JPH0430033U - - Google Patents
Info
- Publication number
- JPH0430033U JPH0430033U JP1990071553U JP7155390U JPH0430033U JP H0430033 U JPH0430033 U JP H0430033U JP 1990071553 U JP1990071553 U JP 1990071553U JP 7155390 U JP7155390 U JP 7155390U JP H0430033 U JPH0430033 U JP H0430033U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- vacuum
- processing apparatus
- changing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990071553U JPH0430033U (lt) | 1990-07-06 | 1990-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990071553U JPH0430033U (lt) | 1990-07-06 | 1990-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0430033U true JPH0430033U (lt) | 1992-03-11 |
Family
ID=31608690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990071553U Pending JPH0430033U (lt) | 1990-07-06 | 1990-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0430033U (lt) |
-
1990
- 1990-07-06 JP JP1990071553U patent/JPH0430033U/ja active Pending