JPH0446537U - - Google Patents
Info
- Publication number
- JPH0446537U JPH0446537U JP8748490U JP8748490U JPH0446537U JP H0446537 U JPH0446537 U JP H0446537U JP 8748490 U JP8748490 U JP 8748490U JP 8748490 U JP8748490 U JP 8748490U JP H0446537 U JPH0446537 U JP H0446537U
- Authority
- JP
- Japan
- Prior art keywords
- marks
- mask alignment
- photolithography
- row
- intervals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例によるマスク合わせ
を示す説明図、第２図は従来広く採られてきたマ
スク合わせの方法の一例を示す説明図である。
１……ウエハ、２……マスク、３，４……マー
ク、５……レーザービームをスキヤンする方向を
示す線。なお各図中同一符号は同一または相当す
るものを示す。
FIG. 1 is an explanatory diagram showing mask alignment according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram showing an example of a conventionally widely used mask alignment method. 1... Wafer, 2... Mask, 3, 4... Mark, 5... Line indicating the direction in which the laser beam is scanned. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
使用するマスクに配設されたマスクアライメント
マークで、縦に２列に各列ごとに複数個ずつで左
右対称形状に配設されたマークのうち、左右１個
ずつで構成する各組のマーク間の間隔がそれぞれ
異なることを特徴とするマスクアライメントマー
ク。 Mask alignment marks are placed on masks used in photolithography for semiconductor wafer processes, and are arranged symmetrically in two vertical rows with multiple marks in each row, one on each side. A mask alignment mark characterized in that the intervals between each set of marks made up of are different from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8748490U JPH0446537U (en) | 1990-08-23 | 1990-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8748490U JPH0446537U (en) | 1990-08-23 | 1990-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0446537U true JPH0446537U (en) | 1992-04-21 |
Family
ID=31819864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8748490U Pending JPH0446537U (en) | 1990-08-23 | 1990-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446537U (en) |
-
1990
- 1990-08-23 JP JP8748490U patent/JPH0446537U/ja active Pending
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