JPH0464713U

JPH0464713U -

Info

Publication number: JPH0464713U
Application number: JP10884790U
Authority: JP
Priority date: 1990-10-16
Filing date: 1990-10-16
Publication date: 1992-06-03

Description

[Brief explanation of drawings]

第１図は本考案に係る測定ヘツドの一部破断分
解斜視図、第２図は半導体レーザユニツトの分解
斜視図、第３図は半導体レーザとコリメータレン
ズの位置関係を説明する側面図、第４図は窓の傾
斜状態を説明する側面図、第５図は一次元イメー
ジセンサーの位置を説明する正面図、第６図は電
子冷却装置の断面図、第７図は外部回路のブロツ
ク図、第８図は一次元イメージセンサー上の光強
度分布を示すグラフ、第９図は本考案において形
成される各種光学系を示す図、第１０図は対象物
体の移動量とイメージセンサー上でのスペツクル
パターンの移動量の一般的関係を説明する図であ
る。１……測定ヘツド、１０……ケーシング、１４
……窓、２１……半導体レーザ、２５……コリメ
ータレンズ、１６……アダプターレンズ、４……
イメージセンサー。 FIG. 1 is a partially cutaway exploded perspective view of a measurement head according to the present invention, FIG. 2 is an exploded perspective view of a semiconductor laser unit, FIG. 3 is a side view illustrating the positional relationship between the semiconductor laser and the collimator lens, and FIG. 5 is a front view illustrating the position of the one-dimensional image sensor; FIG. 6 is a sectional view of the electronic cooling device; FIG. 7 is a block diagram of the external circuit; Figure 8 is a graph showing the light intensity distribution on the one-dimensional image sensor, Figure 9 is a diagram showing various optical systems formed in the present invention, and Figure 10 is a graph showing the amount of movement of the target object and the speckle on the image sensor. FIG. 3 is a diagram illustrating a general relationship between pattern movement amounts. 1...Measuring head, 10...Casing, 14
... window, 21 ... semiconductor laser, 25 ... collimator lens, 16 ... adapter lens, 4 ...
image sensor.

Claims

[Claims for Utility Model Registration] A laser beam is irradiated onto the surface of an object to be measured, and the speckle pattern appearing on the observation surface opposite to the laser irradiation surface of the object is received and photoelectrically converted into an image signal. In the speckle length measuring meter that measures the amount of movement of the target object based on the change in the image signal accompanying the movement of the target object, a semiconductor laser 21 is installed at a predetermined position in the casing 10.
The measurement head 1 is configured by accommodating a collimator lens 25 that condenses the laser light from the semiconductor laser 21 to form a parallel laser beam, and an image sensor 4 that converts the speckle pattern into an image signal. The casing 10 is provided with a window 14 through which the laser beam from the collimator lens 25 should be emitted, and an adapter lens 1 which is to converge the laser beam in the optical path of the laser beam from the collimator lens 25 to the target object.
A measuring head structure of a Speckle length measuring meter, characterized in that 6 is removably arranged. 2. The measurement head structure of a speckle length measuring meter according to claim 1, wherein the adapter lens 16 has a focal length shorter than the distance from the position of the adapter lens to the reflecting surface of the target object. 2. The measurement head structure of a speckle length measuring meter according to claim 1, wherein the adapter lens 16 has a focal length longer than the distance from the position of the adapter lens to the reflecting surface of the target object.