JPH0426454Y2 - - Google Patents

Info

Publication number
JPH0426454Y2
JPH0426454Y2 JP1987118147U JP11814787U JPH0426454Y2 JP H0426454 Y2 JPH0426454 Y2 JP H0426454Y2 JP 1987118147 U JP1987118147 U JP 1987118147U JP 11814787 U JP11814787 U JP 11814787U JP H0426454 Y2 JPH0426454 Y2 JP H0426454Y2
Authority
JP
Japan
Prior art keywords
growth
solution reservoir
solution
raw material
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987118147U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6422778U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987118147U priority Critical patent/JPH0426454Y2/ja
Publication of JPS6422778U publication Critical patent/JPS6422778U/ja
Application granted granted Critical
Publication of JPH0426454Y2 publication Critical patent/JPH0426454Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1987118147U 1987-08-03 1987-08-03 Expired JPH0426454Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987118147U JPH0426454Y2 (it) 1987-08-03 1987-08-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987118147U JPH0426454Y2 (it) 1987-08-03 1987-08-03

Publications (2)

Publication Number Publication Date
JPS6422778U JPS6422778U (it) 1989-02-06
JPH0426454Y2 true JPH0426454Y2 (it) 1992-06-25

Family

ID=31362248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987118147U Expired JPH0426454Y2 (it) 1987-08-03 1987-08-03

Country Status (1)

Country Link
JP (1) JPH0426454Y2 (it)

Also Published As

Publication number Publication date
JPS6422778U (it) 1989-02-06

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