JPH0452695Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of the Invention] The present invention relates to a laser measuring device characterized by a frame structure in which an optical system is arranged.

[Summary of the idea]

The laser measurement device according to the present invention has a frame consisting of a side plate, and a top plate and a bottom plate provided above and below the side plate, and a rod with a low coefficient of linear expansion is fixed to each side plate via a clamp. , a plurality of flat plate carriers are provided on the rod. Optical equipment for the light emitting and receiving sections is mounted on top of each carrier, and a laser light source is mounted on the top plate. Since the optical system is mounted on one frame in this way, the entire laser measurement device can be made compact, and changes in the positional relationship between the optical components of the light emitting and receiving optical system can be minimized regardless of changes in environmental temperature. can.

[Prior art and its problems]

(Prior Art) A conventional laser measuring device, for example, a two-dimensional laser speed measuring device, as shown in FIG. is located. That is, a color beam splitter 3 is arranged opposite to the emission surface of the laser oscillator 2, and the laser beam split by the color beam splitter 3 is further split by a beam splitter 4. An optical fiber 6 is connected to the beam splitter 4 via an optical fiber connector 5. The color beam splitter 3 and the beam splitter 4 constitute a light projection optical system.

Scattered light from the measurement area is incident on the optical fiber 6. The optical fiber 6 is also connected to a photoreceiver 7 via an optical fiber connector 5. The photoreceiver 7 converts the scattered light from the measurement area into an electrical signal.

(Problem to be solved by the invention) However, according to such a conventional laser measuring device, the laser oscillator as the light source, the spectrometer for the light emitting optical system, the light receiver for the light receiving optical system, etc. are arranged on the table. Since the laser measuring device is configured as follows, there is a problem in that it requires a large table and a setting place.

Another drawback is that it is necessary to precisely adjust the optical axis of the optical equipment used to separate the laser beam and guide it to the measurement area, and adjusting the optical axis is complicated and requires a lot of effort. Additionally, the position of optical equipment placed on the table may shift due to temperature changes, and the optical axis of the laser beam changes, making it difficult to improve the reliability of the optical system.

[Technical issues]

The present invention has been made in view of the problems of conventional laser measurement devices, and aims to make the laser measurement device compact so that the optical axis of the optical equipment does not change due to changes in ambient temperature. is a technical issue.

[Structure and effect of the idea]

(Means for solving the problems) The present invention is a laser measurement device characterized by a frame structure for arranging an optical system, and is shown in Figs.
As shown in the figure, the laser beam splitter includes a frame having at least two side panels and a top panel and a bottom panel respectively provided above and below the side panels, a laser light source mounted on the top panel of the frame, and a first laser beam splitter fixed to each side panel of the frame.
The optical system is characterized by comprising a first clamp, a second clamp, a rod having a low linear expansion coefficient fixed to the first clamp and guided parallel to each side plate by the second clamp, and a plurality of flat carriers fixed to the rod at predetermined intervals and on which optical equipment is arranged.

(Function) According to the laser measuring device according to the present invention, the laser light source is mounted on the top plate of the frame. Further, a clamp is fixed to the side plate of the frame, a rod with a low coefficient of linear expansion is fixed to the clamp, and a carrier is fixed to the rod at a predetermined interval. Since the optical equipment is placed on the carrier, the position of the optical system can be easily adjusted by moving the carrier.

(Effects of the invention) This invention uses a frame with two or more side plates attached to the main body of the laser measurement device.
Even if a large laser oscillator such as an Ar ion laser, which is a laser light source, is mounted on the top plate of the frame, the frame will not twist, and there is no fear that the optical axis of the light emitting/receiving optical system attached to the side plate of the frame will be deviated. Since the optical system is mounted on one frame in this way, the laser measuring device can be configured to be compact.

Further, a rod having a low coefficient of linear expansion is fixed to the side plate of the frame via a clamp, and optical equipment of the light emitting/receiving section is attached to a carrier on the rod.
Therefore, even if the ambient temperature changes, the distance between the optical devices hardly changes, and the optical axis does not become misaligned. Furthermore, the optical axis can be easily adjusted from the side of the case.

[Explanation of Examples]

FIG. 2a is an elevational view of a two-dimensional laser velocity measuring device according to an embodiment of the present invention, FIG. 2b is a front view thereof, and FIG. 2c is a side view thereof. The two-dimensional laser velocity measuring device according to this embodiment has a rectangular, cylindrical case 11. The case 11 has a front panel 12 for performing various operations, detachable left and right side panels 13 and 14, and a back panel 15.

Inside the case 11, there is an elevation view shown in Figure 1a, and an elevation view shown in Figure 1b.
As shown in the front view in FIG. 1C and in the enlarged sectional view taken along line A-A in FIG. It is stored. As shown in FIGS. 2a to 2c, a laser oscillator 21 such as a cylindrical, elongated, and heavy Ar ion laser is mounted on the top plate 18, for example. Levelers 22a to 22d are provided on the lower surface of the laser oscillator 21 to adjust its levelness. Further, an optical axis adjuster 23 is attached to the front part of the top plate 18 at right angles to the top plate 18. The optical axis adjuster 23 adjusts the optical axis given to the frame 20. Levelers 24a to 24d are provided under the bottom plate 19, and the frame 2
0 horizontality is adjusted.

Light projecting sections 25a and 25b for projecting green and blue laser beams, respectively, are attached to the right side plate 17 in series with an interval as shown in FIG. 1a. As shown in FIG. 1A, between the left and right side plates 16 and 17 of the frame 20, an electric signal processing section 27 for processing electric signals given from the light receiver 26 is provided.

As shown in the cross-sectional view taken along the line B--B in FIGS. 3 and 4, a flat clamp 28a is fixed to the right side plate 17 with a spacer 29 interposed therebetween and a screw 30. Similarly, clamps 28b and 28c having the same shape as the clamp 28a are also attached to the right side plate 1 as shown in FIG.
It is fixed at 7. Here, the clamps 28a, 28
b, 28c are two cylindrical metal rods 31a, 28c, as shown in cross-sectional views in FIGS.
It has a through hole that penetrates through 31b. The rods 31a and 31b include other frame materials such as Fe,
A member having a low linear expansion coefficient of 2 to 3 × 10 ^-6 deg ^-1 or less, which is sufficiently lower than the expansion coefficient of Al, 10 × 10 ^-6 deg ^-1 and 23 × 10 ^-6 deg, for example, 0.6
×10 ^-6 deg ^-1 super invar alloy (Fe-Ni
alloy) is used. Here, the clamp 28a is fixed by tightening the rods 31a, 31b with screws 30, and the clamps 28b, 28c are fixed even if the relative position with the clamp 28a changes slightly due to thermal expansion of the right side plate 17. Rod 31a, 31b
This is to guide the lines so that they are parallel to each other.
The clamp 28a is a first clamp that fixes the rods 31a and 31b, and the clamps 28b and 28
C is a second clamp that guides the rods 31a and 31b. Carriers 32a, 32b, 32c, and 32d are held by rods 31a and 31b. The carriers 32a and 32b are C- in FIG.
As shown in the cross-sectional view taken along line C, it is fixed so as not to come into direct contact with the right side plate 17. Also carrier 32c, 3
2d is guided by rods 32a and 32b,
It is installed so that it can slide slightly from side to side. A color beam splitter 33 is attached to the carrier 32a. color beam splitter 3
3 separates the laser beam given from the optical axis adjuster 23 into green and blue. Also, the carriers 32b to 32d are provided with color beam splitters 33.
It holds the optical equipment of the light projecting section 25a that emits the green laser beam separated by the light beam. Also, a carrier 3 is installed at a predetermined interval between the rods 31a and 31b.
2e is fixed, and carriers 32f and 32g are held slidably in the same manner as carriers 32c and 32d. Carrier 32e~32
g holds the optical equipment of the light projecting section 25b for emitting the blue laser beam separated by the color beam splitter 33. Here, among the carriers 32b to 32d and 32e to 32g, in which green and blue optical instruments are arranged in a dispersed manner, only the leftmost carriers 32b and 32e are fixed to the rods 31a and 31b. This is due to the following reasons. That is, by making the other carriers 32c and 32d slidable on the rods 31a and 31b, their positions can be easily adjusted from the side, and after the position adjustment, each rod 31a,
31b. Similarly, the positions of the carriers 32f and 32g on which the blue optical equipment is placed are adjusted in the left-right direction, and after adjustment, they are fixed to the rods 31a and 31b. In this way, the optical system can be easily adjusted from the side of the device. After adjustment, carriers 32b, 32c, 32d and carriers 32e, 32f, 3 are connected by rods 31a, 31b with low linear expansion coefficients.
Since the relative position with respect to 2g is determined, the temperature dependence of the distance between the optical instruments can be reduced.

Further, as shown in FIG. 1c, two rods 34a and 34b with low linear expansion coefficients are attached to the left side plate 16, and carriers 35b and carriers 35a and 35c (not shown) are fixed to the rods 34a and 34b. . The optical equipment of the light receiving section 26 is attached to the carriers 35a to 35c.

Next, the light projecting optical system held on the carriers 32b to 32d will be explained with reference to FIG.
A green laser beam is applied from the color beam splitter 33 to the beam compressor 36. The beam compressor 36 narrows the diameter of the green laser beam and adjusts the parallelism, and supplies the laser beam to the beam splitter 37. The beam splitter 37 splits the green laser beam from the beam compressor 36, and sends the laser beams to the respective split cells 3.
8a, 38b. Bragg cell 38a, 3
8b shifts the frequency of the first and second laser beams split by the beam splitter 37, and supplies the respective laser beams to optical fiber connectors 39a and 39b. The optical fiber connectors 39a and 39b are optical fibers 40a and 40b.
It connects.

Here, the beam compressor 36 and the beam splitter 37 are fixed to the carrier 32b, the bracket cells 38a and 38b are fixed to the carrier 32c, and the optical fiber connectors 39a and 39b are fixed to the carrier 32d. These carriers 32b to 32d are connected to low line expansion rods 31a and 31b.
Since it is fixed on the top, it is possible to minimize the deviation of the relative position and optical axis even if the temperature of the surrounding environment changes.

Light projecting unit 2 mounted on carriers 32e to 32g
5b, carriers 35a to 35c, etc., the distance between each optical device and the deviation of the optical axis can be similarly minimized. Further, by removing the side panels 13 and 14 of the case 11 and changing the mounting position of the carrier, the relative position and optical axis can be easily adjusted from the side.

In this example, a two-dimensional laser velocity measuring device was explained that splits Ar ion laser light into two spectra of green and blue, but it also splits Ar ion laser light into three spectra of green, blue and violet. Needless to say, the present invention can be applied to a three-dimensional laser speed measuring device using a He-Ne laser beam, a one-dimensional laser speed measuring device using a He-Ne laser beam, and various measuring devices using these laser light sources.

Further, in this embodiment, the laser beam is transmitted to the measurement area using an optical fiber, but instead, the laser beam may be transmitted using an optical device composed of a lens or the like.

[Brief explanation of the drawing]

FIG. 1a is an elevational view of a frame of a two-dimensional laser velocity measuring device according to an embodiment of the laser measuring device of the present invention, FIG. 1b is a front view thereof, and FIG. 1c is its A.
- An enlarged cross-sectional view along line A, Figure 2a is an elevational view of this two-dimensional laser speed measuring device, Figure 2b is its front view,
Fig. 2c is a longitudinal sectional view of the rod, Fig. 3 is a side view showing the rod and carrier in detail, Fig. 4 is a sectional view taken along the line B-B, Fig. 5 is a sectional view taken along the line C-C, and Fig. 6 is a sectional view taken along the line C-C. Diagram a
6 is a front view showing the carrier and optical equipment mounted on the carrier, FIG. 6b is a side view thereof, and FIG. 7 is a layout diagram showing an example of a conventional laser measuring device. 1...Table, 2, 21...Laser oscillator,
3,23...Color beam splitter, 4,37
...Beam splitter, 5, 39a, 39b...
Optical fiber connector, 6, 40a, 40b...Optical fiber, 7... Light receiver, 11... Case, 16
...Left side board, 17...Right side board, 18...Top board, 1
9... Bottom plate, 20... Frame, 25a, 25b
...Light emitter, 26... Light receiver, 27... Electric signal processing section, 31a, 31b, 34a, 34b... Rod, 32a to 32g, 35a to 35f... Carrier, 28a to 28c... Clamp, 36 ...Beam compressor, 38a, 38b... Bragg cell.

Claims (1)

[Claims for Utility Model Registration] (1) A frame having at least two side plates and a top plate and a bottom plate provided above and below the side plates, respectively; a laser light source mounted on the top plate of the frame; and the frame. The first one fixed to each side plate of
a second clamp; a rod having a low coefficient of linear expansion fixed to the first clamp and guided parallel to each side plate by the second clamp; and a rod having a predetermined spacing between the rods. a plurality of flat plate carriers fixed apart from each other and having optical instruments disposed thereon;
A laser measurement device comprising: (2) The laser measurement device according to claim 1, wherein the rods are two rods fixed in parallel to each of the side plates.