JPH0437534U - - Google Patents

Info

Publication number
JPH0437534U
JPH0437534U JP7885590U JP7885590U JPH0437534U JP H0437534 U JPH0437534 U JP H0437534U JP 7885590 U JP7885590 U JP 7885590U JP 7885590 U JP7885590 U JP 7885590U JP H0437534 U JPH0437534 U JP H0437534U
Authority
JP
Japan
Prior art keywords
cooling
temperature gas
low
gas generator
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7885590U
Other languages
Japanese (ja)
Other versions
JPH055948Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7885590U priority Critical patent/JPH055948Y2/ja
Publication of JPH0437534U publication Critical patent/JPH0437534U/ja
Application granted granted Critical
Publication of JPH055948Y2 publication Critical patent/JPH055948Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係る低温ガス発生装置の説明
図、第2図は低温ガス発生システムの説明図であ
る。 1……冷却槽、2……冷媒液(エチルアルコー
ル)、3……放熱器、4……吸熱器、5……冷媒
液撹拌装置、6……液化窒素タンク、7……気化
器、9……液化窒素タンク、11……コントロー
ラ、12……冷媒液温度センサ、13……低温ガ
ス送出ライン。
FIG. 1 is an explanatory diagram of a low-temperature gas generation device according to the present invention, and FIG. 2 is an explanatory diagram of a low-temperature gas generation system. 1... Cooling tank, 2... Refrigerant liquid (ethyl alcohol), 3... Heat radiator, 4... Heat absorber, 5... Refrigerant liquid stirring device, 6... Liquid nitrogen tank, 7... Vaporizer, 9 ...Liquid nitrogen tank, 11...Controller, 12...Refrigerant liquid temperature sensor, 13...Low temperature gas delivery line.

Claims (1)

【実用新案登録請求の範囲】 1 冷却温度では凝固しない冷媒液を充填して成
る冷却槽と、 前記冷却槽内の冷媒液中に浸漬された被冷却ガ
スが通る吸熱器と、 同じように冷却槽内の冷媒液中に浸漬された冷
却用液体が通る放熱器と、 から成るIC寒冷テスト用低温ガスの発生装置。 2 冷媒液としてエチルアルコール、アセトン、
ヘキサンの中から一種選択された請求項1記載の
IC寒冷テスト用低温ガスの発生装置。 3 被冷却ガスがIC冷却テスト用に使用される
窒素ガスであるところの請求項1記載のIC寒冷
テスト用低温ガスの発生装置。 4 冷却用液体として液化窒素を用いる請求項1
記載のIC寒冷テスト用低温ガスの発生装置。
[Claims for Utility Model Registration] 1. A cooling tank filled with a refrigerant liquid that does not solidify at the cooling temperature, and a heat absorber through which a gas to be cooled immersed in the refrigerant liquid in the cooling tank is cooled in the same way. A low temperature gas generation device for an IC cold test, comprising: a radiator through which a cooling liquid immersed in a refrigerant liquid in a tank passes; 2 Ethyl alcohol, acetone,
2. The low-temperature gas generator for IC cold test according to claim 1, wherein the low-temperature gas generator is selected from hexane. 3. The low temperature gas generator for IC cooling test according to claim 1, wherein the gas to be cooled is nitrogen gas used for IC cooling test. 4 Claim 1 in which liquefied nitrogen is used as the cooling liquid
The low temperature gas generator for IC cold test described above.
JP7885590U 1990-07-25 1990-07-25 Expired - Lifetime JPH055948Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7885590U JPH055948Y2 (en) 1990-07-25 1990-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7885590U JPH055948Y2 (en) 1990-07-25 1990-07-25

Publications (2)

Publication Number Publication Date
JPH0437534U true JPH0437534U (en) 1992-03-30
JPH055948Y2 JPH055948Y2 (en) 1993-02-16

Family

ID=31622496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7885590U Expired - Lifetime JPH055948Y2 (en) 1990-07-25 1990-07-25

Country Status (1)

Country Link
JP (1) JPH055948Y2 (en)

Also Published As

Publication number Publication date
JPH055948Y2 (en) 1993-02-16

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