JPH0427286B2 - - Google Patents
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- JPH0427286B2 JPH0427286B2 JP5815684A JP5815684A JPH0427286B2 JP H0427286 B2 JPH0427286 B2 JP H0427286B2 JP 5815684 A JP5815684 A JP 5815684A JP 5815684 A JP5815684 A JP 5815684A JP H0427286 B2 JPH0427286 B2 JP H0427286B2
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Description
本発明は恒電気抵抗合金に関するものである。
近年工場や各現場ではロポツトや自動化技術が
盛んに採用されて危険な作業や生産性の向上に貢
献している。これら技術システムの性能はマイク
ロプロセツサーのインターフエースへの計測デー
タを検知するセンサの性能によつて優劣が決まる
といつてよい。しかしセンサを取扱う作業現場は
良好な場所が少なく、むしろ非常に苛酷な条件や
危険性を伴う場合が普通であつた。特に製鉄業、
化学工業、原子力関連作業や宇宙関連産業等にお
ける温度、圧力あるいは変位等の各種計測に関し
ては、耐環境性をクリアし、長期間使用に対して
安定性が良く、保守性に優れ、しかも安全性も良
好な優れたセンサが求められるようになつてき
た。
例えば高歩留まり高品質の鉄鋼を一貫生産でき
る連続鋳造プロセスの場合、高炉、タンデツシユ
や鋳型内の原料パウダー量や溶鋼の湯面レベル等
の計測およびスラブの厚さ、幅や圧延速度等の計
測に使用するセンサは800〜1000℃の高温と蒸気
に曝されるため、これら厳しい環境に耐えなけれ
ばならないばかりでなく特性が長期間安定してい
なければならない。上記の計測は従来γ線やX線
等の電離放射線を用いる方式が多く採用されてき
たが、装置が大型となり、人体への危険性も伴う
などの欠点が多かつた。そこで近年小型で取扱い
の容易な渦電流式変位計(以下単にセンサと呼
ぶ)の使用が考えられるようになつた。
さてセンサの性能はセンサコイル材によつて決
まるため、その電気的特性および安定性は特に重
要である。例えば上記連続鋳造プロセスの場合、
800〜1000℃の高温で数ケ月乃至数年間連続して
稼動するため、センサコイル材に要求される条件
は、電気抵抗の温度係数が100ppm/℃以下で長
期間変化せず、さらには耐食性、性酸化性および
加工成形性が良好で、しかも断線に関係深い耐熱
応力破壊性に優れていることも重要である。セン
サの特性は高温領域のみならず常温における校正
計測も必要であるので、電気的特性が常温領域に
おいても高温領域と同様に優れたものでなければ
ならない。
現在これらの条件に合致したセンサコイル材は
全く皆無であるため、関連産業界からその開発が
強く要望されている。
従来この種センサコイル材としては、本発明者
らが先り提案したパラジウム−銀系合金(特開昭
55−122839号)およびパラジウム−鉄系合金(特
願昭58−113332号)があるが、以下述べるように
いずれの合金系においても一長一短がある。
すなわち前者の合金は高温における耐食性、耐
酸化性および加工性が良好で、しかも−50〜600
℃の広い温度範囲にわたつて電気抵抗の温度係数
が±20ppm/℃以下で極めて小さい特長を有する
反面、−50℃以下および600℃以上の温度では電気
抵抗の温度係数が±100ppm/℃以上の非常に大
きな値を示すばかりでなく、この素材を使用した
センサを高温で長期間連続稼動すると素材の結晶
粒が粗大化して特性の劣化が進行するだけでな
く、最悪の場合断線によるトラブルのため生産管
理上大きな傷害となることもしばしばであつた。
また後者の合金の場合では規則−不規則変態点
(600〜800℃)以上融点(約1400℃)近くまで広
い温度範囲における電気抵抗の温度係数は±
100ppm/℃以下で小さく、しかも高温で長期間
連続使用しても特性は極めて安定しているなどの
特長がある反面、規則−不規則変態点以下の温度
では電気抵抗の変化が大きく不安定であるばかり
でなく、高温における耐酸化性が著しく劣り、加
工性も悪いためにその製造上および使用上におい
ては高度の工夫が必要であるなど多くの欠点と制
約があつた。
そこで本発明者らはかかる関連産業の緊急の要
請に応えるべく早速上記のパラジウム−銀系合金
およびパラジウム−鉄系合金について比較検討し
た結果、量産における製造上の取扱いが容易で、
かつ加工性や成形性に優れたパラジウム−銀系合
金の改良を試みた。
すなわち本発明者らはパラジウム−銀系合金の
恒電気抵抗特性は伝導電子の格子振動による散乱
と結晶の短範囲規則性とがバランスした状態では
電子の散乱が一定となり電気抵抗の変化を少なく
するが、−50℃以下および600℃以上ではこれらの
両因子のバランスが崩れるため電子の散乱が多く
なり恒電気抵抗特性を失うものと考えた。因みに
第1図にはパラジウム−銀系合金におけるAg量
に対するる電気抵抗の温度係数を示す。ここで曲
線,およびはそれぞれ0〜400℃、−150℃
〜1000℃および−200〜1200℃の温度間における
電気抵抗の平均の温度係数である。第1図におい
て、電気抵抗の平均の温度係数が100ppm/℃以
下は、曲線のc点(Ag33.2%)〜d点
(Ag46.7%)間および曲線のa点(Ag36.0%)
〜b点(Ag45.5%)間の組成範囲で得られるが、
曲線では全組成にわたつて+100ppm/℃以上
で極めて大きい。以上の説明から、−150〜1000℃
の広い温度範囲における電気抵抗の平均の温度係
数が100ppm/℃以下を示す組成範囲は曲線お
よび曲線においてc点〜a点間およびb点〜d
点間の組成を除いたAg36.0(a点)〜45.5(b点)
%間に限定される。
またセンサコイルの断線現象は、加工した材料
を長期間連続加熱するることによつて再結晶化
し、さらに加熱時間の増加とともに結晶粒が粗大
成長化して、加熱および冷却の繰り返しによる膨
張や収縮等の外的要因に加わつて熱応力破壊が発
生し、遂には断線するものと予想した。すなわち
センサの高温安定性に密接に関連のある耐熱応力
破壊性を改善するための解決策としては、まず再
結晶温度を高めて結晶成長を抑止し、結晶粒径を
出来るだけ小さくすればよい。ついでセンサの使
用温度および耐用時間の上限を低く設定すること
も重要である。前者については合金の結晶別細化
を図るため多元素添加が考えられる。また後者に
ついては合金およびセンサの製造法に深く関与し
ており恒電気抵抗特性と相まつて最適な加工法お
よび熱処理法を採用する必要がある。ここで耐熱
応力破壊性の評価法としては、合金の再結晶温
度、平均の結晶粒径ならびに合金素材をセンサコ
イルに成形加工後、そのインピーダンスの安定性
から判定できる。すなわち再結晶温度が高く、平
均の結晶粒径が小さくしかもインピーダンスの経
時変化が少ないほど、センサの高温安定性および
耐熱応力破壊性が優れているといえる。
本発明者らは上記の問題点を解決して高温でも
安定な恒電気抵抗合金を得るために上述した事実
に基づき多くの実験を行なつた結果、パラジウム
36.0〜45.5%銀合金に周期率表のa族〜b族
元素の添加が高温における電気抵抗の平均の温度
係数および耐熱応力破壊性の改善に極めて有効か
つ効果的であることを突きとめた。
本発明の目的は上述した不具合を解消して、−
150〜1000℃の広い温度範囲において電気抵抗の
変化が極めて少なく、耐熱応力破壊性に優れかつ
加工成形が容易な恒電気抵抗合金および恒電気抵
抗特性を具備したセンサを提供しようとするもの
である。
本発明の合金を組成別に列記すると下記の通り
である。
1 重量比にて第一選択成分としてイリジウム7
%以下、白金5%以下、銅7%以下および金9
%以下の1種あるいは2種以上の合計0.1〜10
%と、第二選択成分としてロジウム5%以下、
オスミウム5%以下、ハフニウム1%以下、イ
ンジウム3%以下、鉄2%以下、コバルト2%
以下、ニツケル2%以下、ニオブ1%以下、タ
ンタル2%以下、クロム1.5%以下、モリブデ
ン1.5%以下、タングステン0.2%以下、チタン
1%以下、イツトリウム1%以下、硼素0.5%
以下、希土類元素1%以下、炭素0.5%以下の
1種あるいは2種以上の合計0.01〜10%以下
と、銀40.2〜43%、残部パラジウムとからな
り、−150〜1000℃の温度範囲における電気抵抗
の平均温度係数が100ppm/℃以下の恒電気抵
抗特性および耐熱応力破壊性を有することを特
徴とする恒電気抵抗合金。
2 重量比にて第一選択成分としてイリジウム7
%以下、白金5%以下、銅7%以下および金9
%以下の1種あるいは2種以上の合計0.1〜10
%と、第二選択成分としてマンガン2%以下、
レニウム2%以下、タリウム2%以下、ガリウ
ム1.5%以下、アルミニウム2%以下、バナジ
ウム2%以下、シリコン1.5%以下、錫1.5%以
下、アンチモン1%以下、ビスマス1%以下、
亜鉛1%以下、カドミウム1%以下の1種ある
いは2種以上の合計0.01〜10%以下と、銀40.2
〜43%、残部パラジウムとからなり、−150〜
1000℃の温度範囲における電気抵抗の平均温度
係数が100ppm/℃以下の恒電気抵抗特性およ
び耐熱応力破壊性を有することを特徴とする恒
電気抵抗合金。
また本発明合金からなる線材または板材等をス
パイラルまたはトロイダル等の所望の形状に成形
加工した後、必要ならばくせ付処理し、これらを
そのままで常温用または耐熱用絶縁体に固定する
かあるいは絶縁体中に埋め込む等の方法によつて
センサとなし、必要ならばさらに非酸化性雰囲気
中または真空下において200〜500℃で数時間加熱
して固形化した後500〜1200℃で2秒以上100時間
以下加熱することにより恒電気抵抗特性を具備せ
しめる方法、あるいは本発明合金からなる線材ま
たは板材表面に常温用または耐熱用絶縁体を塗
布、電着等によりコーテイング処理後、スパイラ
ルまたはトロイダル等の所望の形状に成形加工し
た後これらをそのまま常温用または耐熱用絶縁体
に固定するかあるいは絶縁体中に埋め込む等の方
法によつてセンサとなし、必要ならばさらに非酸
化雰囲気中または真空下において200〜500℃で数
時間加熱して固形化した後500〜1200℃で2秒以
上100時間以下加熱することにより恒電気抵抗特
性を具備せしめる方法、またはあるいは本発明合
金を常温用または耐熱用絶縁体表面に電着または
スパツタリング等の適当な方法により薄膜として
被着した後、所望の形状にエツチング打抜きまた
はトリミング加工を施し、絶縁体に固定するかあ
るいは絶縁体ケース内に装填してセンサとなし、
必要ならばさらにこれを非酸化性雰囲気中または
真空中において200〜500℃で数時間加熱して固形
化した後500〜1200℃で2秒以上100時間以下加熱
することにより恒電気抵抗特性を具備せしめる方
法によりセンサを作製することができる。
以上の説明中、恒電気抵抗特性の語義について
説明すると、通常の金属合金の電気抵抗が温度変
化と共に大きく変化するのに対して本発明合金の
ように特定の温度領域では電気抵抗の変化が極め
て少ないか若しくは零、換言すれば電気抵抗の温
度係数が極めて小さいか若しくは零である性質に
ついて名づけたものである。一例として従来精密
抵抗材料として多用されているマンガニン等が常
温付近に限つて恒電気抵抗を有している。
以下、本発明を図面を参照して詳細に説明す
る。
第2図、第3図、第4図および第5図はそれぞ
れパラジウム−銀系合金の−150〜1000℃間にお
ける電気抵抗の平均の温度係数におよぼすそれぞ
れIr,Pt,,CuおよびAu添加量の効果を示す。ま
た第6図にはPd−40%Ag合金にIr,Pt,Cuまた
はAuを添加した合金の−150〜1000℃間における
電気抵抗の平均の温度係数とIr,Pt,Cuまたは
Au添加量との関係を示す。これらの第2図〜第
6図からも明らかなように、−150〜1000℃間にお
ける電気抵抗の平均の温度係数が100ppm/℃以
下を有するIr,Pt,CuあるいはAuの添加量はそ
れぞれ7%以下、5%以下、7%以下、あるいは
9%以下であることがわかる。なお第2図〜第6
図ではPd−Ag−Ir系、Pd−Ag−Pt系、Pd−Ag
−Cu系およびPd−Ag−Au系三元合金の電気抵
抗の平均の温度係数についてだけ示した過ぎない
が、これら三元系を組み合わせた多元系合金ある
いはさらにa族〜Va族元素を副成分として添
加した合金等についても後述の第3表に揚げてあ
るように、上記4種類の三元系合金の場合と同様
に100ppm/℃以下の電気抵抗の平均の温度係数
を有することは自明である。
つぎに本発明合金について詳細に説明する。
まず本発明合金を造るには上述の組成の合金材
料を配合し、非酸化性雰囲気中または真空中にお
いて適当な溶解炉を用いて溶解し、充分撹拌して
組織的に均一な溶融合金を得る。
つぎに溶融合金を適当な形および大きさの鉄型
に鋳込み健全な鋳塊を得た後、鋳塊表面のスケー
ル、疵類等を研削して取り除き、さらに鋳造工程
を経て種々の熱間加工および冷間加工、例えばス
エージング、伸線、圧延または漬し等の方法によ
つて所望の形状のもの、例えば丸棒、細線または
薄板にする。つぎにこれらの形状のものを非酸化
性雰囲気中または真空中において200〜1200℃で
2秒以上100時間以下加熱することにより電気抵
抗の温度係数が−150〜1000℃の温度範囲におい
て100ppm/℃以下の恒電気抵抗特性および優れ
た耐熱応力破壊性を有することが可能となる。
本発明合金を発熱素子やセンサ等に応用する場
合には通常コイル状に成形加工して使用するた
め、以下に説明するいずれかの方法によつて本発
明合金の恒電気抵抗特性を充分に発揮し得る電気
的および熱的絶縁処理を施こさねばならない。
1 本発明合金の線材または板材等のマイカ等の
常温用絶縁体またはセラミツク等の耐熱用絶縁
体に直接巻きつけるかあるいは絶縁体で挟むな
どの方法により固定した後、必要ならば非酸化
性雰囲気中なたは真空中において絶縁体中の有
害ガスや有機物を蒸発せしめるため200〜500で
数時間加熱後さらに500〜1200℃で2秒以上100
時間以下加熱する。
2 本発明合金の線材あるいは板材等をスパイラ
ルまたはトロイダル等の形状に成形加工したも
のを非酸化性雰囲気中または真空中において
500〜1200℃で5秒以上100時間以下加熱してく
せ付処理後そのままの状態で水ガラス等の常温
用絶縁体またはセラミツクペースト等の耐熱用
絶縁体からなる溶液中に浸漬し200〜500℃で数
時間加熱して固形化した後絶縁ケース内に装填
して密閉し、必要ならばさらに非酸化性雰囲気
中または真空中において500〜1200℃で2秒以
上100時間以下加熱する。
3 本発明合金の線材または板材等表面にホルマ
ール等の常温用絶縁体を塗布またはコーテイン
グするが、あるいはポリイミド樹脂やマグネシ
ヤ等の耐熱用絶縁体を電着またはスパツタリン
グ等の適当な方法により被着した後、スパイラ
ルまたはトロイダル等の形状に巻線成形加工し
200〜500℃で数時間加熱して有害ガスや有機物
等を蒸発揮散させ、絶縁ケース内に装填して密
閉し、必要ならばさらに非酸化性雰囲気中また
は真空中において500〜1200℃で2秒以上100時
間以下加熱する。
4 本発明合計をガラスやセラミツク等の絶縁外
表面に電着またはスパツタリング等の適当な方
法により装着した後、所望の形状にエツチング
打抜きまたはトリミング加工を施し、必要なら
ば絶縁体に固定するかあるいは絶縁性ケース内
に装着する。その後200〜500℃で数時間加熱し
て均質化処理を行い、必要ならばさらに非酸化
性雰囲気中または真空中において500〜1200℃
で2秒以上100時間以下加熱する。
以上のような工程により完成した成品の特性は
本発明合金のそれと全く同じであつて、恒電気抵
抗特性や耐熱応力破壊性を充分に発揮し得ること
が明らかになつた。
つぎに本発明合金およびセンサの製造法につい
て、実施例によつて具体的に述べる。
実施例 1
合金番号PAM−115(組成Pd=54.85%、Ag=
41.5%、Pt=3.0%、Rh=0.5%、Os=0.1%、
Hf=0.05%)合金およびセンサの製造
原料としては純度99.9%のPd、AgおよびPtと、
純度99.5%以上のRh、OsおよびHfを用いた。試
料の製造法は全重量1Kgを高周波真空溶解炉に入
れ約900℃で脱ガス後、不活性ガスとして微量の
アルゴンガスを注入して溶解した。溶融合金を25
mm角の鋳型に鋳込んで健全な鋳塊を造つた。つい
でフライス盤にて鋳塊表面を研削して疵を取り除
き、熱間鍛造および熱間成形ロールにて直径10mm
の丸棒にした。その後スエージングおよび線引等
の冷間加工により線径0.5mmの細線にし、さらに
精密冷間圧延機により厚さ0.28mmおよび厚さ0.22
mmのリボン状薄板とした。このうち、電気抵抗測
定用合金試料としては厚さ0.28mmのリボン状薄板
を使用して、真空中−160〜1100℃の温度範囲で
測定した。また、これら2種類の薄板を重ねてト
ロイダル状に20〜50回巻いた後、500〜800℃で30
分間加熱してくせ付を施した。その後厚さ0.22mm
のリボン状コイルを抜き取り残りの厚さの0.28mm
のトロイダル状センサコイルをセラミツクペース
ト中に浸漬して、セラミツク製ケース内に装填
後、200℃で1時間、400℃で30分ついで1000℃で
30分加熱焼成した。ついでこのセンサのインピー
ダンス変化率
Δη/η0×100=ηT−η0/η0×100(%)
をブリツジ回路法により測定した。測定周波数は
1KHzであつた。ここでη0およびηTはそれぞれ測
定開始時および時間T後におけるセンサコイルの
インピーダンスである。
尚線材試料と比較合金PA−4(組成Pd=58%、
Ag=42%)の温度対電気抵抗曲線を第7図に示
す。またこの曲線から求めた電気抵抗の平均の温
度係数1/R・ΔR/ΔTおよび本発明合金PAM−1の
線材を使用したセンサを800℃以上の高温で長期
間連続使用した場合のセンサの性能、インピーダ
ンスの変化率は第1表に示すとおりである。因み
に本発明合金PAM−115は、第1表にみるように
Δη/η0×100の値が非常に小さいのが特徴である。
The present invention relates to constant electrical resistance alloys. In recent years, robots and automation technologies have been widely adopted in factories and other workplaces, contributing to eliminating dangerous work and improving productivity. It can be said that the performance of these technical systems is determined by the performance of the sensor that detects the measurement data to the microprocessor interface. However, there are few good places to work with sensors, and the conditions are often extremely harsh and dangerous. Especially the steel industry,
For various measurements such as temperature, pressure, or displacement in the chemical industry, nuclear power-related work, space-related industry, etc., it has cleared environmental resistance, is stable for long-term use, has excellent maintainability, and is safe. There is a growing demand for excellent sensors with good performance. For example, in the case of a continuous casting process that allows for the integrated production of high-yield, high-quality steel, it is possible to measure the amount of raw material powder in the blast furnace, tundish, or mold, the level of the molten steel, and the thickness, width, and rolling speed of the slab. The sensors used are exposed to high temperatures of 800 to 1000 degrees Celsius and steam, so not only must they withstand these harsh environments, but their characteristics must remain stable over long periods of time. Conventionally, methods using ionizing radiation such as gamma rays and X-rays have often been adopted for the above-mentioned measurements, but these methods have many drawbacks, such as the large size of the equipment and the danger to the human body. Therefore, in recent years, the use of eddy current displacement meters (hereinafter simply referred to as sensors), which are small and easy to handle, has come to be considered. Since the performance of a sensor is determined by the sensor coil material, its electrical characteristics and stability are particularly important. For example, in the case of the continuous casting process mentioned above,
Since the sensor coil material operates continuously at high temperatures of 800 to 1000℃ for several months to several years, the conditions required for the sensor coil material are that the temperature coefficient of electrical resistance remains unchanged for a long time at 100ppm/℃ or less, and it also has corrosion resistance. It is also important that the wire has good oxidation resistance and processing formability, as well as excellent thermal stress fracture resistance, which is closely related to wire breakage. Since the characteristics of the sensor require calibration measurements not only in the high temperature range but also in the normal temperature range, the electrical characteristics must be as excellent in the normal temperature range as in the high temperature range. Since there is currently no sensor coil material that meets these conditions, there is a strong demand for its development from related industries. Conventionally, as this type of sensor coil material, palladium-silver alloy (Japanese Patent Laid-open Publication No.
No. 55-122839) and palladium-iron alloy (Japanese Patent Application No. 58-113332), but each alloy system has its advantages and disadvantages as described below. In other words, the former alloy has good corrosion resistance, oxidation resistance, and workability at high temperatures, and also has -50 to 600
It has an extremely small temperature coefficient of electrical resistance of less than ±20 ppm/°C over a wide temperature range of °C, but at temperatures below -50°C and above 600°C, the temperature coefficient of electrical resistance is more than ±100 ppm/°C. Not only does it show a very large value, but if a sensor using this material is operated continuously at high temperatures for a long period of time, the crystal grains of the material will become coarse and the characteristics will deteriorate, and in the worst case, it will cause problems due to disconnection. This often resulted in serious damage to production control. In the case of the latter alloy, the temperature coefficient of electrical resistance is ±
Although it has the characteristics of being small (less than 100 ppm/°C) and having extremely stable characteristics even when used continuously at high temperatures for long periods of time, it is unstable due to large changes in electrical resistance at temperatures below the regular-irregular transformation point. Not only that, but it also has many drawbacks and restrictions, such as extremely poor oxidation resistance at high temperatures and poor workability, requiring a high degree of ingenuity in its manufacture and use. Therefore, in order to meet the urgent needs of related industries, the present inventors immediately conducted a comparative study on the above-mentioned palladium-silver alloy and palladium-iron alloy, and found that they are easy to handle in mass production.
We also attempted to improve palladium-silver alloys that have excellent processability and moldability. In other words, the present inventors found that the constant electrical resistance property of palladium-silver alloys is such that when the scattering of conduction electrons due to lattice vibration and the short-range regularity of the crystal are balanced, the scattering of electrons becomes constant and changes in electrical resistance are reduced. However, at temperatures below -50°C and above 600°C, the balance between these two factors is disrupted, leading to increased scattering of electrons and a loss of constant electrical resistance properties. Incidentally, FIG. 1 shows the temperature coefficient of electrical resistance with respect to the amount of Ag in a palladium-silver alloy. Here, the curves and are 0 to 400℃ and −150℃, respectively.
It is the average temperature coefficient of electrical resistance between temperatures of ~1000°C and -200 to 1200°C. In Figure 1, when the average temperature coefficient of electrical resistance is 100 ppm/℃ or less, it is between point c (Ag33.2%) and point d (46.7%Ag) on the curve and point a (Ag36.0%) on the curve.
It is obtained in the composition range between ~ point b (Ag45.5%),
In the curve, it is extremely large at +100 ppm/℃ or more over all compositions. From the above explanation, −150 to 1000℃
The composition range in which the average temperature coefficient of electrical resistance in a wide temperature range is 100 ppm/℃ or less is between points c and a and between points b and d on the curve.
Ag36.0 (point a) to 45.5 (point b) excluding the composition between points
Limited between %. In addition, the sensor coil disconnection phenomenon occurs when the processed material is recrystallized by continuous heating for a long period of time, and as the heating time increases, the crystal grains grow coarser, causing expansion and contraction due to repeated heating and cooling. It was predicted that thermal stress fracture would occur in addition to external factors, and that the wire would eventually break. That is, as a solution to improving the thermal stress fracture resistance, which is closely related to the high-temperature stability of the sensor, it is first necessary to increase the recrystallization temperature to suppress crystal growth and to reduce the crystal grain size as much as possible. Next, it is also important to set the upper limits of the sensor's operating temperature and service life low. Regarding the former, it is possible to add multiple elements in order to refine the alloy by crystallization. The latter is deeply involved in the manufacturing method of the alloy and sensor, and it is necessary to adopt the optimal processing method and heat treatment method in conjunction with constant electrical resistance characteristics. Here, the thermal stress fracture resistance can be evaluated based on the recrystallization temperature of the alloy, the average crystal grain size, and the stability of impedance after forming the alloy material into a sensor coil. In other words, it can be said that the higher the recrystallization temperature, the smaller the average crystal grain size, and the smaller the change in impedance over time, the better the high temperature stability and thermal stress fracture resistance of the sensor. The present inventors conducted many experiments based on the above facts in order to solve the above problems and obtain a constant electrical resistance alloy that is stable even at high temperatures.
It has been found that addition of elements from groups A to B of the periodic table to a 36.0 to 45.5% silver alloy is extremely effective and effective in improving the average temperature coefficient of electrical resistance and thermal stress fracture resistance at high temperatures. The purpose of the present invention is to solve the above-mentioned problems and -
The present invention aims to provide a constant electrical resistance alloy that shows extremely little change in electrical resistance over a wide temperature range of 150 to 1000°C, has excellent heat stress fracture resistance, and is easy to process and form, and a sensor that has constant electrical resistance characteristics. . The alloys of the present invention are listed below by composition. 1 Iridium 7 as the first choice component by weight
% or less, platinum 5% or less, copper 7% or less, and gold 9
Total of 1 type or 2 or more types below 0.1-10
% and rhodium 5% or less as a second selection component,
Osmium 5% or less, Hafnium 1% or less, Indium 3% or less, Iron 2% or less, Cobalt 2%
The following: Nickel 2% or less, Niobium 1% or less, Tantalum 2% or less, Chromium 1.5% or less, Molybdenum 1.5% or less, Tungsten 0.2% or less, Titanium 1% or less, Yttrium 1% or less, Boron 0.5%.
It consists of 1% or less of rare earth elements, 0.5% or less of carbon, a total of 0.01 to 10% or less, 40.2 to 43% silver, and the balance palladium, and is electrically conductive in the temperature range of -150 to 1000℃. A constant electrical resistance alloy characterized by having constant electrical resistance characteristics with an average temperature coefficient of resistance of 100 ppm/℃ or less and thermal stress fracture resistance. 2 Iridium 7 as the first choice component by weight
% or less, platinum 5% or less, copper 7% or less, and gold 9
Total of 1 type or 2 or more types below 0.1-10
%, and manganese 2% or less as a second selection component,
Rhenium 2% or less, thallium 2% or less, gallium 1.5% or less, aluminum 2% or less, vanadium 2% or less, silicon 1.5% or less, tin 1.5% or less, antimony 1% or less, bismuth 1% or less,
Zinc 1% or less, cadmium 1% or less, total of 0.01 to 10% or less, and silver 40.2
~43%, balance palladium, -150~
A constant electrical resistance alloy characterized by having constant electrical resistance characteristics and thermal stress fracture resistance with an average temperature coefficient of electrical resistance of 100 ppm/°C or less in a temperature range of 1000°C. In addition, after forming a wire or plate material made of the alloy of the present invention into a desired shape such as a spiral or toroidal shape, if necessary, it is subjected to a curling treatment, and then the wire rod or plate material made of the alloy of the present invention is fixed to a room temperature or heat resistant insulator or insulated. It is made into a sensor by a method such as implanting it in the body, and if necessary, it is further heated at 200 to 500℃ for several hours in a non-oxidizing atmosphere or under vacuum to solidify, and then heated at 500 to 1200℃ for 2 seconds or more. A method of imparting constant electrical resistance characteristics by heating for less than 1 hour, or applying a normal temperature or heat-resistant insulator to the surface of a wire or plate made of the alloy of the present invention, coating it by electrodeposition, etc., and then forming a desired shape such as a spiral or toroidal material. After molding them into the shape, they are fixed as they are to a room-temperature or heat-resistant insulator, or embedded in an insulator to form a sensor.If necessary, they are further heated in a non-oxidizing atmosphere or under vacuum for 200 m A method in which the alloy is heated at ~500℃ for several hours to solidify, and then heated at 500 to 1200℃ for 2 seconds or more and 100 hours or less to provide constant electrical resistance characteristics, or alternatively, the alloy of the present invention is used as a room temperature or heat-resistant insulator. After depositing it as a thin film on the surface by an appropriate method such as electrodeposition or sputtering, etching, punching or trimming it into the desired shape, fixing it to an insulator or loading it into an insulator case to use it as a sensor,
If necessary, this is further heated at 200 to 500°C for several hours in a non-oxidizing atmosphere or in a vacuum to solidify it, and then heated at 500 to 1200°C for 2 seconds to 100 hours to obtain constant electrical resistance properties. A sensor can be manufactured by a method of making a sensor. In the above explanation, to explain the meaning of the term constant electric resistance characteristic, the electric resistance of ordinary metal alloys changes greatly with temperature changes, but in the case of the alloy of the present invention, the electric resistance changes extremely in a specific temperature range. The name refers to the property that the temperature coefficient of electrical resistance is small or zero, in other words, the temperature coefficient of electrical resistance is extremely small or zero. As an example, manganin, which has been widely used as a conventional precision resistance material, has a constant electric resistance only near room temperature. Hereinafter, the present invention will be explained in detail with reference to the drawings. Figures 2, 3, 4, and 5 show the amounts of Ir, Pt, Cu, and Au added to the average temperature coefficient of electrical resistance of palladium-silver alloys between -150 and 1000°C, respectively. shows the effect of Figure 6 also shows the average temperature coefficient of electrical resistance between -150 and 1000℃ of Pd-40%Ag alloy with Ir, Pt, Cu or Au added.
The relationship with the amount of Au added is shown. As is clear from these Figures 2 to 6, the amounts of Ir, Pt, Cu, or Au each having an average temperature coefficient of electrical resistance of 100 ppm/℃ or less between -150 and 1000℃ are 7. % or less, 5% or less, 7% or less, or 9% or less. In addition, Figures 2 to 6
In the figure, Pd-Ag-Ir system, Pd-Ag-Pt system, Pd-Ag
- Only the average temperature coefficient of electrical resistance of Cu-based and Pd-Ag-Au based ternary alloys is shown, but multi-component alloys that combine these ternary systems or further include group A to Va group elements as subcomponents. As listed in Table 3 below, it is obvious that the alloys added as 3D alloys have an average temperature coefficient of electrical resistance of 100ppm/℃ or less, as in the case of the four types of ternary alloys mentioned above. be. Next, the alloy of the present invention will be explained in detail. First, to produce the alloy of the present invention, alloy materials having the above-mentioned composition are blended, melted in a non-oxidizing atmosphere or in vacuum using a suitable melting furnace, and sufficiently stirred to obtain a structurally uniform molten alloy. . Next, the molten alloy is cast into iron molds of appropriate shape and size to obtain a sound ingot, and scale, scratches, etc. on the surface of the ingot are removed by grinding, and the ingot is then subjected to various hot working processes through the casting process. Then, it is formed into a desired shape, such as a round bar, a thin wire, or a thin plate, by cold working, such as swaging, wire drawing, rolling, or dipping. Next, these shapes are heated at 200 to 1200°C for 2 seconds or more and 100 hours or less in a non-oxidizing atmosphere or vacuum, so that the temperature coefficient of electrical resistance becomes 100 ppm/°C in the temperature range of -150 to 1000°C. It becomes possible to have the following constant electric resistance characteristics and excellent thermal stress fracture resistance. When the alloy of the present invention is applied to heating elements, sensors, etc., it is usually formed into a coil shape and used, so the constant electrical resistance characteristics of the alloy of the present invention can be fully exhibited by any of the methods described below. Appropriate electrical and thermal insulation shall be provided. 1. After fixing the wire or plate of the alloy of the present invention by directly wrapping it around a room-temperature insulator such as mica or a heat-resistant insulator such as ceramic or by sandwiching it between insulators, place it in a non-oxidizing atmosphere if necessary. In order to evaporate harmful gases and organic substances in the insulator, the inside is heated at 200-500℃ for several hours in a vacuum, and then further heated at 500-1200℃ for 2 seconds or more at 100℃.
Heat for no more than an hour. 2 A wire rod or plate material of the alloy of the present invention is formed into a spiral or toroidal shape in a non-oxidizing atmosphere or in a vacuum.
After being heated at 500-1200℃ for 5 seconds or more and 100 hours or less for curling treatment, it is immersed in a solution made of room-temperature insulators such as water glass or heat-resistant insulators such as ceramic paste at 200-500℃. After heating for several hours to solidify, it is loaded into an insulating case and sealed, and if necessary, further heated at 500 to 1200°C for 2 seconds or more and 100 hours or less in a non-oxidizing atmosphere or in a vacuum. 3 The surface of the wire or plate material of the alloy of the present invention is coated or coated with a room temperature insulator such as formal, or a heat resistant insulator such as polyimide resin or magnesia is deposited by an appropriate method such as electrodeposition or sputtering. After that, the wire is formed into a spiral or toroidal shape.
Heat at 200 to 500℃ for several hours to evaporate harmful gases and organic substances, load it into an insulating case and seal it, and if necessary, heat at 500 to 1200℃ for 2 seconds in a non-oxidizing atmosphere or in vacuum. Heat for more than 100 hours. 4 After the composite of the present invention is attached to the outer surface of an insulating material such as glass or ceramic by an appropriate method such as electrodeposition or sputtering, it is etched, punched or trimmed into a desired shape, and if necessary, fixed to an insulating material or Installed inside an insulating case. After that, homogenization treatment is performed by heating at 200-500℃ for several hours, and if necessary, further heating at 500-1200℃ in a non-oxidizing atmosphere or in vacuum.
Heat for more than 2 seconds and less than 100 hours. It has been revealed that the properties of the product completed through the above steps are exactly the same as those of the alloy of the present invention, and that it can sufficiently exhibit constant electrical resistance properties and thermal stress fracture resistance. Next, the method for manufacturing the alloy and sensor of the present invention will be specifically described with reference to Examples. Example 1 Alloy number PAM-115 (composition Pd=54.85%, Ag=
41.5%, Pt=3.0%, Rh=0.5%, Os=0.1%,
Hf=0.05%) Alloy and sensor manufacturing The raw materials are Pd, Ag and Pt with a purity of 99.9%,
Rh, Os, and Hf with a purity of 99.5% or higher were used. The sample was manufactured by putting a total weight of 1 kg into a high-frequency vacuum melting furnace, degassing it at about 900°C, and then melting it by injecting a small amount of argon gas as an inert gas. 25 melted alloys
A sound ingot was produced by casting into a mm square mold. Next, the surface of the ingot was ground with a milling machine to remove any flaws, and then hot forged and hot formed into rolls with a diameter of 10 mm.
I made it into a round bar. After that, cold processing such as swaging and drawing is performed to make the wire into a fine wire with a wire diameter of 0.5 mm, and then a precision cold rolling machine is used to make the wire into a thin wire with a thickness of 0.28 mm and a thickness of 0.22 mm.
It was made into a ribbon-like thin plate of mm. Among these, a ribbon-shaped thin plate with a thickness of 0.28 mm was used as the alloy sample for electrical resistance measurement, and the measurement was carried out in a vacuum at a temperature range of -160 to 1100°C. In addition, after stacking these two types of thin plates and winding them 20 to 50 times in a toroidal shape,
It was heated for a minute to give it a curl. Then thickness 0.22mm
Remove the ribbon-like coil and reduce the remaining thickness to 0.28mm.
The toroidal sensor coil was immersed in ceramic paste, loaded into a ceramic case, heated at 200°C for 1 hour, 400°C for 30 minutes, and then heated at 1000°C.
Baked for 30 minutes. Next, the impedance change rate of this sensor Δη/η0×100=ηT−η0/η0×100 (%) was measured using the bridge circuit method. The measurement frequency is
It was 1KHz. Here, η0 and ηT are the impedances of the sensor coil at the start of measurement and after time T, respectively. The wire rod sample and comparative alloy PA-4 (composition Pd=58%,
Figure 7 shows the temperature vs. electrical resistance curve of Ag=42%). Also, the average temperature coefficient of electrical resistance 1/R・ΔR/ΔT obtained from this curve and the sensor performance when a sensor using the wire of the invention alloy PAM-1 is used continuously for a long period of time at a high temperature of 800°C or higher. , the rate of change in impedance is as shown in Table 1. Incidentally, the alloy PAM-115 of the present invention is characterized by a very small value of Δη/η0×100, as shown in Table 1.
【表】
実施例 2
合金番号PAM−214(組成Pd=46.2%、Ag=
40.5%、Ir=3.0%、Pt=1.5%、Cu=5.0%、Si
=0.8%、Sn=0.5%、Sb=0.05%、Bi=0.01%)
合金およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Ag,
Ir,PtおよびCuと、純度99.5%以上のSi,Sn,
SbおよびBiを用いた。製造法および実験法は実
施例1と全く同様である。合金試料とセンサの電
気的特性ならびに性能について第8図および第2
表に示すとおりで、実施例1の結果と類似してい
る。[Table] Example 2 Alloy number PAM-214 (composition Pd=46.2%, Ag=
40.5%, Ir=3.0%, Pt=1.5%, Cu=5.0%, Si
=0.8%, Sn=0.5%, Sb=0.05%, Bi=0.01%)
Manufacture of alloy and sensor The raw materials are Pd, Ag, and 99.9% pure Pd, the same as in Example 1.
Ir, Pt and Cu, and Si, Sn, with a purity of 99.5% or more
Sb and Bi were used. The manufacturing method and experimental method are exactly the same as in Example 1. Figures 8 and 2 about the electrical characteristics and performance of the alloy sample and sensor.
As shown in the table, the results are similar to those of Example 1.
【表】
実施例 3
合金番号PAM−112(組成Pd=53.70%、Ag=
40.2%、Ir=5.0%、Ni=1.0%、Ti=0.1%)合
金およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Agお
よびIrと、純度99.5%以上のNiおよびTiを用い
た。製造法および実験法は実施例1と全く同様で
ある。合金試料とセンサの電気的特性ならびに性
能について第3表に示すとおりで、実施例1の結
果と類似している。[Table] Example 3 Alloy number PAM-112 (composition Pd=53.70%, Ag=
40.2%, Ir = 5.0%, Ni = 1.0%, Ti = 0.1%) Production of alloy and sensor The raw materials were Pd, Ag and Ir with a purity of 99.9% as in Example 1, and Ni and Ti with a purity of 99.5% or more. Using. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical characteristics and performance of the alloy sample and sensor are shown in Table 3 and are similar to the results of Example 1.
【表】
実施例 4
合金番号PAM−221(組成Pd=47.24%、Ag=
42.0%、Au=9.0%、Fe=1.5%、W=0.2%、
Mo=0.05%、C=0.01%)合金およびセンサ
の製造
原料は実施例1と同じ99.9%純度のPd,Ag,
IrおよびAuと、純度99.5%以上のFe,Wおよび
MoおよびCを用いた。製造法および実験法は実
施例1と全く同様である。合金試料とセンサの電
気的特性ならびに性能については第4表に示すと
おりで、実施例1の結果と類似している。[Table] Example 4 Alloy number PAM-221 (composition Pd=47.24%, Ag=
42.0%, Au=9.0%, Fe=1.5%, W=0.2%,
Production of alloy and sensor (Mo = 0.05%, C = 0.01%) The raw materials are Pd, Ag, with the same 99.9% purity as in Example 1.
Ir and Au, Fe, W and more than 99.5% purity
Mo and C were used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical properties and performance of the alloy sample and sensor are shown in Table 4 and are similar to the results of Example 1.
【表】
実施例 5
合金番号PAM−205(組成Pd=50.82%、Ag=
40.5%、Pt=2.5%、Cu=1.1%、Au=5.0%、
Mn=0.05%、Re=0.02%、Gd=0.01%)合金
およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Ag,
PtおよびAuと、純度99.5%以上のMn,Reおよ
びGdを用いた。製造法および実験法は実施例1
と全く同様である。合金試料とセンサの電気的特
性ならびに性能については第5表に示すとおり
で、実施例1の結果と類似している。[Table] Example 5 Alloy number PAM-205 (composition Pd=50.82%, Ag=
40.5%, Pt=2.5%, Cu=1.1%, Au=5.0%,
Manufacture of alloy and sensor (Mn=0.05%, Re=0.02%, Gd=0.01%) The raw materials are 99.9% pure Pd, Ag, the same as in Example 1.
Pt and Au, and Mn, Re and Gd with a purity of 99.5% or higher were used. The manufacturing method and experimental method are as in Example 1.
It is exactly the same. The electrical properties and performance of the alloy sample and sensor are shown in Table 5 and are similar to the results of Example 1.
【表】【table】
【表】
実施例 6
合金番号PAM−211(組成Pd=44.35%、Ag=
42.1%、Ir=3.0%、Cu=7.0%、Au=1.5%、
Nb=0.5%、Ta=1.5%、V=0.05%)合金お
よびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Ag,
Ir,CuおよびAuと、純度99.5%以上のNb,Ta
およびVを用いた。製造法および実験法は実施例
1と全く同様である。合金試料とセンサの電気的
特性ならびに性能については第6表に示すとおり
で、実施例1の結果と類似している。[Table] Example 6 Alloy number PAM-211 (composition Pd=44.35%, Ag=
42.1%, Ir=3.0%, Cu=7.0%, Au=1.5%,
Production of alloy and sensor (Nb=0.5%, Ta=1.5%, V=0.05%) The raw materials are Pd, Ag, with 99.9% purity as in Example 1,
Ir, Cu and Au, and Nb, Ta with a purity of over 99.5%
and V were used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical properties and performance of the alloy sample and sensor are shown in Table 6 and are similar to the results of Example 1.
【表】
実施例 7
合金番号PAM−228(組成Pd=49.66%、Ag=
43.0%、Ir=0.2%、Pt=0.1%、Cu=2.0%、
Au=5.0%、B=0.01、Y=0.01%、Nd=0.01、
La=0.01%)合金およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Ag,
Ir,Pt,CuおよびAuと、純度99.5%以上のB,
Y,NdおよびLaを用いた。製造法および実験法
は実施例1と全く同様である。合金試料とセンサ
の電気的特性ならびに性能については第7表に示
すとおりで、実施例1の結果と類似している。[Table] Example 7 Alloy number PAM-228 (composition Pd=49.66%, Ag=
43.0%, Ir=0.2%, Pt=0.1%, Cu=2.0%,
Au=5.0%, B=0.01, Y=0.01%, Nd=0.01,
Production of alloy and sensor (La = 0.01%) The raw materials are Pd, Ag, and 99.9% pure Pd, the same as in Example 1.
Ir, Pt, Cu and Au, B with a purity of 99.5% or more,
Y, Nd and La were used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical properties and performance of the alloy sample and sensor are shown in Table 7 and are similar to the results of Example 1.
【表】
実施例 8
合金番号PAM−231(組成Pd=48.5%、Ag=
42.0%、Rh=2.0%、Os=2.0%、Hf=0.5%、
Cu=5.0%)合金およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Agと、
純度99.5%以上のRh,Os,HfおよびCuを用い
た。製造法および実験法は実施例1と全く同様で
ある。合金試料とセンサの電気的特性ならびに性
能については第8表に示すとおりで、実施例1の
結果と類似している。[Table] Example 8 Alloy number PAM-231 (composition Pd=48.5%, Ag=
42.0%, Rh=2.0%, Os=2.0%, Hf=0.5%,
Production of alloy and sensor (Cu = 5.0%) The raw materials are the same 99.9% purity Pd and Ag as in Example 1,
Rh, Os, Hf, and Cu with a purity of 99.5% or higher were used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical properties and performance of the alloy sample and sensor are shown in Table 8 and are similar to the results of Example 1.
【表】
実施例 9
合金番号PAM−216(組成Pd=48.5%、Ag=
42.0%、Rh=2.0%、Os=2.0%、Hf=0.5%、
Au=5.0%)合金およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Ag,
Auと、純度99.5%以上のRh,OsおよびHfを用い
た。製造法および実験法は実施例1と全く同様で
ある。合金試料とセンサの電気的特性ならびに性
能については第9表に示すとおりで、実施例1の
結果と類似している。[Table] Example 9 Alloy number PAM-216 (composition Pd=48.5%, Ag=
42.0%, Rh=2.0%, Os=2.0%, Hf=0.5%,
Production of alloy and sensor (Au = 5.0%) The raw materials are Pd, Ag, and 99.9% pure Pd, the same as in Example 1.
Au, Rh, Os, and Hf with a purity of 99.5% or higher were used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical properties and performance of the alloy sample and sensor are shown in Table 9 and are similar to the results of Example 1.
【表】
実施例 10
合金番号PAM−246(組成Pd=52.5%、Ag=
41.0%、Ir=2.0%、Rh=2.0%、Os=2.0%、
Hf=0.5%)合金およびセンサの製造
原料は実施例1と同じ99.9%純度のPd,Ag,
Irと、純度99.5%以上のRh,OsおよびHfを用い
た。製造法および実験法は実施例1と全く同様で
ある。合金試料とセンサの電気的特性ならびに性
能については第10表に示すとおりで、実施例1の
結果と類似している。[Table] Example 10 Alloy number PAM-246 (composition Pd=52.5%, Ag=
41.0%, Ir=2.0%, Rh=2.0%, Os=2.0%,
Hf=0.5%) Production of alloy and sensor The raw materials are Pd, Ag, and 99.9% pure Pd, the same as in Example 1.
Ir, Rh, Os, and Hf with a purity of 99.5% or higher were used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical properties and performance of the alloy sample and sensor are shown in Table 10 and are similar to the results of Example 1.
【表】【table】
【表】
実施例 11
合金番号PAM−282(組成Pd=52.0%、Ag=
41.5%、Rh=2.0%、Pt=2.0%、Os=2.0%、
Hf=0.5%)合金およびセンサの製造
原料は実施例1と同じ純度99.9%のPd,Ag,
IrおよびPtと、純度99.5%以上のRh,Osおよび
Hfを用いた。製造法および実験法は実施例1と
全く同様である。合金試料とセンサの電気的特性
ならびに性能については第11表に示すとおりで、
実施例1の結果と類似している。[Table] Example 11 Alloy number PAM-282 (composition Pd=52.0%, Ag=
41.5%, Rh=2.0%, Pt=2.0%, Os=2.0%,
Hf = 0.5%) Production of alloy and sensor The raw materials are Pd, Ag, with the same purity of 99.9% as in Example 1,
Ir and Pt, Rh, Os and more than 99.5% purity
Hf was used. The manufacturing method and experimental method are exactly the same as in Example 1. The electrical characteristics and performance of the alloy sample and sensor are shown in Table 11.
The results are similar to those of Example 1.
【表】
上述の実施例1〜11の他に多くの合金について
も実験を行つたが、第12表にはこれら代表的な合
金試料の電気的特性、再結晶温度、平均の結晶粒
径ならびに本発明合金線材を用いたセンサについ
て800℃で10日間加熱保持した場合のインピーダ
ンス変化率を示す。[Table] In addition to the above-mentioned Examples 1 to 11, experiments were also conducted on many alloys, and Table 12 shows the electrical properties, recrystallization temperature, average grain size, and The impedance change rate when a sensor using the alloy wire of the present invention is heated and held at 800°C for 10 days is shown.
【表】
本発明の合金は以下の実施例1〜実施例11およ
び第12表からわかるように、−150〜1000℃の広い
範囲において100ppm/℃以下の恒電気抵抗特性
および優れた耐熱応力破壊性を有しており、第7
図第8図にみるように電気抵抗の温度に対する変
化が高温では著しく改善されているのが大きな特
長である。また本発明合金を使用したセンサの性
能も第12表に示すようにΔη/η0×100が比較合金PA
−4のそれの約1/10の±0.015%以下で極めて
小さく、高温安定性に優れ、本発明合金の特性を
充分に発揮し得ることがわかる。
ここで本発明合金の組成はPd−Ag−(Ir,Pt,
Cu,Au)−(第二選択成分)であつて、銀40.2〜
43.0%と限定した理由は、この範囲外であると、
電気抵抗の平均の温度計数が0ないし100ppm/
℃の範囲内に入らず、優れた恒電気抵抗特性が得
られないために、優れた耐熱応力破壊性を得るこ
との目的が達成されない。
次に本発明合金の第一選択成分中イリジウム
7.5%以下、白金5%以下、銅7%以下、金9%
以下の範囲では第2図ないし第6図に示すよう
に、−150℃〜1000℃の間の電気抵抗の平均の温度
係数が何れも100ppm/℃以下となるが、この範
囲の上限を越えると電気抵抗の平均温度係数が何
れも100ppm/℃以上となるので本発明の目的を
達成できなくなるので好ましくない。
そしてこれら第一選択成分イリジウム、白金、
銅、金はその組成範囲内で同効物であることが確
認された。
次に、本願第一発明合金の第二選択成分添加効
果の一般的傾向は第13表に示す通りで、この内恒
電気抵抗特性の向上に寄与する成分はRh,Os,
In,Fe,Co,Ni,Ta,Re,Al,Tl,Ga,Si,
Sn,Y,Ti,Hf,Nb,Zn,Cd,Sb,Bi,B,
希土類元素,Cであるが、これらの成分が各特許
請求の範囲の組成の上限を超えて添加されると、
恒電気抵抗特性の改善がなされず、特性が何れも
劣化するので好ましくない。
また本願第一発明の合金の第二選択成分中耐熱
応力破壊性に寄与する成分はRh,Os,In,Hf,
Fe,Co,Ni,V,Ta,Re,Al,Tl,Cr,Mo,
Si,Sn,Y,Ti,Nb,Zn,Cd,Sb,Bi,B,
希土類元素,Cであるが、これらの成分が各特許
請求の範囲の組成の上限を超えて添加さるとSi,
Y,Ti,Sb,を除き何れも特性が悪くなる。
第二選択成分の各成分範囲外では恒電気抵抗特
性(A)又は耐熱応力破壊性(B)の特性の何れか一方又
は双方が悪くなるので好ましくない。
本発明のPd−Ag(40.2〜43.0%)−(Ir,Pt,
Cu,Au)系合金に第二選択成分添加の効果の一
般的傾向は第13表の(1)および第13表の(2)に示すと
おりである。[Table] As can be seen from Examples 1 to 11 and Table 12 below, the alloy of the present invention has constant electrical resistance properties of 100 ppm/℃ or less in a wide range of -150 to 1000℃ and excellent thermal stress fracture resistance. 7th
As shown in Figure 8, the major feature is that the change in electrical resistance with respect to temperature is significantly improved at high temperatures. Furthermore, as shown in Table 12, the performance of the sensor using the alloy of the present invention is extremely small, with Δη/η0×100 being less than ±0.015%, about 1/10 of that of the comparative alloy PA-4, and exhibiting excellent high-temperature stability. It can be seen that the characteristics of the alloy of the present invention can be fully exhibited. Here, the composition of the alloy of the present invention is Pd-Ag-(Ir, Pt,
Cu, Au) - (second selection component), silver 40.2 ~
The reason for limiting it to 43.0% is that it is outside this range.
Average temperature coefficient of electrical resistance is 0 to 100ppm/
℃ range, and excellent constant electrical resistance properties cannot be obtained, so the purpose of obtaining excellent thermal stress fracture resistance cannot be achieved. Next, iridium is the first selected component of the alloy of the present invention.
7.5% or less, platinum 5% or less, copper 7% or less, gold 9%
In the following ranges, as shown in Figures 2 to 6, the average temperature coefficient of electrical resistance between -150℃ and 1000℃ is less than 100ppm/℃, but beyond the upper limit of this range Since the average temperature coefficient of electrical resistance is 100 ppm/°C or more in all cases, the object of the present invention cannot be achieved, which is not preferable. These first-choice components iridium, platinum,
It was confirmed that copper and gold have the same effect within their composition ranges. Next, the general trend of the effect of adding the second selected component to the first invention alloy of the present application is as shown in Table 13, and the components that contribute to the improvement of the internal constant electrical resistance characteristics are Rh, Os,
In, Fe, Co, Ni, Ta, Re, Al, Tl, Ga, Si,
Sn, Y, Ti, Hf, Nb, Zn, Cd, Sb, Bi, B,
Rare earth elements and C, but if these components are added in excess of the upper limit of the composition in each claim,
This is not preferable because the constant electric resistance characteristics are not improved and all the characteristics are deteriorated. In addition, the components contributing to the heat stress fracture resistance in the second selected components of the alloy of the first invention of the present application are Rh, Os, In, Hf,
Fe, Co, Ni, V, Ta, Re, Al, Tl, Cr, Mo,
Si, Sn, Y, Ti, Nb, Zn, Cd, Sb, Bi, B,
Rare earth elements and C, but if these components are added in excess of the upper limit of the composition in each claim, Si,
The properties of all of them except Y, Ti, and Sb deteriorate. If the second selected component is outside the respective ranges, either or both of the constant electrical resistance properties (A) and the thermal stress fracture resistance (B) properties will deteriorate, which is not preferable. Pd-Ag (40.2-43.0%)-(Ir, Pt,
The general trend of the effect of adding the second selective component to Cu, Au)-based alloys is shown in Table 13 (1) and Table 13 (2).
【表】【table】
【表】【table】
【表】
以上の第13表の(1)および(2)に示すとおり、本発
明の組成限定範囲外では恒電気抵抗特性(A)又は耐
熱応力破壊性(B)の特性の何れか一方又は双方が悪
くなり好ましくない。
さらにまた本発明合金およびセンサの製造法に
おいて、熱処理として200〜1200℃で2秒以上100
時間以下に限定した理由は、この温度範囲および
時間内では加工による内部歪が充分に取り除か
れ、さらに一層安定した恒電気抵抗特性が得られ
るが、200℃以下で2秒以下加熱処理した場合に
は加工による残留応力のため恒電気抵抗特性が得
られずセンサを高温で使用する場合非常に不安定
となる。また1200℃以上で100時間以上加熱処理
した場合には結晶粒の粗大化によつて耐熱応力破
壊性が悪化し、しかも含有銀の蒸発によつて恒電
気抵抗特性が得られないだけでなく蒸発銀の汚染
により電気絶縁性が悪化することもある。従つて
上記の熱処理条件からはずれた場合には、恒電気
抵抗特性あるいは高温における安定性の優れたセ
ンサとしては不適当となるからである。
要するに本発明合金およびセンサは−150〜
1000℃の温度範囲において電気抵抗の平均の温度
係数が100ppm/℃以下の恒電気抵抗特性および
耐熱応力破壊性に優れ、しかも高温で長期間使用
してもインピーダンス変化率が±0.005%以下で
非常に少なく安定性に優れているなどの特徴を有
しており、これらの合金およびセンサを利用した
デバイス複合体や種々計測機器の主要な部品、例
えば発熱素子、熱線風速度、抵抗温度計や熱定電
流安定器等の基準抵抗体等に応用しても本発明合
金およびセンサま有する優れた特性を充分に発揮
することが可能である。[Table] As shown in (1) and (2) of Table 13 above, outside the limited composition range of the present invention, either constant electrical resistance property (A) or thermal stress fracture resistance (B) property or It's not good for both parties. Furthermore, in the method for manufacturing the alloy and sensor of the present invention, heat treatment is performed at 200 to 1200°C for 2 seconds or more.
The reason for limiting the temperature to 2 seconds or less is that within this temperature range and time, the internal strain caused by processing is sufficiently removed and even more stable constant electrical resistance characteristics are obtained. Due to residual stress caused by processing, constant electrical resistance characteristics cannot be obtained and the sensor becomes extremely unstable when used at high temperatures. In addition, if heat treatment is performed at 1200℃ or higher for 100 hours or more, thermal stress fracture resistance deteriorates due to coarsening of crystal grains, and furthermore, constant electrical resistance characteristics cannot be obtained due to the evaporation of silver contained, as well as evaporation. Electrical insulation may deteriorate due to silver contamination. Therefore, if the heat treatment conditions are deviated from the above, the sensor becomes unsuitable as a sensor with excellent constant electrical resistance characteristics or stability at high temperatures. In short, the alloy and sensor of the present invention are -150~
It has excellent constant electrical resistance characteristics with an average temperature coefficient of electrical resistance of 100 ppm/℃ or less in a temperature range of 1000℃, and excellent thermal stress fracture resistance, and even when used for long periods at high temperatures, the impedance change rate is ±0.005% or less. These alloys and sensors are used as main components of device complexes and various measuring instruments, such as heating elements, hot wire wind velocity, resistance thermometers, and thermometers. Even when applied to reference resistors such as constant current stabilizers, the excellent characteristics of the alloy and sensor of the present invention can be fully exhibited.
第1図はパラジウム−銀系合金の0〜400℃
()、−150〜1000℃()および−200〜1200℃
()の温度間における電気抵抗の平均の温度係
数とAg量との関係を示す特性図、第2図、第3
図、第4図および第5図はそれぞれ(Pd−Ag)
+Ir系、(Pd−Ag)+Pt系、(Pd−Ag)+Cu系お
よび(Pd−Ag)+Au系合金の−150〜1000℃にお
ける電気抵抗の平均の温度係数とAg量との関係
を示す特性図、第6図はPd−40%Ag合金にIr,
Pt,CuまたはAuを添加した場合の各元素添加量
と−150〜1000℃における電気抵抗の平均の温度
係数との関係を示す特性図、第7図〜第8図は合
金番号PAM−115、PAM−214ならびに比較合金
PA−4の電気抵抗と測定温度との関係を示す特
性図である。
Figure 1 shows the temperature of palladium-silver alloy from 0 to 400℃.
(), −150 to 1000℃ () and −200 to 1200℃
Characteristic diagrams showing the relationship between the average temperature coefficient of electrical resistance and the amount of Ag between temperatures in (), Figures 2 and 3
Figures 4 and 5 are respectively (Pd-Ag)
Characteristics showing the relationship between the average temperature coefficient of electrical resistance and Ag content at -150 to 1000°C for +Ir, (Pd-Ag) + Pt, (Pd-Ag) + Cu, and (Pd-Ag) + Au alloys. Figure 6 shows Ir in Pd-40%Ag alloy.
Characteristic diagrams showing the relationship between the amount of each element added and the average temperature coefficient of electrical resistance at -150 to 1000°C when Pt, Cu or Au is added. Figures 7 and 8 are alloy number PAM-115, PAM-214 and comparative alloys
FIG. 3 is a characteristic diagram showing the relationship between electrical resistance and measurement temperature of PA-4.
Claims (1)
%以下、白金5%以下、銅7%以下および金9%
以下の1種あるいは2種以上の合計0.1〜10%と、
第二選択成分としてロジウム5%以下、オスミウ
ム5%以下、ハフニウム1%以下、インジウム3
%以下、鉄2%以下、コバルト2%以下、ニツケ
ル2%以下、ニオブ1%以下、タンタル2%以
下、クロム1.5%以下、モリブデン1.5%以下、タ
ングステン0.2%以下、チタン1%以下、イツト
リウム1%以下、硼素0.5%以下、希土類元素1
%以下、炭素0.5%以下の1種あるいは2種以上
の合計0.01〜10%以下と、銀40.2〜43%、残部パ
ラジウムとからなり、−150〜1000℃の温度範囲に
おける電気抵抗の平均温度係数が100ppm/℃以
下の恒電気抵抗特性および耐熱応力破壊性を有す
ることを特徴とする恒電気抵抗合金。 2 重量比にて第一選択成分としてイリジウム7
%以下、白金5%以下、銅7%以下および金9%
以下の1種あるいは2種以上の合計0.1〜10%と、
第二選択成分としてマンガン2%以下、レニウム
2%以下、タリウム2%以下、ガリウム1.5%以
下、アルミニウム2%以下、バナジウム2%以
下、シリコン1.5%以下、錫1.5%以下、アンチモ
ン1%以下、ビスマス1%以下、亜鉛1%以下、
カドミウム1%以下の1種あるいは2種以上の合
計0.01〜10%以下と、銀40.2〜43%、残部パラジ
ウムとからなり、−150〜1000℃の温度範囲におけ
る電気抵抗の平均温度係数が100ppm/℃以下の
恒電気抵抗特性および耐熱応力破壊性を有するこ
とを特徴とする恒電気抵抗合金。[Claims] Iridium 7 as the first selected component in a weight ratio of 1
% or less, platinum 5% or less, copper 7% or less and gold 9%
A total of 0.1 to 10% of one or more of the following:
Second selection components: rhodium 5% or less, osmium 5% or less, hafnium 1% or less, indium 3
% or less, iron 2% or less, cobalt 2% or less, nickel 2% or less, niobium 1% or less, tantalum 2% or less, chromium 1.5% or less, molybdenum 1.5% or less, tungsten 0.2% or less, titanium 1% or less, yttrium 1 % or less, boron 0.5% or less, rare earth elements 1
% or less, carbon 0.5% or less, a total of 0.01 to 10% or less of one or more types, 40.2 to 43% silver, and the balance palladium, and the average temperature coefficient of electrical resistance in the temperature range of -150 to 1000℃. A constant electric resistance alloy characterized by having constant electric resistance characteristics of 100 ppm/℃ or less and heat stress fracture resistance. 2 Iridium 7 as the first choice component by weight
% or less, platinum 5% or less, copper 7% or less and gold 9%
A total of 0.1 to 10% of one or more of the following:
The second selected components include manganese 2% or less, rhenium 2% or less, thallium 2% or less, gallium 1.5% or less, aluminum 2% or less, vanadium 2% or less, silicon 1.5% or less, tin 1.5% or less, antimony 1% or less, Bismuth 1% or less, zinc 1% or less,
It consists of one type or two or more types of cadmium 1% or less, a total of 0.01 to 10% or less, silver 40.2 to 43%, and the balance palladium, and has an average temperature coefficient of electrical resistance of 100 ppm/ A constant electric resistance alloy characterized by having constant electric resistance characteristics below ℃ and heat stress fracture resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5815684A JPS60204847A (en) | 1984-03-28 | 1984-03-28 | Constant electric resistance alloy, production thereof and sensor using said alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5815684A JPS60204847A (en) | 1984-03-28 | 1984-03-28 | Constant electric resistance alloy, production thereof and sensor using said alloy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60204847A JPS60204847A (en) | 1985-10-16 |
| JPH0427286B2 true JPH0427286B2 (en) | 1992-05-11 |
Family
ID=13076127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5815684A Granted JPS60204847A (en) | 1984-03-28 | 1984-03-28 | Constant electric resistance alloy, production thereof and sensor using said alloy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60204847A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69227620T2 (en) * | 1991-08-02 | 1999-06-17 | Canon K.K., Tokio/Tokyo | INK BEAM HEAD SUPPORT, INK BEAM HEAD WITH THIS CARRIER, AND INK BEAM EQUIPMENT EQUIPPED WITH SUCH A HEAD |
| US5849113A (en) * | 1996-09-27 | 1998-12-15 | The Foundation: The Research Institute Of Electric And Magnetic Alloys | Electrical resistant alloy having a high temperature coefficient of resistance |
| US6923936B2 (en) | 2001-10-23 | 2005-08-02 | Medtronic Minimed, Inc. | Sterile device and method for producing same |
| JP4926543B2 (en) * | 2006-05-24 | 2012-05-09 | 中国電力株式会社 | Strain measuring device |
| US7959855B2 (en) * | 2006-10-19 | 2011-06-14 | Heru Budihartono | White precious metal alloy |
| JP5767484B2 (en) * | 2011-02-01 | 2015-08-19 | ササキジェム株式会社 | Silver base alloy |
| CN110387483B (en) * | 2019-07-25 | 2021-02-09 | 无锡英特派金属制品有限公司 | Manufacturing method of Pt-Au alloy |
-
1984
- 1984-03-28 JP JP5815684A patent/JPS60204847A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60204847A (en) | 1985-10-16 |
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