JPS6373360U - - Google Patents
Info
- Publication number
- JPS6373360U JPS6373360U JP16840186U JP16840186U JPS6373360U JP S6373360 U JPS6373360 U JP S6373360U JP 16840186 U JP16840186 U JP 16840186U JP 16840186 U JP16840186 U JP 16840186U JP S6373360 U JPS6373360 U JP S6373360U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- shutter
- source
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例における蒸着制御用
シヤツターを用いた真空蒸着装置の概略図、第２
図は従来の蒸着制御用シヤツターを用いた真空蒸
着装置の概略図である。
１，２…蒸発源、３…熱遮蔽板、５…基板、６
…本考案の蒸着制御用シヤツター、７，８…熱反
射面（熱放散手段）。
Figure 1 is a schematic diagram of a vacuum evaporation apparatus using a shutter for evaporation control in one embodiment of the present invention;
The figure is a schematic diagram of a vacuum evaporation apparatus using a conventional shutter for evaporation control. 1, 2... Evaporation source, 3... Heat shielding plate, 5... Substrate, 6
...Shutter for vapor deposition control of the present invention, 7, 8... Heat reflecting surface (heat dissipation means).
Claims (1)
蒸着源以外の方向へ放散させる手段を備えたこと
を特徴とする蒸着制御用シヤツター。 1. A shutter for controlling vapor deposition, comprising means for dissipating radiation heat emitted from an evaporation source of a vacuum vapor deposition apparatus in a direction other than the vapor deposition source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16840186U JPH0543090Y2 (en) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16840186U JPH0543090Y2 (en) | 1986-10-31 | 1986-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373360U true JPS6373360U (en) | 1988-05-16 |
| JPH0543090Y2 JPH0543090Y2 (en) | 1993-10-29 |
Family
ID=31101250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16840186U Expired - Lifetime JPH0543090Y2 (en) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543090Y2 (en) |
-
1986
- 1986-10-31 JP JP16840186U patent/JPH0543090Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543090Y2 (en) | 1993-10-29 |
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