JPH0427285B2 - - Google Patents

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Publication number
JPH0427285B2
JPH0427285B2 JP59058155A JP5815584A JPH0427285B2 JP H0427285 B2 JPH0427285 B2 JP H0427285B2 JP 59058155 A JP59058155 A JP 59058155A JP 5815584 A JP5815584 A JP 5815584A JP H0427285 B2 JPH0427285 B2 JP H0427285B2
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JP
Japan
Prior art keywords
alloy
less
electrical resistance
sensor
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59058155A
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Japanese (ja)
Other versions
JPS60204846A (en
Inventor
Ryo Masumoto
Naoji Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DENKI JIKI ZAIRYO KENKYUSHO
Original Assignee
DENKI JIKI ZAIRYO KENKYUSHO
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Priority to JP5815584A priority Critical patent/JPS60204846A/en
Publication of JPS60204846A publication Critical patent/JPS60204846A/en
Publication of JPH0427285B2 publication Critical patent/JPH0427285B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は恒電気抵抗合金およびその製造法に関
するものである。 近年工場や各種現場ではロボツトや自動化技術
が盛んに採用されて危検な作業や生産性の向上に
貢献している。これら技術システムの性能はマイ
クロプロセツサーのインターフエースへの計測デ
ータを検知するセンサの性能によつて優劣が決ま
るといつてよい。しかしセンサを取扱う作業現場
は良好な場所が少なく、むしろ非常に苛酷な条件
や危検性を伴う場合が普通であつた。特に製鉄
業、化学工業、原子力関連産業や宇宙関連産業等
における温度、圧力あるいは変位等の各種計測に
関しては、耐環境性をクリアし、長期間使用に対
して安定性が良く、保守性に優れ、しかも安定性
に良好な優れたセンサが求められるようになつて
きた。 例えば高歩留まり高品位の鉄鋼を一貫生産でき
る連続鋳造プロセスの場合、高炉、タンデツシユ
や鋳型内の原料パウダー量や溶鋼の湯面レベル等
の計測およびスラブの厚さ、幅や圧延速度等の計
測に使用するセンサは800〜1000℃の高温と蒸気
に曝されるため、これら厳しい環境に耐えなけれ
ばならないばかりでなく特性が長期間安定してい
なければならない。上記の計測は従来γ線やX線
等の電離放射線を用いる方式が多く採用されてき
たが、装置が大型となり、人体への危険性を伴う
などの欠点が多かつた。そこで近年小型で取扱い
の容易な渦電流式変位計(以下単にセンサと呼
ぶ)の使用が考えられるようになつた。 さてセンサの性能はセンサコイル材によつて決
まるため、その電気的特性および安定性は特に重
要である。例えば上記連続鋳造プロセスの場合、
800〜1000℃の高温で数ケ月乃至数年間連続して
稼動するため、センサコイル材に要求される条件
は、−150℃〜1000℃の温度範囲における電気抵抗
の温度係数は100ppm/℃以下で長期間変化せず、
さらには耐食性、耐酸化性および加工成形性が良
好で、しかも断線に関係深い耐熱応力破壊性に優
れていることも重要である。センサの特性は高温
領域のみならず常温における較正計測も必然であ
るので、電気的特性が常温領域においても高温領
域と同様に優れたものでなければならない。 現在これらの条件に合致したセンサコイル材は
全く皆無であるため、関連産業界からその開発が
強く要望されている。 従来この種センサコイル材としては、本発明者
らが先に提案したパラジウム−銀系合金(特開昭
55−122839号)およびパラジウム−鉄系合金(特
開昭58−113332号)があるが、以下述べるように
いずれの合金系においても一長一短がある。 すなわち前者の合金は高温における耐食性、耐
酸化性および加工性が良好で、しかも−50〜600
℃の広い温度範囲にわたつて電気抵抗の温度係数
が±20ppm/℃以下で極めて小さい特長を有する
反面、−50℃以下および600℃以上の温度では電気
抵抗の温度係数が±100ppm/℃以上の非常に大
きな値を示すばかりでなく、この素材を使用した
センサを高温で長期間連続稼動する素材の結晶粒
が粗大化して特性の劣化が進行するだけでなく、
最悪の場合断線によるトラブルのため生産管理上
大きな障害となることもしばしばであつた。 また後者の合金の場合では規則−不規則変態点
(600〜800℃)以上融点(約1400℃)近くまでの
広い温度範囲における電気抵抗の温度係数は±
100ppm/℃以下で小さく、しかも高温で長期間
連続使用しても特性は極めて安定しているなどの
特長がある反面、規則−不規則変態点以下の温度
では電気抵抗の変化が大きく不安定であるばかり
でなく、高温における耐酸化性が著しく劣り、加
工性も悪いためにその製造上および使用上におい
ては高度の工夫が必要であるなど多くの欠点と制
約があつた。 そこで本発明者らはかかる関連産業の緊急の要
請に応えるべく早速上記のパラジウム.銀系合金
およびパラジウム−鉄系合金について比較検討し
た結果、量産における製造上の取扱いが容易で、
かつ加工性や成形性に優れたパラジウム−銀系合
金の改良を試みた。 すなわち本発明者らはパラジウム−銀系合金の
恒電気抵抗特性は伝導電子の格子振動による散乱
と結晶の短範囲規則性とがバランスした状態では
電子の散乱が一定となり電気抵抗の変化を少なく
するが、−50℃以下および600℃以上ではこれら両
因子のバランスが崩れるため電子の散乱が多くな
り恒電気抵抗特性を失うものと考えた。因みに第
1図にはパラジウム−銀系合金におけるAg量に
対す電気抵抗の平均の温度係数を示す。ここで曲
線,およびはそれぞれ0〜400℃、−150〜
1000℃および−200〜120℃の温度間における電気
抵抗の平均の温度係数である。第1図において、
電気抵抗の平均の温度係数が100ppm/℃以下は、
曲線のc点(Ag33.2%)〜d点(Ag46.7%)
間および曲線のa点(Ag36.0%)〜b点
(Ag45.5%)間の組成範囲で得られるが、曲線
では全組成にわたつて+100ppm/℃以上で極め
て大きい。以上の説明から、−150℃〜1000℃の広
い温度範囲における電気抵抗の平均の温度係数が
100ppm/℃以下を示す組成範囲は曲線および
曲線においてc点〜a点間およびb〜d点間の
組成を除いたAg36.0(a点)〜45.5(b点)%間に
限定される。 またセンサコイルの断線現象は、加工した材料
を長期間連続加熱することによつて再結晶化し、
さらに加熱時間の増加とともに結晶粒が粗大成長
化して、加熱および冷却の繰り返しによる膨張や
収縮等の外的要因が加わつて熱応力破壊が発生
し、逐には断線するものと予想した。すなわちセ
ンサの高温安定性に密接に関連のある耐熱応力破
壊性を改善するための解決策としては、まず再結
晶温度を高めて結晶成長を抑止し、結晶粒径を出
来るだけ小さくすればよい。ついでセンサの使用
温度および耐用時間の上限を低く設定することも
重要である。前者については合金の結晶微細化を
図るため多元素添加が考えられる。また後者につ
いては合金およびセンサの製造法に深く関与して
おり恒電気抵抗特性を相まつて最適な加工法およ
び熱処理法を採用する必要がある。ここで耐熱応
力破壊性の評価法としては、合金の再結晶温度、
平均の結晶粒径ならびに合金素材をセンサコイル
に成形加工後、そのインピーダンスの安定性から
判定できる。すなわち再結晶温度が高く、平均の
結晶粒径が小さく、しかもインピーダンスの経時
変化が少ないほど、センサの高温安定性および耐
熱応力破壊性が優れているといえる。 本発明者らは上記の諸問題点を解決して高温で
も安定な恒電気抵抗合金を得るために上述した事
実に基づき多くの実験を行つた結果、40.2〜43.0
%銀パラジウム合金に周期率表のa〜b族元
素の添加が高温における電気抵抗の平均の温度係
数および耐熱応力破壊性の改善に極めて有効かつ
効果的であることを突きとめた。 本発明の目的は上述した不具合を解消して、−
150〜1000℃の広い温度範囲において電気抵抗の
変化が極めて少なく、耐熱応力破壊性に優れかつ
加工成形が容易な恒電気抵抗合金を提供しようと
するものである。 すなわち、本発明の特徴とする所は下記の点に
ある。 第1発明 重量比にてイリジウム7%以下、白金5%以
下、銅7%以下および金9%以下の1種あるいは
2種以上の合計0.1〜10%と、銀40.2〜43%およ
び残部パラジウムと少量の不純物とからなり、−
150℃〜1000℃の温度範囲におけ電気抵抗の平均
温度係数が100ppm/℃以下の恒電気抵抗特性お
よび耐熱応力破壊性を有することを特徴とする恒
電気抵抗合金。 第2発明 重量比にてイリジウム7%以下、白金5%以
下、銅7%以下および金9%以下の1種あるいは
2種以上の合計0.1〜10%と、銀40.2〜43%およ
び残部パラジウムと少量の不純物とからなるる合
金を、溶解、鋳造、鍛造および熱加工および冷間
加工により線材または板材等の所望の形状とな
し、非酸化性雰囲気中または真空中において200
〜1200℃で2秒以上100時間以下加熱することを
特徴とする恒電気抵抗合金の製造法。 以上の説明中、恒電気抵抗特性の語義について
説明すると、通常の金属合金の電気抵抗が温度変
化と共に大きく変化するのに対して本発明合金の
ように特定の温度領域では電気抵抗の変化が極め
て少ないか若しくは零、換言すれば電気抵抗の温
度係数が極めて小さいか若しくは零である性質に
ついて名づけたものである。一例として従来精密
抵抗材料として多用されているマンガニン等が常
温付近に限つて恒電気抵抗特性を有している。 以下、本発明を図面を参照して詳細に説明す
る。 第2図、第3図、第4図および第5図はそれぞ
れパラジウム−銀系合金の−150℃〜1000℃間に
おける電気抵抗の平均の温度係数におよぼすそれ
ぞれIr,Pt,CuおよびAu添加量の効果を示す。
また第6図は、Pd−42%Ag2元合金に、Au,
Cu,PtあるいはIrを添加した場合の電気抵抗の
温度係数を示すもので、Auは9%以下、Cuは7
%以下、Ptは5%以下、Irは7%以下の少量添加
において、電気抵抗の温度係数が添加しない合金
の場合よりも小さくなる。図から分かるように、
Au,Cu,PtあるいはIrの多量の添加は電気抵抗
の温度係数が大きくなり100ppm/℃以下の恒電
気抵抗特性を示さないので、材料としては好まし
くない。これら第2図乃至第6図からも明らかな
ように、−150℃〜1000℃間における電気抵抗の平
均の温度係数が100ppm/℃以下を有するIr,Pt,
CuあるいはAuの添加量はそれぞれIr7%以下、
Pt5%以下、Cu7%以下あるいはAu9%以下であ
ることがわかる。 つぎに本発明合金およびセンサの製造法につい
て詳細に説明する。 まず本発明合金を造るにはIr7%以下、Pt5%以
下、Cu7%以下およびAu9%以下の1種あるいは
2種以上の合計0.1〜10%と、Ag40.2〜43.0%お
よび残部Pdと少量の不純物の適量を非酸化性雰
囲気中または真空中において適当な溶解炉を用い
て溶解し、充分攪拌して組織的に均一な溶融合金
を得る。つぎに溶融合金を適当な形および大きさ
の鉄型に鋳込み健全な鋳塊を得た後、鋳塊表面の
スケール、疵類等を研削して取り条き、さらに鍛
造工程を経て種々の熱間加工および冷間加工、例
えばスエージング、伸線、圧延または押潰し等の
方法によつて所望の形状のもの、例えば丸棒、細
線または薄板にする。つぎにこれらの形状のもの
を非酸化性雰囲気中または真空中において200〜
1200℃で2秒以上100時間以下加熱することによ
り電気抵抗の温度係数が−150℃〜1000℃の温度
範囲において100ppm/℃以下の恒電気抵抗特性
および優れた耐熱応力破壊性を有することが可能
となる。 また本発明合金を発熱素子やセンサ等に応用す
る場合には通常コイル状に成形加工して使用する
ため、以下に説明するいずれかの方法によつて本
発明合金の恒電気抵抗特性を充分に発揮し得る電
気的および熱的絶縁処理を施さねばならない。 (1) 本発明合金の線材または板材等をマイカ等の
常温用絶縁体またはセラミツク等の耐熱用絶縁
体に直接巻きつけるかあるいは絶縁体で挟む等
の方法により固定した後、必要ならば非酸化性
雰囲気中または真空中において絶縁体中の有害
ガスや有機物を蒸発せしめるため200〜500℃で
数時間加熱後さらに500〜1200℃で2秒以上100
時間以下加熱する。 (2) 本発明合金の線材あるいは板材等をスパイラ
ルまたはトロイダル等の形状に成形加工したも
のを非酸化性雰囲気中または真空中において
500〜1200℃で2秒以上100時間以下加熱してく
せ付処理後そのままの状態で水ガラス等の常温
用絶縁体またはセラミツクペースト等の耐熱用
絶縁体からなる溶液中に浸漬し200〜500℃で数
時間加熱して固形化した後絶縁ケース内に装填
して密閉し、必要ならばさに非酸化性雰囲気中
または真空中において500〜1200℃で2秒以上
100時間以下加熱する。 (3) 本発明合金の線材または板材等表面にホルマ
ール等の常温用絶縁体を塗布またはコーテイン
グするか、あいはポリイミド樹脂やマグネシヤ
等の耐熱用絶縁体を電着またはスパツタリング
等の適当な方法により被着した後、スパイラル
またはトロイダル等の形状に巻線成形加工し
200〜500℃で数時間加熱して有害ガスや有機物
等を蒸発発散させ、絶縁ケース内に装填して密
閉し、必要ならばさらに非酸化性雰囲気中また
は真空中において500〜1200℃で2秒以上100時
間以下加熱する。 (4) 本発明合金をガラスやセラミツク等の絶縁体
表面に電着またはスパツタリング等の適当な方
法により被着した後、所望の形状にエツチング
打抜きまたはトリミング加工を施し、必要なら
ば絶縁体に固定するかあるいは絶縁体ケース内
に装填する。その後200〜500℃で数時間加熱し
て均質化処理を行い、必要ならばさらに非酸化
性雰囲気中または真空中において500〜1200℃
で2秒以上100時間加熱する。 以上のような工程により完成した成品の特性は
本発明合金のそれと全く同じであつて、恒電気抵
抗特性や耐熱応力破壊性を充分に発揮し得ること
が明らかになつた。 つぎに本発明合金の製造について、実施例によ
つて具体的に述べる。 実施例 1 合金番号PAM−1(組成Pd=55.5%,Ag=
42.0%,Ir=2.5%)合金およびセンサの製造 原料として純度99.9%のPd,AgおよびIrを用
いた。試料を造るには全重量100gの原料を高純
度アルミナ坩堝に入れ、アルゴンガスを吹きつけ
ながら高周波誘導電気炉によつて溶解し、よく攪
拌して均質な溶融合金とした後、内径7mm、高さ
180mmの鉄型に鋳込み、鋳塊表面の疵を取り除い
た。その後鍛造および熱間ロールにより直径10mm
にし、スエージングおよび線引等の冷間加工によ
り直径0.5mmの細線にしたものから長さ約10cmに
切り取り電気抵抗測定用試料とした。電気抵抗は
真空中−160℃〜1100℃の温度範囲で測定した。
また上記線材(0.5mmφ)にマグネシアのコロイ
ド溶液を塗布し乾燥後軸径2mmのセラミツク製ボ
ビンに20〜50回巻きつけてセンサコイルを造り、
これをセラミツク製ケース内に装填後セラミツク
ペーストで密閉した。さらに200℃で1時間、400
℃で30分ついで1000℃で30分加熱焼成した。 ついでこのセンサのインピーダンス変化率 Δη/η0×100=ηT−η0/η0×100(%) をブリツジ回路法により測定した。測定周波数は
1KHzであつた。ここでη0およびηTはそれぞれ測
定開始時および時間T後におけるセンサコイルの
インピーダンスである。 尚線材試料と比較合金PA−4(組成Pd=58%,
Ag=42%)の温度対電気抵抗曲線を第7図に示
す。またこの曲線から求めた電気抵抗の平均温度
係数1/R・ΔR/ΔTおよび本発明合金M−1の線材を 使用したセンサ800℃以上の高温で長期間連続使
用した場合のセンサの性能、インピーダンスの変
化率は第1表に示すとおりである。因みに本発明
合金PAM−1と同様な方法で作製した比較合金
PA−4のセンサコイルは、800℃で5日後に断線
したが、本発明合金PAM−1のセンサコイルは
1000℃で1ケ月以上経過後も正常に作動し断線し
なかつた。
The present invention relates to a constant electrical resistance alloy and a method for manufacturing the same. In recent years, robots and automation technology have been widely adopted in factories and various workplaces, contributing to the elimination of hazardous work and improved productivity. It can be said that the performance of these technical systems is determined by the performance of the sensor that detects the measurement data to the microprocessor interface. However, there are few suitable work sites where sensors are handled, and rather they are usually accompanied by extremely harsh conditions and danger. Especially for various measurements such as temperature, pressure, or displacement in the steel industry, chemical industry, nuclear industry, space industry, etc., it has cleared environmental resistance, has good stability for long-term use, and has excellent maintainability. In addition, there is a growing demand for superior sensors with good stability. For example, in the case of a continuous casting process that allows integrated production of high-yield, high-quality steel, it is possible to measure the amount of raw material powder in the blast furnace, tundish, or mold, the level of the molten steel, and the thickness, width, and rolling speed of the slab. The sensors used are exposed to high temperatures of 800 to 1000 degrees Celsius and steam, so not only must they withstand these harsh environments, but their characteristics must remain stable over long periods of time. Conventionally, methods using ionizing radiation such as gamma rays and X-rays have been widely adopted for the above-mentioned measurements, but these methods have many disadvantages, such as the large size of the equipment and the danger to the human body. Therefore, in recent years, the use of eddy current displacement meters (hereinafter simply referred to as sensors), which are small and easy to handle, has come to be considered. Since the performance of a sensor is determined by the sensor coil material, its electrical characteristics and stability are particularly important. For example, in the case of the above continuous casting process,
Since the sensor coil material operates continuously at high temperatures of 800 to 1000°C for several months to several years, the temperature coefficient of electrical resistance in the temperature range of -150°C to 1000°C must be 100 ppm/°C or less. unchanged for a long time,
Furthermore, it is important that the material has good corrosion resistance, oxidation resistance, and processability, as well as excellent thermal stress fracture resistance, which is closely related to wire breakage. Since the characteristics of the sensor need to be calibrated not only in the high temperature range but also in the normal temperature range, the electrical characteristics must be as excellent in the normal temperature range as in the high temperature range. Since there is currently no sensor coil material that meets these conditions, there is a strong demand for its development from related industries. Conventionally, as this type of sensor coil material, palladium-silver alloy (Japanese Patent Application Laid-open No.
No. 55-122839) and palladium-iron alloy (Japanese Patent Application Laid-Open No. 113332/1982), each of these alloys has advantages and disadvantages as described below. In other words, the former alloy has good corrosion resistance, oxidation resistance, and workability at high temperatures, and also has -50 to 600
It has an extremely small temperature coefficient of electrical resistance of less than ±20 ppm/°C over a wide temperature range of °C, but at temperatures below -50°C and above 600°C, the temperature coefficient of electrical resistance is more than ±100 ppm/°C. Not only does it show a very large value, but when a sensor using this material is operated continuously at high temperatures for a long period of time, the crystal grains of the material become coarse and the characteristics deteriorate.
In the worst case, troubles caused by wire breakage often caused major problems in production management. In the case of the latter alloy, the temperature coefficient of electrical resistance is ±
Although it has the characteristics of being small (less than 100 ppm/°C) and having extremely stable characteristics even when used continuously at high temperatures for long periods of time, it is unstable due to large changes in electrical resistance at temperatures below the regular-irregular transformation point. Not only that, but it also has many drawbacks and restrictions, such as extremely poor oxidation resistance at high temperatures and poor workability, requiring a high degree of ingenuity in its manufacture and use. Therefore, the present inventors immediately developed the above-mentioned palladium in order to meet the urgent needs of related industries. As a result of comparative studies of silver-based alloys and palladium-iron alloys, we found that they are easy to handle in mass production;
We also attempted to improve palladium-silver alloys that have excellent processability and moldability. In other words, the present inventors found that the constant electrical resistance property of palladium-silver alloys is such that when the scattering of conduction electrons due to lattice vibration and the short-range regularity of the crystal are balanced, the scattering of electrons becomes constant and changes in electrical resistance are reduced. However, at temperatures below -50°C and above 600°C, the balance between these two factors is disrupted, leading to increased scattering of electrons and a loss of constant electrical resistance properties. Incidentally, FIG. 1 shows the average temperature coefficient of electrical resistance with respect to the amount of Ag in a palladium-silver alloy. Here, the curves and are respectively 0~400℃ and −150~
It is the average temperature coefficient of electrical resistance between 1000°C and -200 to 120°C. In Figure 1,
If the average temperature coefficient of electrical resistance is 100ppm/℃ or less,
Point c (Ag33.2%) to point d (Ag46.7%) of the curve
It is obtained in the composition range between point a (36.0%Ag) and point b (45.5%Ag) of the curve, but it is extremely large at +100ppm/°C or more over the entire composition of the curve. From the above explanation, the average temperature coefficient of electrical resistance over a wide temperature range of -150℃ to 1000℃ is
The composition range exhibiting 100 ppm/°C or less is limited to 36.0 (point a) to 45.5 (point b)% Ag, excluding the compositions between points c and a and points b and d in the curve. In addition, the disconnection phenomenon of the sensor coil is caused by recrystallization due to continuous heating of the processed material for a long period of time.
Furthermore, it was predicted that as the heating time increased, the crystal grains would grow coarser, and external factors such as expansion and contraction due to repeated heating and cooling would be added, leading to thermal stress fracture and eventual disconnection. That is, as a solution to improving the thermal stress fracture resistance, which is closely related to the high-temperature stability of the sensor, it is first necessary to increase the recrystallization temperature to suppress crystal growth and to reduce the crystal grain size as much as possible. Next, it is also important to set the upper limits of the sensor's operating temperature and service life low. Regarding the former, addition of multiple elements may be considered in order to refine the crystals of the alloy. The latter is deeply involved in the manufacturing method of the alloy and sensor, and it is necessary to adopt the optimal processing method and heat treatment method in conjunction with constant electrical resistance characteristics. Here, the method for evaluating thermal stress fracture resistance is the recrystallization temperature of the alloy,
It can be determined from the average crystal grain size and the stability of impedance after forming the alloy material into a sensor coil. That is, it can be said that the higher the recrystallization temperature, the smaller the average crystal grain size, and the smaller the change in impedance over time, the better the high temperature stability and thermal stress fracture resistance of the sensor. The present inventors conducted many experiments based on the above facts in order to solve the above problems and obtain a constant electrical resistance alloy that is stable even at high temperatures.
It has been found that addition of elements from groups a to b of the periodic table to a silver-palladium alloy is extremely effective and effective in improving the average temperature coefficient of electrical resistance and thermal stress fracture resistance at high temperatures. The purpose of the present invention is to solve the above-mentioned problems and -
The purpose of the present invention is to provide a constant electrical resistance alloy that shows extremely little change in electrical resistance over a wide temperature range of 150 to 1000°C, has excellent thermal stress fracture resistance, and is easy to process and form. That is, the features of the present invention are as follows. First invention A total of 0.1 to 10% of one or more of iridium 7% or less, platinum 5% or less, copper 7% or less, and gold 9% or less, 40.2 to 43% silver, and the balance palladium. Consists of a small amount of impurities, -
A constant electrical resistance alloy characterized by having constant electrical resistance characteristics and thermal stress fracture resistance with an average temperature coefficient of electrical resistance of 100 ppm/°C or less in a temperature range of 150°C to 1000°C. Second invention A total of 0.1 to 10% of one or more of iridium 7% or less, platinum 5% or less, copper 7% or less, and gold 9% or less, and 40.2 to 43% silver and the balance palladium. An alloy consisting of a small amount of impurities is melted, cast, forged, and heat-worked and cold-worked into a desired shape such as a wire or plate, and then heated in a non-oxidizing atmosphere or in a vacuum for 200°C.
A method for producing a constant electrical resistance alloy, characterized by heating at ~1200°C for 2 seconds or more and 100 hours or less. In the above explanation, to explain the meaning of the term constant electric resistance characteristic, the electric resistance of ordinary metal alloys changes greatly with temperature changes, but in the case of the alloy of the present invention, the electric resistance changes extremely in a specific temperature range. The name refers to the property that the temperature coefficient of electrical resistance is small or zero, in other words, the temperature coefficient of electrical resistance is extremely small or zero. As an example, manganin, which has been commonly used as a precision resistance material, has a constant electric resistance characteristic only near room temperature. Hereinafter, the present invention will be explained in detail with reference to the drawings. Figures 2, 3, 4, and 5 show the amounts of Ir, Pt, Cu, and Au added to the average temperature coefficient of electrical resistance of palladium-silver alloys between -150℃ and 1000℃, respectively. shows the effect of
Figure 6 also shows the Pd-42%Ag binary alloy with Au,
This shows the temperature coefficient of electrical resistance when Cu, Pt or Ir is added.Au is less than 9% and Cu is 7%.
% or less, Pt is added in small amounts of 5% or less, and Ir is added in small amounts of 7% or less, the temperature coefficient of electrical resistance becomes smaller than that of the alloy without addition. As you can see from the figure,
Addition of large amounts of Au, Cu, Pt, or Ir increases the temperature coefficient of electrical resistance and does not exhibit constant electrical resistance characteristics of 100 ppm/°C or less, which is not preferable as a material. As is clear from these Figures 2 to 6, Ir, Pt, and
The amount of Cu or Au added is less than 7% Ir, respectively.
It can be seen that Pt is 5% or less, Cu is 7% or less, or Au is 9% or less. Next, the method for manufacturing the alloy and sensor of the present invention will be explained in detail. First, to make the alloy of the present invention, a total of 0.1 to 10% of one or more of Ir 7% or less, Pt 5% or less, Cu 7% or less and Au 9% or more, Ag 40.2 to 43.0% and the balance Pd and a small amount. An appropriate amount of impurities is melted in a non-oxidizing atmosphere or in a vacuum using a suitable melting furnace, and thoroughly stirred to obtain a structurally uniform molten alloy. Next, the molten alloy is poured into iron molds of appropriate shape and size to obtain a sound ingot. After that, the scale, scratches, etc. on the surface of the ingot are ground to remove them, and the ingot is then subjected to a forging process where it is heated to various temperatures. It is formed into a desired shape, such as a round bar, a thin wire, or a thin plate, by cold working and cold working, such as swaging, wire drawing, rolling, or crushing. Next, these shapes are heated to 200~200℃ in a non-oxidizing atmosphere or vacuum.
By heating at 1200℃ for 2 seconds or more and 100 hours or less, it is possible to have a constant electrical resistance characteristic with a temperature coefficient of electrical resistance of 100ppm/℃ or less in the temperature range of -150℃ to 1000℃ and excellent thermal stress fracture resistance. becomes. In addition, when the alloy of the present invention is applied to heating elements, sensors, etc., it is usually formed into a coil shape and used, so the constant electrical resistance characteristics of the alloy of the present invention can be sufficiently improved by any of the methods described below. Providing electrical and thermal insulation must be provided. (1) After fixing the wire or plate material of the alloy of the present invention by directly wrapping it around a room-temperature insulator such as mica or a heat-resistant insulator such as ceramics, or by sandwiching it between insulators, if necessary, do not oxidize it. In order to evaporate harmful gases and organic substances in the insulator in a harsh atmosphere or vacuum, heat at 200 to 500℃ for several hours and then heat at 500 to 1200℃ for 2 seconds or more.
Heat for no more than an hour. (2) A wire or plate made of the alloy of the present invention is molded into a spiral or toroidal shape in a non-oxidizing atmosphere or in a vacuum.
After being heated at 500-1200℃ for 2 seconds or more and 100 hours or less, it is immersed in a solution made of room-temperature insulators such as water glass or heat-resistant insulators such as ceramic paste at 200-500℃. After heating for several hours to solidify, load it into an insulating case and seal it, and if necessary, heat it at 500 to 1200℃ for more than 2 seconds in a non-oxidizing atmosphere or in a vacuum.
Heat for up to 100 hours. (3) Apply or coat a room-temperature insulator such as formal to the surface of the wire or plate material of the alloy of the present invention, or apply a heat-resistant insulator such as polyimide resin or magnesia by an appropriate method such as electrodeposition or sputtering. After being applied, the wire is formed into a spiral or toroidal shape.
Heat at 200 to 500℃ for several hours to evaporate harmful gases and organic substances, load it into an insulating case and seal it, and if necessary, heat at 500 to 1200℃ for 2 seconds in a non-oxidizing atmosphere or in vacuum. Heat for more than 100 hours. (4) After the alloy of the present invention is deposited on the surface of an insulator such as glass or ceramic by an appropriate method such as electrodeposition or sputtering, it is etched, punched, or trimmed into a desired shape, and if necessary, fixed to the insulator. or packed in an insulator case. After that, homogenization treatment is performed by heating at 200-500℃ for several hours, and if necessary, further heating at 500-1200℃ in a non-oxidizing atmosphere or in vacuum.
Heat for 2 seconds or more for 100 hours. It has been revealed that the properties of the product completed through the above steps are exactly the same as those of the alloy of the present invention, and that it can sufficiently exhibit constant electrical resistance properties and thermal stress fracture resistance. Next, the production of the alloy of the present invention will be specifically described with reference to Examples. Example 1 Alloy number PAM-1 (composition Pd=55.5%, Ag=
42.0%, Ir = 2.5%) Production of alloy and sensor Pd, Ag and Ir with a purity of 99.9% were used as raw materials. To make the sample, raw materials with a total weight of 100 g were placed in a high-purity alumina crucible, melted in a high-frequency induction electric furnace while blowing argon gas, and stirred thoroughly to form a homogeneous molten alloy. difference
The ingot was cast into a 180mm iron mold, and any scratches on the surface of the ingot were removed. Then forged and hot rolled to a diameter of 10mm.
The wire was made into a thin wire with a diameter of 0.5 mm by cold working such as swaging and wire drawing, and then cut to a length of about 10 cm to prepare a sample for measuring electrical resistance. Electrical resistance was measured in a temperature range of -160°C to 1100°C in vacuum.
In addition, a sensor coil is made by coating the above wire (0.5 mmφ) with a colloidal solution of magnesia, and after drying, winding it around a ceramic bobbin with a shaft diameter of 2 mm 20 to 50 times.
This was loaded into a ceramic case and sealed with ceramic paste. Another 1 hour at 200℃, 400℃
It was baked at 1000°C for 30 minutes and then heated at 1000°C for 30 minutes. Next, the impedance change rate of this sensor Δη/η 0 ×100=η T −η 00 ×100 (%) was measured by the bridge circuit method. The measurement frequency is
It was 1KHz. Here, η 0 and η T are the impedances of the sensor coil at the start of measurement and after time T, respectively. The wire rod sample and comparative alloy PA-4 (composition Pd=58%,
Figure 7 shows the temperature vs. electrical resistance curve of Ag=42%). In addition, the average temperature coefficient of electrical resistance 1/R・ΔR/ΔT obtained from this curve, and the performance and impedance of a sensor using the wire of the present invention alloy M-1 when continuously used for a long period of time at high temperatures of 800°C or higher The rate of change in is shown in Table 1. Incidentally, a comparative alloy prepared in the same manner as the invention alloy PAM-1
The sensor coil of PA-4 broke after 5 days at 800℃, but the sensor coil of PAM-1, the alloy of the present invention,
It operated normally and did not break even after more than a month at 1000℃.

【表】 実施例 2 合金番号PAM−19(組成Pd=55.2%,Ag=
41.3%,Pt=3.5%)合金およびセンサの製造 原料は実施例1と同じ純度のPd,AgおよびPt
を用いた。試料の製造法および実験法は実施例1
と全く同様である。合金試料とセンサの電気的特
性なびにセンサの性能については第8図および第
2表に示すとおりで、実施例1の結果と類似して
いる。
[Table] Example 2 Alloy number PAM-19 (composition Pd=55.2%, Ag=
41.3%, Pt=3.5%) Production of alloy and sensor The raw materials are Pd, Ag and Pt of the same purity as in Example 1.
was used. The sample manufacturing method and experimental method are as in Example 1.
It is exactly the same. The electrical characteristics of the alloy sample and the sensor as well as the performance of the sensor are as shown in FIG. 8 and Table 2, and are similar to the results of Example 1.

【表】【table】

【表】 実施例 3 合金番号PAM−25(組成Pd=54.5%,Ag=
40.5%,Cu=5.0%)合金およびセンサの製造 原料は実施例1と同じ純度のPd,AgおよびCu
を用いた。試料の製造法および実験法は実施例1
と全く同様である。合金試料とセンサの電気的特
性ならびにセンサの性能については第9図および
第3表に示すとおで、実施例1の結果と類似して
いる。
[Table] Example 3 Alloy number PAM-25 (composition Pd=54.5%, Ag=
40.5%, Cu = 5.0%) Production of alloy and sensor The raw materials are Pd, Ag and Cu of the same purity as in Example 1.
was used. The sample manufacturing method and experimental method are as in Example 1.
It is exactly the same. The electrical properties of the alloy sample and sensor as well as the sensor performance are shown in FIG. 9 and Table 3, and are similar to the results of Example 1.

【表】 実施例 4 合金番号PAM−41(組成Pd=47.3%,Ag=
40.7%,Au=9.0%)合金およびセンサの製造 原料は実施例1と同じ純度のPd,AgおよびAu
を用いた。試料の製造法および実験法は実施例1
と全く同様である。合金試料とセンサの電気的特
性ならびにセンサの性能については第9図および
第3表に示すとおで、実施例1の結果と類似して
いる。
[Table] Example 4 Alloy number PAM-41 (composition Pd=47.3%, Ag=
40.7%, Au = 9.0%) Production of alloy and sensor The raw materials are Pd, Ag and Au of the same purity as in Example 1.
was used. The sample manufacturing method and experimental method are as in Example 1.
It is exactly the same. The electrical properties of the alloy sample and sensor as well as the sensor performance are shown in FIG. 9 and Table 3, and are similar to the results of Example 1.

【表】 上述の実施例の他に多くの合金についても実験
を行つたが、第5表には代表的な合金試料の電気
的特性、再結晶温度、平均の結晶粒径ならびに本
発明合金線材を用いたセンサについて800℃で10
日間加熱保持した場合のインピーダンス変化率を
示す。
[Table] In addition to the above-mentioned examples, experiments were also conducted on many alloys, and Table 5 shows the electrical properties, recrystallization temperature, average grain size, and alloy wire of the present invention of typical alloy samples. 10 at 800℃ for sensors using
It shows the rate of change in impedance when heated and held for days.

【表】 第5表に示すように、本発明合金の再結晶温度
は比較合金(合金番号PA−4:Pd−42%Ag)
に比べて約50〜100℃高い。また比較合金Pd−
Agの平均の結晶粒径は、添加元素Ir,Pt,Cuあ
るいはAuなどによつて1/2〜1/7小さくなり、結
晶粒径の粗大化が抑制される効果がある。さらに
再結晶温度が高く、平均の結晶粒径小さいほど結
晶粒間の機械的強度が強い。このことから本発明
合金は、耐熱応力破壊性が従来の比較合金より優
れているといえる。 例えば、実施例2の本発明合金(合金番号
PAM−19)および比較合金(合金番号PA−4)
を渦電流式変位計のセンサコイルに応用した場合
についてつぎに説明する。 合金番号PAM−19(Pd−41.3%Ag−35%Pt)
およびPA−4(Pd−42%Ag)を渦電流式変位計
のセンサコイルに応用して、約700℃の高温まで
昇温および冷却を約20回繰り返した結果、比較合
金を使用したセンサコイルは、10ケの内7ケまで
が断線したが、本発明合金を使用した場合では全
て断線しなかつた。 因みに本発明合金と比較合金(PA−4)をセ
ンサコイルに使用し変位計の寿命試験を試みた。
試験は、1000℃に保つたマツフル炉内にセンサヘ
ツドを挿入して1時間保持後、炉外に取り出して
室温に戻し、この操作を繰り返す加熱−空冷方式
(HC)およびマツフル炉から取り出したセンサ
ヘツドを水中に浸漬して室温に戻し、この操作を
繰り返す高速急冷方式(HQ)の2通りの熱処理
を施し、変位計の出力が消失した時点、すなわち
センサコイルの断線状態における加熱−冷却のサ
イクル数Tを求めた。実験結果の一例を示したの
が、第6表である。
[Table] As shown in Table 5, the recrystallization temperature of the invention alloy is the comparative alloy (alloy number PA-4: Pd-42%Ag).
Approximately 50 to 100 degrees Celsius higher than that of Also, comparative alloy Pd−
The average crystal grain size of Ag is reduced by 1/2 to 1/7 by additive elements such as Ir, Pt, Cu, or Au, which has the effect of suppressing coarsening of the crystal grain size. Furthermore, the higher the recrystallization temperature and the smaller the average crystal grain size, the stronger the mechanical strength between crystal grains. From this, it can be said that the alloy of the present invention is superior in thermal stress fracture resistance to conventional comparative alloys. For example, the alloy of the present invention in Example 2 (alloy number
PAM-19) and comparative alloy (alloy number PA-4)
Next, a case will be described in which the method is applied to a sensor coil of an eddy current displacement meter. Alloy number PAM-19 (Pd-41.3%Ag-35%Pt)
and PA-4 (Pd-42%Ag) were applied to the sensor coil of an eddy current displacement meter, and as a result of repeating heating and cooling to a high temperature of approximately 700℃ approximately 20 times, the sensor coil using the comparative alloy was In this case, 7 out of 10 wires broke, but when the alloy of the present invention was used, none of the wires broke. Incidentally, a life test of a displacement meter was attempted using the present invention alloy and a comparative alloy (PA-4) for a sensor coil.
The test was conducted using a heating-air cooling method (HC) in which the sensor head was inserted into a Matsuful furnace kept at 1000°C, held there for 1 hour, then taken out of the furnace and returned to room temperature, and this operation was repeated. Two types of heat treatment are performed: a high-speed quenching method (HQ) in which immersion in water is returned to room temperature and this operation is repeated, and the number of heating-cooling cycles T is determined at the point when the output of the displacement meter disappears, that is, when the sensor coil is disconnected. I asked for Table 6 shows an example of the experimental results.

【表】 第6表に示すように、本発明合金の場合は、熱
処理方式にはあまり大きな違いがなく、しかも断
線に達するまでのサイクル数が高い。したがつて
本発明合金は比較合金に比べて数十倍の長い寿命
が得られることが判明した。またこれらの回数が
多ければ多いほど材料としては好ましいが、1000
℃を越えると合金成分中のAgの酸化が急速に進
行するので、センサコイルの耐熱限界温度を1000
℃とした。なお第6表は、温度が非常に高い場合
であるが、最高加熱温度が低ければ低いほどセン
サコイルは断線しにくいといえる。 センサコイルの断線原因は、以上の実線から判
断すると、センサコイルが熱膨張と収縮を繰り返
す内に、結晶の粒界に強い応力が加わり、粒界破
壊が生じるものと考えられる。本発明合金はこの
点を大きく改善したものであると同時に、本発明
合金を用いたセンサコイルは、高温での過酷な使
用においても十分耐えられるので、耐熱応力破壊
性が著しく向上した。 すなわち昇温および冷却を繰り返すとセンサコ
イル材が熱膨張と収縮によつて結晶粒間に強い応
力が加わり、結晶粒間の強度が弱ければ粒界破壊
を生じ、また逆に強ければセンサコイルが断線し
ないことが分かつた。したがつて本発明合金は、
優れた耐熱応力破壊性を有することが実証され
た。 以上実施例1〜実施例4および第5表からわか
るように、Ir,Pt,CuおよびAuの1種あるいは
2種以上の合計0.1〜10%と、Ag40.2〜43.0%お
よび残部Pdと少量の不純物からなる合金は、−
150℃〜1000℃の広い温度範囲において100ppm/
℃の恒電気抵抗特性および優れた耐熱応力破壊性
を有しており、第7図〜第10図にみるように電
気抵抗の温度に対する変化が高温では著しく改善
されているのが大きな特徴である。 なお第11図A,B,CおよびDは、Pd(50〜
70%)−Ag(30〜50%)の組成範囲のPd−Ag合金
の20℃における比電気抵抗ρ20に対するIr,Pt,
AgあるいはAu添加の効果を示した特性図であ
り、その結果に対する考察は次の通りである。 一般にPd−Ag合金にIr,Pt,Agあるいは
Auを添加すると、ρ20は、増加する傾向にあ
る。<材料としては好ましくない> ただし、少量の添加の場合は、ρ20の増加は
極めて少ないかほとんどゼロである。<材料と
しては好ましい> Pd−Ag合金およびIr,Pt,AgあるいはAu
添加合金のρ20は、いずれもAg量が35%におい
て極大を示し、Ag量の増加とともに次第に減
少する。すなわちAg40.2〜43.0の組成では、
Ag量が40%以下に比べてρ20が小さく、しかも
電気抵抗の温度係数が極めて小さい。<これら
の特性は、材料として非常に好ましい> また本発明合金を使用したセンサの性能も第5
表に示すようにΔη/η0×100が比較合金PA−4のそ れの約1/10の±0.015%以下で極めて小さく、高
温安定性に優れ、本発明合金の特性を十分に発揮
し得ることがわかる。 ここで本発明合金の組成において、Ir7%以下、
Pt5%以下、Cu7%以下およびAu9%以下の1種
あるいは2種以上の合計0.1〜10%と、Ag40.2〜
43.0%に限定した理由は、第1図〜第6図、第1
1図、実施例1〜実施例4および第5表からも明
らかなように、−150℃〜1000℃間における電気抵
抗の平均の温度係数が100ppm/℃以下の恒電気
抵抗特性を示し、しかもAg量が多くなるにした
がつて比電気抵抗が比較的大きくなることによ
る。またセンサの高温におけるインピーダンス変
化率が±0.100%以下で長時間にわたつて非常に
安定しているが、組成がこの範囲をはずれると電
気抵抗の平均の温度係数が100ppm/℃以上で大
きくなり恒電気抵抗合金あるいは高温における安
定性の優れたセンサとしては不適当となるからで
ある。 第12図AおよびBに示すものは、それぞれ第
5表の本発明合金(PAM−19;Ag41.3%、Pt3.5
%、Pd55.2%合金)および比較合金(PA−4;
Pd58%、Ag42%合金)を常温から700℃に急熱
と急冷を数回繰り返した場合の顕微鏡写真をスケ
ツチした図である。本発明合金は、比較合金Pd
−AgにIr,Pt,CuあるいはAuの何れかの金属を
加えてあるので、800℃で10日間熱処理しても結
晶粒が比較合金のように粗大化せず、結晶粒径は
50μm以下で小さく、しかも一定の大きさを示
す。因みに比較合金の場合では、同様の処理を施
すことによつて結晶粒径が100〜500μmの大きさ
に粗大化し、機械的強度が低下し、しかもこの合
金を使用したセンサコイルについて加熱と冷却を
繰り返した結果、断線が多発して、センサコイル
用線材としては不適当であつた。したがつて第5
表に示すように、合金の結晶粒径が小さいほど好
ましいといえる。 以上述べように、本発明合金の場合は、第5表
にも示すようにIr,Pt,CuあるいはAuの何れか
を少量添加することによつて、結晶粒が微細化
(60μm以下)し、しかも粒径が揃うために結晶
粒相互の接触結合がよく、このため機械的強度が
大となる。したがつて常温から700℃の高温まで
の間で加熱と冷却を繰り返し使用した場合でもセ
ンサコイルの線材の断線が少ないことが判明し
た。 また本発明合金の恒電気抵抗特性を示す温度範
囲を−150℃〜1000℃間に限定した理由は、第1
図〜第6図、実施例1〜実施例4、第5表からも
明らかなように、上記の温度範囲内における電気
抵抗の平均の温度係数100ppm/℃以下の恒電気
抵抗特性を示すが、この温度領域からはずれると
電気抵抗の平均の温度係数が100ppm/℃以上と
なり本発明合金の要求特性に合致しないばかりで
なくセンサの性能を十分に発揮し得ないため、恒
電気抵抗合金あるいは高温における安定性の優れ
たセンサとしては不適当となるからである。 さらまた本発明合金の製造法において、熱処理
として200〜1200℃で2秒以上100時間以下に限定
した理由は、この温度範囲内および時間内では加
工による内部歪が十分に取り除かれ、さらに一層
安定した恒電気抵抗特性が得られるが、200℃以
下で2秒以下加熱処理した場合には加工による残
留応力のため恒電気抵抗特性が得られずセンサを
高温で使用する場合非常に不安定となる。また
1200℃以上で100時間以上加熱処理した場合には
結晶粒の粗大化によつて耐熱応力破壊性が悪化
し、しかも含有銀の蒸発によつて恒電気抵抗特性
が得られないだけでなく蒸発銀の汚染により電気
絶縁特性が悪化することもある。したがつて上記
の熱処理条件からはずれた場合には、恒電気抵抗
特性あるいは高温における安定性の優れたセンサ
としては不適当となるからである。熱処理温度が
高くなると処理時間は短い方がよい。すなわち
1200℃で2秒間または200℃で100時間の熱処理で
は加工による内部歪が十分に取り除かれ所期の目
的が達せられる。 要するに本発明合金およびセンサは−150℃〜
1000℃の温度範囲において電気抵抗の平均の温度
係数が100ppm/℃以下の恒電気抵抗特性および
耐熱応力破壊性に優れ、しかも高温で長期間使用
してもインピーダンス変化率が±0.100%以下で
非常に少なく安定性に優れているなどの特徴を有
しており、これらの合金およびセンサを利用した
デバイス複合体や各種計測機器の主要な部品、例
えば発熱素子、熱線風速計、抵抗温度計や熱定電
流安定器等の基準抵抗体等に応用しても本発明合
金およびセンサの有する優れた特性を十分に発揮
することが可能である。
[Table] As shown in Table 6, in the case of the alloys of the present invention, there is not much difference in the heat treatment method, and moreover, the number of cycles until disconnection is reached is high. Therefore, it has been found that the alloy of the present invention has a life several tens of times longer than that of the comparative alloy. Also, the higher the number of these times, the better the material is, but 1000
If the temperature exceeds ℃, the oxidation of Ag in the alloy will proceed rapidly.
℃. Although Table 6 shows the case where the temperature is very high, it can be said that the lower the maximum heating temperature, the less likely the sensor coil will be disconnected. Judging from the solid line above, the cause of the disconnection of the sensor coil is thought to be that strong stress is applied to the grain boundaries of the crystals while the sensor coil repeats thermal expansion and contraction, causing grain boundary fracture. The alloy of the present invention has greatly improved this point, and at the same time, the sensor coil using the alloy of the present invention can sufficiently withstand even severe use at high temperatures, so that the thermal stress fracture resistance has been significantly improved. In other words, when the sensor coil material is repeatedly heated and cooled, strong stress is applied between the crystal grains due to thermal expansion and contraction. I found out that there was no disconnection. Therefore, the alloy of the present invention is
It was demonstrated that it has excellent thermal stress fracture resistance. As can be seen from the above Examples 1 to 4 and Table 5, a total of 0.1 to 10% of one or more of Ir, Pt, Cu, and Au, 40.2 to 43.0% of Ag, and a small amount of Pd as the balance. An alloy consisting of impurities of -
100ppm/in a wide temperature range from 150℃ to 1000℃
It has constant electrical resistance characteristics at ℃ and excellent thermal stress fracture resistance, and its major feature is that the change in electrical resistance with respect to temperature is significantly improved at high temperatures, as shown in Figures 7 to 10. . In addition, Fig. 11 A, B, C and D are Pd (50~
Ir, Pt, for specific electrical resistance ρ 20 at 20°C of Pd-Ag alloy with composition range of
This is a characteristic diagram showing the effect of adding Ag or Au, and the discussion on the results is as follows. Generally, Ir, Pt, Ag or
When Au is added, ρ 20 tends to increase. <Unfavorable as a material> However, when a small amount is added, the increase in ρ 20 is extremely small or almost zero. <Preferred materials> Pd-Ag alloy and Ir, Pt, Ag or Au
The ρ 20 of the additive alloys all reach a maximum when the Ag content is 35%, and gradually decrease as the Ag content increases. In other words, with a composition of Ag40.2-43.0,
Compared to when the Ag content is 40% or less, ρ 20 is small, and the temperature coefficient of electrical resistance is extremely small. <These characteristics are very preferable as a material> The performance of the sensor using the alloy of the present invention also ranks fifth.
As shown in the table, Δη/η 0 ×100 is extremely small, approximately 1/10 of that of comparative alloy PA-4, less than ±0.015%, and has excellent high-temperature stability, allowing the alloy of the present invention to fully exhibit its characteristics. I understand that. Here, in the composition of the alloy of the present invention, Ir7% or less,
A total of 0.1 to 10% of one or more of Pt5% or less, Cu7% or less, and Au9% or less, and Ag40.2 to
The reason for limiting it to 43.0% is as shown in Figures 1 to 6 and Figure 1.
As is clear from Figure 1, Examples 1 to 4, and Table 5, it exhibits constant electrical resistance characteristics with an average temperature coefficient of electrical resistance of 100 ppm/°C or less between -150°C and 1000°C. This is because the specific electrical resistance becomes relatively large as the amount of Ag increases. In addition, the impedance change rate of the sensor at high temperatures is less than ±0.100% and is extremely stable over a long period of time, but if the composition is outside this range, the average temperature coefficient of electrical resistance becomes large at 100 ppm/°C or more and becomes constant. This is because it is unsuitable for use as an electrical resistance alloy or as a sensor with excellent stability at high temperatures. The alloys shown in FIGS. 12A and 12B are the alloys of the present invention (PAM-19; Ag41.3%, Pt3.5 in Table 5), respectively.
%, Pd55.2% alloy) and comparative alloy (PA-4;
This is a sketch of a microscopic photograph of an alloy (58% Pd, 42% Ag) that was rapidly heated and cooled several times from room temperature to 700°C. The alloy of the present invention is a comparative alloy Pd
-Since Ir, Pt, Cu, or Au is added to Ag, the crystal grains do not become coarse like the comparative alloys even after heat treatment at 800℃ for 10 days, and the crystal grain size remains the same.
It is small, less than 50 μm, and exhibits a constant size. Incidentally, in the case of a comparative alloy, the crystal grain size becomes coarser to 100 to 500 μm by applying the same treatment, and the mechanical strength decreases, and furthermore, the sensor coil using this alloy does not have to be heated or cooled. As a result of repeated attempts, many wire breaks occurred, making it unsuitable as a wire for sensor coils. Therefore, the fifth
As shown in the table, it can be said that the smaller the crystal grain size of the alloy is, the more preferable it is. As mentioned above, in the case of the present alloy, as shown in Table 5, by adding a small amount of Ir, Pt, Cu or Au, the crystal grains are made finer (60 μm or less), Moreover, since the grain sizes are uniform, the contact bond between the crystal grains is good, and therefore the mechanical strength is high. Therefore, it was found that even when the sensor coil was repeatedly heated and cooled from room temperature to a high temperature of 700°C, there was little disconnection of the sensor coil wire. Furthermore, the reason why the temperature range in which the alloy of the present invention exhibits constant electrical resistance characteristics is limited to -150°C to 1000°C is as follows:
As is clear from Fig. 6, Examples 1 to 4, and Table 5, the average electrical resistance temperature coefficient within the above temperature range is 100 ppm/°C or less, which shows constant electrical resistance characteristics. Outside this temperature range, the average temperature coefficient of electrical resistance becomes 100 ppm/°C or higher, which not only does not meet the required properties of the alloy of the present invention, but also prevents the sensor from exhibiting its full performance. This is because it is inappropriate as a sensor with excellent stability. Furthermore, in the method for manufacturing the alloy of the present invention, the heat treatment is limited to 2 seconds to 100 hours at 200 to 1200°C, because within this temperature range and time, internal strain due to processing is sufficiently removed, and the stability is further improved. However, if heat treatment is performed at 200℃ or less for less than 2 seconds, constant electrical resistance characteristics cannot be obtained due to residual stress due to processing, and the sensor becomes extremely unstable when used at high temperatures. . Also
If heat treatment is performed at 1200°C or higher for 100 hours or more, the thermal stress fracture resistance deteriorates due to the coarsening of crystal grains, and furthermore, due to the evaporation of silver contained, not only is it impossible to obtain constant electrical resistance properties, but also the evaporated silver The electrical insulation properties may deteriorate due to contamination. Therefore, if the heat treatment conditions are deviated from the above, the sensor becomes unsuitable for use as a sensor with excellent constant electrical resistance characteristics or stability at high temperatures. The higher the heat treatment temperature, the shorter the treatment time. i.e.
Heat treatment at 1200°C for 2 seconds or 200°C for 100 hours sufficiently removes internal strain caused by processing and achieves the desired purpose. In short, the alloy and sensor of the present invention can be used at -150℃~
It has excellent constant electrical resistance characteristics with an average temperature coefficient of electrical resistance of 100 ppm/℃ or less in a temperature range of 1000℃, and excellent thermal stress fracture resistance, and even after long-term use at high temperatures, the impedance change rate is ±0.100% or less. These alloys and sensors are used as main components of device complexes and various measuring instruments, such as heating elements, hot wire anemometers, resistance thermometers, and thermometers. Even when applied to reference resistors such as constant current stabilizers, the excellent characteristics of the alloy and sensor of the present invention can be fully exhibited.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はパラジウム−銀系合金の0〜400℃
()、−150〜1000℃()および−200℃〜1200
()の温度間における電気抵抗の平均の温度係
数とAg量との関係を示す特性図、第2図、第3
図、第4図および第5図はそれぞれ(Pd−Ag)
+Ir系、(Pd−Ag)+Pt系、(Pd−Ag)+Cu系お
よび(Pd−Ag)+Au系合金の−150℃〜1000℃に
おける電気抵抗の平均の温度係数とAg量との関
係を示す特性図、第6図はPd−40%Ag合金にIr,
Pt,Cu又はAuを添加した場合の各元素添加量と
−150℃〜1000℃における電気抵抗の平均の温度
係数との関係を示す特性図、第7図〜第10図は
合金番号PAM−1、PAM−19、PAM−25、
PAM−39ならびに比較合金PA−4の電気抵抗と
測定温度との関係を示す特性図、第11図A,
B,CおよびDは、Pd(50〜70%)−Ag(30〜50)
Ag合金の20℃における比電気抵抗ρ20に対するIr,
Pt,CuあるいはAu添加の効果を示した特性図、
第12図A,Bは本発明合金(合金番号:PAM
−19;Ag41.3%、Pt3.5%、Pd55.2%)と比較合
金(合金番号:PA−4;Pd58%、Ag42%)と
の再結晶組織の光学顕微鏡写真のスケツチ図であ
る。
Figure 1 shows the temperature of palladium-silver alloy from 0 to 400℃.
(), −150 to 1000℃ () and −200℃ to 1200
Characteristic diagrams showing the relationship between the average temperature coefficient of electrical resistance and the amount of Ag between temperatures in (), Figures 2 and 3
Figures 4 and 5 are respectively (Pd-Ag)
Shows the relationship between the average temperature coefficient of electrical resistance and Ag content at -150°C to 1000°C for +Ir-based, (Pd-Ag)+Pt-based, (Pd-Ag)+Cu-based, and (Pd-Ag)+Au-based alloys. Characteristic diagram, Figure 6 shows Pd-40%Ag alloy with Ir,
Characteristic diagrams showing the relationship between the amount of each element added and the average temperature coefficient of electrical resistance from -150℃ to 1000℃ when Pt, Cu or Au is added. Figures 7 to 10 are alloy number PAM-1. , PAM-19, PAM-25,
Characteristic diagram showing the relationship between electrical resistance and measurement temperature of PAM-39 and comparative alloy PA-4, Figure 11A,
B, C and D are Pd (50-70%)-Ag (30-50)
Ir for specific electrical resistance ρ 20 of Ag alloy at 20℃,
Characteristic diagram showing the effect of adding Pt, Cu or Au,
Figure 12 A and B are alloys of the present invention (alloy number: PAM
-19; 41.3% Ag, 3.5% Pt, 55.2% Pd) and a comparative alloy (alloy number: PA-4; 58% Pd, 42% Ag).

Claims (1)

【特許請求の範囲】 1 重量比にてイリジウム7%以下、白金5%以
下、銅7%以下および金9%以下の1種あるいは
2種以上の合計0.1〜10%と、銀40.2〜43%およ
び残部パラジウムと少量の不純物とからなり、−
150℃〜1000℃の温度範囲における電気抵抗の平
均温度係数が100ppm/℃以下の恒電気抵抗特性
および耐熱応力破壊性を有することを特徴とする
恒電気抵抗合金。 2 重量比にてイリジウム7%以下、白金5%以
下、銅7%以下および金9%以下の1種あるいは
2種以上の合計0.1〜10%と、銀40.2〜43%およ
び残部パラジウムと少量の不純物とからなる合金
を、溶解、鋳造、鍛造および熱間加工および冷間
加工により線材または板材等の所望の形状とな
し、非酸化性雰囲気中または真空中において200
〜1200℃で2秒以上100時間以下加熱することを
特徴とする恒電気抵抗合金の製造法。 3 前記恒電気抵抗合金を、非酸化性雰囲気中ま
たは真空中において200〜500℃で数時間加熱し冷
却して固形化した後、さらに500〜1200℃で2秒
以上100時間以下加熱することを特徴とする特許
請求の範囲第2項記載の恒電気抵抗合金の製造
法。
[Scope of Claims] 1 A total of 0.1 to 10% of one or more of iridium 7% or less, platinum 5% or less, copper 7% or less, and gold 9% or less, and silver 40.2 to 43% by weight. The remainder consists of palladium and a small amount of impurities, −
A constant electrical resistance alloy characterized by having constant electrical resistance characteristics and thermal stress fracture resistance with an average temperature coefficient of electrical resistance of 100 ppm/°C or less in a temperature range of 150°C to 1000°C. 2 A total of 0.1 to 10% of one or more of iridium 7% or less, platinum 5% or less, copper 7% or less, and gold 9% or less in weight ratio, 40.2 to 43% silver, the balance palladium and a small amount The alloy consisting of impurities is melted, cast, forged, and hot-worked and cold-worked into a desired shape such as a wire or plate, and then heated to a temperature of 200% in a non-oxidizing atmosphere or in a vacuum.
A method for producing a constant electrical resistance alloy, characterized by heating at ~1200°C for 2 seconds or more and 100 hours or less. 3. The constant electrical resistance alloy is heated at 200 to 500°C for several hours in a non-oxidizing atmosphere or in vacuum, cooled and solidified, and then further heated at 500 to 1200°C for 2 seconds or more and 100 hours or less. A method for producing a constant electrical resistance alloy according to claim 2, characterized in that:
JP5815584A 1984-03-28 1984-03-28 Constant electric resistant alloy, production thereof and sensor using said alloy Granted JPS60204846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5815584A JPS60204846A (en) 1984-03-28 1984-03-28 Constant electric resistant alloy, production thereof and sensor using said alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5815584A JPS60204846A (en) 1984-03-28 1984-03-28 Constant electric resistant alloy, production thereof and sensor using said alloy

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP26762187A Division JPS63132114A (en) 1987-10-24 1987-10-24 Manufacturing method of eddy current sensor

Publications (2)

Publication Number Publication Date
JPS60204846A JPS60204846A (en) 1985-10-16
JPH0427285B2 true JPH0427285B2 (en) 1992-05-11

Family

ID=13076099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5815584A Granted JPS60204846A (en) 1984-03-28 1984-03-28 Constant electric resistant alloy, production thereof and sensor using said alloy

Country Status (1)

Country Link
JP (1) JPS60204846A (en)

Also Published As

Publication number Publication date
JPS60204846A (en) 1985-10-16

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