JPH0466587U - - Google Patents

Info

Publication number
JPH0466587U
JPH0466587U JP10942990U JP10942990U JPH0466587U JP H0466587 U JPH0466587 U JP H0466587U JP 10942990 U JP10942990 U JP 10942990U JP 10942990 U JP10942990 U JP 10942990U JP H0466587 U JPH0466587 U JP H0466587U
Authority
JP
Japan
Prior art keywords
thermostatic chamber
testing device
outrail
shutter
heat conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10942990U
Other languages
English (en)
Other versions
JP2533768Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10942990U priority Critical patent/JP2533768Y2/ja
Publication of JPH0466587U publication Critical patent/JPH0466587U/ja
Application granted granted Critical
Publication of JP2533768Y2 publication Critical patent/JP2533768Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例を示す断面図、第
２図はＩＣ試験装置のＩＣ搬送通路の形態を説明
するための側面図、第３図は従来の技術を説明す
るための断面図、第４図はこの考案の実施例に用
いたシヤツタの構造を説明するための平面図、第
５図乃至第８図はＩＣの種類を説明するための正
面図である。 ２Ａ……被試験ＩＣ、３……接続ユニツト、４
……恒温槽、５……出口、６……シヤツタ、７…
…ＩＣガイドレール、８……アウトレール、１２
……ノズル、１３……乾燥空気、１４……孔、１
５……熱良導体。

Claims (1)

  1. 【実用新案登録請求の範囲】 Ａ 恒温槽内において被試験ＩＣを試験し、試験
    されたＩＣをアウトレールと恒温槽の出口に設け
    たシヤツタを通じて恒温槽から取出すように構成
    したＩＣ試験装置において、 Ｂ 上記シヤツタとアウトレールとの間を熱伝導
    体によつて連結すると共に、この熱伝導体を加熱
    するヒータを設けて成るＩＣ試験装置。
JP10942990U 1990-10-19 1990-10-19 Ｉｃ試験装置 Expired - Lifetime JP2533768Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10942990U JP2533768Y2 (ja) 1990-10-19 1990-10-19 Ｉｃ試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10942990U JP2533768Y2 (ja) 1990-10-19 1990-10-19 Ｉｃ試験装置

Publications (2)

Publication Number Publication Date
JPH0466587U true JPH0466587U (ja) 1992-06-11
JP2533768Y2 JP2533768Y2 (ja) 1997-04-23

Family

ID=31856631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10942990U Expired - Lifetime JP2533768Y2 (ja) 1990-10-19 1990-10-19 Ｉｃ試験装置

Country Status (1)

Country Link
JP (1) JP2533768Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977757B1 (ko) * 2008-06-03 2010-08-24 주식회사 씨어테크 반도체 검사장치의 콜드챔버

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977757B1 (ko) * 2008-06-03 2010-08-24 주식회사 씨어테크 반도체 검사장치의 콜드챔버

Also Published As

Publication number Publication date
JP2533768Y2 (ja) 1997-04-23

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