JPH0467342U - - Google Patents
Info
- Publication number
- JPH0467342U JPH0467342U JP11001590U JP11001590U JPH0467342U JP H0467342 U JPH0467342 U JP H0467342U JP 11001590 U JP11001590 U JP 11001590U JP 11001590 U JP11001590 U JP 11001590U JP H0467342 U JPH0467342 U JP H0467342U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- evaluation device
- temperature measurement
- circuit evaluation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000011156 evaluation Methods 0.000 claims description 4
- 238000009529 body temperature measurement Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例である半導体集積
回路評価装置の測定部を示す斜視図、第２図は従
来の半導体集積回路評価装置の測定部を示す斜視
図である。
図において、１は端子固定機、２ａ，２ｂはテ
スター側接続端子、３ａ，３ｂは半導体集積回路
側接続端子、４は半導体集積回路、５はレール、
６ａ，６ｂはテスターヘツド、７は導線、８は進
入機、９は通路、１０は排出機、１１は排出機構
、１２はエアーノズル、１３はエアー供給管、１
４はエアーノズルスタンドを示す。なお、図中、
同一符号は同一、又は相当部分を示す。
FIG. 1 is a perspective view showing a measuring section of a semiconductor integrated circuit evaluation apparatus which is an embodiment of this invention, and FIG. 2 is a perspective view showing a measuring section of a conventional semiconductor integrated circuit evaluation apparatus. In the figure, 1 is a terminal fixing device, 2a and 2b are connection terminals on the tester side, 3a and 3b are connection terminals on the semiconductor integrated circuit side, 4 is a semiconductor integrated circuit, 5 is a rail,
6a and 6b are tester heads, 7 is a conductor, 8 is an entry device, 9 is a passage, 10 is an ejector, 11 is an ejection mechanism, 12 is an air nozzle, 13 is an air supply pipe, 1
4 indicates an air nozzle stand. In addition, in the figure,
The same reference numerals indicate the same or equivalent parts.
Claims (1)
導体集積回路に設けられた温度測定用端子とこの
温度測定用端子とを接続する接続端子を備えたこ
とを特徴とする半導体集積回路評価装置。 A semiconductor integrated circuit evaluation device, characterized in that the measurement unit of the semiconductor integrated circuit evaluation device includes a temperature measurement terminal provided on the semiconductor integrated circuit and a connection terminal for connecting the temperature measurement terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11001590U JPH0467342U (en) | 1990-10-19 | 1990-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11001590U JPH0467342U (en) | 1990-10-19 | 1990-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0467342U true JPH0467342U (en) | 1992-06-15 |
Family
ID=31857293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11001590U Pending JPH0467342U (en) | 1990-10-19 | 1990-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0467342U (en) |
-
1990
- 1990-10-19 JP JP11001590U patent/JPH0467342U/ja active Pending