JPH0465145B2 - - Google Patents

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Publication number
JPH0465145B2
JPH0465145B2 JP61069336A JP6933686A JPH0465145B2 JP H0465145 B2 JPH0465145 B2 JP H0465145B2 JP 61069336 A JP61069336 A JP 61069336A JP 6933686 A JP6933686 A JP 6933686A JP H0465145 B2 JPH0465145 B2 JP H0465145B2
Authority
JP
Japan
Prior art keywords
silicon carbide
gas
film
carbide film
microcrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61069336A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62224674A (ja
Inventor
Yoshihisa Fujii
Akira Suzuki
Akitsugu Hatano
Masaru Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP61069336A priority Critical patent/JPS62224674A/ja
Publication of JPS62224674A publication Critical patent/JPS62224674A/ja
Publication of JPH0465145B2 publication Critical patent/JPH0465145B2/ja
Granted legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP61069336A 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法 Granted JPS62224674A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61069336A JPS62224674A (ja) 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61069336A JPS62224674A (ja) 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62224674A JPS62224674A (ja) 1987-10-02
JPH0465145B2 true JPH0465145B2 (lt) 1992-10-19

Family

ID=13399606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61069336A Granted JPS62224674A (ja) 1986-03-26 1986-03-26 微結晶炭化珪素膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62224674A (lt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2692091B2 (ja) * 1987-10-31 1997-12-17 株式会社日本自動車部品総合研究所 炭化ケイ素半導体膜およびその製造方法
US5465680A (en) * 1993-07-01 1995-11-14 Dow Corning Corporation Method of forming crystalline silicon carbide coatings

Also Published As

Publication number Publication date
JPS62224674A (ja) 1987-10-02

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