JPH0438245Y2 - - Google Patents

Description

[Detailed description of the invention] <Technical field> The present invention relates to the measurement parameters of a surface profile measuring device. Conventionally, according to the JIS standard, parameters for roughness measurement were displayed as center line average roughness (R _a ), maximum height (Rmax). ) and ten-point average roughness (Rz), but the present invention relates to the calculation and display method RzDIN regarding the German standard (DIN4768) for _Rz . In other words, the roughness measurement parameters calculated based on the curve (center line) that matches the area of the raised surface and the recessed surface of the surface profile obtained along the tracing direction by the tracer are used to calculate the measurement interval L _n . Let 1/5 be the single measurement length e, and the single roughness between the highest peak and the lowest valley in each section of five consecutive single measurement lengths _e1 to _e5 , R _z1 , R _z2 , R _z3 , The _present invention relates to an arithmetic display method of a surface shape measuring device that outputs the average value R _z DIN=1/ ₅ (R _z1 +R _z2 +R _z3 +R _z4 +R _{z5) of R z4 and R z5} .

<Prior art> Figure 3 shows a conventionally used circuit for this purpose, which takes the amount of displacement due to the surface shape from the detector, stores the maximum amplitude value at a single measurement length _e1 in the memory circuit _M11 , Next, put the peak value in the range of _e2 into _M12 , sequentially put _e3 , _e4 and the maximum amplitude value into _M13 and _M14 , and finally put the value of _e5 into _M15 . That is, the single roughness R _z1 between the highest peak and lowest valley in each section of single measurement length _e1 to _e5 .
~R _z5 are stored sequentially by S _w11 ~S _w15 , respectively,
Finally, R _z1 + R _z2 + R _z3 + R _z4 + R _z5 is added using an adder, and then 1/5 (R _z1 + R _z2
The average roughness of R _z DIN was measured as +R _z3 +R _z4 +R _z5 ).

<Problems to be Solved> However, as is clear from Figure 3, the conventional circuit consisted of a maximum amplitude value detection circuit, a timing circuit, 6 switches, 5 sets of memory circuits, an adder, and a 1/5 attenuator. Therefore, the electronic circuit was complicated and the printed circuit board for the circuit was large, making the device large and expensive.

<Means for solving the problem> Therefore, in the present invention, as shown in Figure 2, the circuit consists of a maximum amplitude value detection circuit, a 1/5 attenuator, four switches, a timing circuit, and two sets of memory circuits to reduce the number of parts and improve the circuit. The size of the printed circuit board has also been reduced, making it possible to create an inexpensive system configuration.

<Embodiment> In FIG. 2, two memory circuits M ₁ and M ₂ are reset by a signal from a timing circuit to make the stored contents zero before starting measurement. Next, when measurement starts, the maximum amplitude value detection circuit measures the maximum amplitude value (peak and valley value) between _e1 , inputs it to the 1/5 attenuator circuit, and outputs the 1/5 signal R _z1. Make /5.
When S _w1 and S _w2 are closed, the signal R _z1 /5 passes through the adder and is stored in the memory circuit M ₁ . At this time, S _w2 is also closed, but since M ₂ is zero, the maximum amplitude value R _z1 /5 at _e1 is stored as is in M ₁ . The value of _M1 is
Transferred to _M2 , start transfer, open S _w3 and reset _M1 . Next, the measured value of _e1 is stored as R _z2 /5, which is 1/5 of the maximum amplitude value between _e2 .
The value R _z1 /5 is obtained by adding the value R _z1 /5 of M ₂ with the adder.
+R _z2 /5 is stored in M ₁ and transferred to M ₂ . Next, confirm the transfer, open S _w3 and transfer _M1 . Next, confirm the transfer, open _SW2 and reset _M1 .
In this way, the value of 1/5 of the maximum amplitude value of _e1 to _e5 is added sequentially, enters _M2 , and finally 1/5 (R _z1 + R _z2
+R _z3 +R _z4 +R _z5 ), close S _w4 and output it as the value of R _z DIN. In addition, the switches S _w1 , S _w2 ,
The opening/closing timing of S _w3 and S _w4 and the reset timing of memory circuits M ₁ and M ₂ are shown in FIG. This timing is based on a method of determining the times _e1 , _e2 , _e3 , . . . from the relative movement distance of the detector or the movement time of the measurement distance L.

<Effects> In the present invention, compared to the conventional one, the number of memory circuits is 2 compared to 5, and the number of switches is 4 compared to 6, so the overall configuration including the timing circuit is improved. It can be made easily and cheaply.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of the calculation contents of the roughness display standard _Rz DIN, Fig. 2 is a block diagram showing the configuration of the circuit of the present invention, Fig. 3 is a block diagram of the conventional circuit, and Fig. 4
The figure shows the timing in the circuit of the present invention. 1...Measurement workpiece, 2...Tracer stylus, 3
...Detection unit, 4...Memory circuit _M1 , 5...Memory circuit _M2 , 6...Memory circuit _M11 , 7...Memory circuit
M ₁₂ , 8...Memory circuit M ₁₃ , 9... Memory circuit M ₁₄ ,
10...Memory circuit _M15 , 11...Maximum amplitude value detection circuit, 12...1/5 attenuator, 13...Adder, 14...Timing circuit.

Claims (1)

[Claims for Utility Model Registration] A detector that outputs a surface shape signal indicating the amount of displacement of the surface shape of the object to be measured, and a length of 1/5 of the measurement section L _n based on the surface shape signal from the detector. For each I _el , I _e2 , ..., I _e5 , the maximum amplitude to detect the maximum amplitude value R _z1 , R _z2 , ..., R _z5 that indicates the difference between the highest peak and the lowest valley in each length section value detection circuit, and the maximum amplitude values R _z1 , R _z2 , ..., R _z5 detected by the maximum amplitude value detection circuit are each 1/5 the value.
A 1/5 attenuator that outputs R _z1 /5, R _z2 /5, ..., R _z5 /5, an adder circuit that adds two inputs, and a first memory that temporarily stores the added value of the adder circuit. a circuit _M1 , and a second memory circuit that stores the memory value of the first memory circuit _M1 .
The memory circuit M ₂ and the 1/5 value R _z1 /5 obtained from the 1/5 attenuator,
A first switch S _w1 that outputs R _z2 /5, ..., R _z5 /5 to the addition circuit, and a second switch that outputs the stored value of the second storage circuit M ₂ to another input of the addition circuit The switch S _w2 and the memory value of the first memory circuit _M1 are transferred to a second memory circuit.
a third switch S _w3 that outputs to M ₂ ; a fourth switch S _w4 that outputs the value stored in the second memory circuit M ₂ as a value indicating R _z DIN; and the first and second memory circuits M ₁ , M ₂ and the first, second, third, and fourth switches S _w1 to S _w4 , the control means controls the first storage circuit at the start of measurement.
The stored values of M ₁ and the second storage circuit M ₂ are reset to zero, and then the 1/5 attenuator is used to set the 1/5 value R _z1 /
5. Every time R _z2 /5, . . . , R _z5 /5 is obtained, the value of 1/5 is sequentially calculated through the adding circuit and stored in the second storage circuit _M2 . The first, second and third switches S _w1 to S _w3 are turned on/off as shown in FIG.
A surface roughness meter comprising: control means for controlling off and turning on the fourth switch S _w4 when the final 1/5 value R _z5 /5 is accumulated; Arithmetic circuit.