JPH0464800U

JPH0464800U -

Info

Publication number: JPH0464800U
Application number: JP10875090U
Authority: JP
Priority date: 1990-10-17
Filing date: 1990-10-17
Publication date: 1992-06-03
Anticipated expiration: 2005-10-17
Also published as: JPH0754960Y2

Description

[Brief explanation of drawings]

第１図は、この考案の一実施例を示す光取り出
しラインの縦断面図および揺動機構の制御系統を
示すブロツク図である。第２図は、ＳＯＲ光装置
の概要を示す平面図である。第３図は、従来の光
取り出しラインの構造を示す縦断面図である。第
４図は、第３図の窓３２の形状を示す正面図であ
る。第５図は、従来提案されていた窓部の揺動機
構およびその揺動制御系統を示すブロツク図であ
る。第６図は、第１図および第５図の窓４４の形
状を示す正面図である。第７図は、第５図の揺動
機構の揺動動作を示す縦断面図である。第８図は
、この考案の他の実施例を示す光取り出しライン
の縦断面図である。第９図は、この考案の変更例
を示す縦断面図である。１……ＳＯＲ光装置、２６……光取り出しライ
ン、２９……ＳＯＲ光、３０……斜入射ミラー、
３６……ミラー揺動機構、６４……揺動制御手段
、７０……ゲートバルブ、７６……２重ベローズ
（多重ベローズ）、７８……内周側ベローズ、８
０……外周側ベローズ、８６……真空計（圧力検
出器）。 FIG. 1 is a longitudinal cross-sectional view of a light extraction line and a block diagram showing a control system of a swinging mechanism, showing an embodiment of this invention. FIG. 2 is a plan view showing an outline of the SOR optical device. FIG. 3 is a longitudinal sectional view showing the structure of a conventional light extraction line. FIG. 4 is a front view showing the shape of the window 32 in FIG. 3. FIG. FIG. 5 is a block diagram showing a conventionally proposed window swing mechanism and its swing control system. FIG. 6 is a front view showing the shape of the window 44 in FIGS. 1 and 5. FIG. FIG. 7 is a longitudinal sectional view showing the swinging operation of the swinging mechanism shown in FIG. 5. FIG. FIG. 8 is a longitudinal sectional view of a light extraction line showing another embodiment of this invention. FIG. 9 is a longitudinal sectional view showing a modification of this invention. 1... SOR optical device, 26... Light extraction line, 29... SOR light, 30... Oblique incidence mirror,
36... Mirror rocking mechanism, 64... Rocking control means, 70... Gate valve, 76... Double bellows (multiple bellows), 78... Inner peripheral side bellows, 8
0...Outer bellows, 86...Vacuum gauge (pressure detector).

Claims

[Claims for Utility Model Registration] (1) A window device that is installed at the end of a light extraction line of an SOR optical device and emits SOR light from the window with the light extraction line vacuum-sealed, It has a portion made up of multiple bellows in which a plurality of cylindrical bellows with different diameters are arranged concentrically at a position closer to the light source than the window, and this multiple bellows transmits the SOR light inside the innermost bellows. space between the innermost bellows and the outermost bellows, the pressure being higher than inside the light extraction line and lower than the pressure outside the outermost bellows. A window device for SOR light emission in an SOR optical device, which has a layer and further includes a pressure detector for detecting the pressure of the spatial layer. (2) A gate valve for blocking a light extraction line is provided at a position closer to the light source than the multiple bellows, and a connection between the gate valve and the multiple bellows is configured to be detachable. A window device for SOR light emission in the SOR light device described above.