JPH0455532U - - Google Patents
Info
- Publication number
- JPH0455532U JPH0455532U JP9944790U JP9944790U JPH0455532U JP H0455532 U JPH0455532 U JP H0455532U JP 9944790 U JP9944790 U JP 9944790U JP 9944790 U JP9944790 U JP 9944790U JP H0455532 U JPH0455532 U JP H0455532U
- Authority
- JP
- Japan
- Prior art keywords
- force sensor
- diffusion
- bonding
- connection terminal
- crystal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Description
第１図は本考案に係る拡散型力覚センサーの一
例の正面図、第２図は同側面図、第３図は本考案
に係る拡散型力覚エンサーに用いられるＦＰＣの
一部を示す拡大正面図、第４図は従来の電気的接
続を説明するためのキヤツプを省略した拡散型力
覚センサーの正面図、第５図は同側面図、第６図
は同断面図、第７図、第８図、第９図は拡散型力
覚センサーの機械的な変化を電気的出力に変換す
るための検出回路を構成するブリツジ回路の説明
図である。
１……起歪体、３……検出アーム、４……ＦＰ
Ｃ（フレキシブル・プリント・サーキツト）基板
、４ａ……導体、４ｂ……ＩＣチツプ接続部、４
ｃ……外部接続部、５……拡散歪ゲージ（ＩＣチ
ツプ）、５ａ……ボンデイングパツド、６，６′
……切欠き部、６ａ，６ｂ……位置決め、７，７
′……拡散型力覚センサー、８……ボンデイング
ワイヤ。
Fig. 1 is a front view of an example of the diffused force sensor according to the present invention, Fig. 2 is a side view of the same, and Fig. 3 is an enlarged view showing a part of the FPC used in the diffused force sensor according to the present invention. 4 is a front view of a diffused force sensor with a cap omitted to explain the conventional electrical connection, FIG. 5 is a side view of the same, FIG. 6 is a cross-sectional view of the same, and FIG. FIGS. 8 and 9 are explanatory diagrams of a bridge circuit constituting a detection circuit for converting mechanical changes of the diffused force sensor into electrical output. 1... Strain body, 3... Detection arm, 4... FP
C (flexible printed circuit) board, 4a...conductor, 4b...IC chip connection part, 4
c... External connection part, 5... Diffusion strain gauge (IC chip), 5a... Bonding pad, 6, 6'
...Notch, 6a, 6b...Positioning, 7,7
'... Diffuse force sensor, 8... Bonding wire.
Claims (1)
起歪体に接合して成る拡散型力覚センサーにおい
て、ＦＰＣ基板の電気的接続端子部を前記拡散型
力覚センサーに内包し、該シリコン単結晶基板の
ボンデイングパツトとＦＰＣ基板の接続端子をボ
ンデイングワイヤーで接続して外部回路との電気
信号の入出力を行うようにした構成を特徴とする
半導体３次元力覚センサー。 In a diffusion-type force sensor formed by bonding a silicon single-crystal substrate on which a diffusion strain gauge is formed to a strain-generating body, an electrical connection terminal portion of an FPC board is included in the diffusion-type force sensor, and the silicon single-crystal substrate A semiconductor three-dimensional force sensor characterized by a structure in which the bonding pad and the connection terminal of the FPC board are connected with a bonding wire to input and output electrical signals to and from an external circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9944790U JPH0455532U (en) | 1990-09-20 | 1990-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9944790U JPH0455532U (en) | 1990-09-20 | 1990-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455532U true JPH0455532U (en) | 1992-05-13 |
Family
ID=31841382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9944790U Pending JPH0455532U (en) | 1990-09-20 | 1990-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455532U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211586A (en) * | 1998-01-27 | 1999-08-06 | Matsushita Electric Works Ltd | Semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253625A (en) * | 1988-04-01 | 1989-10-09 | Ricoh Co Ltd | Signal transfer body of force sensor |
-
1990
- 1990-09-20 JP JP9944790U patent/JPH0455532U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253625A (en) * | 1988-04-01 | 1989-10-09 | Ricoh Co Ltd | Signal transfer body of force sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211586A (en) * | 1998-01-27 | 1999-08-06 | Matsushita Electric Works Ltd | Semiconductor device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0455532U (en) | ||
| JPS62180738U (en) | ||
| JPS62180963U (en) | ||
| JPS6310571U (en) | ||
| JPH0459436U (en) | ||
| JPH01139449U (en) | ||
| JPS61196531U (en) | ||
| JPS6438545U (en) | ||
| JPH0385676U (en) | ||
| JPS6159235A (en) | Semiconductor pressure sensor | |
| JPS633160U (en) | ||
| JPS63191673U (en) | ||
| JPS6249395U (en) | ||
| JPH06265571A (en) | Acceleration sensor | |
| JPH01120342U (en) | ||
| JPH0361341U (en) | ||
| JPS6312759U (en) | ||
| JPH01139452U (en) | ||
| JPS6051442U (en) | Strain gauge for surface pressure measurement | |
| JPS6388483U (en) | ||
| JPS6444636U (en) | ||
| JPH0199663U (en) | ||
| JPH01129877U (en) | ||
| JPS63167735U (en) | ||
| JPS63149570U (en) |