JPH0463643U - - Google Patents
Info
- Publication number
- JPH0463643U JPH0463643U JP10719290U JP10719290U JPH0463643U JP H0463643 U JPH0463643 U JP H0463643U JP 10719290 U JP10719290 U JP 10719290U JP 10719290 U JP10719290 U JP 10719290U JP H0463643 U JPH0463643 U JP H0463643U
- Authority
- JP
- Japan
- Prior art keywords
- process equipment
- substrate
- standby position
- size
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図は本考案の一例の自走式基板搬送ロボツ
トを用いた半導体製造装置の一例を示す斜視図、
第２図は本考案の基板搬送装置を示す斜視図、第
３図は基板搬送装置の一部断面側面図、第４図は
第２図の−線矢視断面図、第５図は両アーム
と仕切り板との関係を示す平面図、第６図は仕切
り板の変形例を示す平面図、第７図は仕切り板の
他の変形例を示す側面図、第８図は仕切り板の固
定方法の変形例を示す側面図である。
１……塗布ユニツト、２……現像ユニツト、３
……熱処理ユニツト、６……自走式基板搬送ロボ
ツト、１０……上段アーム、１１……下段アーム
、２５……仕切り板、Ｗ……基板。
FIG. 1 is a perspective view showing an example of a semiconductor manufacturing apparatus using a self-propelled substrate transfer robot according to an example of the present invention;
Fig. 2 is a perspective view showing the substrate transfer device of the present invention, Fig. 3 is a partially sectional side view of the substrate transfer device, Fig. 4 is a sectional view taken along the - line in Fig. 2, and Fig. 5 shows both arms. 6 is a plan view showing a modified example of the partition plate, FIG. 7 is a side view showing another modified example of the partition plate, and FIG. 8 is a method of fixing the partition plate. It is a side view which shows the modification of . 1...Coating unit, 2...Developing unit, 3
...Heat treatment unit, 6...Self-propelled substrate transfer robot, 10...Upper arm, 11...Lower arm, 25...Partition plate, W...Substrate.
Claims (1)
に移動可能に支持され、基台上の待機位置からプ
ロセス装置方向に進退して、このプロセス装置へ
の未処理基板の供給および、プロセス装置からの
処理済基板の取出しをする複数のアームを有し、
且つ上記各アームの待機位置において各アームが
上下に位置するような構造の基板搬送装置におい
て、 前記待機位置における上段のアームと下段のア
ームとの間に、下段アームに支持された基板の大
きさと同等か、それ以上の大きさを有する仕切り
板が設けられていることを特徴とする基板搬送装
置。[Claims for Utility Model Registration] The substrate is movably supported on a base that moves between process equipment that processes substrates, and is moved forward and backward from a standby position on the base towards the process equipment to transfer unprocessed substrates to the process equipment. It has multiple arms for supplying and removing processed substrates from the process equipment,
In addition, in the substrate transfer device having a structure in which the arms are positioned one above the other in the standby position of each arm, the size and size of the substrate supported by the lower arm are located between the upper arm and the lower arm in the standby position. A substrate transfer device characterized by being provided with a partition plate having an equal or larger size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10719290U JP2516877Y2 (en) | 1990-10-12 | 1990-10-12 | Substrate transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10719290U JP2516877Y2 (en) | 1990-10-12 | 1990-10-12 | Substrate transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0463643U true JPH0463643U (en) | 1992-05-29 |
| JP2516877Y2 JP2516877Y2 (en) | 1996-11-13 |
Family
ID=31853594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10719290U Expired - Lifetime JP2516877Y2 (en) | 1990-10-12 | 1990-10-12 | Substrate transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516877Y2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11238775A (en) * | 1998-02-20 | 1999-08-31 | Hirata Corp | Robot apparatus |
| JP2008030151A (en) * | 2006-07-28 | 2008-02-14 | Daihen Corp | Linear movement mechanism and transfer robot using the same |
| US7538857B2 (en) | 2004-12-23 | 2009-05-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
| US7656506B2 (en) | 2004-12-23 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
| JP2013080812A (en) * | 2011-10-04 | 2013-05-02 | Ulvac Japan Ltd | Substrate processing apparatus |
-
1990
- 1990-10-12 JP JP10719290U patent/JP2516877Y2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11238775A (en) * | 1998-02-20 | 1999-08-31 | Hirata Corp | Robot apparatus |
| US7538857B2 (en) | 2004-12-23 | 2009-05-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
| US7656506B2 (en) | 2004-12-23 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
| US8411252B2 (en) | 2004-12-23 | 2013-04-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
| JP2008030151A (en) * | 2006-07-28 | 2008-02-14 | Daihen Corp | Linear movement mechanism and transfer robot using the same |
| JP2013080812A (en) * | 2011-10-04 | 2013-05-02 | Ulvac Japan Ltd | Substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2516877Y2 (en) | 1996-11-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |