JPH0429665U - - Google Patents

Info

Publication number
JPH0429665U
JPH0429665U JP1990071907U JP7190790U JPH0429665U JP H0429665 U JPH0429665 U JP H0429665U JP 1990071907 U JP1990071907 U JP 1990071907U JP 7190790 U JP7190790 U JP 7190790U JP H0429665 U JPH0429665 U JP H0429665U
Authority
JP
Japan
Prior art keywords
crucible
cell
cap
evaporation source
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1990071907U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990071907U priority Critical patent/JPH0429665U/ja
Publication of JPH0429665U publication Critical patent/JPH0429665U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例を示すＧａ用セル
の概略構成図、第２図は従来のＧａ用セルの概略
構成図である。 図において、１は放熱防止筒、２はるつぼ、３
はＧａ、４は加熱用ヒータ、５は熱電対、６はシ
ヤツタ、７はキヤツプ、９はドーナツ状部材、１
０はＧａ用セルである。なお、各図中の同一符号
は同一または相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. るつぼの中に蒸発源を収容し、前記るつぼを加
    熱して前記蒸発源を蒸発させ、基板上に所望の化
    合物半導体の結晶成長を行うための分子線エピタ
    キシー用セルにおいて、前記るつぼと、このるつ
    ぼを押え付けるキヤツプとの間に、薄板からなる
    リングを複数枚積層したドーナツ状部材を設置し
    たことを特徴とする分子線エピタキシー用セル。
JP1990071907U 1990-07-03 1990-07-03 Pending JPH0429665U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990071907U JPH0429665U (ja) 1990-07-03 1990-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990071907U JPH0429665U (ja) 1990-07-03 1990-07-03

Publications (1)

Publication Number Publication Date
JPH0429665U true JPH0429665U (ja) 1992-03-10

Family

ID=31609365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990071907U Pending JPH0429665U (ja) 1990-07-03 1990-07-03

Country Status (1)

Country Link
JP (1) JPH0429665U (ja)

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