JPH0458902B2 - - Google Patents

Info

Publication number
JPH0458902B2
JPH0458902B2 JP7163486A JP7163486A JPH0458902B2 JP H0458902 B2 JPH0458902 B2 JP H0458902B2 JP 7163486 A JP7163486 A JP 7163486A JP 7163486 A JP7163486 A JP 7163486A JP H0458902 B2 JPH0458902 B2 JP H0458902B2
Authority
JP
Japan
Prior art keywords
light
pattern
inspected
reflected light
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7163486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62228149A (ja
Inventor
Kyotaka Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP7163486A priority Critical patent/JPS62228149A/ja
Publication of JPS62228149A publication Critical patent/JPS62228149A/ja
Publication of JPH0458902B2 publication Critical patent/JPH0458902B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7163486A 1986-03-28 1986-03-28 表面欠陥検査装置 Granted JPS62228149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7163486A JPS62228149A (ja) 1986-03-28 1986-03-28 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7163486A JPS62228149A (ja) 1986-03-28 1986-03-28 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS62228149A JPS62228149A (ja) 1987-10-07
JPH0458902B2 true JPH0458902B2 (ko) 1992-09-18

Family

ID=13466274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7163486A Granted JPS62228149A (ja) 1986-03-28 1986-03-28 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS62228149A (ko)

Also Published As

Publication number Publication date
JPS62228149A (ja) 1987-10-07

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