JPH0467409A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To make the joining surface of a slider block on which a first core is to be formed flat, and to prevent a gap from being formed between the joining surfaces by forming beforehand a recessed part at the first core formation expecting position of the joining surface of the slider block of one side, and burying the first core in this recessed part by sticking a material film to the recessed part. CONSTITUTION:A resist film 22 is stuck and formed at the position except the first core formation expecting position (m) of the joining surface 21a of the slider block 21 of one side made of non-magnetic material, and the first core formation expecting position (m) is etching treated, and the recessed part 23 as deep as the portion of the thickness of the core is formed. After burying the first core 25 in the recessed part 23 by sticking and forming the metallic magnet film 24 as thick as the portion of the thickness of the core extending over the whole joining surface, the resist film 22 is peeled off, and the metallic magnetic film on it is removed. Next, a first core block 27 in which a pair of the slider blocks 21, 26 are integrated into one body and a second core block 31 are integrated into one body by sticking the second core block 31 to the end surface where a part of the first core 25 of the first core block 27 is exposed through the non-magnetic film by aligning the first and the second cores. Thus, the first core 25 is formed on a part of the joining surface 21a of the slider block 21, and in addition, the gap is prevented from being formed even if a pair of the slider blocks are joined and integrated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a magnetic head.
The present invention relates to a method of manufacturing a magnetic head used in a D (hard disk drive) device.

[Conventional technology]

In HDD (hard disk drive) devices used as external storage devices for computer systems, a disk-shaped magnetic recording medium rotates at a high speed of 3000 to 3600 rpm, so the magnetic head is separated from the magnetic recording medium by 0.3 rpm.
Information is recorded and reproduced in a state where it is slightly floated by about μ.

A conventional method of manufacturing a magnetic head used in the above-mentioned HDD device will be explained with reference to FIGS.

First, as shown in FIG. 5, a pair of slider blocks (1) and (2) made of a non-magnetic material including a hard abrasion-resistant ceramic such as alumina titanium carbide are prepared. Then, as shown in FIG. 6, a metal magnetic film (3) such as Sendust is deposited to a predetermined thickness on the entire surface of the joint surface (1a) of one slider block (1) by sputtering or the like. Form a core (4). Here, the film thickness of the metal magnetic film (3), ie, the core thickness of the first core (4), becomes the track width of the magnetic gap, which will be described later. next,
As shown in Fig. 7, a pair of slider blocks (1) (2)
) are abutted against each other and bonded together by glass welding or the like to obtain a first core block (5). A substantially C-shaped second core block (9) is prepared in the same manner as this first core block (5), and has a second core (6) sandwiched between a pair of sliders (7) and (8) from both sides. do. The central part of this second core block (9) has a concave groove (1
0), the wire is wound a predetermined number of turns to form a coil (
11) is formed. Finally, as shown in FIG. 8, the second core block (9) is attached to the 5
Glue the first and second cores (4) and (6) in alignment by glass welding or the like to the end surface (5a) of the first core block (5) via a non-magnetic thin film (not shown) such as i02. Unify.

In the magnetic head manufactured as described above, as shown in FIG. 9, the lower surface (5b) of the first core block (5) is a surface facing the magnetic recording medium (12) in a floating state, The magnetic recording medium (work 2) runs from the direction of the arrow in the figure with the second core block (9) side at the rear, and the first core (4
) and the second core (6)
Information is recorded and played back.

[Problem to be solved by the invention]

By the way, in the conventional magnetic head manufacturing method described above,
The first core (4) of the first core block (5) is coated with metal magnetic III! over the entire joint surface (1a) of one slider block (1). It is formed by applying (3). If the first core (4) is located on the entire surface of the slider block (1) in this way, the loss will increase when information is recorded or reproduced in the magnetic gap g behind it, and the magnetic head characteristics will deteriorate.

Therefore, the first core (4) is connected to the slider block (1).
The first core (4'') is not formed on the entire surface (1a) of the slider block (1a), but is formed only on a part of the rear side of the slider block (1), that is, on the second core block (9) side, as shown in FIG. There are ways to think about it. However, this slider block (
1) and the other slider block (2) are bonded and integrated by abutting their joint surfaces, the first core (4)
The lower surface (5b) of the first core block (5) facing the magnetic recording medium (12) is a step caused by the thickness of the first core block (5).
voids are formed. On the other hand, a magnetic head and a magnetic recording medium used in an HDD device float and are not in contact with each other while the medium is rotating, but when the medium is stopped, the two come into contact. Therefore, in normal use, this contact and floating are repeated. Therefore, there is a possibility that the edge portion of the periphery of the gap described above may damage the magnetic recording medium (12).

Therefore, the present invention has been proposed in view of the above problems, and its purpose is to form the first core on a part of the joint surface of the slider block, and to join and integrate a pair of slider blocks. It is an object of the present invention to provide a method of manufacturing a magnetic head in which no air gap is formed even when the magnetic head is formed.

[Means to solve the problem]

Technical means for achieving the above object of the present invention include a step of depositing and forming a resist film on a joint surface of one slider block made of a non-magnetic material, excluding a region where the first core is to be formed; A step of etching the area where the first core is to be formed of the block and forming a recess having a depth equal to the core thickness in the area where the first core is expected to be formed, and a metal magnetic film is applied to the resist film of the slider block and the entire surface of the recess. burying the first core in the recess by depositing it in a film thickness equal to the core thickness, and then peeling off the resist film and removing the undesired metal magnetic film thereon; A step of joining and integrating one slider block formed with the other slider block by abutting their joining surfaces together; A substantially C-shaped second core block, in which a second core is sandwiched between a pair of sliders from both sides, is placed on the partially exposed end surface of the non-magnetic material i that will serve as a gear and a bus spacer.
Il! The first and second cores are brought into contact with each other in an aligned state via the first and second cores.

[Effect]

In the method of the present invention, a recess is formed in advance in the area where the first core is to be formed on the joint surface of one slider pro, and a metal magnetic film is applied to the recess to bury the first core. The bonding surface of the slider block on which the first core is formed becomes flat, and even if this slider block and the other slider block are bonded and integrated by abutting their bonding surfaces, a gap may occur between the bonding surfaces. There isn't.

[Embodiment] An embodiment of the method for manufacturing a magnetic head according to the present invention will be described with reference to FIGS. 1 (511 to 4).

First, as in the past, a pair of slider blocks made of a non-magnetic material made of ceramic such as alumina titanium carbide are prepared. Then, as shown in FIG. 1(a), the first
Resist III to areas other than the planned core formation area (m)!
(22) is deposited and formed by photolithography technology. Next, as shown in FIG. 1(b), the portion (m) of the slider block (21) where the first core is to be formed is etched by dry or wet etching to form a recess (23). At this time, the depth d of the recess (23) is set to be equal to the core thickness. Thereafter, as shown in FIG. 1 (C1), a metal magnetic layer (24) such as sendust is deposited on the entire surface of the resist film (22) and the recess (23) of the slider block (21) by sputtering or the like. When, the above metal magnetism III! (
24) by the core thickness, that is, the depth d of the recess (23)
Set the same as . The metal magnetic film (24) buried in the recess (23) becomes the first core (25). Next, the first
As shown in Figure (d) 5, the resist film (22) is peeled off using an organic solvent or the like, and the undesired metal magnetism 111 on it is removed.
(24) is removed. The joint surface (21a) of the slider block (21) thus obtained is flattened so that the region where the first core (25) is formed and the other regions are on the same plane.

After forming the first core (25) on one slider block (21) as described above, as shown in FIG.
26) Prepare. Then, as shown in FIG. 3, the pair of slider blocks (21) and (26) are brought together by bonding and bonding their joint surfaces together by glass welding or the like to obtain a first core block (27). At this time, since the joint surface (21a) of the slider block (21) is flattened as described above, the slider block (21) (
26) There is no gap between the bonding surfaces.

Next, as before, a pair of sliders (28) made of ceramic non-magnetic material such as alumina titanium carbide
(29) is prepared, and a metal magnetic film such as sendust is deposited on the bonding surface of one of the sliders (28) by sputtering or the like to the same film thickness as the first core (25) to form a second core (30). One slider (28) on which this second core (30) is formed is bonded and integrated with the other slider (29) by abutting their joint surfaces, and the second core (30) is bonded together. A pair of sliders (28) from both sides
(29) A substantially C-shaped second core block (31) having a sandwiched structure is obtained. A coil (33) is formed in the center of the second core block (31) by winding a wire rod a predetermined number of turns using the groove (32).

Finally, as shown in FIG.
1) is glass-welded to the end surface (27a) where a part of the first core (25) of the first core block (27) is exposed through a magnetic thin film (not shown) such as Sing that serves as a gap spacer. etc., the first and second cores (25) (30
) and then bond and integrate them in the aligned state to obtain a magnetic head.

In addition, in the above embodiment, the first core (25) has the same shape as the second core (30), but the first core (25) has the same shape as the second core (30).
does not necessarily have to have the same shape as the second core (30), and when forming the first core (25) in one slider block (21), in the above embodiment, a single first core ( 25), there are a plurality of first cores (25) on the slider block (21) (25).
. . may be formed in a predetermined arrangement relationship and then individually cut and separated.

〔Effect of the invention〕

According to the method of the present invention, since the first core is formed not on the entire surface of the joint surface of the slider block (but on a part of the second core block side), information is recorded in the magnetic gap between the first and second cores. - It is possible to reduce loss during reproduction and prevent deterioration of magnetic head characteristics.In addition, a recess is formed in advance at the area where the first core is to be formed on the joint surface of the slider block, and the first core is buried in this recess. As a result, the bonding surface of the slider block is flattened, and even when the slider block is closely integrated with the other slider block, there is no gap between the bonding surfaces, and this gap causes damage to the magnetic recording medium. Damage can also be avoided and a high quality and highly reliable magnetic head can be provided.

[Brief explanation of drawings]

FIGS. 1(a) to (d) to FIG. 4 are for explaining an embodiment of the method of the present invention, and FIGS. 1(a) to (d) show forming the first core on one slider block. Perspective views showing the slider block in each process: !F!2 is a perspective view showing the slider block forming the first core and the other slider block, and Figure 3 is a perspective view showing the slider block forming the first core. 1
FIG. 4 is a perspective view showing a core block and a second core block, and FIG. 4 is a perspective view showing a magnetic head in which the first and second core blocks are joined and integrated. 5 to 10 are for explaining a conventional method of manufacturing a magnetic head. FIG. 5 is a perspective view showing a pair of slider blocks, and FIG. 6 is a perspective view showing a pair of slider blocks forming a first core. A perspective view showing the other slider block,
FIG. 7 is a perspective view showing a first core block and a second core block joined together, FIG. 8 is a perspective view showing a magnetic head where the first and second core blocks are joined together, and FIG. A side view showing the magnetic head and magnetic recording medium in FIG. 8, and FIG. 10.
The figure is a perspective view showing a slider block with a first core formed on a part of the joint surface and the other slider block. (21) -One slider pro 7ri, (21a
)--joint surface, (22)--resist film,
(23) - one to recess, (24) - metal magnetic film, (25)... first core, (26) - other slider block, (27) -...
First core block, (27a)...end surface, (28) (29)...pair of sliders, (30)
- Second core, (31) - Second core pro, Ku (m) - - First core formation planned site, (d) - m - Depth equivalent to core thickness. Patent applicant: Kansai NEC Co., Ltd.
Rijin Gangwon Province Go Figure 2

Claims (1)

[Claims] (1) A step of depositing a resist film on the bonding surface of one slider block made of a non-magnetic material except for the region where the first core is to be formed, and etching the region of the slider block where the first core is to be formed. , forming a recess having a depth equivalent to the thickness of the core in the area where the first core is to be formed, and depositing a metal magnetic film to a thickness equivalent to the core thickness on the resist film of the slider block and the entire surface of the recess. After burying the first core in the recess, the resist film is peeled off and the undesired metal magnetic film thereon is removed. a step of abutting the joint surfaces to join and integrate the joint surfaces;
A substantially C-shaped second core block, in which the second core is sandwiched between a pair of sliders from both sides, is bonded and integrated with the first and second cores aligned through a non-magnetic thin film that serves as a gap spacer. A method of manufacturing a magnetic head, comprising the steps of: