JPH0458901B2 - - Google Patents

Info

Publication number
JPH0458901B2
JPH0458901B2 JP6181586A JP6181586A JPH0458901B2 JP H0458901 B2 JPH0458901 B2 JP H0458901B2 JP 6181586 A JP6181586 A JP 6181586A JP 6181586 A JP6181586 A JP 6181586A JP H0458901 B2 JPH0458901 B2 JP H0458901B2
Authority
JP
Japan
Prior art keywords
light
inspected
pattern
reflected light
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6181586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62217148A (ja
Inventor
Kyotaka Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP6181586A priority Critical patent/JPS62217148A/ja
Publication of JPS62217148A publication Critical patent/JPS62217148A/ja
Publication of JPH0458901B2 publication Critical patent/JPH0458901B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6181586A 1986-03-18 1986-03-18 表面欠陥検査装置 Granted JPS62217148A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6181586A JPS62217148A (ja) 1986-03-18 1986-03-18 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6181586A JPS62217148A (ja) 1986-03-18 1986-03-18 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS62217148A JPS62217148A (ja) 1987-09-24
JPH0458901B2 true JPH0458901B2 (ko) 1992-09-18

Family

ID=13181956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6181586A Granted JPS62217148A (ja) 1986-03-18 1986-03-18 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS62217148A (ko)

Also Published As

Publication number Publication date
JPS62217148A (ja) 1987-09-24

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