JPH044759U - - Google Patents
Info
- Publication number
- JPH044759U JPH044759U JP4471590U JP4471590U JPH044759U JP H044759 U JPH044759 U JP H044759U JP 4471590 U JP4471590 U JP 4471590U JP 4471590 U JP4471590 U JP 4471590U JP H044759 U JPH044759 U JP H044759U
- Authority
- JP
- Japan
- Prior art keywords
- scribe line
- wafer
- view
- chips
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Description
第１図は本考案の一実施例を示すウエハーの平
面図、第２図は部分拡大平面図、第３図および第
４図は第２図のスクライブライン部分の断面図、
第５図は他の実施例によるスクライブライン部分
の断面図、第６図は従来のウエハーの平面図、第
７図は部分拡大平面図、第８図および第９図は第
７図のスクライブライン部分の断面図である。
Ｗ……ウエハー、１……ＩＣチツプ、２……Ｉ
Ｃチツプ、１１，１２……スクライブライン、１
３，１４……スクライブライン、ｄ……ダイシン
グによる切断部分。
FIG. 1 is a plan view of a wafer showing an embodiment of the present invention, FIG. 2 is a partially enlarged plan view, and FIGS. 3 and 4 are cross-sectional views of the scribe line portion of FIG.
FIG. 5 is a sectional view of a scribe line portion according to another embodiment, FIG. 6 is a plan view of a conventional wafer, FIG. 7 is a partially enlarged plan view, and FIGS. 8 and 9 are scribe lines of FIG. 7. FIG. W...Wafer, 1...IC chip, 2...I
C chip, 1 1 , 1 2 ... scribe line, 1
3 , 1 4 ...Scribe line, d...Cut portion by dicing.
Claims (1)
て、段部を備えたスクライブラインが形成されて
いることを特徴とするウエハー。 A wafer on which a plurality of IC chips are formed, characterized in that a scribe line with a stepped portion is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4471590U JPH044759U (en) | 1990-04-25 | 1990-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4471590U JPH044759U (en) | 1990-04-25 | 1990-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044759U true JPH044759U (en) | 1992-01-16 |
Family
ID=31558262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4471590U Pending JPH044759U (en) | 1990-04-25 | 1990-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044759U (en) |
-
1990
- 1990-04-25 JP JP4471590U patent/JPH044759U/ja active Pending