JPH0454852B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a clean room that can be easily and quickly constructed inside an existing building.

(Conventional technology) In a conventional clean room, a machine room is separately provided adjacent to the airtight room, an air conditioner is installed in this machine room, and, for example, when the airflow is a vertical flow type, the ceiling and the grid floor are installed separately. It was connected to an air conditioner through a duct to circulate the air in the airtight room.

(Problems to be solved by the invention) In the conventional example, the construction is complicated because it requires a large number of work items and labor, such as installing equipment for air conditioners, installing piping and ducts, etc. There is a problem that construction cannot be carried out, and the space becomes larger due to the space required for the machine room, resulting in an increase in scale.

By the way, in various industries, the cleanliness level required for clean rooms varies from high class to low class. For example, clean rooms in advanced technology industries that handle semiconductor assembly, microorganisms, and bacteria require a high level of cleanliness, such as class 1, whereas industries that handle dust-free laundry, food packaging, etc. require a level of cleanliness of around class 10,000. The high level of cleanliness required in high-tech industries is not necessarily required. In clean rooms in special fields where high cleanliness is required, the emphasis is on improving performance, so it is unavoidable to use conventional examples with the above problems, but for general fields where low cleanliness is sufficient. , the conventional example is not compatible. Furthermore, in recent years, there have been expectations for the development of clean rooms that can be constructed inexpensively and in a small space in a short period of time.

An object of the present invention is to provide a clean room that can be easily constructed in a short period of time, at low cost, and in a small space.

(Means for Solving the Problems) In the clean room of the present invention, a plurality of gate-shaped frames 5 are arranged side by side in a predetermined direction at intervals on the floor surface 9 of the building. This frame functions as the main structural member of the clean room. Between the side parts 5a and 5a of adjacent frames 5,
Air conditioning units A1 and A2 are installed between the air conditioning units A1 and A2, and a control unit B for controlling the operation of the air conditioning units is installed between the other sides. One air conditioning unit A or one control unit B is installed between one side, and there is a one-to-one correspondence between the sides and the units. When a plurality of air conditioning units are provided, it is desirable that one air conditioning unit be provided with heat exchangers 8e and 8f. The term "between all the sides and inside the side" except between the sides where the air conditioning units A1 and A2 are located refers to the wall panel 1.
It is covered with 3. The inside of the outer part of the frame located on the outside is covered with a wall panel 13. wall panel 1
3 and air conditioning units A1 and A2 constitute the inner wall of the airtight chamber 1. The upper part of the airtight room 1 is covered with a ceiling plate 24, and this ceiling plate is supported by supporting means 6, 7, and 25 on the horizontal part 5C of the frame. The inside of the airtight chamber 1 is sealed by sealing means 26, 27, and 29.
The air conditioning units A1 and A2 are equipped with a thin exterior casing 8, and a suction port 8a ₁ is provided at the lower part of the indoor side of this casing, and an air outlet 8b ₁ equipped with a high-performance filter 8j is provided at the upper part. A blower 8h is provided so that airflow from the blower can be blown out to the air outlet. When the air conditioning unit is equipped with heat exchangers 8e and 8f, the heat exchangers are installed on the suction port _8a1 side in the casing 8, and the blower 8
h is located on the air outlet _8b1 side. The control unit B has control equipment built into a thin exterior casing 12.

(Function) The air in the airtight room 1 is supplied to the air conditioning units A1 and A2.
The air enters the casing 8 through the suction port _8a1 , becomes a blowout airflow by the blower 8h, is guided by the guide 8i, passes through the filter 8j at the blowout port, and is blown into the airtight chamber ₁ again from the blowout port 8b1. The dust contained in the air is filtered by a high-performance filter 8j to become clean air and blown into the room.

(Example) In Figs. 1 to 4, the clean room comprises an airtight room 1 and an auxiliary room 2 adjacent to the outside of the airtight room 1. The chamber 2b has a rear chamber 2c on the left side. Each room 1, 2 can be entered and exited through a door 4 provided in a partition wall 3.

In the airtight room 1, three gate-shaped frames 5
They are arranged in parallel in the depth direction (vertical direction in Figure 2) with an interval of 1000 mm, and this frame is the main structural member of the airtight chamber.

As shown in FIGS. 5 to 7, each gate-shaped frame 5 has mouth-shaped side frames 5a and 5b constituting the side parts and a horizontal part 5.
Three mouth-shaped horizontal frames 5c ₁ , 5c ₂ , 5 forming c
c ₃ , the span (distance between opposing side frames 5a and 5b) is 7000 mm, and the height is
It is 3000m. Among the horizontal frames 5c ₁ , 5c ₂ , 5c ₃ ,
Both ends of the horizontal frame 5c ₁ located in the center are connected to one end of the horizontal frames 5c ₂ and 5c ₃ located on both sides, and the connecting plate 5d,
5d, angles 5e, 5e, and bolts 5f. The other ends of the horizontal frames 5c ₂ and 5c ₃ on both sides are fixed with bolts 5h to angles 5g and 5g fixed to the inside of the upper ends of the side frames 5a and 5b, and their outer surfaces are fixed to the side frames. A certain connecting plate 5i,
5i and fixed to the connecting plate with bolts 5h. Each horizontal part 5c of each frame 5 is connected by a long support member 6 (FIGS. 18 and 19) made of channel material located on the lower surface, and the horizontal part and the long support member are connected with a clip (not shown). interconnected.
The long support member 6 has a bar 7 with an M-shaped cross section on its lower surface.
(Figure 1) is supported.

In addition, as shown in FIGS. 1 to 4, among the spaces (between side frames) partitioned by the side frames 5a and 5a, 5b, and 5b of adjacent frames 5, there is a space between the side frames on the right side of FIG. The first air conditioning unit A1 is incorporated, and the first
A second air conditioning unit A2 is installed between the side frames 5b on the left side of the figure. Between the first air conditioning unit A1 and the side frame 5a on the same side, both air conditioning units A1 and A2 are installed.
A control unit B is incorporated for controlling the operation of the system. The control unit B is adjacent to the first air conditioning unit A1 with the side frame 5a of the frame in between, and is located opposite to the second air conditioning unit A2.

As shown in FIGS. 8 and 9, the first air conditioning unit A1 includes an exterior casing 8 having a height of about 2730 mm, a width of 995 mm, and a thickness of 250 mm, and glass wool is pasted on the inner surface of the casing. The front surface of the casing 8 (left side in FIG. 9) is covered with a lower front plate 8a and an upper front plate 8b, and each front plate is fixed with bolts 8c. An inlet 8a ₁ is provided at the bottom of the lower front plate 8a, and an outlet 8b ₁ is provided at the upper front plate 8b.
A coarse dust filter 8d is installed in the casing 8 adjacent to the back of the suction port _8a1 .
A cooling coil 8e is attached to the back of this filter, an electric heater 8f is provided above the coil, and a humidifier 8g is provided above and to the side of the heater. Furthermore, a blower 8h is attached above the electric heater 8f, and a guide vane 8i is provided close to the blower cylinder _8h1 of this blower.
The airflow from the blower 8h is rectified by this guide vane and guided to the air outlet _8b1 . Blower 8h
The blower casing is made thin and the blades are set large and driven by a low-speed rotating motor to suppress noise generation during operation. Air outlet 8
b The back of ₁ has HEPA (High Effciency)
Penetration Air) filter 8j is installed. Work such as replacing the filter 8d and repairing the blower 8h is performed by removing the lower front plate 8a of the casing 8, and replacing the high-performance filter 8j is performed by removing the upper front plate 8b. The installation state of the casing 8 will be explained. The bottom surface of the casing 8 is attached to the floor surface 9 with an anchor member (not shown).
(FIG. 4), and the side portion of the casing is fixed to the side frame 5a of the frame 5 by means of a fixing plate 10 and bolts 11, as shown in FIG.

Further, as shown in FIG. 11, the second air conditioning unit A2 is substantially the same as the first air conditioning unit A1 in its main parts, but the heat exchangers 8e and 8f and the humidifier 8g that the first air conditioning unit A1 has are different from each other. Not equipped. Note that the reference numerals indicating the constituent parts of the second air conditioning unit A2 are made the same for the parts corresponding to those of the first air conditioning unit A1. The method of mounting the second air conditioning unit A2 is also the same as that of the first air conditioning unit A1.

Control unit B is shown in FIGS. 1 and 2 and 12 and 1.
As shown in Fig. 3, the casing 12 is approximately the same size as the casing 8 of the air conditioning units A1, A2, and is connected to the blower 8h, heat exchanger 8e, heat exchanger 8e,
8f and the air shower chamber 2a are electrically controlled. The installation condition of control unit B is also the same as that of air conditioning units A1 and A2, and the side part of casing 12 is attached to fixing plate 10 and bolts 11 as shown in FIG.
It is fixed to the side frame 5a of the frame 5 by.
A plate 12a projects from the front of the casing 12, and a back cover 12b is attached to the back so that it can be opened and closed. Inspection of the number of devices, etc. is performed by removing the back cover 12b.

The inner wall of the airtight room 1 is composed of a wall panel 13 and the front surfaces of the air conditioning units A1 and A2, as shown in FIGS. 1-4.

The structure of the inner walls on both the left and right sides in FIG. 1 of the airtight chamber 1 will be explained. Wall panel 1 is installed between all side frames except between the side frames of frame 5 where air conditioning units A1 and A2 are located.
It is covered by 3. As shown in FIG. 10 and FIGS. 13 to 17, the wall panel 13 consists of a decorative steel plate 13a and a plaster board 13b attached to the entire back surface of the steel plate. It is reinforced with a reinforcing frame 13c made of channel steel. Corresponding to both side frames of each frame 5, posts 14 standing up on the floor surface 9 are located in front of the side frames. The post 14 is made of a square pipe,
A holding fitting 15 (FIGS. 15 and 16) is attached to the lower end, and the post is fixed on the floor by fixing this fitting to the floor 9 with bolts 16. A wall panel 13 is assembled between each post.
Side reinforcing frames 13c ₁ attached to both sides of the wall panel 13 hold the post 14 from both sides, thereby stably holding it at the side of the wall panel. In addition, the lower part of the wall panel 13
As shown in FIGS. 4, 15, and 17, it is supported on a support member 20 that also serves as a base and is fixed with a nut 19 to a support bolt 18 that stands upright on a seat plate 17 installed on the floor 9. Two support bolts 18 correspond to one wall panel 13. The receiving member 20 is made of channel steel and is attached horizontally by support bolts 18, and the upper part of the receiving member is attached to the wall panel 13.
The lower reinforcing frame _13c2 is received in a fitted state (Fig. 17). To adjust the height of the wall panel 13, use Nut 1.
This is done by turning 9 to move the level of the receiving member 20 up and down. Further, the upper part of the wall panel 13 is supported by a long holding member 21 having a groove-shaped cross section, as shown in FIGS. 4 and 18.

In addition, as shown in Fig. 2 and Fig. 19, the airtight chamber 1
Of the wall panels covering the outer surface of the
The method of supporting the wall panel constituting the inner wall on the right side of FIG. 9 is substantially the same as that of the wall panel on the air conditioning unit A1 side. The left wall panel 13 is the spare room 2
The airtight room 1 and the preliminary room 2 are combined with the wall panel 22 of
It constitutes a partition wall 3 that separates the wall panel 2
The structure of wall panel 2 is substantially the same as that of wall panel 13, as shown in FIGS. 19-22. The wall panels 13 and 22 fit together via reinforcing frames 13c and 22c, and the reinforcing frames 13c ₁ and 22 on the sides of both panels fit together.
c ₁ holds a post 14 that is fixed upright on the floor surface 9 . The method of fixing the post 14 to the floor surface 9 is substantially the same as the method of fixing the post described above (FIG. 16). The lower portions of the panels 13, 22 are supported by fitting a lower reinforcing frame _13c1 onto a base receiving member 20 attached to a bolt 18, as shown in FIG. 22c ₂ is the lower reinforcing frame. The level of the receiving member 20 can be adjusted by operating the nut 19. The upper parts of the panels 13 and 22 are held by a holding member 23 having substantially the same structure as the holding member 21 described above (FIG. 18).

Further, the ceiling plate 24 of the airtight room 1 is made of a glass wool plate. As shown in FIG. 1 and FIGS. 18 and 19, a holding bar 25 for holding the ceiling plate 24 is supported by a bar 7 having an M-shaped cross section and suspended from a long support member 6. As shown in FIG.

Furthermore, the method for sealing the airtight chamber 1 is as follows. That is, the first air conditioning unit A1 and the wall panel 1
3, the gap between the side surface of the casing 8 and the post 14 is sealed by filling the front surface of the backup material with an elastic sealing material 27. As shown in FIG. The gap between the second air conditioning unit A2 and the wall panel 13 is sealed in a similar manner. The gaps between the joints of the wall panels 13 are sealed by placing a backup material 26 and an elastic sealant 27 in the gaps between adjacent panels, as shown in FIGS. 13, 14 and 21. Further, the corner portions of the airtight room 1, for example, the windowed wall panel 13A (FIG. 1) and the wall panel 13
The gap at the intersection with the wall panel can be sealed by disposing a backup material 26 and an elastic sealing material 27 between the side surface of the wall panel and the front surface of the side end of the wall panel, as shown in FIG. There is. 28 is a cover plate. The other corners are sealed in substantially the same manner.

In addition, the method of sealing the gap between the floor surface 9 and the lower part of the inner wall is as shown in FIGS. The outer periphery of the inner wall is adhered to the lower surface of the inner wall to seal the gap. The outer periphery of the sheet 29 also serves as a baseboard. The outer periphery of the ceiling plate 24 is also sealed with an elastic sealant 27 as shown in FIGS. 18 and 19.

Note that the wall 31 having the entrance door 30 of the preliminary room 2
has the same structure as the partition wall 3 described above, and the other walls have substantially the same structure as the outer wall of the airtight chamber 1 facing the partition wall.

Next, the assembly of the clean room will be explained.

First, three frames 5 are installed on the floor surface 9 at equal intervals, and the horizontal parts 5c of the frames are connected by a long support member 6. Next, as shown in FIG. 2, the posts 14 are set up at equal intervals along each side frame 5a and 5b of the frame 5, and between the opposing side frames 5a and 5b of the outermost frame. The posts are placed upright at equal intervals, and the lower ends of the posts are fixed to the floor surface 9 with bolts 16.
Fixed to. Thereafter, the first air conditioning unit A1 and the control unit B are assembled between the predetermined side frames on one side frame 5a side, and the control unit B is installed on the other side frame 5b side.
A second air conditioning unit A2 is installed between the side frames facing each other. At this time, the air conditioning unit A1 and the control unit B are not placed next to each other, but are always positioned with the side frame 5a in between.

Then, support bolts 1 are mounted on the floor surface 9 between the posts 14.
8 and the receiving member 20, and after setting the wall panel 13 is assembled between the posts, the lower part of the panel is placed on the receiving member, the side reinforcing frame _13c1 is placed on both sides of the post, and the upper part of the panel is attached to the holding member 21, Supported by 23. After that, the ceiling board 24 is stretched, a sealing sheet 29 is spread over the entire surface of the floor surface 9, the outer periphery of the sheet is glued to the lower part of the inner wall, and the inside of the airtight room is sealed using a backup material 26 and an elastic sealing material 27. do. The preliminary chamber 2 is assembled in parallel with the airtight chamber 1.

Next, the effect will be explained.

When the control unit B is operated and the blower 8h, heat exchangers 8e, 8f, and humidifier 8g of the first air conditioning unit A1 operate the blower 8h of the second air conditioning unit A2, the air in the airtight chamber 1 is From the suction port _8a1 of the casing 8 of the air conditioning unit A1, the airflow coil 8e passes through the filter 8d as shown by the arrow in FIG.
The air passes through the electric heater 8f, enters the blower 8h, becomes a blowout air stream, rises by the guide bar 8i, passes through the HEPA filter 8j, becomes clean air, and flows horizontally into the room from the blowout port _8b1 . is blown out. The air is cooled by a cooling coil 8e and relaxed by an electric heater 8f.

At the same time, the indoor air is supplied to the second air conditioning unit A2.
is sucked into the casing 8 from the suction port 8a ₁ as shown by the arrow in FIG.
The air is cleaned at the air outlet 8b1 and then blown horizontally into the room again from the air outlet _8b1 .

The airflow distribution in the airtight chamber of the air blown out from the second air conditioning unit A2 is shown in FIG. 24, and the dust concentration distribution is shown in FIG. 25, respectively. 32 is a desk placed in the room. It can be seen that the airflow is stagnant on the indoor air conditioning unit A1 side. In FIG. 25, a circle 33 represents dust, and the longer the radius, the larger the dust. It can be seen that large particles of dust are floating near the dust source.

The cleanliness inside the airtight room 1 is set to 1500 at each point on the floor.
The results of measurement at three levels of mm, 1000 mm and 500 mm are shown in FIGS. 26 and 27. Figure 26 shows the case where one air conditioning unit is operated.
Figure 27 shows the case where two units are operated. In both figures, the cleanliness was measured at 35 locations in the room, the measurement points are identified by O marks, each location is numbered from 1 to 35, and the cleanliness of the odd numbered locations is indicated.

First, FIG. 26 will be explained. In this diagram,
It shows the cleanliness at each measurement point when only air conditioning unit A1 is operated. FIG. 26(i) is a measurement taken at a level of 1500 mm above the floor, and the cleanliness is, for example, class 760 at measurement point 1, class 1100 at measurement point 25, and the average value is class 1190. In Figure 26(ii), 1000 above the floor
The average value of cleanliness is class 960, measured at mm level. In Figure 26(iii), 500 above the floor
The average value of cleanliness is class 770, measured at mm level. Comparing the cleanliness at measurement point 25, the highest level of cleanliness was at class 260 at 500mm above the floor level, followed by class 10 at the 1000mm level.
70, the lowest at 1500mm level is class 1
It is 100.

Next, FIG. 27 will be explained. In this figure, two air conditioning units A1 and A2 are operated. Figure 27(i) shows the cleanliness measured at a level of 1500mm above the floor, and the average value is class 97.
0, and Figure 27 (ii) and (iii) are 1000 m above the floor level.
and 500 mm, respectively, and the average values are class 1120 and class 850.

Comparing the cleanliness level between operating two air conditioning units and operating one air conditioning unit at a level of 1500mm above the floor, for example, at measurement point 25, the former is class 770, while the latter is class 770. is classified as class 1100. From this, increasing the number of air conditioning units increases the cleanliness, and if it is necessary to further increase the cleanliness, increase the number of units between the side frames facing the air conditioning unit A1, as shown by the chain line in Figure 2. An air conditioning unit A3 similar to air conditioning unit A2 is provided.

The number of air conditioning units to be installed is appropriately selected depending on the span of the airtight room (the distance between the side frames 5a and 5b), the required cleanliness, or the amount of dust generated.

Also, if the airtight chamber 1 is added, it will be extended upward in FIG. When expanding the example shown in Figure 2, the fourth frame should be installed 100 mm away from the third frame (the frame located at the top of Figure 2) with frame 5 on the preliminary room 2 side as a reference. Bye. If an air conditioning unit is required due to expansion, it can be installed between both sides of the third and fourth frames or between one side.

Although only one air conditioning unit may be installed in the airtight room, cleanliness can be improved by installing two air conditioning units as in the above example. If the installation positions of the two units are set on opposite sides, it is suitable for cases where the span of the airtight room is long or when high cleanliness is required. If the above-mentioned sealing sheet 29 is used as a sealing means between the floor surface 9 and the inner wall of the airtight room, the sealing will be ensured and the sealing operation can be performed easily and quickly.

(Effects of the Invention) According to the present invention, construction can be carried out by simply incorporating the air conditioning unit and control unit between the sides of the frame and partitioning the airtight room with a wall panel and a ceiling board, and installation work on site can be completed by wiring. Since only the construction work is required, the construction can be done easily and in a short period of time, and the construction cost is also low. Also, unlike in the past, a machine room is not required, so the building size can be reduced. Furthermore, the scale can be expanded (expanded) or reduced as necessary.

[Brief explanation of drawings]

Figure 1 is a partially omitted perspective view, Figure 2 is a cross-sectional view,
Figure 3 is a cross-sectional view taken from Figure 1, Figure 4 is a cross-sectional view taken from Figure 2, Figure 5 is an assembled view and exploded view of the portal frame, and Figure 6 is an enlarged front view of the upper part of the portal frame. Figure 7 is an enlarged plan view of a part of the horizontal part of the portal frame, Figure 8 is a partially cutaway front view of the first air conditioning unit, Figure 9 is a sectional view taken along the line shown in Figure 8,
Figure 0 is an enlarged cross-sectional view showing the connection state between the first air conditioning unit and the frame, Figure 11 is a partially cutaway front view of the second air conditioning unit, and Figure 12 is an enlarged view of the upright state of the control unit. 13 is a sectional view taken along the line of FIG. 12, FIG. 14 is a cross-sectional view of the joint portion of the wall panel, and FIG. 15 is a partially cutaway front view showing the lower part of the joint portion of the wall panel. Fig. 16 is a sectional view taken along the line of Fig. 15, Fig. 17 is a sectional view taken along the line of Fig. 15, Fig. 18 is an enlarged sectional view taken from Fig. 2, and Fig. 19 is a sectional view taken along the line of Fig.
Figure - Line enlarged sectional view, Figure 20 is a partially exploded perspective view of the partition wall, Figure 21 is Figure 20 -
Line enlarged sectional view, Fig. 22 is Fig. 20-
23 is an enlarged cross-sectional view showing the state of the corner portion of the airtight chamber; FIG. 24 is an explanatory diagram showing the airflow distribution in the airtight chamber;
Figure 5 is an explanatory diagram showing the dust concentration distribution in the airtight room, Figure 26 is a diagram showing the measured value of the cleanliness in the airtight room at three levels when one air conditioning unit is operated, and Figure 27 is the diagram showing the values measured at three levels. 2 air conditioning units
FIG. 3 is a diagram showing the values measured in three levels of the cleanliness inside the airtight room when the machine is operated. 1... Airtight chamber, 5... Frame, 5a, 5b...
...Side part, 5c...Horizontal part, 8...Exterior casing, 8a ₁ ...Suction port, 8b ₁ ...Blowout port, 8e, 8
f...Heat exchanger, 8h...Blower, 8j...High performance filter, 9...Floor surface, 12...Exterior casing, 13...Wall panel, 24...Ceiling board, 2
6, 27, 29... sealing means, A1, A2, A3
...Air conditioning unit, B...Control unit.

Claims (1)

[Scope of Claims] 1. A plurality of gate-shaped frames arranged side by side in a predetermined direction at intervals on the floor of a building, and at least one gate-shaped frame that is assembled between the sides of the adjacent frames and constitutes a part of the inner wall. A control unit that controls the air conditioning unit that is installed between the air conditioning unit of the frame, a control unit that controls the air conditioning unit that is installed between the sides other than the side where this air conditioning unit is located, and a control unit that controls the air conditioning unit that is installed between the sides of the frame that is adjacent to the frame. A wall panel that covers between the sides except for the side where the frame is located and inside the side of the frame, a wall panel that covers the outside part of the frame that is located outside, and the upper part of the airtight room partitioned by the wall panel. The air conditioning unit is equipped with a thin exterior casing, a suction port is provided at the bottom of the indoor side of the casing, and a high-performance filter is provided at the top of the casing. A blower is disposed within the casing, and the airflow from the blower can be blown out to the blower outlet, and the control unit has control equipment built into the thin outer casing. A clean room characterized by: 2. A clean room according to claim 1, comprising at least two air conditioning units, one of which has a heat exchanger built into its casing. 3. A clean room according to claim 2, characterized in that one air conditioning unit and the other air conditioning unit are installed on opposite sides. 4. The clean room according to claim 1, wherein the sealing means for sealing the gap between the lower part of the inner wall of the airtight room and the floor is a sheet that covers the gap and the entire floor.