JPH0465459U - - Google Patents

Info

Publication number
JPH0465459U
JPH0465459U JP10782490U JP10782490U JPH0465459U JP H0465459 U JPH0465459 U JP H0465459U JP 10782490 U JP10782490 U JP 10782490U JP 10782490 U JP10782490 U JP 10782490U JP H0465459 U JPH0465459 U JP H0465459U
Authority
JP
Japan
Prior art keywords
metal film
dielectric film
film
dielectric
film provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10782490U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10782490U priority Critical patent/JPH0465459U/ja
Publication of JPH0465459U publication Critical patent/JPH0465459U/ja
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)

Description

【図面の簡単な説明】
第１図ａは、本考案の一実施例を示す平面図、
第１図ｂは第１図ａのＸ―Ｘ線断面図、第２図は
一実施例の変形を示す断面図、第３図ａは従来例
を示す平面図、第３図ｂは第３図ａのＸ―Ｘ線断
面図である。 １……基板、２……第１金属膜、３……第１誘
電体膜、４……第２金属膜、５……第２誘電体膜
、６……第３誘電体膜、７……下層配線、８……
誘電体膜、９……上層配線。

Claims (1)

    【実用新案登録請求の範囲】
  1. 所定層次の第１金属膜と、前記第１金属膜上に
    設けられた第１誘電体膜と、前記第１誘電体膜上
    に設けられた第２金属膜からなる一方の電極と、
    前記第２金属膜上に設けられた第２誘電体膜と、
    前記第２誘電体膜上に設けられた第３の金属膜及
    び前記第１金属膜からなる他方の電極とを有する
    ことを特徴とする集積回路用キヤパシタ。
JP10782490U 1990-10-15 1990-10-15 Pending JPH0465459U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10782490U JPH0465459U (ja) 1990-10-15 1990-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10782490U JPH0465459U (ja) 1990-10-15 1990-10-15

Publications (1)

Publication Number Publication Date
JPH0465459U true JPH0465459U (ja) 1992-06-08

Family

ID=31854514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10782490U Pending JPH0465459U (ja) 1990-10-15 1990-10-15

Country Status (1)

Country Link
JP (1) JPH0465459U (ja)

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