JPH0423130U - - Google Patents
Info
- Publication number
- JPH0423130U JPH0423130U JP1990064540U JP6454090U JPH0423130U JP H0423130 U JPH0423130 U JP H0423130U JP 1990064540 U JP1990064540 U JP 1990064540U JP 6454090 U JP6454090 U JP 6454090U JP H0423130 U JPH0423130 U JP H0423130U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- extraction window
- disposed
- reaction chamber
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990064540U JPH0423130U (th) | 1990-06-18 | 1990-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990064540U JPH0423130U (th) | 1990-06-18 | 1990-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0423130U true JPH0423130U (th) | 1992-02-26 |
Family
ID=31595580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990064540U Pending JPH0423130U (th) | 1990-06-18 | 1990-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423130U (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0932127A (ja) * | 1995-07-13 | 1997-02-04 | Kaneko:Kk | 家屋の防湿構造と一体パネル工法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241182A (ja) * | 1987-03-27 | 1988-10-06 | Matsushita Electric Ind Co Ltd | 膜形成装置 |
| JPH02156088A (ja) * | 1988-12-07 | 1990-06-15 | Anelva Corp | バイアスｅｃｒ装置 |
-
1990
- 1990-06-18 JP JP1990064540U patent/JPH0423130U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241182A (ja) * | 1987-03-27 | 1988-10-06 | Matsushita Electric Ind Co Ltd | 膜形成装置 |
| JPH02156088A (ja) * | 1988-12-07 | 1990-06-15 | Anelva Corp | バイアスｅｃｒ装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0932127A (ja) * | 1995-07-13 | 1997-02-04 | Kaneko:Kk | 家屋の防湿構造と一体パネル工法 |