JPH0448870Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The invention is applicable to optical lenses, prisms, transparent substrates for photomask blanks, photomask blanks,
The present invention relates to an apparatus for cleaning objects to be cleaned, such as silicon wafers and large glass substrates for liquid crystal display devices.

[Conventional technology]

As shown in FIG. 4, a conventional cleaning device includes a cleaning tank 2 containing a cleaning liquid 1 containing a surfactant, an overflow liquid storage section 3 disposed at the upper part of the cleaning tank 2, and an overflow liquid piping 4;
A recovery tank 5 containing cleaning liquid 1 and a recovery tank 5
It is equipped with a lid 6 that closes the upper opening, a pump 7, a pipe 8, a filter 9, an ultrasonic generator 10, a discharge pipe 11, and a drain valve 12.

In the above-mentioned cleaning device, ultrasonic waves (not shown) are generated by the ultrasonic generator 10 in the cleaning tank 2 filled with the cleaning liquid 1 to clean the object A immersed in the cleaning liquid 1. do. By the way, by cleaning the object A, the cleaning liquid 1 in the cleaning tank 2 is
Since the cleaning liquid 1 becomes contaminated, in order to clean the cleaning liquid 1, the cleaning liquid 1 in the recovery tank 5 is sent out by the pump 7 through the pipe 8 from the recovery tank 5, and is cleaned by passing it through the filter 9.
Supplied into the cleaning tank 2. The cleaning liquid 1 overflows from the cleaning tank 2 in excess of the predetermined stored liquid amount.
is collected in the overflow liquid storage section 3 and collected into the recovery tank 5 through the overflow liquid piping 4.

When the entire amount of cleaning liquid 1 in the cleaning tank 2 is to be recovered into the recovery tank 5, the drain valve 12 is opened and the cleaning liquid 1 is recovered through the discharge pipe 11.

[Problem that the invention attempts to solve]

In conventional cleaning equipment, as mentioned above,
When the cleaning liquid 1 overflowing from the cleaning tank 2 is collected in the overflow liquid storage part 3 and collected into the recovery tank 5 through the overflow liquid piping 4, and when the entire amount of the cleaning liquid 1 is recovered into the recovery tank 5. Since the drain valve 12 is opened and the waste is collected through the discharge pipe 11, there are problems as described below.

That is, cleaning liquid 1 containing a surfactant
has the property of generating bubbles (so-called "foaming property") when the air around the cleaning liquid 1 is taken into the cleaning liquid 1. Therefore, when the cleaning liquid 1 overflowing from the cleaning tank 2 flows down inside the overflow liquid pipe 4 into which air has entered, and the water outlet 4a of the overflow liquid pipe 4 (see Fig. 4).
When the cleaning liquid 1 drops from the water to the surface of the cleaning liquid 1 in the recovery tank 5, the cleaning liquid 1 generates a large amount of bubbles, and as a result, the recovery tank 5 is filled with a large amount of bubbles generated from the recovered cleaning liquid 1. Resulting in. Similarly, when the cleaning liquid 1 in the cleaning tank 2 passes through the above-mentioned discharge pipe 11 and falls from the water outlet 11a (see Fig. 4) to the surface of the cleaning liquid 1 in the recovery tank 5. Also, cleaning solution 1 generates a large amount of bubbles,
As a result, the recovery tank 5 is filled with a large amount of foam. As described above, when the recovery tank 5 is filled with a large amount of bubbles generated from the recovered cleaning liquid 1, the opening at the top of the recovery tank 5 is closed by the lid 6 described above. in spite of,
A large amount of foam gushes out from the gap between the recovery tank 5 and the lid 6. Then, a large amount of bubbles ejected comes into contact with electrical components (not shown) that make up the pump 7 and the ultrasonic generator 10, causing a short circuit in the electrical system, and causing the pump 7 and the ultrasonic generator 10 to become damaged. Things that can cause a malfunction may occur.

Note that, in order to prevent bubbles from gushing out from the gap between the recovery tank 5 and the lid 6, it is conceivable to completely seal the recovery tank 5 with the lid 6. However, it is actually very difficult to completely seal the recovery tank 5 with the lid 6 to prevent bubbles from blowing out. Furthermore, when the degree of sealing of the recovery tank 5 by the lid 6 increases, the cleaning liquid 1 flows into the recovery tank 5 through the overflow liquid pipe 4 or the discharge pipe 11, and the air pressure inside the sealed recovery tank 5 increases. Since the cleaning liquid 1 becomes higher, it becomes difficult for the cleaning liquid 1 to flow down inside the overflow liquid pipe 4. Furthermore, when the cleaning liquid 1 is collected into the recovery tank 5 through the discharge pipe 11, the cleaning liquid 1
The recovery speed may be significantly reduced, causing inconvenience.

The present invention has been made in view of the above circumstances, and provides a cleaning device that can prevent foaming of the cleaning liquid even when using a foaming cleaning liquid and clean the object to be cleaned. The purpose is to

[Means for solving problems]

The present invention has been made to achieve the above-mentioned object, and includes a cleaning tank that contains a cleaning liquid, a container that stores the cleaning liquid that flows out in excess of a predetermined amount of liquid contained in the cleaning tank, and a container that contains the cleaning liquid. and a control means for regulating the outflow of the cleaning liquid from the container, and the opening/closing drive of the liquid level switch and the regulating operation of the control means are linked. This is a cleaning device characterized by:

[Effect]

According to the cleaning device of the present invention, the cleaning liquid is prevented from taking in surrounding air into the cleaning liquid, thereby preventing the cleaning liquid from foaming.

〔Example〕

As shown in FIG. 1, the cleaning device according to the embodiment of the present invention includes a cleaning tank 14 containing a cleaning liquid 13;
An overflow liquid storage section 15 disposed at the upper part of the cleaning tank 14 , a container 16 that stores cleaning liquid that flows out in excess of a predetermined amount of storage liquid in the cleaning tank 14 , and a container 1 .
6, a float switch 17 as a liquid level switch, and an overflow liquid pipe 18,
Provided in the middle of the overflow liquid pipe 18,
Solenoid valve 19 as a means for regulating the outflow of cleaning liquid
, a solenoid valve control mechanism 20 for controlling the opening/closing operation of the solenoid valve 19 , a recovery tank 21 containing the cleaning liquid 13 , and an upper opening of the recovery tank 21 to prevent dirt and dust from entering the recovery tank 21 . A lid 22 for preventing intrusion, a pump 23,
Piping 24, filter 25, and ultrasonic generator 26
, a discharge pipe 27 , and a drain valve 28 . The float switch 17 and the solenoid valve control mechanism 20 are connected by a wiring 29, and the solenoid valve control mechanism 20 and the solenoid valve 19 are connected by a wiring 3.
0. In addition, the water outlet 18a of the overflow liquid pipe 18 and the discharge pipe 27
The water outlet 27a is contained in the cleaning liquid 13 contained in the recovery tank 21.

The cleaning liquid 13 is a neutral detergent containing a surfactant (for example, NCW-601 manufactured by Wako Pure Chemical Industries, Ltd.),
The solenoid valve 19 is an automatic valve (for example, MBF7 manufactured by TLV Co., Ltd.) that opens and closes in response to a predetermined drive signal.
It has a function of opening and closing a valve (not shown) constituting the electromagnetic valve 19 to allow the cleaning liquid 13 to flow or not to flow at all. Also, a cleaning tank 14, an overflow liquid storage section 15, a container 16, an overflow liquid discharge pipe 18, a recovery tank 21, a lid 2
2. The piping 24 and the discharge piping 27 are made of stainless steel. Further, when the inside of the container 16 is filled with the cleaning liquid 13 to a predetermined liquid level, the float 17a of the float switch 17 (see FIGS. 1 and 2) rises to a predetermined position and floats. The slave switch 17 is driven open (ON state) and generates an ON signal. On the other hand, when the inside of the container 16 is not filled with the cleaning liquid 13 to a predetermined liquid level, the float 17a descends and floats. The slave switch 17 is driven closed (OFF state) and generates an OFF signal.

Next, a process of cleaning an object to be cleaned using the cleaning apparatus of this example will be explained.

First, the object to be cleaned 31 (see FIG. 1) is immersed in the cleaning tank 14 filled with the cleaning liquid 13, and the ultrasonic wave generator 26 generates ultrasonic waves (not shown) in the cleaning liquid 13. ) is propagated to clean the object 31 to be cleaned.

The cleaning tank 1 is cleaned by cleaning the object 31 to be cleaned.
The cleaning liquid 13 in the recovery tank 21 becomes contaminated, so in order to clean the cleaning liquid 13, the cleaning liquid 1 in the recovery tank 21 is passed from the recovery tank 21 to the pipe 24.
3 is sent out by the pump 23 and passed through the filter 25.
is cleaned by passing through the cleaning tank 14.
supply within. The cleaning liquid 13 that has overflowed from the cleaning tank 14 in excess of a predetermined stored liquid amount flows into the container 16 while being collected in the overflow liquid storage section 15 (see FIGS. 1 and 2).
At this time, the cleaning liquid 1 reaches a predetermined level in the container 16.
3, the float switch 17 is driven open and generates an ON signal, which is transmitted through the wiring 29 to the solenoid valve control mechanism 2.
0. The solenoid valve control mechanism 20 is connected to the solenoid valve 19 through wiring 30 (not shown).
Since the opening signal is transmitted, the solenoid valve 19 opens, and the cleaning liquid 13 in the container 16 flows down into the recovery tank 21 through the overflow liquid pipe 18. Then, the liquid level of the cleaning liquid 13 in the container 16 becomes lower than the above-described predetermined liquid level, and the float switch 17 is driven to close and generates an OFF signal.
The OFF signal is sent to the solenoid valve control mechanism 2 through the wiring 29.
0. Then, the solenoid valve control mechanism 20 transmits a signal to close the solenoid valve 19 through the wiring 30, so the solenoid valve 19 closes and the container 1
The cleaning liquid 13 in 6 is connected to the overflow liquid pipe 18
does not flow down into the recovery tank 21 through the Next, since the cleaning liquid 13 overflowing from the cleaning tank 14 continues to flow into the container 16, the inside of the container 16 is again filled with the cleaning liquid 13 up to the above-mentioned predetermined liquid level. Then, the float switch 17 is driven to open again, and thereafter, the float switch 17 is driven to close or open in the same manner as described above, and the container 1
The liquid level of the cleaning liquid 13 in the cleaning liquid 13 falls within the range from the above-mentioned predetermined liquid level to the liquid level when the float switch 17 is driven to close. The liquid level when the float switch 17 is driven to close is set higher than the water intake port 18b of the overflow liquid pipe 18, so that the cleaning liquid 13 is always contained in the container 16. Therefore, when the cleaning liquid 13 in the container 16 flows down through the overflow liquid pipe 18, air flows from the water intake port 18b into the overflow liquid pipe 18.
The cleaning liquid 13 flowing down inside the overflow liquid pipe 18 is prevented from taking in air and foaming. Further, since the water outlet 18a of the overflow liquid pipe 18 is located in the cleaning liquid 13 stored in the recovery tank 21, the cleaning liquid 13 flowing out from the water outlet 18a is prevented from taking in air and foaming. Ru.

In addition, the cleaning liquid 13 in the cleaning tank 14 is discharged from the discharge pipe 2.
7 into the recovery tank 21,
Since the water outlet 27a of the discharge pipe 27 is located in the cleaning liquid 13 contained in the recovery tank 21,
The cleaning liquid 13 flowing out from the water outlet 27a is also prevented from taking in air and foaming.

As described above, according to the cleaning device of this embodiment,
The cleaning liquid 13 flowing down in the overflow liquid pipe 18 foams, and the overflow liquid pipe 1
The cleaning liquid 13 flowing out from the water outlet 18a of the drain pipe 27 is prevented from foaming, and the cleaning liquid 13 flowing out from the water outlet 27a of the discharge pipe 27 is prevented from foaming. It never fills up. Therefore, bubbles will not blow out from the recovery tank 21 and cause failures in the pump 23, the ultrasonic generator 26, etc. Also, the cleaning liquid 1 cleaned through the filter 25
3 is supplied into the cleaning tank 14, and the object 31 to be cleaned is cleaned by propagating ultrasonic waves to the cleaning liquid 13 in the cleaning tank 14 by the ultrasonic generator 26, so the object 31 to be cleaned is cleaned. can do.

The present invention is not limited to the embodiments described above.

In the above embodiment, overflow liquid pipe 1
Although a solenoid valve 19 was provided in the middle of the pipe 8, a second overflow liquid pipe 32 communicating with the overflow liquid pipe 18 was attached as shown in FIG.
A manual valve 33 may be provided in the middle of the second overflow liquid pipe 32. Note that this manual valve 33 is
The degree of opening and closing of the valve can be controlled manually, and the flow rate of the cleaning liquid 13 passing through the manual valve 33 can be regulated. As described above, by providing the manual valve 33 and opening the valve to the necessary extent, the cleaning liquid 13 can be constantly flowed down at a predetermined flow rate from inside the container 16 to the recovery tank 21. The frequency of opening/closing driving can be reduced. Therefore, the life of the float switch 17 and the electromagnetic valve 19 that opens and closes in conjunction with the opening and closing drive of the float switch 17 can be extended. Also,
A solenoid valve 19 is installed in the middle of the overflow liquid pipe 18.
Instead, a flow rate adjustment valve that opens and closes the valve while constantly circulating the cleaning liquid 13 at a predetermined flow rate may be provided, and the flow rate adjustment valve and the manual valve 33 described above may be arranged in parallel. In short, it is sufficient that a control means for regulating the outflow of the cleaning liquid 13 is provided in the middle of the overflow liquid piping 18.

Moreover, instead of the electromagnetic valve 19, a control means for regulating the outflow of the cleaning liquid 13, such as an air valve or a motor valve, may be used.

In addition, as a liquid level switch, a pair of electrodes facing each other is arranged in the container 16 instead of the float switch 17, and when the inside of the container 16 is filled with the cleaning liquid 13 to a predetermined liquid level, conduction between the electrodes is established. It is also possible to use a device that is driven to open and driven to close when the liquid level becomes less than a predetermined level.

As the cleaning liquid, in addition to those exemplified in the above examples, for example, Cicaclean manufactured by Kanto Kagaku Co., Ltd.
A cleaning liquid containing a surfactant such as TMK-6 may be used, or a cleaning liquid such as isopropyl alcohol, an acid or alkaline solution, or pure water may be used.

In the above embodiment, the overflow liquid storage section 15 was provided at the top of the cleaning tank 14, but the cleaning tank 14
The overflow liquid storage section 15 may be omitted if the entire amount of the cleaning liquid 13 overflowing from the container 13 flows directly into the container 16.

In addition, the cleaning liquid 1 overflowing from the cleaning tank 14
It is preferable that the height between the liquid level of No. 3 and the liquid level of the cleaning liquid 13 that has flowed into the overflow liquid storage portion 15 and the container 16 be as small as possible. This is because the cleaning liquid 13 overflowing from the cleaning tank 14 is prevented from taking in surrounding air and foaming.

In the above embodiment, the upper opening of the recovery tank 21 was closed with the lid 22 in order to prevent dirt and dust from entering the recovery tank 21. Therefore, the lid 22 is not essential for the cleaning device in the above embodiment. Further, the ultrasonic generator 26 may be omitted unless consideration is given to a reduction in the cleaning effect. In addition, the cleaning tank 14, overflow liquid storage section 15, container 16, overflow liquid piping 18, recovery tank 21, lid 22, piping 24, and discharge piping 27 are manufactured from metals other than stainless steel, vinyl chloride, fluororesin, etc. You can.

[Effect of idea]

According to the cleaning device of the present invention, even when a foaming cleaning liquid is used, foaming of the cleaning liquid can be prevented.
The object to be cleaned can be reliably cleaned.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a cleaning device according to an embodiment of the present invention, FIG. 2 is a perspective view showing a part of the cleaning device according to the same embodiment, and FIG. 3 is a diagram showing a cleaning device according to a modification of the embodiment. and FIG. 4 are diagrams showing a conventional cleaning device. 13...Cleaning liquid, 14...Cleaning tank, 16...Container, 17...Float switch, 18...Piping for overflow liquid, 19...Solenoid valve, 20...Solenoid valve control mechanism, 29, 30... wiring.

Claims (1)

[Scope of utility model registration request] a cleaning tank that stores a cleaning liquid; a container that stores the cleaning liquid that flows out in excess of a predetermined amount of liquid stored in the cleaning tank; a liquid level switch disposed in the container; and an outflow of the cleaning liquid from the container. What is claimed is: 1. A cleaning device comprising: a control means for regulating the liquid level switch, and the opening/closing drive of the liquid level switch and the regulation operation of the control means are linked.