JPH0467327U - - Google Patents

Info

Publication number
JPH0467327U
JPH0467327U JP11135690U JP11135690U JPH0467327U JP H0467327 U JPH0467327 U JP H0467327U JP 11135690 U JP11135690 U JP 11135690U JP 11135690 U JP11135690 U JP 11135690U JP H0467327 U JPH0467327 U JP H0467327U
Authority
JP
Japan
Prior art keywords
exhaust
monitoring device
pressure monitoring
exhaust pressure
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11135690U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11135690U priority Critical patent/JPH0467327U/ja
Publication of JPH0467327U publication Critical patent/JPH0467327U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図、第２図はこの考案の実施例をそれぞれ
示すＣＶＤ装置の排気圧力監視装置の概略構成図
、第３図は従来のＣＶＤ装置の排気圧力監視装置
を示す概略構成図である。 図において、１はポンプ、２は圧力ゲージ、３
は導入管、４，７は排気管、５はベントパージガ
ス導入口、８はポンプパージガス導入口である。
なお、各図中の同一符号は同一または相当部分を
示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ＣＶＤ装置の排気圧を監視する排気圧力監視装
    置において、排気ポンプの入力側または出力側の
    排気管と圧力ゲージをつなぐ導入管の任意の位置
    に前記排気管内のガスを排出する不活性ガスを導
    入するパージガス導入口を設けたことを特徴とす
    るＣＶＤ装置の排気圧力監視装置。
JP11135690U 1990-10-23 1990-10-23 Pending JPH0467327U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11135690U JPH0467327U (ja) 1990-10-23 1990-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11135690U JPH0467327U (ja) 1990-10-23 1990-10-23

Publications (1)

Publication Number Publication Date
JPH0467327U true JPH0467327U (ja) 1992-06-15

Family

ID=31858793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11135690U Pending JPH0467327U (ja) 1990-10-23 1990-10-23

Country Status (1)

Country Link
JP (1) JPH0467327U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012160614A (ja) * 2011-02-01 2012-08-23 Tokyo Electron Ltd 成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012160614A (ja) * 2011-02-01 2012-08-23 Tokyo Electron Ltd 成膜装置

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