JPH0437534U - - Google Patents
Info
- Publication number
- JPH0437534U JPH0437534U JP7885590U JP7885590U JPH0437534U JP H0437534 U JPH0437534 U JP H0437534U JP 7885590 U JP7885590 U JP 7885590U JP 7885590 U JP7885590 U JP 7885590U JP H0437534 U JPH0437534 U JP H0437534U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- temperature gas
- low
- gas generator
- cooled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 239000003507 refrigerant Substances 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 claims description 2
- 235000019441 ethanol Nutrition 0.000 claims description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical group CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims 2
- 239000000110 cooling liquid Substances 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
第1図は本考案に係る低温ガス発生装置の説明
図、第2図は低温ガス発生システムの説明図であ
る。
1……冷却槽、2……冷媒液(エチルアルコー
ル)、3……放熱器、4……吸熱器、5……冷媒
液撹拌装置、6……液化窒素タンク、7……気化
器、9……液化窒素タンク、11……コントロー
ラ、12……冷媒液温度センサ、13……低温ガ
ス送出ライン。
FIG. 1 is an explanatory diagram of a low-temperature gas generation device according to the present invention, and FIG. 2 is an explanatory diagram of a low-temperature gas generation system. 1... Cooling tank, 2... Refrigerant liquid (ethyl alcohol), 3... Heat radiator, 4... Heat absorber, 5... Refrigerant liquid stirring device, 6... Liquid nitrogen tank, 7... Vaporizer, 9 ...Liquid nitrogen tank, 11...Controller, 12...Refrigerant liquid temperature sensor, 13...Low temperature gas delivery line.
Claims (1)
る冷却槽と、 前記冷却槽内の冷媒液中に浸漬された被冷却ガ
スが通る吸熱器と、 同じように冷却槽内の冷媒液中に浸漬された冷
却用液体が通る放熱器と、 から成るIC寒冷テスト用低温ガスの発生装置。 2 冷媒液としてエチルアルコール、アセトン、
ヘキサンの中から一種選択された請求項1記載の
IC寒冷テスト用低温ガスの発生装置。 3 被冷却ガスがIC冷却テスト用に使用される
窒素ガスであるところの請求項1記載のIC寒冷
テスト用低温ガスの発生装置。 4 冷却用液体として液化窒素を用いる請求項1
記載のIC寒冷テスト用低温ガスの発生装置。[Claims for Utility Model Registration] 1. A cooling tank filled with a refrigerant liquid that does not solidify at the cooling temperature, and a heat absorber through which a gas to be cooled immersed in the refrigerant liquid in the cooling tank is cooled in the same way. A low temperature gas generation device for an IC cold test, comprising: a radiator through which a cooling liquid immersed in a refrigerant liquid in a tank passes; 2 Ethyl alcohol, acetone,
2. The low-temperature gas generator for IC cold test according to claim 1, wherein the low-temperature gas generator is selected from hexane. 3. The low temperature gas generator for IC cooling test according to claim 1, wherein the gas to be cooled is nitrogen gas used for IC cooling test. 4 Claim 1 in which liquefied nitrogen is used as the cooling liquid
The low temperature gas generator for IC cold test described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7885590U JPH055948Y2 (en) | 1990-07-25 | 1990-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7885590U JPH055948Y2 (en) | 1990-07-25 | 1990-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0437534U true JPH0437534U (en) | 1992-03-30 |
| JPH055948Y2 JPH055948Y2 (en) | 1993-02-16 |
Family
ID=31622496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7885590U Expired - Lifetime JPH055948Y2 (en) | 1990-07-25 | 1990-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH055948Y2 (en) |
-
1990
- 1990-07-25 JP JP7885590U patent/JPH055948Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH055948Y2 (en) | 1993-02-16 |
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