JPH0439480A - Double pressure-corresponding type load lock valve for vacuum device - Google Patents

Abstract

PURPOSE:To prevent the leakage by a differential pressure between both chambers and to reduce a sliding surface at valve opening/closing time so as to suppress generation of dusty grains by providing a valve in respective chamber sides, in a device or the like formed of many film forming chambers. CONSTITUTION:The first and second bodies 1, 2 are mounted opposed to each other and the first and second valves 3, 4 for opening/closing openings 1a, 2a are provided in the first and second film forming chambers 11, 12. The first and second arms 7, 8 are pivotally supported by the first and second shafts 5, 6 rotatably to the first and second bodies 1, 2, and the first and second valves 3, 4 are mounted by the first and second pivotally supporting shafts 9, 10 on a point end part of the arms 7, 8. The first body 1 is guided relating to the second body 2 by inserting a guide post 18 to a guide bush 17. In this way, a sliding surface can be sharply reduced, and the leakage can be suppressed while substantially suppressing generation of dusty grains.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to vacuum equipment used in semiconductor manufacturing equipment, in which multiple film forming chambers, etc. are connected, and clean vacuum chambers tailored to each application are created. This invention relates to a surface pressure compatible load rotary valve that makes it possible.

[Prior art]

A load rotor valve is used in an in-line device or the like consisting of a multi-chamber film forming chamber, and is a valve required when a film is formed in the film forming chamber (reaction chamber) and the product is transferred to the next process after completion.

When this valve is opened and closed, dust particles are generated, and when it is closed, leakage to other reaction chambers becomes a problem.

The structure of conventional load rotary valves is usually the fifth one.
A valve as shown in the figure is used.

That is, the first. Body 3 connected between second chambers 11 and 12
A cylinder 34 is attached to the body 33, and inside the body 33 there is a body 33 that communicates with the first and second chambers 11 and 12, respectively.
A valve 38 and a counter plate 39 for opening and closing openings 33a and 33b, and an O-ring 37. Leaf Springri 40. Ball bearing 41. A ball retainer 42 and a leaf spring stop 43 are provided, and these are attached to a piston rod 36 provided on a piston 35 of an air cylinder 34 (G).

When the pulp 38 is closed, the piston 35 of the air cylinder 34 is pressed to the left, and when the 7N/lube 38 is opened, the piston 35 and the piston rod 36 move to the right inside the cylinder 34. At this time, the ball retainer 42 moves to the right. Ball retainer 42 is valve 3
8 and move to the recess on the counter plate 39,
The force of the leaf spring 40 draws the valve 38 and the counter plate 39 away from the wall of the body 33. Thereafter, the nozzle valve 38 and the counter plate 39 move to the right together with the ball retainer 42 and stop at the end of the cylinder stroke, and the nozzle valve becomes open. The operation of the valve to the closed state is the reverse process to the above, and the valve is brought into the closed state.

[Problem to be solved by the invention]

In the conventional example described above, during the opening/closing operation, the rolling contact of the ball bearing 41 and the contact of the counter plate 39 with the wall surface of the body 33 cause dust particles to be generated.

Further, when the film forming chambers 11 and 12 are connected by a load rotor valve, the valve 38 is provided only on one side, which may cause leakage if there is a pressure difference between the two reaction chambers. Not only does the dust particles and leakage become factors that greatly affect the quality of film formation, but the conventional example also has a problem in that there are restrictions on the order of assembly, making it difficult to assemble and maintain.

The purpose of the present invention is to provide a valve on each side of each chamber in an apparatus consisting of a multi-chamber film forming chamber, to prevent leaks due to differential pressure between the compartments, and to reduce the sliding surface when opening and closing the valve, thereby reducing dust. The goal is to suppress the generation of particles.

[Means to solve the problem]

In order to solve the above-mentioned problem and achieve the above-mentioned object, the valve of the present invention has a first valve as shown in the first figure. The second chambers 11 and 12 each have a first chamber. Install the second body 1.2 facing each other,
1st. The first chamber communicates with the second chambers 11 and 12, respectively. The first one opens and closes the opening 1a = 2a of the second body 1.2.
A second valve 3.4 is provided and a first valve 3.4 is provided. The first body is rotatably attached to the second bodies 1 and 2, respectively. The second shaft 5.6 and the first shaft. A second arm 7.8 is pivotally supported, and this first arm 7.8 is pivotally supported. 2nd round 7,8
1. At the tip of each. The second valve 3.4 is connected to the first valve 3.4. It has a configuration in which it is attached by a second pivot shaft 9.10.

[For production]

When opening the first valve 3, when the first shaft 5 is rotated in one direction, the first arm 7 fixed to the first shaft 5 rotates in one direction, and a The first valve 3 attached by the first pivot shaft 9 rotates in one direction, and the first valve 3 is opened. Similarly, when the second shaft 6 is rotated in the other direction, the second arm 8 fixed to the second shaft 6 rotates in the other direction, and is attached to the tip of the second arm 8 by the second pivot shaft IO. The second valve 4 rotates in the other direction, and the second valve 4 is opened.

1st. When closing the second valve 3.4, the above operation is reversed and the first valve 3.4 is closed. The second valve 3.4 is closed.

Therefore, the sliding surface when opening and closing the valve is the first one. 2nd shaft 5
．． 6 and 1st. Since only the rotating parts of the second pivot shafts 9 and 10 are involved, the sliding surface can be significantly reduced compared to the conventional example. Rotate the second shaft 5.6 with sufficient force to rotate the first shaft 5.6. The first valve 3.4 is opened and closed by opening and closing the second valve 3.4. Even if there is a vacuum pressure difference between the second chambers 1 and 12, the occurrence of leakage can be suppressed, unlike the conventional example.

〔Example〕

The present invention will be explained in detail below with reference to the drawings.

FIG. 1 is a simplified sectional view showing the configuration of an embodiment of the valve of the present invention, in which 11 is a first chamber 1, for example, a first film forming chamber, and 12 is a second chamber 9, for example, a second film forming chamber (or a load rotor chamber). It is.

1st. The second film forming chambers 11 and 12 have the first film forming chambers 11 and 12, respectively. Second
The bodies 1 and 2 are mounted facing each other, and the first and second bodies are mounted facing each other. The first chamber communicates with the second film forming chambers 11 and 12, respectively. 2nd body 1
, 2 for opening and closing the openings 1a and 2a. A second valve 3.4 is provided.

1st. The second bodies 1.2 each have a rotatable first body.
The second shaft 5.6 and the first shaft. A second arm 7.8 is pivoted to this first arm. At the tip of the second arm 7.87, there is a first. The second valve 3.4 is the first valve. Second pivot axis 9.10
It is installed in

The first body 1 is provided with a guide bush 17, and the second body 1 is provided with a guide bush 17.
Guide post 1 supported by guide receiver 19 on body 2
8 is inserted into the guide bush 17 so that the first body 1 is guided with respect to the second body 2.

A push bolt 14 supported by a support portion 15 of the second body 2 via a bearing 16 is screwed into a nut 13 of the first body 1, and rotation of the push bolt 14 causes the second body 1, 2 to The configuration is such that the distance between them can be adjusted. 20～
24 is a sealing material, and 25 is a mounting bolt.

FIG. 2 is an explanatory diagram showing the configuration of a first example of the valve opening/closing mechanism according to the present invention.
A drive gear 27.0 is fixed to a gear shaft 28 via a drive gear 27. The driven gear 26 meshed with this and the first shaft 5 fixed thereto can be rotated in both directions, and the first valve 3 can be opened and closed. The same applies to the rotation of the second shaft 5, so that the second valve 4 can be opened and closed.

In this first example, the cylinder 29 does not protrude from the body 1, and the entire device can be made more compact than the conventional example.

FIG. 3 is an explanatory view showing the configuration of a second example of the valve opening/closing mechanism according to the present invention. This second example can be rotated in both directions by an electric motor or a hydraulic motor 31 having a first shaft 5 connected to the body 1. In addition, the first valve 3 is configured to be opened and closed, and the second shaft 6 is rotated in the same manner so that the second valve 4 can be opened and closed.

This second example has the advantage that the number of parts can be reduced compared to the conventional example, and the motor 31 does not protrude from the body, resulting in cost reduction and compactness.

FIG. 4 is an explanatory diagram showing the configuration of a third example of the valve opening/closing mechanism according to the present invention.
The first shaft 5 attached to the lever 32 can be rotated in both directions via the lever 32 and the first valve 3, and the first valve 3 can be opened and closed. The structure is such that two valves 4 can be opened and closed. In this third example as well, the above-mentioned first example. Similar to the second example, the device is more compact than the conventional example, and has a great effect on the effective use of the device's area.

In the configuration of the first embodiment described above, when the film forming operation is completed in the first film forming chamber 11, first, the first valve 3 is opened and the film forming product is transferred to the first film forming chamber 11. into the second body 1.2 (into the valve according to the invention). That is, when the first shaft 5 is rotated counterclockwise in FIG. 1, the first arm 7 fixed to the first shaft 5 is rotated counterclockwise, and the first The first valve 3 mounted on the pivot shaft 9 is rotated counterclockwise, and the first valve 3 is opened. This first
With the valve 3 open, the film-forming product is transferred from the first film-forming chamber 11 to the first film-forming chamber 11. Move into the second bodies 1 and 2. After that,
The first valve 3 is closed by performing an operation opposite to that described above.

Next, when the second shaft 6 is rotated clockwise, this second
The second arm 8 fixed to the shaft 6 rotates clockwise, and the second valve 4 attached to the tip of the second arm 8 with a second pivot shaft 10 rotates clockwise, causing the second valve 4 to rotate clockwise. 4 will be opened. With this second valve 4 open, the first valve 4. The film-forming product in the second body 1.2 is transferred to the second film-forming chamber 1.
Move within 2.

Thereafter, the second valve 4 is closed by performing an operation opposite to that described above. The film-formed product is further formed into a film in this second film-forming chamber 12 and then transferred to the next valve of the present invention.

Therefore, the sliding surface when opening and closing the valve is the first one. 2nd shaft 5
．． 6 and 1st. Since it is only the rotating part of the second pivot shaft 9.10, the sliding surface can be significantly reduced compared to the conventional example, and the generation of dust particles can be suppressed.

Also, 1st. Rotate the second shaft 5.6 with sufficient force to rotate the first shaft 5.6. By opening and closing the second valve 3.4, the first
．． Even if there is a vacuum pressure difference between the second film forming chambers 11 and 12, the occurrence of leakage can be suppressed, unlike the conventional example.

When attaching the valve of the present invention to a device, in the valve of the present invention, the first body 1 is guided by the guide post 18 with respect to the second body 2, and the push bolt 14 supported by the second body 2 is connected to the second body 2. 1 body 1 Natsu 13
, the first body 1 is guided relative to the second body 2 by the rotation operation of the push bolt 14.
Proximity and separation are now possible, and the first. Second film forming chamber 11, 12
Even if there is an error in the distance between the two, it can be dealt with by rotating the press-hole 14, which improves the ease of attachment and detachment to the device, as well as ease of assembly and maintenance.

〔Effect of the invention〕

As described above, according to the present invention, first. Each of the first and second chambers 1112 and 1112 has a first chamber. Install the second bodies 1 and 2 facing each other,
1st. The first chamber communicates with the second chambers 11 and 12, respectively. The first body opens and closes the openings 1a and 2a of the second body 1.2.
A second valve 3.4 is provided and a first valve 3.4 is provided. The second body 1.2 is rotatably connected to the first body 1.2, respectively. The second shaft 5.6 and the first shaft. A second arm 7.8 is pivotally supported, and this first arm 7.8 is pivotally supported. 2nd arm 7.8
1. At the tip of each. The second valve 3.4 is connected to the first valve 3.4. Since it is attached by the second pivot shaft 910, the sliding surface when opening and closing the valve is the first. The second shaft 5.6 and the first shaft 5.6. Since it is only the rotating part of the second pivot shaft 9.10, the sliding surface can be significantly reduced compared to the conventional example, and the generation of dust particles can be significantly suppressed. Also, 1st. The second shaft 5.6 is rotated and the first shaft 5.6 is rotated. The first valve 3.4 is opened and closed by opening and closing the second valve 3.4. Even if there is a vacuum pressure difference between the second chambers 11 and 12, it is not only possible to suppress the occurrence of leaks to a much greater extent than in the conventional example, but also the first and second chambers connected by the surface pressure compatible load lock valve according to the present invention. This has the advantage that the chambers 11 and 12 can be easily brought to a degree of vacuum suitable for each purpose.

[Brief explanation of the drawing]

FIG. 1 is a simplified cross-sectional view showing the configuration of an embodiment of the valve of the present invention, FIG. 2 is an explanatory diagram showing the configuration of a first example of the valve opening/closing mechanism of the present invention, and FIG. 3 is the valve opening/closing mechanism of the present invention. FIG. 4 is an explanatory diagram showing the configuration of a third example of the valve opening/closing mechanism according to the present invention, and FIG.
The figure is a simplified sectional view showing the configuration of an example of a conventional valve. 1.2... 1st. 2nd body, 3.4...
... 1st ° 2nd valve, 5.6 ... 1st. Second
Shaft, 78...1st. 2nd arm, 9.1
0...1st. 2nd pivot shaft, 11...1st chamber (first film forming chamber), 12...2nd chamber (second film forming chamber or load lock chamber), 13... ... Nut, 14 ... Push bolt, 15 ... Support part, 16 ... Bearing, 17 ... Guide bush, 18 ...・・Guide post, 19・・・・
・Guide reception. Notebook illustration

Claims (2)

[Claims] (1) The first and second bodies (1, 2) are installed facing each other in the first and second chambers (11, 12), respectively, and the first and second bodies (1, 2) are attached to the first and second chambers (11, 12), respectively, and a 1. Second body (
First and second valves (3, 4) for opening and closing the openings (1a, 2a) of the bodies (1, 2) are provided, and the first and second shafts are rotatably attached to the first and second bodies (1, 2), respectively. The first and second arms (7, 8) are pivotally supported by (5, 6), and the first and second valves (
3, 4) are attached using first and second pivot shafts (9, 10).A dual-pressure compatible load lock valve for vacuum equipment. (2) The first and second bodies (1, 2) are the guide posts (1
8) A dual-pressure compatible load lock valve for a vacuum device according to claim 1, further comprising means for adjusting the distance between the two.