JPH04500126A - 単数もしくは複数の測定点で迅速に信号のスペクトル分析を行うための方法と装置 - Google Patents
単数もしくは複数の測定点で迅速に信号のスペクトル分析を行うための方法と装置Info
- Publication number
- JPH04500126A JPH04500126A JP2507893A JP50789390A JPH04500126A JP H04500126 A JPH04500126 A JP H04500126A JP 2507893 A JP2507893 A JP 2507893A JP 50789390 A JP50789390 A JP 50789390A JP H04500126 A JPH04500126 A JP H04500126A
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- signal
- spectrum analyzer
- modulation
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 74
- 238000005259 measurement Methods 0.000 title claims description 57
- 238000010183 spectrum analysis Methods 0.000 title claims description 17
- 238000001228 spectrum Methods 0.000 claims description 76
- 238000009826 distribution Methods 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 10
- 230000003993 interaction Effects 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 7
- 239000011163 secondary particle Substances 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000000977 initiatory effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000011164 primary particle Substances 0.000 claims description 2
- 229940036310 program Drugs 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 30
- 230000003595 spectral effect Effects 0.000 description 20
- 238000000691 measurement method Methods 0.000 description 16
- 238000013507 mapping Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 241000270281 Coluber constrictor Species 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 238000012216 screening Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/16—Spectrum analysis; Fourier analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3917411.5 | 1989-05-29 | ||
| DE3917411A DE3917411A1 (de) | 1989-05-29 | 1989-05-29 | Verfahren und anordnung zur schnellen spektralanalyse eines signals an einem oder mehreren messpunkten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04500126A true JPH04500126A (ja) | 1992-01-09 |
Family
ID=6381583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2507893A Pending JPH04500126A (ja) | 1989-05-29 | 1990-05-28 | 単数もしくは複数の測定点で迅速に信号のスペクトル分析を行うための方法と装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5260648A (de) |
| EP (1) | EP0428663B1 (de) |
| JP (1) | JPH04500126A (de) |
| AT (1) | ATE93064T1 (de) |
| DE (2) | DE3917411A1 (de) |
| DK (1) | DK0428663T3 (de) |
| ES (1) | ES2044593T3 (de) |
| WO (1) | WO1990015340A1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109202A (ja) * | 2007-10-26 | 2009-05-21 | National Institute Of Information & Communication Technology | 電界、電圧または磁界用測定プローブ |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5162723A (en) * | 1991-02-11 | 1992-11-10 | Hewlett-Packard Company | Sampling signal analyzer |
| DE4439971A1 (de) * | 1993-11-09 | 1995-05-24 | Advantest Corp | Fehleranalysesystem für integrierte Schaltkreise |
| DE69528481T2 (de) * | 1994-01-12 | 2003-06-18 | Advantest Corp., Tokio/Tokyo | Kontaktlose Wellensignalbeobachtungsvorrichtung |
| EP0702236A3 (de) * | 1994-09-19 | 1996-06-05 | Hamamatsu Photonics Kk | Spannungsmesssystem |
| US5581194A (en) * | 1995-06-07 | 1996-12-03 | Advanced Micro Devices, Inc. | Method and apparatus for passive optical characterization of semiconductor substrates subjected to high energy (MEV) ion implantation using high-injection surface photovoltage |
| JPH1062502A (ja) * | 1996-08-21 | 1998-03-06 | Mitsubishi Electric Corp | 被測定デバイスの故障解析方法、故障解析装置及び故障解析システム |
| US6425132B1 (en) | 1998-04-06 | 2002-07-23 | Wavetek Corporation | Ingress testing of CATV system utilizing remote selection of CATV node |
| JP4891508B2 (ja) * | 1999-11-23 | 2012-03-07 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | ウォーターマーク埋込み及び検出 |
| DE10130687A1 (de) * | 2001-06-26 | 2003-01-02 | Rohde & Schwarz | Meßsystem mit einem Referenzsignal zwischen einem Signalgenerator und einem Signalanalysator |
| JP4344197B2 (ja) * | 2003-08-26 | 2009-10-14 | パナソニック株式会社 | 絶縁膜測定装置、絶縁膜測定方法及び絶縁膜評価装置 |
| JP2006040991A (ja) * | 2004-07-23 | 2006-02-09 | Hitachi Ltd | 半導体装置の評価方法、および製造方法 |
| US7116092B2 (en) * | 2004-07-28 | 2006-10-03 | International Business Machines Corporation | Integrated spectrum analyzer circuits and methods for providing on-chip diagnostics |
| CN101300498B (zh) * | 2005-11-04 | 2011-04-20 | 特克特朗尼克公司 | 利用实时频谱分析仪的瞬时信号的宽带宽频谱分析 |
| US20090300534A1 (en) * | 2008-05-30 | 2009-12-03 | Trilithic, Inc. | Apparatus and method for displaying network status |
| US20100064078A1 (en) * | 2008-08-15 | 2010-03-11 | Powell Thomas J | Wireless communication between testing instrument and network |
| KR100987583B1 (ko) * | 2008-10-27 | 2010-10-12 | 포항공과대학교 산학협력단 | 전광 효과를 이용한 빔 진단 장치 및 방법 |
| JP6379018B2 (ja) * | 2014-11-20 | 2018-08-22 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および検査方法 |
| CN110582833B (zh) * | 2017-12-27 | 2022-07-01 | 日商光电魂股份有限公司 | 试样检查装置及试样检查方法 |
| US12431327B2 (en) * | 2022-04-01 | 2025-09-30 | Intel Corporation | Stroboscopic electron-beam signal image mapping |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3660763A (en) * | 1970-01-08 | 1972-05-02 | Benjamin Parzen | Wide band frequency extender for a frequency comparator |
| US3643126A (en) * | 1970-03-04 | 1972-02-15 | Hewlett Packard Co | Frequency-measuring system utilizing means for momentarily stopping the variable frequency generator |
| IT1071425B (it) * | 1976-08-31 | 1985-04-10 | Rai Radiotelevisione Italiana | Procedimento ed apparecchiatura per la misura dell ampiezza e del ritardo di gruppo sulle singole bande laterali..dai morsetti di ingresso a quelli di uscita di un trasmettitore modulato in ampiezza |
| DE2814049A1 (de) * | 1978-03-31 | 1979-10-18 | Siemens Ag | Verfahren zur beruehrungslosen messung des potentialverlaufs in einem elektronischen bauelement und anordnung zur durchfuehrung des verfahrens |
| DE2813948A1 (de) * | 1978-03-31 | 1979-10-11 | Siemens Ag | Verfahren zur elektronischen abbildung der potentialverteilung in einem elektronischen bauelement |
| JPS5764171A (en) * | 1980-10-08 | 1982-04-19 | Advantest Corp | Spectrum analyzer |
| DE3482769D1 (de) * | 1984-05-30 | 1990-08-23 | Siemens Ag | Verfahren und vorrichtung zur detektion und abbildung eines messpunkts, der eine spannung wenigstens einer bestimmten frequenz fuehrt. |
| EP0226913A3 (de) * | 1985-12-17 | 1988-10-05 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur Lokalisierung und/oder Abbildung der ein bestimmtes zeitabhängiges Signal führenden Punkte einer Probe |
| DE3617044A1 (de) * | 1986-05-21 | 1987-11-26 | Siemens Ag | Messverarbeitungsanordnung fuer korpuskularstrahlung |
| US4728884A (en) * | 1986-10-09 | 1988-03-01 | Tektronix, Inc. | Infinite dynamic range phase detector |
| DE3887403D1 (de) * | 1987-08-06 | 1994-03-10 | Siemens Ag | Spannungsmessung mit einer Elektronensonde ohne externes Triggersignal. |
| DE3866079D1 (de) * | 1987-09-30 | 1991-12-12 | Siemens Ag | Automatische frequenznachfuehrung bei korpuskularstrahlmessverfahren unter anwendung eines modulierten primaerstrahls. |
-
1989
- 1989-05-29 DE DE3917411A patent/DE3917411A1/de not_active Withdrawn
-
1990
- 1990-05-28 DK DK90908190.3T patent/DK0428663T3/da active
- 1990-05-28 JP JP2507893A patent/JPH04500126A/ja active Pending
- 1990-05-28 US US07/646,785 patent/US5260648A/en not_active Expired - Fee Related
- 1990-05-28 ES ES90908190T patent/ES2044593T3/es not_active Expired - Lifetime
- 1990-05-28 AT AT90908190T patent/ATE93064T1/de not_active IP Right Cessation
- 1990-05-28 EP EP90908190A patent/EP0428663B1/de not_active Expired - Lifetime
- 1990-05-28 DE DE9090908190T patent/DE59002300D1/de not_active Expired - Fee Related
- 1990-05-28 WO PCT/DE1990/000391 patent/WO1990015340A1/de not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109202A (ja) * | 2007-10-26 | 2009-05-21 | National Institute Of Information & Communication Technology | 電界、電圧または磁界用測定プローブ |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1990015340A1 (de) | 1990-12-13 |
| US5260648A (en) | 1993-11-09 |
| ES2044593T3 (es) | 1994-01-01 |
| EP0428663A1 (de) | 1991-05-29 |
| DE3917411A1 (de) | 1990-12-06 |
| ATE93064T1 (de) | 1993-08-15 |
| DK0428663T3 (da) | 1993-12-13 |
| DE59002300D1 (de) | 1993-09-16 |
| EP0428663B1 (de) | 1993-08-11 |
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