JPH0459436U - - Google Patents
Info
- Publication number
- JPH0459436U JPH0459436U JP10214590U JP10214590U JPH0459436U JP H0459436 U JPH0459436 U JP H0459436U JP 10214590 U JP10214590 U JP 10214590U JP 10214590 U JP10214590 U JP 10214590U JP H0459436 U JPH0459436 U JP H0459436U
- Authority
- JP
- Japan
- Prior art keywords
- force sensor
- strain
- semiconductor
- axis force
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
- 238000004088 simulation Methods 0.000 description 2
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Description
第１図は本考案の力覚センサーの断面図、第２
図は従来の拡散型力覚センサーの断面図、第３図
はＸ，Ｙ軸方向の変形シミユレーシヨン図、第４
図はＺ軸方向の押張力の変形シミユレーシヨン図
、第５図はＸ軸用ブリツジ回路図、第６図はＹ軸
用ブリツジ回路図、第７図はＺ軸用ブリツジ回路
図、第８図は従来の拡散型力覚センサーの動作特
性図、第９図は理想的な力覚センサーの動作特性
図、第１０図は従来の高感度化した拡散型力覚セ
ンサーで、イは断面図、ロは下側から見た平面図
である。
３０……半導体３軸力覚センサー、３１……起
歪体、３１ａ……外周部、３２……ダイアフラム
、３３……検出アーム。
Figure 1 is a sectional view of the force sensor of the present invention, Figure 2 is a cross-sectional view of the force sensor of the present invention.
The figure is a cross-sectional view of a conventional diffused force sensor, Figure 3 is a simulation diagram of deformation in the X and Y axis directions, and Figure 4 is a cross-sectional view of a conventional diffused force sensor.
The figure is a simulation diagram of the deformation of the pushing and tension force in the Z-axis direction, Figure 5 is the bridge circuit diagram for the X-axis, Figure 6 is the bridge circuit diagram for the Y-axis, Figure 7 is the bridge circuit diagram for the Z-axis, and Figure 8 is the bridge circuit diagram for the Y-axis. Figure 9 is a diagram of the operating characteristics of a conventional diffused force sensor. Figure 10 is a diagram of the operating characteristics of an ideal force sensor. Figure 10 is a conventional highly sensitive diffused force sensor. is a plan view seen from below. 30...Semiconductor 3-axis force sensor, 31...Strain body, 31a...Outer peripheral portion, 32...Diaphragm, 33...Detection arm.
Claims (1)
歪体に接合してなる半導体３軸力覚センサーにお
いて、起歪体のダイアフラムの外周部側が薄く、
検出アームが接続される中心部が厚いテーパー状
としたことを特徴とする半導体３軸力覚センサー
の起歪体構造。 In a semiconductor three-axis force sensor formed by bonding a silicon single crystal plate on which a diffusion strain gauge is formed to a strain body, the outer peripheral side of the diaphragm of the strain body is thin;
A strain-generating body structure of a semiconductor three-axis force sensor characterized by a thick tapered central portion to which a detection arm is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10214590U JP2514974Y2 (en) | 1990-09-27 | 1990-09-27 | Strain element structure of semiconductor 3-axis force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10214590U JP2514974Y2 (en) | 1990-09-27 | 1990-09-27 | Strain element structure of semiconductor 3-axis force sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459436U true JPH0459436U (en) | 1992-05-21 |
| JP2514974Y2 JP2514974Y2 (en) | 1996-10-23 |
Family
ID=31846153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10214590U Expired - Lifetime JP2514974Y2 (en) | 1990-09-27 | 1990-09-27 | Strain element structure of semiconductor 3-axis force sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2514974Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017166847A (en) * | 2016-03-14 | 2017-09-21 | トヨタ自動車株式会社 | Force sensor design method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4303091B2 (en) * | 2003-11-10 | 2009-07-29 | ニッタ株式会社 | Strain gauge type sensor and strain gauge type sensor unit using the same |
| JP2023099959A (en) * | 2022-01-04 | 2023-07-14 | 住友重機械工業株式会社 | Gear device and sensor installation member |
-
1990
- 1990-09-27 JP JP10214590U patent/JP2514974Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017166847A (en) * | 2016-03-14 | 2017-09-21 | トヨタ自動車株式会社 | Force sensor design method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2514974Y2 (en) | 1996-10-23 |