JPH0457706U - - Google Patents
Info
- Publication number
- JPH0457706U JPH0457706U JP10005590U JP10005590U JPH0457706U JP H0457706 U JPH0457706 U JP H0457706U JP 10005590 U JP10005590 U JP 10005590U JP 10005590 U JP10005590 U JP 10005590U JP H0457706 U JPH0457706 U JP H0457706U
- Authority
- JP
- Japan
- Prior art keywords
- light
- order diffracted
- interference
- light source
- diffracted light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 230000003595 spectral effect Effects 0.000 claims description 5
- 238000004611 spectroscopical analysis Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000000835 fiber Substances 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の表面形状測定器の一実施例を
示す構成図、第２図は第１図装置に用いられる光
源の分光特性および音響光学素子の出力を示す図
、第３図はパワー変動の影響の補正動作を示す図
、第４図は本考案の表面形状測定器の他の実施例
を示す図である。
１……波長可変光源部、２……測定用干渉計部
、３，４……検出部、５……割算器、６……干渉
位相測定器、１１……スペクトル線幅の広い白色
光を出射する光源、１２……光源１１の駆動部、
１３……フアイバ、１４……分光用音響光学素子
、１５……音響光学素子１４の駆動部、１６……
ピンホール、２１……ハーフミラー、２２……参
照光用ミラー、２３……集光レンズ、２４……測
定対称、２５……ステージ。
Fig. 1 is a configuration diagram showing an embodiment of the surface profile measuring device of the present invention, Fig. 2 is a diagram showing the spectral characteristics of the light source and the output of the acousto-optic element used in the device shown in Fig. 1, and Fig. 3 is a diagram showing the power FIG. 4 is a diagram showing a correction operation for the influence of fluctuations, and is a diagram showing another embodiment of the surface profile measuring device of the present invention. DESCRIPTION OF SYMBOLS 1...Wavelength variable light source part, 2...Measurement interferometer part, 3, 4...Detection part, 5...Divider, 6...Interference phase measuring device, 11...White light with wide spectral line width A light source that emits a light source 12, a driving section of the light source 11,
13... Fiber, 14... Acousto-optic element for spectroscopy, 15... Drive section of the acousto-optic element 14, 16...
Pinhole, 21... Half mirror, 22... Mirror for reference light, 23... Condensing lens, 24... Measurement target, 25... Stage.
Claims (1)
表面形状測定器であつて、 スペクトル線幅の広い白色光を出射する光源と
、この光源からの出射光が入射される分光用の音
響光学素子と、この音響光学素子により回折され
た１次回折光および２次回折光が入射するピンホ
ールとから成る波長可変光源部と、 前記ピンホールを通過した１次回折光が入射さ
れる測定用干渉計部と、 この測定用干渉計部からの測定用干渉光を受光
する第１の検出部と、 前記ピンホールを通過した２次回折光を受光す
る第２の検出部と、 この第２の検出部からの出力信号と前記第１の
検出部からの干渉信号との比をとる割算器と、 この割算器の出力を受けて前記物体の表面形状
に対応する干渉位相と形状を測定する干渉位相測
定器とを備え、 前記光源からのスペクトル線幅の広い白色光を
前記音響光学素子で分光し、１次回折光は測定用
干渉光として、また２次回折光はパワーモニタと
して使用し、両者の比を前記割算器でとることに
より、強度変化の影響を除去するようにしたこと
を特徴とする表面形状測定器。[Claims for Utility Model Registration] A surface profile measuring device that measures the surface profile of an object using light interference, which comprises a light source that emits white light with a wide spectral line width, and a light source that emits white light with a wide spectral line width. A wavelength tunable light source section consisting of an acousto-optic element for incident spectroscopy, and a pinhole into which the first-order diffracted light and second-order diffracted light diffracted by the acousto-optic element enter; and the first-order diffracted light that has passed through the pinhole. a measurement interferometer section that is incident; a first detection section that receives the measurement interference light from the measurement interferometer section; and a second detection section that receives the second-order diffracted light that has passed through the pinhole. , a divider that takes the ratio of the output signal from the second detection section and the interference signal from the first detection section; and an interference signal corresponding to the surface shape of the object upon receiving the output of the divider. and an interference phase measuring device for measuring phase and shape, the white light with a wide spectral linewidth from the light source is separated by the acousto-optic element, the first-order diffracted light is used as interference light for measurement, and the second-order diffracted light is used as a power 1. A surface profile measuring instrument, characterized in that the influence of intensity changes is removed by being used as a monitor and calculating the ratio between the two using the divider.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10005590U JPH0742084Y2 (en) | 1990-09-25 | 1990-09-25 | Surface shape measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10005590U JPH0742084Y2 (en) | 1990-09-25 | 1990-09-25 | Surface shape measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0457706U true JPH0457706U (en) | 1992-05-18 |
| JPH0742084Y2 JPH0742084Y2 (en) | 1995-09-27 |
Family
ID=31842414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10005590U Expired - Fee Related JPH0742084Y2 (en) | 1990-09-25 | 1990-09-25 | Surface shape measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742084Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014016247A (en) * | 2012-07-09 | 2014-01-30 | Shimadzu Corp | Wavelength variable monochromatic light source |
-
1990
- 1990-09-25 JP JP10005590U patent/JPH0742084Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014016247A (en) * | 2012-07-09 | 2014-01-30 | Shimadzu Corp | Wavelength variable monochromatic light source |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0742084Y2 (en) | 1995-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees | ||
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R323115 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |