JPH045576A - Contact resistance testing device - Google Patents

Contact resistance testing device

Info

Publication number
JPH045576A
JPH045576A JP10605890A JP10605890A JPH045576A JP H045576 A JPH045576 A JP H045576A JP 10605890 A JP10605890 A JP 10605890A JP 10605890 A JP10605890 A JP 10605890A JP H045576 A JPH045576 A JP H045576A
Authority
JP
Japan
Prior art keywords
probes
contact
resistance
contact resistance
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10605890A
Other languages
Japanese (ja)
Inventor
Yoshio Kobayashi
義男 小林
Wataru Takahashi
渉 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10605890A priority Critical patent/JPH045576A/en
Publication of JPH045576A publication Critical patent/JPH045576A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

PURPOSE:To prevent a wrong test and to conduct a contact test with high reliability by providing a comparing circuit, a resistance, etc., and deciding whether or not the contacting of probes is normal or not when a constant current is supplied to a material to be tested through probes to detect a voltage drop due to a contact resistance through the probes. CONSTITUTION:The constant current is supplied from a constant current generator 2 to the material 1 to be tested such as a switch through the probes P1 and P2 and the detected voltage drop due to the contact resistance through probes P3 and P4 is processed by a differential amplifier 3 and an A/D converter 4, and displayed on a display unit 5, thereby testing whether or not the resistance value of the sample 1 is normal or not. The resistance R1 is connected in parallel to the probes P1 and P3 and the value of the voltage drop through the resistance R1 is compared by a comparing circuit 8 with a decision level value which is almost a half as large as the saturation voltage of the generator 2 to decide whether the probes P1 and P3 contact each other normally or not; and resistance value normalcy misdecision making due to a defect in contacting between the probes is prevented and no defective is mixed in normal articles, so that the contact resistance test with high reliability can be conducted. Further, it is decided through a parallel resistance R2 similarly whether the probes P2 and P4 contact each other normally or not.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はリードスイッチや押釦スイッチ等機械的スイッ
チの試験装置に係り、特に良品への不良品の混入を防止
する接触抵抗の試験装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a testing device for mechanical switches such as reed switches and pushbutton switches, and particularly to a contact resistance testing device for preventing the mixing of defective products with non-defective products.

リードスイッチや押釦スイッチ等を半導体集積回路と組
合せてなる装置では、それらの機械的スイッチにおける
接点の接触性が装置の性能を左右する場合が多く、機械
的スイッチに対する多くの試験項目の中でも接触抵抗の
試験は極めて重要視されている。しかるに接点の接触抵
抗値は小さいため良品と不良品の判別が難しく、信鯨度
の低い試験装置で試験すると良品の中に中に不良品が混
入する場合が多い。しかし不良品の良品への混入は絶対
防がなければならない。そこで信転度の高い接触抵抗試
験装置の実現が要望されている。
In devices that combine reed switches, pushbutton switches, etc. with semiconductor integrated circuits, the contact properties of the contacts in these mechanical switches often affect the performance of the device, and contact resistance is one of the many test items for mechanical switches. exams are given great importance. However, since the contact resistance value of the contacts is small, it is difficult to distinguish between non-defective products and defective products, and when testing with testing equipment with low reliability, defective products are often mixed in with the non-defective products. However, it is absolutely necessary to prevent defective products from mixing with good products. Therefore, it is desired to realize a contact resistance testing device with high reliability.

[従来の技術〕 第3図は従来の第1の試験装置を示すブロック図、第4
図は従来の第2の試験装置を示すブロック図である。
[Prior art] Fig. 3 is a block diagram showing a conventional first test device;
The figure is a block diagram showing a conventional second test device.

従来の第1の試験装置は第3図に示す如く被試験試料1
の端子に、プローブP1、R2を介して電流を供給する
定電流発生器2と、プローブP3、P、を介して接触抵
抗による電圧降下を検出する差動増幅器3と、差動増幅
器3の出力電圧をデジタル化するアナログ/デジタル変
換器(A/D変換器)4と、A/D変換器4から出力さ
れる電圧または抵抗値を表示する表示器5と、電圧また
は抵抗値を規格値と比較して接触抵抗の良否を判定する
判定回路6を具えている。
The conventional first test device is a test sample 1 as shown in Fig. 3.
a constant current generator 2 that supplies current to the terminals of the terminal via probes P1 and R2, a differential amplifier 3 that detects a voltage drop due to contact resistance via probes P3 and P, and an output of the differential amplifier 3. An analog/digital converter (A/D converter) 4 that digitizes voltage, a display 5 that displays the voltage or resistance value output from the A/D converter 4, and a display device 5 that displays the voltage or resistance value as a standard value. It is provided with a determination circuit 6 that compares and determines whether the contact resistance is good or bad.

また従来の第2の試験装置は第4図に示す如く上記回路
の他に、プローブP1.P2、R3、R4の接触不良を
検出する導通チエツク回路7を具えており、導通チエツ
ク回路7はリレー接点rl、、r1.、R13、rla
を介してプローブP1、R2、R3、P4に接続され、
プローブP、、P、、R3、P4のいずれか一つに接触
不良があると、判定回路6における良否の判定を無効に
するように構成されている。
Furthermore, as shown in FIG. 4, the conventional second test apparatus includes, in addition to the above circuit, a probe P1. It is equipped with a continuity check circuit 7 for detecting poor contact between relay contacts rl, r1 . , R13, rla
connected to probes P1, R2, R3, P4 via
If there is a contact failure in any one of the probes P, , P, , R3, and P4, the determination circuit 6 is configured to invalidate the determination of pass/fail.

〔発明が解決しようとする課題] しかし従来の第1の試験装置の場合はプローブP8、P
zの接触抵抗がある一定の値を超すと、定電流発生器か
ら被試験試料に定電流を流すことが不可能になり、被試
験試料の接触抵抗値が規定値以上であっても電圧降下が
小さいため良品と判定される。同様にプローブP3、R
4の接触抵抗が差動増幅器3の入力インピーダンスに近
くなると、被試験試料による電圧降下分が分圧されて差
動増幅器3に小さい電圧が入力され、被試験試料の接触
抵抗値が規定値以上であっても良品と判定される。即ち
、不良品であるべき被試験試料が良品の中に混入すると
いう問題があった。
[Problem to be solved by the invention] However, in the case of the conventional first test device, the probes P8, P
If the contact resistance of z exceeds a certain value, it becomes impossible to flow a constant current from the constant current generator to the test sample, and even if the contact resistance value of the test sample exceeds the specified value, the voltage will drop. It is judged to be a good product because it is small. Similarly probes P3, R
When the contact resistance of 4 approaches the input impedance of the differential amplifier 3, the voltage drop due to the sample under test is divided and a small voltage is input to the differential amplifier 3, and the contact resistance value of the sample under test exceeds the specified value. Even if it is, it is judged to be a good product. That is, there was a problem in that test samples that were supposed to be defective products were mixed into non-defective products.

また従来の第2の試験装置はプローブの接触抵抗を確認
することが可能で、第1の試験装置のように不良品であ
るべき被試験試料が良品の中に混入することはないが、
プローブの接触抵抗の確認と被試験試料の接触抵抗の試
験を交互に行うことになり、被試験試料の接触抵抗を試
験するために長い時間がかかるという問題があった。
In addition, the conventional second test device is capable of checking the contact resistance of the probe, and unlike the first test device, the test sample that should be a defective product does not mix in with a good product.
The problem is that checking the contact resistance of the probe and testing the contact resistance of the test sample are performed alternately, and it takes a long time to test the contact resistance of the test sample.

本発明の目的は被試験試料の接触抵抗試験のみで良品へ
の不良品の混入が防止され、しかも信鎖度の高い接触抵
抗試験装置を提供することにある。
An object of the present invention is to provide a contact resistance testing device which prevents defective products from being mixed with non-defective products only by testing the contact resistance of a test sample, and which has a high degree of reliability.

〔課題を解決するための手段〕[Means to solve the problem]

第1図は本発明になる試験装置を示すブロック図である
。なお企図を通し同じ対象物は同一記号で表している。
FIG. 1 is a block diagram showing a test device according to the present invention. The same objects are represented by the same symbols throughout the plan.

上記課題は被試験試料1にプローブP、、P、を介して
電流を供給する定電流発生器2と、プローブP3、R4
を介して被試験試料lの接触抵抗による電圧降下を検出
し、接触抵抗値を表示すると共に被試験試料1の良否を
判定するための、差動増幅器3とアナログ/デジタル変
換器4と表示器5と判定回路6を有し、且つ、プローブ
P1、R2の接触不良による誤判定を防止するための比
較回路8と、プローブP3、R4の接触不良による誤判
定を防止するための抵抗R1,R2を有し、不良品の良
品への混入を防止してなる本発明の接触抵抗の試験装置
によって達成される。
The above problem involves a constant current generator 2 that supplies current to the sample under test 1 via probes P, , P, and probes P3, R4.
A differential amplifier 3, an analog/digital converter 4, and a display device for detecting the voltage drop due to the contact resistance of the sample under test 1 via the 5 and a determination circuit 6, a comparison circuit 8 for preventing erroneous determination due to poor contact between probes P1 and R2, and resistors R1 and R2 for preventing erroneous determination due to poor contact between probes P3 and R4. This is achieved by the contact resistance testing device of the present invention, which prevents defective products from being mixed with non-defective products.

〔作 用〕[For production]

第1図においてプローブP L、 P tの接触不良に
よる誤判定を防止するための比較回路と、プローブP3
、R4の接触不良による誤判定を防止するための抵抗R
,,R,を設けることによって、被試験試料の接触抵抗
値を試験する都度プローブの接触状態を確認する必要が
無くなり、被試験試料の接触抵抗試験のみで良品への不
良品の混入が防止され、しかも信顛度の高い接触抵抗試
験装置を実現することができる。
In FIG. 1, there is a comparison circuit for preventing erroneous judgment due to poor contact between the probes P L and P t, and a probe P3.
, a resistor R to prevent misjudgment due to poor contact of R4.
By providing ,,R, there is no need to check the contact state of the probe each time the contact resistance value of the test sample is tested, and the mixing of defective products with non-defective products can be prevented by simply testing the contact resistance of the test sample. Moreover, it is possible to realize a highly reliable contact resistance testing device.

〔実施例〕〔Example〕

以下添付図により本発明の実施例について説明する。な
お第2図は本発明になる試験装置の動作原理を示す回路
図である。
Embodiments of the present invention will be described below with reference to the accompanying drawings. Note that FIG. 2 is a circuit diagram showing the operating principle of the test apparatus according to the present invention.

本発明になる試験装置は第1図に示す如く被試験試料1
の端子に、プローブP3、R2を介して電流を供給する
定電流発生器2と、プローブP3、R4を介して接触抵
抗による電圧降下を検出する差動増幅器3と、差動増幅
器3の出力電圧をデジタル化するA/D変換器4と、A
/D変換器4から出力される電圧または抵抗値を表示す
る表示器5と、電圧または抵抗値を規格値と比較して接
触抵抗の良否を判定する判定回路6を具えている。
As shown in FIG. 1, the test device according to the present invention
a constant current generator 2 that supplies current to the terminals of the terminal via probes P3 and R2, a differential amplifier 3 that detects a voltage drop due to contact resistance via probes P3 and R4, and an output voltage of the differential amplifier 3. An A/D converter 4 that digitizes the
It includes a display 5 that displays the voltage or resistance value output from the /D converter 4, and a determination circuit 6 that compares the voltage or resistance value with a standard value to determine whether the contact resistance is good or bad.

また本発明になる試験装置はプローブP1、R2の接触
抵抗が大きいと、定電流発生器2の電圧が上昇すること
を利用して誤判定を防止する比較回路8を具えている。
The test apparatus according to the present invention also includes a comparison circuit 8 that prevents erroneous determination by utilizing the fact that the voltage of the constant current generator 2 increases when the contact resistance of the probes P1 and R2 is large.

比較回路8は第2図に示す如く比較器81とフォトカプ
ラ82とゲート回路83を有し、基準電圧Vsとして定
電流発生器2の飽和電圧の172程度の電圧が比較器8
1に印加されている。
The comparator circuit 8 has a comparator 81, a photocoupler 82, and a gate circuit 83 as shown in FIG.
1 is applied.

接触抵抗の試験時に定電流発生器2の電圧が基準電圧V
sより大きいと、プローブP1、R2の接触不良を示す
信号がゲート回路83を介して出力される。
When testing contact resistance, the voltage of constant current generator 2 is the reference voltage V.
If it is larger than s, a signal indicating poor contact between the probes P1 and R2 is outputted via the gate circuit 83.

更に本発明になる試験装置はプローブP1.P。Furthermore, the test device according to the present invention includes probe P1. P.

と並列に接続された抵抗R1、プローブPz、P。Resistor R1 and probes Pz, P connected in parallel with.

と並列に接続された抵抗R2を具えており、プローブP
3、R4の接触不良による誤判定を防止している。第2
図において定電流発生器2から被試験試料1に、プロー
ブの接触抵抗r、、rzを介して電流が供給されており
、プローブの接触抵抗r、、R2が許容値以下の低い値
であれば、被試験試料lの端子間電圧は被試験試料lの
抵抗値に比例した値になる。しかしいずれが一方のプロ
ーブの接触抵抗が許容値を超えると、定電流発生器2が
ら定電流が供給できなくなり被試験試料1の端子間電圧
は前記電圧より低くなる。
and a resistor R2 connected in parallel with the probe P.
3. Prevents misjudgment due to poor contact of R4. Second
In the figure, current is supplied from the constant current generator 2 to the sample under test 1 via the contact resistances r, , rz of the probes, and if the contact resistances r, , R2 of the probes are low values below the allowable value, , the voltage between the terminals of the sample l under test becomes a value proportional to the resistance value of the sample l under test. However, if the contact resistance of one of the probes exceeds the allowable value, the constant current generator 2 will no longer be able to supply a constant current, and the voltage between the terminals of the test sample 1 will become lower than the above voltage.

同様に被試験試料lはプローブの接触抵抗r3、R4を
介して差動増幅器3に接続され、被試験試料1の端子間
電圧と差動増幅器3の入力電圧は、プローブの接触抵抗
r3、R4が許容値以下であればほぼ等しい。しかしい
ずれが一方のプローブの接触抵抗が大きくなると、被試
験試料1の端子間電圧に比べ差動増幅器3の入力電圧が
低くなる。
Similarly, the sample under test l is connected to the differential amplifier 3 via the contact resistances r3 and R4 of the probe, and the voltage between the terminals of the sample under test 1 and the input voltage of the differential amplifier 3 are determined by the contact resistances r3 and R4 of the probe. are approximately equal if they are less than the allowable value. However, when the contact resistance of one of the probes becomes larger, the input voltage of the differential amplifier 3 becomes lower than the voltage between the terminals of the sample under test 1.

しかるに接触抵抗r+、r3と並列に抵抗R1が接続さ
れており、接触抵抗r2、R4と並列に抵抗R2が接続
されている。したがって定電流発生器2の電圧は接触抵
抗r3、R4と抵抗R1、R2で、それぞれ分圧されて
差動増幅器3に入力される。
However, a resistor R1 is connected in parallel with the contact resistors r+ and r3, and a resistor R2 is connected in parallel with the contact resistors r2 and R4. Therefore, the voltage of the constant current generator 2 is divided by the contact resistances r3 and R4 and the resistances R1 and R2 and input to the differential amplifier 3.

即ち、接触抵抗r3、R4が許容値を超えると差動増幅
器3に、被試験試料1の端子間電圧より高い電圧が人力
され、被試験試料Iの良・不良に関係なく不良品と判定
される。前記比較回路8はプローブP 1. P zの
接触不良を検出できるが、プローブP4、R4の接触不
良による誤判定を防止することはできない。しかし並列
に抵抗を接続することによってプローブP3、P、の接
触不良が検出できる。なおR+、Rzとして100にΩ
程度の抵抗が用いられており、プローブの接触抵抗が許
容値以下であれば検出電圧に誤差を生じることはない。
That is, when the contact resistances r3 and R4 exceed the allowable values, a voltage higher than the voltage between the terminals of the sample under test 1 is applied to the differential amplifier 3, and the sample is determined to be defective regardless of whether the sample under test I is good or defective. Ru. The comparison circuit 8 includes a probe P1. Although it is possible to detect a contact failure of Pz, it is not possible to prevent erroneous determination due to contact failure of the probes P4 and R4. However, by connecting a resistor in parallel, poor contact between the probes P3, P can be detected. In addition, R+, Rz is 100Ω
If the contact resistance of the probe is below the allowable value, there will be no error in the detected voltage.

このようにプローブP3、R2の接触不良による誤判定
を防止するための比較回路と、プローブP3、R4の接
触不良による誤判定を防止するための抵抗R+、Rzを
設けることによって、被試験試料の接触抵抗値を試験す
る都度プローブの接触状態を確認する必要が無くなり、
被試験試料の接触抵抗試験のみで良品への不良品の混入
が防止され、しかも信転度の高い接触抵抗試験装置を実
現することができる。
In this way, by providing a comparison circuit to prevent erroneous judgments due to poor contact between probes P3 and R2, and resistors R+ and Rz to prevent erroneous judgments due to poor contact between probes P3 and R4, the There is no need to check the contact status of the probe every time you test the contact resistance value.
It is possible to prevent defective products from being mixed with non-defective products only by testing the contact resistance of the sample under test, and to realize a highly reliable contact resistance testing device.

〔発明の効果] 上述の如く本発明によれば被試験試料の接触抵抗試験の
みで良品への不良品の混入が防止され、しかも信幀度の
高い接触抵抗試験装置を提供することができる。
[Effects of the Invention] As described above, according to the present invention, it is possible to prevent the mixing of defective products with non-defective products only by performing a contact resistance test on a test sample, and to provide a highly reliable contact resistance testing device.

83はゲート回路、 82はフォトカプラ、 R1,R2は抵抗、 P、、P、、R3、R4はブローフ、 rl、r、、r、、R4は接触抵抗、 をそれぞれ表す。83 is a gate circuit, 82 is a photocoupler, R1 and R2 are resistances, P,,P,,R3,R4 are Brouf, rl, r, , r, , R4 is contact resistance, respectively.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明になる試験装置を示すブロック図、 第2図は本発明になる試験装置の動作原理を示す回路図
、 第3図は従来の第1の試験装置を示すブロック図、 第4図は従来の第2の試験装置を示すブロック図、 である。図において 1は被試験試料、    2は定電流発生器、3は差動
増幅器、    4はA/D変換器、5は表示器、  
    6は判定回路、8は比較回路、    81は
比較器、木虻明にな′5拭1駄置に爪↑7゛旧11,2
図第1図 翳3図 木′ブ〒−明にTi5g式騒擾Ka)m¥!MLI;r
i口昂因槽2図 従来の第2のSK験擾置lホ↑プロ1.77図第4図
FIG. 1 is a block diagram showing a test device according to the present invention. FIG. 2 is a circuit diagram showing the operating principle of the test device according to the present invention. FIG. 3 is a block diagram showing a first conventional test device. FIG. 4 is a block diagram showing a second conventional test device. In the figure, 1 is a test sample, 2 is a constant current generator, 3 is a differential amplifier, 4 is an A/D converter, 5 is a display,
6 is a judgment circuit, 8 is a comparison circuit, 81 is a comparator, and a nail is placed in the '5 wipe 1 position in Kifu Akira ↑ 7゛ Old 11, 2
Figure 1 Figure 1 Shadow 3 Figure Tree'bu〒-Ming Ti5g type disturbance Ka) m ¥! MLI;r
i Mouth stimulation tank 2 diagram Conventional 2nd SK test station l E ↑ Pro 1.77 Figure 4

Claims (1)

【特許請求の範囲】 被試験試料(1)にプローブP_1、P_2を介して電
流を供給する定電流発生器(2)と、プローブP_3、
P_4を介して該被試験試料(1)の接触抵抗による電
圧降下を検出し、接触抵抗値を表示すると共に該被試験
試料(1)の良否を判定するための、差動増幅器(3)
とアナログ/デジタル変換器(4)と表示器(5)と判
定回路(6)を有し、 且つ、プローブP_1、P_2の接触不良による誤判定
を防止するための比較回路(8)と、プローブP_3、
P_4の接触不良による誤判定を防止するための抵抗R
_1、R_2を有し、不良品の良品への混入を防止して
なることを特徴とする接触抵抗の試験装置。
[Claims] A constant current generator (2) that supplies current to the test sample (1) via probes P_1 and P_2; probe P_3;
A differential amplifier (3) for detecting the voltage drop due to the contact resistance of the test sample (1) via P_4, displaying the contact resistance value, and determining the quality of the test sample (1).
and an analog/digital converter (4), a display (5), and a determination circuit (6), and a comparison circuit (8) for preventing erroneous determination due to poor contact between the probes P_1 and P_2, and a probe. P_3,
Resistor R to prevent misjudgment due to poor contact of P_4
_1, R_2, and is characterized in that it prevents defective products from mixing with non-defective products.
JP10605890A 1990-04-20 1990-04-20 Contact resistance testing device Pending JPH045576A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10605890A JPH045576A (en) 1990-04-20 1990-04-20 Contact resistance testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10605890A JPH045576A (en) 1990-04-20 1990-04-20 Contact resistance testing device

Publications (1)

Publication Number Publication Date
JPH045576A true JPH045576A (en) 1992-01-09

Family

ID=14424020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10605890A Pending JPH045576A (en) 1990-04-20 1990-04-20 Contact resistance testing device

Country Status (1)

Country Link
JP (1) JPH045576A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003066074A (en) * 2001-08-24 2003-03-05 Hioki Ee Corp Resistance measuring method and resistance measuring device
US6674295B1 (en) 1999-08-05 2004-01-06 Murata Manufacturing Co., Ltd. Impedance measuring apparatus for electronic component
JP2007165435A (en) * 2005-12-12 2007-06-28 Hitachi Computer Peripherals Co Ltd Probe contact state checking method and apparatus
JP2007212340A (en) * 2006-02-10 2007-08-23 Hioki Ee Corp measuring device
JP2012098157A (en) * 2010-11-02 2012-05-24 Hioki Ee Corp Resistance measuring device
CN104535843A (en) * 2015-01-14 2015-04-22 秦辉 Intelligent direct current stabilized power supply internal resistance measuring device
CN106415295A (en) * 2014-10-06 2017-02-15 株式会社Lg 化学 Switch deterioration detection device and method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674295B1 (en) 1999-08-05 2004-01-06 Murata Manufacturing Co., Ltd. Impedance measuring apparatus for electronic component
JP2003066074A (en) * 2001-08-24 2003-03-05 Hioki Ee Corp Resistance measuring method and resistance measuring device
JP2007165435A (en) * 2005-12-12 2007-06-28 Hitachi Computer Peripherals Co Ltd Probe contact state checking method and apparatus
JP2007212340A (en) * 2006-02-10 2007-08-23 Hioki Ee Corp measuring device
JP2012098157A (en) * 2010-11-02 2012-05-24 Hioki Ee Corp Resistance measuring device
CN106415295A (en) * 2014-10-06 2017-02-15 株式会社Lg 化学 Switch deterioration detection device and method
CN104535843A (en) * 2015-01-14 2015-04-22 秦辉 Intelligent direct current stabilized power supply internal resistance measuring device

Similar Documents

Publication Publication Date Title
JP3546046B2 (en) Circuit board insulation inspection apparatus and insulation inspection method
WO2001079863A2 (en) Method and apparatus for testing signal paths between an integrated circuit wafer and a wafer tester
JPH045576A (en) Contact resistance testing device
US7382141B2 (en) Testing a batch of electrical components
US5600249A (en) Determining contact quality of an impedance meter
JP3073806B2 (en) Digital Multimeters
JP5291860B2 (en) Insulation withstand voltage test equipment
JP3145506B2 (en) Connection test method for 4-wire resistance measurement and 4-wire resistance measurement device capable of implementing the method
JP4314096B2 (en) Semiconductor integrated circuit inspection apparatus and semiconductor integrated circuit inspection method
JPS63252271A (en) Semiconductor inspector
JPH01199173A (en) Electrostatic capacity measuring type apparatus for inspecting board
JPS62211568A (en) Continuity test equipment for printed circuit boards
EP4579247A1 (en) Tester with self-test functions
KR100355716B1 (en) Test method of low resistor for in-circuit tester
KR0179093B1 (en) Test adapter board checker
JPS61155873A (en) Measuring instrument for semiconductor element
TW420753B (en) Method of inspecting defects of the diodes connected in parallel
JPH02210271A (en) Checking device for short-circuit of multi-pin probe
JPS60253883A (en) Constant current load/constant voltage applied current measuring apparatus
JP2018194377A (en) measuring device
JPH04208881A (en) Semiconductor integrated circuit
JPH054034B2 (en)
JPS63167281A (en) Contact pin relay quality determination method in circuit board inspection equipment
JPH10300823A (en) Prober inspection method
JPH0425774A (en) Inspecting device for sliding resistor