JPH0429665U - - Google Patents
Info
- Publication number
- JPH0429665U JPH0429665U JP1990071907U JP7190790U JPH0429665U JP H0429665 U JPH0429665 U JP H0429665U JP 1990071907 U JP1990071907 U JP 1990071907U JP 7190790 U JP7190790 U JP 7190790U JP H0429665 U JPH0429665 U JP H0429665U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- cell
- cap
- evaporation source
- molecular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図はこの考案の一実施例を示すＧａ用セル
の概略構成図、第２図は従来のＧａ用セルの概略
構成図である。
図において、１は放熱防止筒、２はるつぼ、３
はＧａ、４は加熱用ヒータ、５は熱電対、６はシ
ヤツタ、７はキヤツプ、９はドーナツ状部材、１
０はＧａ用セルである。なお、各図中の同一符号
は同一または相当部分を示す。
FIG. 1 is a schematic diagram of a Ga cell showing an embodiment of this invention, and FIG. 2 is a schematic diagram of a conventional Ga cell. In the figure, 1 is a heat radiation prevention cylinder, 2 is a crucible, and 3
is Ga, 4 is a heater, 5 is a thermocouple, 6 is a shutter, 7 is a cap, 9 is a donut-shaped member, 1
0 is a Ga cell. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
熱して前記蒸発源を蒸発させ、基板上に所望の化
合物半導体の結晶成長を行うための分子線エピタ
キシー用セルにおいて、前記るつぼと、このるつ
ぼを押え付けるキヤツプとの間に、薄板からなる
リングを複数枚積層したドーナツ状部材を設置し
たことを特徴とする分子線エピタキシー用セル。 In a molecular beam epitaxy cell for storing an evaporation source in a crucible, heating the crucible to evaporate the evaporation source, and growing a crystal of a desired compound semiconductor on a substrate, the crucible and the crucible are provided. A cell for molecular beam epitaxy, characterized in that a donut-shaped member made of a plurality of laminated rings made of thin plates is installed between the cap and the cap that holds down the cell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990071907U JPH0429665U (en) | 1990-07-03 | 1990-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990071907U JPH0429665U (en) | 1990-07-03 | 1990-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429665U true JPH0429665U (en) | 1992-03-10 |
Family
ID=31609365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990071907U Pending JPH0429665U (en) | 1990-07-03 | 1990-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429665U (en) |
-
1990
- 1990-07-03 JP JP1990071907U patent/JPH0429665U/ja active Pending
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