JPH0464714U - - Google Patents

Description

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway exploded perspective view of a measurement head according to the present invention, FIG. 2 is an exploded perspective view of a semiconductor laser unit, FIG. 3 is a side view illustrating the positional relationship between the semiconductor laser and the collimator lens, and FIG. 5 is a front view illustrating the position of the one-dimensional image sensor; FIG. 6 is a sectional view of the electronic cooling device; FIG. 7 is a block diagram of the external circuit; Figure 8 is a graph showing the light intensity distribution on the one-dimensional image sensor, Figure 9 is a diagram explaining the effects of the present invention, and Figure 10 is the amount of movement of the target object and the movement of the speckle pattern on the image sensor. It is a figure explaining the general relationship of quantity. 1...Measuring head, 10...Casing, 14
... window, 21 ... semiconductor laser, 25 ... collimator lens, 16 ... polarizing filter, 4 ... image sensor.

Claims (1)

[Claim for Utility Model Registration] A linearly polarized laser beam is irradiated onto the surface of an object to be measured, and a speckle pattern appearing on an observation surface opposite to the laser irradiation surface of the object is received and converted into an image signal. In a speckle length measuring meter that performs photoelectric conversion and measures the amount of movement of a target object based on a change in the image signal accompanying the movement of the target object, a semiconductor laser 21 is disposed at a predetermined position within the casing 10; The measuring head 1 is constructed by accommodating a collimator lens 25 that condenses laser light from a target object to form a laser beam, and an image sensor 4 that receives reflected light from a target object and converts the speckle pattern into an image signal. The casing 10 includes a collimator lens 25.
A window 14 is provided to emit the laser beam 8 from the target object 7, and the emitted laser beam 8 is provided in the optical path of the reflected light 81 from the target object 7 to the image sensor 4.
A measurement head structure of a speckle length measuring meter, characterized in that a polarizing filter 16 having a polarization direction perpendicular or substantially perpendicular to the polarization direction of the speckle length meter is disposed. The measuring head structure of a speckle length measuring meter according to claim 1, wherein the polarizing filter (16) is detachably attached to the casing (10).