JPH0454200Y2 - - Google Patents

Info

Publication number
JPH0454200Y2
JPH0454200Y2 JP1984196908U JP19690884U JPH0454200Y2 JP H0454200 Y2 JPH0454200 Y2 JP H0454200Y2 JP 1984196908 U JP1984196908 U JP 1984196908U JP 19690884 U JP19690884 U JP 19690884U JP H0454200 Y2 JPH0454200 Y2 JP H0454200Y2
Authority
JP
Japan
Prior art keywords
processing chamber
plasma processing
plasma
cleaning
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984196908U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116741U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984196908U priority Critical patent/JPH0454200Y2/ja
Publication of JPS61116741U publication Critical patent/JPS61116741U/ja
Application granted granted Critical
Publication of JPH0454200Y2 publication Critical patent/JPH0454200Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Of Particles Using Liquids (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP1984196908U 1984-12-28 1984-12-28 Expired JPH0454200Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984196908U JPH0454200Y2 (2) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984196908U JPH0454200Y2 (2) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61116741U JPS61116741U (2) 1986-07-23
JPH0454200Y2 true JPH0454200Y2 (2) 1992-12-18

Family

ID=30754839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984196908U Expired JPH0454200Y2 (2) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0454200Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108886866B (zh) * 2016-03-22 2021-04-27 皇家飞利浦有限公司 用于处理表面的冷等离子体设备

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153073A (2) * 1974-05-31 1975-12-09

Also Published As

Publication number Publication date
JPS61116741U (2) 1986-07-23

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