JPH04586B2 - - Google Patents
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- Publication number
- JPH04586B2 JPH04586B2 JP59146284A JP14628484A JPH04586B2 JP H04586 B2 JPH04586 B2 JP H04586B2 JP 59146284 A JP59146284 A JP 59146284A JP 14628484 A JP14628484 A JP 14628484A JP H04586 B2 JPH04586 B2 JP H04586B2
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- Prior art keywords
- weight
- stabilized zirconia
- sprayed
- cao
- base material
- Prior art date
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Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は電子部品、例えばセラミツクコンデン
サーなどの焼成に用いられる治具の改良に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to improvements in jigs used for firing electronic parts, such as ceramic capacitors.
電子部品、例えばセラミツクコンデンサーを製
造する際にはコンデンサー素地を1200〜1400℃で
焼成する工程があるが、コンデンサーの接触する
部分には該コンデンサーとの反応が最も少ない材
料としてジルコニアが用いられている。実際の焼
成に際して従来は、アルミナ・シリカ質の治具、
具体的には匣鉢にジルコニア板を敷きその上に敷
粉としてジルコニア粉末を載せてコンデンサー素
地を並べるか、あるいはジルコニア質の匣鉢にジ
ルコニア粉末敷粉を載せてコンデンサー素地を並
べるのが一般な方法である。しかし、前者のジル
コニア板を敷く方法は比較的安価ではあるが、手
作業で製品の乗せ降ろしをする場合は非常に繁雑
で多くの手間を要し、また自動化した場合に製品
を取出す際匣鉢を反転させてコンデンサーを取出
そうとすると、ジルコニア板が落下してしまい、
オートメーシヨン化のネツクとなつている。一
方、後者の匣鉢全体をジルコニアとする方法は、
ジルコニアが急熱急冷の熱衝撃に弱く、比重が大
きく、しかも非常に高価である欠点を有する。
When manufacturing electronic components, such as ceramic capacitors, there is a process in which the capacitor base is fired at 1,200 to 1,400°C, and zirconia is used for the parts that come into contact with the capacitor as it is the material that has the least amount of reaction with the capacitor. . Conventionally, during actual firing, alumina/silica jigs,
Specifically, it is common to spread a zirconia board in a sagger, place zirconia powder as a bedding powder on top of it, and then arrange the capacitor bases, or place a zirconia powder bedding in a zirconia sagger and then arrange the capacitor bases. It's a method. However, although the former method of laying zirconia plates is relatively inexpensive, it is very complicated and requires a lot of time when loading and unloading the products manually, and when it is automated, it is difficult to remove the products from the saggers. When I turned it around and tried to take out the capacitor, the zirconia plate fell off.
It has become the key to automation. On the other hand, the latter method of making the entire sagger is made of zirconia.
Zirconia has the drawbacks of being vulnerable to thermal shock caused by rapid heating and cooling, having a high specific gravity, and being very expensive.
上述の欠点を解消するため、一般に広く使用さ
れているアルミナ・シリカ質匣鉢を用い、その被
焼成物を載せる側の表面にジルコニア溶射層を形
成する方法が考えられる。しかし単にアルミナ・
シリカ質材料にジルコニアを溶射したのみでは、
加熱・冷却の熱履歴を繰返すうちに溶射層が基材
から剥離してしまう。 In order to eliminate the above-mentioned drawbacks, a method can be considered in which a widely used alumina-silica sagger is used and a zirconia sprayed layer is formed on the surface of the sagger on which the object to be fired is placed. However, simply alumina
Simply spraying zirconia on siliceous material will not
As the thermal history of heating and cooling is repeated, the sprayed layer peels off from the base material.
ジルコニアはよく知られているように、単斜晶
−正方晶−立方晶の結晶変態を持ち、コンデンサ
ー焼成の温度領域で結晶変態に伴なう異常な膨
脹・収縮があり、これに伴なう溶射層の体積変化
のため剥離してしまうのである。この結晶変態に
伴なう異常な膨脹・収縮は安定化剤を加えたジル
コニア（安定化ジルコニア）を用いることにより
防止出来る。 As is well known, zirconia has a monoclinic-tetragonal-cubic crystal transformation, and in the capacitor firing temperature range, it undergoes abnormal expansion and contraction due to crystal transformation. The thermal spray layer peels off due to volume changes. Abnormal expansion and contraction accompanying this crystal transformation can be prevented by using zirconia to which a stabilizer has been added (stabilized zirconia).
安定化ジルコニアの安定化剤としては、酸化カ
ルシウム、酸化マグネシウム、酸化イツトリウム
が知られているが、酸化マグネシウムはジルコニ
アとの固溶体が不安定で、高温での使用中MgO
が固溶体から抜けやすく、一方酸化イツトリウム
は価格が高い。これに比べて酸化カルシウムは固
溶体が安定で、高温においてもCaOが比較的拡散
しにくく、しかも安価である。従つて酸化カルシ
ウムが安定化剤としては好ましい。 Calcium oxide, magnesium oxide, and yttrium oxide are known as stabilizers for stabilized zirconia, but magnesium oxide is unstable as a solid solution with zirconia, and MgO
easily escapes from solid solution, while yttrium oxide is expensive. In comparison, calcium oxide has a stable solid solution, CaO is relatively difficult to diffuse even at high temperatures, and it is inexpensive. Therefore, calcium oxide is preferred as a stabilizer.
しかし、アルミナ・シリカ質基材にCaO安定化
ジルコニア溶射した場合、CaOは高温下では基材
中に少しずつ拡散してゆくため、溶射層中のCaO
量が次第に減少し、ジルコニアは安定化領域から
はずれ、加熱・冷却に伴なう異常な膨脹・収縮が
次第に現われ剥離の原因となる。そのためCaOの
拡散消失を予期して多量のCaOを含むジルコニア
を用いると、電子部品、例えばチタン酸バリウム
を主体とするコンデンサーを焼成する際にチタン
酸バリウムとの反応が促進され、それがコンデン
サーの特性に悪影響を及ぼす恐れがある。 However, when CaO-stabilized zirconia is thermally sprayed onto an alumina/siliceous base material, CaO gradually diffuses into the base material at high temperatures.
As the amount gradually decreases, zirconia moves out of the stable region, and abnormal expansion and contraction accompanying heating and cooling gradually appears, causing peeling. Therefore, if zirconia containing a large amount of CaO is used in anticipation of CaO dissipating by diffusion, the reaction with barium titanate will be promoted during firing of electronic components, such as capacitors mainly made of barium titanate, and this will cause the capacitor to react with barium titanate. It may adversely affect the characteristics.
本発明者等は以上の溶射法によつて製造される
電子部品焼成用治具において溶射層と基材の熱膨
脹及び溶射層と電子部品との反応の問題について
種々検討を加えた結果、耐火基材中のAl2O3及び
SiO2の含有量と安定化ジルコニア中の安定化剤
含有量を調整することにより、基材と溶射層の熱
膨脹曲線をほぼ等しくし、しかも反応もほとんど
なくすることが可能であることを見出して本発明
を完成したものである。
The present inventors have conducted various studies on the problems of thermal expansion of the thermal sprayed layer and the base material and reaction between the thermal sprayed layer and the electronic components in a jig for firing electronic components manufactured by the above thermal spraying method. Al 2 O 3 and
We discovered that by adjusting the content of SiO 2 and the stabilizer content in stabilized zirconia, it is possible to make the thermal expansion curves of the base material and the sprayed layer almost equal, and also to almost eliminate any reaction. This completes the present invention.
本発明は耐火基材の表面にCaO安定化ジルコニ
アを溶射する方法であつて、その溶射にあたつて
基材側から表面に向かつて次第に溶射材料中の
CaO含有量の少ない安定化ジルコニアを溶射する
ことを特徴とする電子部品焼成用治具の製造方法
を提供するものである。 The present invention is a method of thermally spraying CaO-stabilized zirconia onto the surface of a fire-resistant base material, and during the thermal spraying, the amount of CaO-stabilized zirconia in the sprayed material is gradually increased from the base material side toward the surface.
The present invention provides a method for manufacturing a jig for firing electronic components, which is characterized by thermally spraying stabilized zirconia with a low CaO content.
本発明者等は各種耐火材料の熱膨脹挙動につい
て検討の結果、通常の耐火れんがや匣鉢として使
用されるアルミナ・シリカ質材料は、そのAl2O3
含有量の高い領域でCaO安定化ジルコニア溶射層
と熱膨脹曲線が比較的類似していることを見出し
た。そして安定化ジルコニア中のCaO含有量を増
した場合には、Al2O3含有量の多いアルミナ・シ
リカ材料を使用すれば熱膨脹挙動が追従できるこ
ともわかつた。 As a result of studying the thermal expansion behavior of various refractory materials, the present inventors found that the alumina-siliceous materials used for ordinary firebricks and saggers have an Al 2 O 3
It was found that the thermal expansion curves of the CaO-stabilized zirconia sprayed layer were relatively similar in the high content region. It was also found that when the CaO content in the stabilized zirconia was increased, the thermal expansion behavior could be followed by using an alumina-silica material with a high Al 2 O 3 content.
従つてAl2O385重量％以上、SiO215重量％以
下、残部は不可避的不純物から成る耐火性基材を
用い、安定化ジルコニア中のCaO量を６〜15重量
％とした材料を溶射すれば、20回を越える熱履歴
に対しても剥離することなく使用できることが判
明した。 Therefore, we used a fire-resistant base material consisting of 85% by weight or more of Al 2 O 3 and 15% by weight or less of SiO 2 , with the remainder being unavoidable impurities, and thermally sprayed a material in which the amount of CaO in stabilized zirconia was 6 to 15% by weight. It was found that it could be used without peeling even after being subjected to over 20 thermal cycles.
一方、反応による製品への悪影響の排除につい
てはジルコニア溶射材料を最初はCaO含有量の多
いものから次第にCaO含有量の少ないものへと変
化させて溶射し、最後は安定化領域限度か、ある
いは部分安定化領域であつても、安定化領域に近
い範囲の材料を溶射することによつて対処し得る
ことを見出した。この溶射材料中の安定化剤の変
化は段階的に行なつても、連続的でもよい。 On the other hand, in order to eliminate the adverse effects on products caused by reactions, the zirconia thermal spray material is first sprayed with a high CaO content, then gradually changed to a low CaO content, and finally reaches the stabilization region limit or partially sprays. It has been found that even the stabilization region can be addressed by spraying material close to the stabilization region. This change in stabilizer in the thermal spray material may be gradual or continuous.
耐火基材はアルミナ・シリカ質でAl2O385重量
％以上、SiO215重量％以下、残部は不可避的不
純物から成るものを使用する。Al2O385重量％以
下、SiO215重量％以上では基材は安定化ジルコ
ニアの熱膨脹挙動に追従できない。
The fireproof base material used is an alumina-silica material containing 85% by weight or more of Al 2 O 3 and 15% by weight or less of SiO 2 , with the remainder being unavoidable impurities. If Al 2 O 3 is less than 85% by weight and SiO 2 is more than 15% by weight, the base material cannot follow the thermal expansion behavior of stabilized zirconia.
基材と直接接触する部分の安定化ジルコニア中
の安定化剤CaOの含有量は６〜15重量％の範囲と
する。CaOは高温における使用中に徐々に基材中
に拡散して失われ、次第にその含有量が少なくな
るので、ジルコニアの安定化の点では安定化剤は
多いほど好ましいが、15重量％を越えるとアルミ
ナ・シリカ基材のAl2O3を多くしても剥離を生
じ、匣鉢が多数回の使用に耐えない。一方、
CaO6重量％以下ではCaOの消失による安定化の
喪失が起こりやすく、やはり好ましくない。 The content of the stabilizer CaO in the stabilized zirconia in the portion directly in contact with the base material is in the range of 6 to 15% by weight. During use at high temperatures, CaO gradually diffuses into the base material and is lost, and its content gradually decreases. Therefore, in terms of stabilizing zirconia, the more stabilizer the better, but if it exceeds 15% by weight, Even if the amount of Al 2 O 3 in the alumina/silica base material is increased, peeling occurs and the sagger cannot withstand repeated use. on the other hand,
If CaO is less than 6% by weight, stabilization is likely to be lost due to disappearance of CaO, which is also undesirable.
最表層に溶射される安定化ジルコニアのCaO含
有量は４〜10重量％である。部分安定化領域であ
つても、４重量％以上であればジルコニアの相変
化に伴なう体積の異常変化はそれほどでもない
が、４重量％以下ではそれがひどくなり、剥離の
原因となる。また10重量％以上では電子部品との
反応が問題となる。基材と接触している層と最表
層の他に中間層はなくてもよいが、該２層のCaO
量がかなり異なる場合は中間のCaO量の中間層を
設けるのがより好ましい。あるいはジルコニア溶
射層中のCaO量を連続的に変化させれば、溶射層
間の剥離を防止するという点ではなお望ましい。 The CaO content of the stabilized zirconia sprayed on the outermost layer is 4 to 10% by weight. Even in the partially stabilized region, if the amount is 4% by weight or more, the abnormal change in volume due to the phase change of zirconia is not so great, but if it is less than 4% by weight, it becomes severe and causes peeling. Moreover, if it exceeds 10% by weight, reaction with electronic components becomes a problem. There may be no intermediate layer other than the layer in contact with the base material and the outermost layer, but the CaO
If the amounts differ considerably, it is more preferable to provide an intermediate layer with an intermediate amount of CaO. Alternatively, it is more desirable to continuously change the amount of CaO in the zirconia sprayed layer in order to prevent separation between the sprayed layers.
次に本発明の製造方法について説明する。 Next, the manufacturing method of the present invention will be explained.
溶射はジルコニアの融点から考えてプラズマ溶
射が、特に水プラズマ溶射が好ましい。溶射は通
常のセラミツク溶射の方法で行なわれ、溶射材料
の粒径は150μ以下のものを用いる。 Considering the melting point of zirconia, plasma spraying is preferable, and water plasma spraying is particularly preferable. Thermal spraying is carried out using the usual ceramic spraying method, and the particle size of the sprayed material is 150μ or less.
耐火基材中のAl2O3及びSiO2含有量に対する耐
火基材の熱膨脹の関係及びCaO含有量に対する安
定化ジルコニア溶射層の熱膨脹の関係をあらかじ
め求めて、組成の定まつた耐火基材を用いる場合
には、その耐火基材と等しい熱膨脹挙動を有する
安定化ジルコニアのCaO含有量を決定するか、逆
に安定化ジルコニアのCaO含有量が定まつている
場合には、安定化ジルコニアと等しい熱膨脹挙動
を有する耐火基材の組成を決定する。安定化ジル
コニアのCaO含有量は既述のように６〜15重量％
の範囲とする。 The relationship between the thermal expansion of the fireproof base material with respect to the Al 2 O 3 and SiO 2 contents in the fireproof base material and the relationship between the thermal expansion of the stabilized zirconia sprayed layer with respect to the CaO content are determined in advance, and the fireproof base material with a determined composition is obtained. If used, determine the CaO content of the stabilized zirconia that has a thermal expansion behavior equal to that of the refractory substrate, or conversely, if the CaO content of the stabilized zirconia is determined, the CaO content of the stabilized zirconia is equal to that of the stabilized zirconia. Determining the composition of a refractory substrate with thermal expansion behavior. The CaO content of stabilized zirconia is 6 to 15% by weight as mentioned above.
The range shall be .
溶射の順序は耐火基材にまずCaO含有量６〜15
重量％の安定化ジルコニアを溶射する。溶射層の
厚みは0.05〜５mmが好ましい。溶射終了後、今度
はCaO含有量４〜10重量％の安定化ジルコニアを
再び溶射する。溶射層の厚みはやはり0.05〜５mm
とする。こうして治具が製造される。 The order of thermal spraying is to first coat the refractory substrate with a CaO content of 6 to 15.
% by weight of stabilized zirconia. The thickness of the sprayed layer is preferably 0.05 to 5 mm. After the thermal spraying is completed, stabilized zirconia with a CaO content of 4 to 10% by weight is again thermally sprayed. The thickness of the sprayed layer is still 0.05 to 5 mm.
shall be. In this way, the jig is manufactured.
以上は溶射層が２層の場合であるが、基材に溶
射する際安定化ジルコニア中のCaO含有量を次第
に減少させたものに変えて順次溶射し、最表層は
あらかじめ予定したCaO含有量の安定化ジルコニ
アを溶射することによつて溶射層を３層以上とす
るか、溶射を途中で中断しないで、CaO含有量を
次第に減少させた安定化ジルコニアをホツパーか
ら連続的に供給して溶射することもよい。こうす
ることによつて、溶射層が２層の場合より更に熱
履歴に対する安定性が増す。 The above is a case where there are two thermally sprayed layers, but when spraying on the base material, the CaO content in the stabilized zirconia is gradually reduced and thermally sprayed one after another, and the outermost layer has a pre-planned CaO content. By spraying stabilized zirconia, the number of sprayed layers is increased to three or more, or by continuously supplying stabilized zirconia with a gradually decreasing CaO content from a hopper without interrupting the spraying process. It's also good. By doing so, stability against thermal history is further increased than in the case of two thermally sprayed layers.
以下実施例により本発明の方法をより具体的に
説明する。
The method of the present invention will be explained in more detail with reference to Examples below.
実施例 １
Al2O392重量％、SiO26重量％、その他残部が
不可避的不純物より成るアルミナ・シリカ質耐火
基材を170x110x10mmに切り出し、その表面にま
ずCaO10重量％含有の安定化ジルコニア粉末を水
プラズマ溶射装置により0.2mm厚さに溶射した。
次いでCaO含有量を５重量％にした安定化ジルコ
ニア粉末を同じく水プラスズマ溶射装置を用いて
0.3mm厚さに溶射して溶射体を得た。Example 1 An alumina-silica refractory base material consisting of 92% by weight of Al 2 O 3 , 6% by weight of SiO 2 , and the remainder being unavoidable impurities was cut into a size of 170x110x10mm, and stabilized zirconia powder containing 10% by weight of CaO was first applied to the surface of the material. was sprayed to a thickness of 0.2mm using a water plasma spraying device.
Next, stabilized zirconia powder with a CaO content of 5% by weight was applied using the same water plasma spraying device.
A sprayed body was obtained by spraying to a thickness of 0.3 mm.
実施例 ２
まずCaO10重量％含有の安定化ジルコニアを
0.1mm、次いでCaO7重量％含有の安定化ジルコニ
アを0.1mm、最後にCaO含有量を５重量％にした
ものを0.2mm厚さに溶射した以外は実施例１と同
様にして溶射層３層より成る製品を得た。Example 2 First, stabilized zirconia containing 10% by weight of CaO was prepared.
Three thermally sprayed layers were prepared in the same manner as in Example 1, except that 0.1 mm, then 0.1 mm of stabilized zirconia containing 7% by weight of CaO, and finally 0.2 mm of stabilized zirconia with a CaO content of 5% by weight were sprayed. Obtained a product consisting of:
実施例 ３
溶射粉末供給タンクを２個用意し、一方のタン
クにはCaO含有量５重量％の安定化ジルコニア
を、他方にはCaO含有量31重量％のジルコン酸カ
ルシウムを入れ、フイーダーを調節して両者を混
合し、混合物の見掛けのCaO含有量が10重量％か
ら５重量％まで連続的に変化するようにしたもの
を溶射装置に供給し、実施例１と同じ耐火基材に
0.5mm厚さに水プラズマ溶射機を用いて溶射して
溶射体を得た。Example 3 Two thermal spray powder supply tanks were prepared, one tank was filled with stabilized zirconia with a CaO content of 5% by weight, the other was filled with calcium zirconate with a CaO content of 31% by weight, and the feeder was adjusted. The mixture was mixed in such a manner that the apparent CaO content of the mixture varied continuously from 10% by weight to 5% by weight, and the mixture was supplied to a thermal spraying device and applied to the same fire-resistant base material as in Example 1.
A sprayed body was obtained by spraying to a thickness of 0.5 mm using a water plasma spraying machine.
比較例 １
溶射層をCaO含有量５重量％の安定化ジルコニ
ア粉末を0.5mm厚さの１層にした以外は実施例１
と同様にして溶射体を得た。Comparative Example 1 Example 1 except that the thermal spray layer was a single layer of 0.5 mm thick stabilized zirconia powder with a CaO content of 5% by weight.
A sprayed body was obtained in the same manner as above.
比較例 ２
溶射層をCaO含有量12重量％の安定化ジルコニ
ア粉末を0.5mm厚さの１層にした以外は実施例１
と同様にして溶射体を得た。Comparative Example 2 Example 1 except that the thermal spray layer was a single layer of 0.5 mm thick stabilized zirconia powder with a CaO content of 12% by weight.
A sprayed body was obtained in the same manner as above.
〔発明の効果〕
実施例１〜３及び比較例１、２の５種の試料に
チタン酸バリウムコンデンサー素地を載せ、電気
炉中で室温より昇温速度５℃／minで1400℃に昇
温し、4hr保持後室温まで炉冷する操作を繰返し
て基材と溶射層の接着状況とコンデンサーの特性
への影響を観察した。その結果、比較例１の試料
は６回目で端にわずか剥離が認められ、９回目の
熱履歴で約１／３が剥離した。比較例２の試料で
は10回目の熱履歴でも剥離は認められなかつたが
チタン酸バリウムコンデンサーにCaOとの反応の
影響が多く見られた。しかし、実施例１〜３の試
料はいずれも焼成後のコンデンサーにCaOとの反
応の影響は認められず、剥離も実施例１の試料で
熱履歴15回目を過ぎてやゝ端に剥離が認められた
が、20回まで使用できた。一方、実施例２及び３
の試料は20回目まで全く剥離は見られなかつた。
これは本発明の効果を如実に示すものである。[Effect of the invention] Barium titanate capacitor bodies were placed on five samples of Examples 1 to 3 and Comparative Examples 1 and 2, and the temperature was raised from room temperature to 1400°C at a heating rate of 5°C/min in an electric furnace. After holding for 4 hours, the process of cooling down to room temperature was repeated to observe the adhesion between the base material and the sprayed layer and the effect on the characteristics of the capacitor. As a result, in the sample of Comparative Example 1, slight peeling was observed at the edges after the 6th heat cycle, and about 1/3 of the sample was peeled off during the 9th heat cycle. In the sample of Comparative Example 2, no peeling was observed even after the 10th heat cycle, but the barium titanate capacitor was largely affected by the reaction with CaO. However, in all of the samples of Examples 1 to 3, no influence of reaction with CaO was observed on the capacitors after firing, and peeling was observed in the sample of Example 1 after the 15th thermal cycle. However, it could be used up to 20 times. On the other hand, Examples 2 and 3
No peeling was observed in the sample until the 20th test.
This clearly shows the effect of the present invention.
以上述べたように、本発明の方法で製造された
電子部品焼成用治具はアルミナ・シリカ耐火基材
上に該基材との熱膨脹を合わせたCaO安定化ジル
コニアを溶射し、さらにその上層にCaO含有量を
減じた安定化ジルコニアを溶射することにより、
治具使用中に被焼成物の電子部品に悪影響を及ぼ
すことなく、また治具が熱履歴を受けてもジルコ
ニアの安定化が失われず、溶射層が剥離すること
もなく、繰返し使用可能である。 As described above, the electronic component firing jig manufactured by the method of the present invention is made by thermally spraying CaO-stabilized zirconia that matches the thermal expansion of the base material onto an alumina-silica refractory base material, and further coats the top layer with CaO-stabilized zirconia that matches the thermal expansion of the base material. By spraying stabilized zirconia with reduced CaO content,
The jig can be used repeatedly without adversely affecting the electronic components of the object to be fired, and even if the jig is subjected to thermal history, the zirconia does not lose its stability and the sprayed layer does not peel off. .
Claims (1)
成る耐火基材の表面にCaOの含有量が４〜15重量
％である安定化ジルコニアを溶射する方法であつ
て、その溶射にあたつて基材側から表面に向かつ
て次第に溶射材料中のCaO含有量の少ない安定化
ジルコニアを溶射することを特徴とする電子部品
焼成用治具の製造方法。 ２ 基材側にCaOの含有量が６〜15重量％である
安定化ジルコニアを溶射し、次いでその上にCaO
の含有量が４〜10重量％である安定化ジルコニア
を溶射することを特徴とする特許請求の範囲１記
載の電子部品焼成用治具の製造方法。 ３ 基材側にCaOの含有量が６〜15重量％である
安定化ジルコニアを溶射し、表面側がCaOの含有
量が４〜10重量％である安定化ジルコニアを溶射
し、両溶射層間はその中間のCaO含有量の安定化
ジルコニアを１層以上溶射することを特徴とする
特許請求の範囲１記載の電子部品焼成用治具の製
造方法。 ４ 基材側がCaO含有量が６〜15重量％である安
定化ジルコニア、表面側がCaO含有量が４〜10重
量％である安定化ジルコニアを、CaO含有量が連
続的に変化するように溶射することを特徴とする
特許請求の範囲１記載の電子部品焼成用治具の製
造方法。[Claims] 1. A method of thermally spraying stabilized zirconia with a CaO content of 4 to 15% by weight on the surface of a refractory base material consisting of 85% by weight or more of Al 2 O 3 and 15% by weight or less of SiO 2 . A method for producing a jig for firing an electronic component, characterized in that during thermal spraying, stabilized zirconia with a low CaO content in the thermal spraying material is gradually sprayed from the base material side toward the surface. 2. Stabilized zirconia with a CaO content of 6 to 15% by weight is sprayed on the base material side, and then CaO is applied on top of it.
2. The method of manufacturing a jig for firing electronic components according to claim 1, wherein stabilized zirconia having a content of 4 to 10% by weight is thermally sprayed. 3 Stabilized zirconia with a CaO content of 6 to 15% by weight is sprayed on the base material side, stabilized zirconia with a CaO content of 4 to 10% by weight is sprayed on the surface side, and the space between the two sprayed layers is 2. A method for manufacturing a jig for firing electronic components according to claim 1, characterized in that one or more layers of stabilized zirconia having an intermediate CaO content are thermally sprayed. 4. Spray stabilized zirconia with a CaO content of 6 to 15% by weight on the base material side and stabilized zirconia with a CaO content of 4 to 10% by weight on the surface side so that the CaO content changes continuously. A method for manufacturing a jig for firing electronic components according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14628484A JPS6124225A (en) | 1984-07-13 | 1984-07-13 | Method of producing jig for electronic part baking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14628484A JPS6124225A (en) | 1984-07-13 | 1984-07-13 | Method of producing jig for electronic part baking |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6124225A JPS6124225A (en) | 1986-02-01 |
| JPH04586B2 true JPH04586B2 (en) | 1992-01-08 |
Family
ID=15404222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14628484A Granted JPS6124225A (en) | 1984-07-13 | 1984-07-13 | Method of producing jig for electronic part baking |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6124225A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01126285A (en) * | 1987-11-10 | 1989-05-18 | Ngk Insulators Ltd | Zirconia coated ceramic tool |
| JPH02102171A (en) * | 1988-10-11 | 1990-04-13 | Nichias Corp | Ceramic firing aids and refractories |
| US5201547A (en) * | 1991-04-10 | 1993-04-13 | Toyota Jidosha Kabushiki Kaisha | Rear under body structure |
| JP5235753B2 (en) * | 2009-03-31 | 2013-07-10 | ニチコン株式会社 | Manufacturing method of positive temperature coefficient thermistor |
| JP6342844B2 (en) * | 2015-05-11 | 2018-06-13 | 株式会社アテクト | Turbine wheel manufacturing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6051426B2 (en) * | 1980-10-31 | 1985-11-13 | 東芝セラミツクス株式会社 | Multilayer container for heat treatment of electronic industrial parts and method for manufacturing the same |
| JPS5922148A (en) * | 1982-07-29 | 1984-02-04 | Fujitsu Ltd | Diagnostic system |
-
1984
- 1984-07-13 JP JP14628484A patent/JPS6124225A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6124225A (en) | 1986-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |