JPH0459458U - - Google Patents
Info
- Publication number
- JPH0459458U JPH0459458U JP10203290U JP10203290U JPH0459458U JP H0459458 U JPH0459458 U JP H0459458U JP 10203290 U JP10203290 U JP 10203290U JP 10203290 U JP10203290 U JP 10203290U JP H0459458 U JPH0459458 U JP H0459458U
- Authority
- JP
- Japan
- Prior art keywords
- inspection table
- cylinder
- tips
- oblique light
- positioning member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図は本考案の斜光検査台の実施例を示す駆
動部の平面図、第２図は同じく側面断面図である
。
１……テーブル、２……ケース、２ａ……ケー
スの底板、３……駆動部、４……ガイド、６……
第１の回転軸、７……第２の回転軸、８……第３
の回転軸、９……第１の駆動モータ、１０……第
２の駆動モータ、１１……第３の駆動モータ、１
２……連結部、１３……第１の支持部、１４……
軸受け、１５……第２の支持部、１６……ステー
、１７……固定部、１８……ピン、１９……シリ
ンダ取付け板、２０……第１のエアシリンダ、２
１……第２のエアシリンダ、２２……第３のエア
シリンダ。
FIG. 1 is a plan view of a driving section showing an embodiment of the oblique light inspection table of the present invention, and FIG. 2 is a side sectional view of the same. DESCRIPTION OF SYMBOLS 1...Table, 2...Case, 2a...Bottom plate of case, 3...Drive unit, 4...Guide, 6...
1st rotation axis, 7...2nd rotation axis, 8...3rd rotation axis
rotating shaft, 9...first drive motor, 10...second drive motor, 11...third drive motor, 1
2... Connecting part, 13... First support part, 14...
Bearing, 15...Second support part, 16...Stay, 17...Fixing part, 18...Pin, 19...Cylinder mounting plate, 20...First air cylinder, 2
1...Second air cylinder, 22...Third air cylinder.
Claims (1)
転並びに前後左右方向に傾斜可能とした検査テー
ブルを備えた斜光検査台において、 検査テーブルの下面に設けられた回転位置の位
置決め部材と、 前記の位置決め部材と嵌合部材を先端に持つ第
１のシリンダと、 前記の第１のシリンダと共に検査テーブルの水
平位置を調整する支持部材を先端に持つ第２及び
第３のシリンダと、 を設けたことを特徴とする斜光検査台。[Scope of Claim for Utility Model Registration] In an oblique light inspection table equipped with a glass substrate mounting portion on the upper surface and an inspection table that can be rotated and tilted in front, back, left, and right directions, a positioning member; a first cylinder having the positioning member and the fitting member at its tips; and second and third cylinders having supporting members at their tips that adjust the horizontal position of the inspection table together with the first cylinder. An oblique light inspection table characterized by having a cylinder and the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10203290U JPH0729481Y2 (en) | 1990-09-28 | 1990-09-28 | Oblique inspection table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10203290U JPH0729481Y2 (en) | 1990-09-28 | 1990-09-28 | Oblique inspection table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459458U true JPH0459458U (en) | 1992-05-21 |
| JPH0729481Y2 JPH0729481Y2 (en) | 1995-07-05 |
Family
ID=31845961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10203290U Expired - Lifetime JPH0729481Y2 (en) | 1990-09-28 | 1990-09-28 | Oblique inspection table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729481Y2 (en) |
-
1990
- 1990-09-28 JP JP10203290U patent/JPH0729481Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729481Y2 (en) | 1995-07-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |