JPH0441608U - - Google Patents

Description

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a sensor head of a thickness measuring device according to an embodiment of this invention. Figure 2 is the first
FIG. 2 is a schematic block diagram showing the electrical configuration of the sensor head shown in the figure. FIG. 3 is a schematic block diagram of a controller connected to the sensor head shown in FIG. 2. FIG. 4 is a layout diagram of an optical displacement meter that is placed when attempting to measure the thickness of an object to be measured using a conventional optical displacement meter. In the figure, 1 is a sensor head, 2 and 3 are head members, 4 is a connecting member, 5 is a cable, 6 and 13 are semiconductor lasers, 7 and 14 are drive circuits, 8 and 15 are PSDs, 9, 10, 16, and 17 19 is an amplifier circuit, 19 is a casing, 21 is a controller, 22 is an oscillation circuit, 23 and 24 are displacement calculation circuits, and 25 is an addition circuit.

Claims (1)

[Claims for Utility Model Registration] A device for measuring the thickness of an object to be measured, comprising first and second members that are provided facing each other with a predetermined distance apart and are integrally formed. a casing provided in the first and second members of the casing, respectively, and when a measurement target object is interposed between the first and second members, opposing surfaces of the measurement target object are connected to each other; a light projecting means for respectively projecting measurement light onto corresponding locations; and a light projecting means for projecting measurement light onto corresponding locations; A thickness measuring device, comprising: a light receiving means provided on a member, and measuring the thickness of an object to be measured based on outputs of the light receiving means provided on the first and second members.