JPH046764A - Connecting method for oxide superconductor - Google Patents

Connecting method for oxide superconductor

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Publication number
JPH046764A
JPH046764A JP10762790A JP10762790A JPH046764A JP H046764 A JPH046764 A JP H046764A JP 10762790 A JP10762790 A JP 10762790A JP 10762790 A JP10762790 A JP 10762790A JP H046764 A JPH046764 A JP H046764A
Authority
JP
Japan
Prior art keywords
oxide
superconductors
bonding
atmosphere
joining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10762790A
Other languages
Japanese (ja)
Inventor
Chie Satou
佐藤 知絵
Masahiko Sakamoto
坂本 征彦
Hisanobu Okamura
久宣 岡村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10762790A priority Critical patent/JPH046764A/en
Publication of JPH046764A publication Critical patent/JPH046764A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、酸化物系超電導体の接合方法に係り、特に、
接合工程が簡単で、且つ接続抵抗が小さい超電導接合体
を得ることができる接合方法に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for joining oxide-based superconductors, and in particular,
The present invention relates to a bonding method that allows a simple bonding process and provides a superconducting bonded body with low connection resistance.

〔従来の技術〕[Conventional technology]

超電導体の接合は、超電導特性を劣化させず、しかも、
接合部の抵抗ができるだけ小さくなるように接合するこ
とが要求される。酸化物系超電導体の接合は、酸化物で
あるために金属のぬれ性が悪いこと、超電導特性が組成
によって大きく左右されること等により、極めて難しい
Bonding of superconductors does not deteriorate superconducting properties, and
It is required to bond so that the resistance of the bonded portion is as low as possible. Bonding of oxide-based superconductors is extremely difficult because they are oxides and have poor metal wettability, and their superconducting properties are largely influenced by their composition.

現在までに論じられている接合方法の一つに。One of the joining methods currently being discussed.

アプライド フィジックス レターズ 52 (21)
第1819頁から第1821頁(1988年)(App
l、 Phys、Lett、52 (21) p、 1
819−1921 (1981))記載のように、Ar
イオン等によるスパッタエツチング後、貴金属を蒸着し
、その上にワイヤボンディングで端子を取り付ける方法
がある。この方法では、接続抵抗を10−10Ω・−オ
ーダと極めて小さくできる。しかしこの接続抵抗値は被
接合体の大きさ、及び、外部端子の接続方法などが極め
て限られた条件の場合にのみ得られる値であり、適用で
きる範囲も制限されてしまう。今後の酸化物系超電導体
の種々の応用をふまえて接合を考えるならば、被接合体
の形状・大きさ、及び、材質等に制限されない接合手法
の開発が必須である。
Applied Physics Letters 52 (21)
Pages 1819 to 1821 (1988) (App
l, Phys, Lett, 52 (21) p, 1
819-1921 (1981)), Ar
There is a method in which a precious metal is vapor-deposited after sputter etching using ions or the like, and a terminal is attached thereon by wire bonding. With this method, the connection resistance can be extremely small, on the order of 10-10 Ω. However, this connection resistance value is a value that can only be obtained under extremely limited conditions such as the size of the object to be joined and the method of connecting external terminals, and the applicable range is also limited. When considering bonding based on various future applications of oxide-based superconductors, it is essential to develop a bonding method that is not limited by the shape, size, material, etc. of the objects to be bonded.

一方、特開昭64−28284号公報に記載のように、
活性金属を含むろう材で真空中、または、不活性ガス雰
囲気中で加熱接合する方法は、被接合体の形状・大きさ
及び材質等に制限されない接合手法の一つである。しか
し、真空中、または、不活性ガス雰囲気中で加熱するこ
とにより、超電導体の組成が変化し、特性が劣化してし
まう。特性を回復させるには、酸素雰囲気中、または、
大気中でさらに熱処理を施す必要があり、接合のために
何段階もの過程をふむことになる。超電導体の特性劣化
をできるだけ避けるため、また、工程を単純化するため
に他の接合手法の開発が望まれる。
On the other hand, as described in Japanese Patent Application Laid-Open No. 64-28284,
A method of heating and bonding using a brazing filler metal containing an active metal in a vacuum or an inert gas atmosphere is one of the bonding methods that is not limited by the shape, size, material, etc. of the objects to be bonded. However, heating in vacuum or in an inert gas atmosphere changes the composition of the superconductor and deteriorates its properties. To restore the properties, in an oxygen atmosphere or
Further heat treatment in the atmosphere is required, resulting in a multi-step process for bonding. In order to avoid deterioration of superconductor properties as much as possible and to simplify the process, it is desirable to develop other bonding methods.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術のうち、貴金属蒸着による接合方法では、
接続抵抗は小さいが、適用できる範囲が限られてしまい
1種々の用途を目的とした場合の各種部材との接合には
適さないという問題があった。一方、活性金属ろうによ
る真空中、または、不活性雰囲気中での加熱は、適用範
囲は大きいが、超−電導特性を劣化させる可能性があり
、また、ろう付加熱、及び、酸素中熱処理の少なくとも
二段階の工程が必要である。
Among the above conventional techniques, the bonding method using noble metal vapor deposition,
Although the connection resistance is low, there is a problem that the applicable range is limited and it is not suitable for joining various members for a variety of purposes. On the other hand, heating with active metal solder in vacuum or in an inert atmosphere has a wide range of applications, but may deteriorate the superconducting properties. At least a two-step process is required.

本発明の目的は、応用範囲が広く、かつ、接合工程のよ
り簡単な、酸化物系超電導体の接合方法を提供すること
にある。
An object of the present invention is to provide a method for joining oxide-based superconductors that has a wide range of applications and a simpler joining process.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するために、Ag系またはAg−Cu合
金系ろう材を用いることにより、酸化物系超電導体の相
互または超電導体と他の部材とを、直接、接合できるよ
うにしたものである。また、ろう材を用いて、酸素濃度
が0.1%以上の雰囲気中で加熱することにより、−回
の加熱工程だけで接合することを可能にしたものである
In order to achieve the above object, by using an Ag-based or Ag-Cu alloy-based brazing filler metal, oxide-based superconductors or superconductors and other members can be directly bonded. . In addition, by using a brazing material and heating in an atmosphere with an oxygen concentration of 0.1% or more, it is possible to bond with only - times of heating steps.

すなわち、本発明は、酸化物系超電導体の接合で、A、
系またはA g −Cu合金系ろう材を用いて、酸素濃
度が0.1%以上の雰囲気中で加熱することを特徴とす
る酸化物系超電導体の接合方法である。なお、酸素雰囲
気は、接合過程のうち、冷却時のみでも構わない。
That is, the present invention is a bonding of oxide-based superconductors, in which A,
This is a method for joining oxide-based superconductors, which is characterized by heating in an atmosphere with an oxygen concentration of 0.1% or more using a brazing filler metal based on a brazing material based on a brazing material based on a brazing material based on an oxide-based superconductor or an A g -Cu alloy. Note that the oxygen atmosphere may be applied only during cooling during the bonding process.

また、本発明は、接合方法によって接合されている酸化
物系超電導一体どうし又は該超電導体と他の部材との接
合体である。
The present invention also relates to a joined body of oxide-based superconductors joined together by a joining method, or a joined body of the superconductor and another member.

次に本発明の詳細な説明する。Next, the present invention will be explained in detail.

本発明で使用できるろう材は、銀または銀−銅合金の他
に、周期表IIIb族又はIVa族元素を少なくとも一
種含む銀または銀−銅系合金が好適に使用できる。II
Ib族、lVa族元素を含む場合にはIIIb族元素の
中ではInを用いるのが望ましく、また、lVa族元素
の中ではTiを用いるのが望ましい。
As the brazing material that can be used in the present invention, in addition to silver or a silver-copper alloy, silver or a silver-copper alloy containing at least one element of group IIIb or group IVa of the periodic table can be suitably used. II
When containing Ib group and lVa group elements, it is desirable to use In among the IIIb group elements, and it is desirable to use Ti among the IVa group elements.

また、本発明の酸化物系超電導体は、公知の酸化物系の
超電導体などすべてに適用できるが、例えば、ランタン
系、イツトリウム系、ビスマス系、及び、タリウム系が
ある9 〔作用〕 本発明は、酸化物系超電導体を接合するろう材としてA
g系、または、Ag−Cu系ろう材を用いる。それによ
って超電導特性を損なわずに1200に以下の温度での
直接接合が可能となる。
Further, the oxide-based superconductor of the present invention can be applied to all known oxide-based superconductors, including lanthanum-based, yttrium-based, bismuth-based, and thallium-based superconductors9 [Function] The present invention A is used as a brazing material for joining oxide superconductors.
G-based or Ag-Cu-based brazing filler metal is used. This allows direct bonding at temperatures below 1200 without impairing superconducting properties.

銀や金の貴金属は、高温でも酸化物系超電導体とほとん
ど反応しないため、超電導体を低抵抗で接続する場合に
は非常に有用である。特に、銀は5それ自身の電気抵抗
も小さく、また、酸素透過率にも優れているため、低抵
抗接合には極めて有利である。しかし、これらの貴金属
と超電導体との界面を形成するには、ぬれ性が極めて悪
いこと。
Precious metals such as silver and gold hardly react with oxide-based superconductors even at high temperatures, so they are very useful when connecting superconductors with low resistance. In particular, silver 5 itself has low electrical resistance and excellent oxygen permeability, so it is extremely advantageous for low-resistance bonding. However, in order to form an interface between these noble metals and superconductors, the wettability is extremely poor.

又、接合温度は超電導体の融点以下でなければならない
こと等の理由から、蒸着に限られてしまう。
In addition, the bonding temperature must be lower than the melting point of the superconductor, which limits the method to vapor deposition.

前述のように、蒸着後、はんだ付は等の接合工程がさら
に必要であること、そのため応用範囲がせまくなること
などの問題がある。
As mentioned above, there are problems such as the need for additional bonding steps such as soldering after vapor deposition, which limits the range of applications.

他の元素をわずかに添加したAg系、または、Ag  
Cu系ろう材では、ぬれ性が改善され、また、融点も低
くなることから、直接、接合が可能となる。
Ag-based with a small amount of other elements added, or Ag
Cu-based brazing filler metals have improved wettability and a lower melting point, making direct bonding possible.

また、本発明は、酸化物系超電導体の接合方法として、
酸素濃度が0.1%以上の雰囲気中で加熱する。それに
よって、−回の加熱工程だけで接合可能となる。
Furthermore, the present invention provides a method for joining oxide-based superconductors, including:
Heating is performed in an atmosphere with an oxygen concentration of 0.1% or more. As a result, bonding can be achieved with only -times of heating process.

酸化物系超電導体はほとんどの場合酸素の組成量が超電
導特性を大きく支配していることがわかっている。いく
つかの超電導体の中でも特に酸素元素の吸収・放出の度
合いが大きいY系超電導体を例にとるならば、673〜
873にで酸素の吸収と放出が最も活発となる。従って
、Ag系またはA g −Cu合金系ろう材で接合する
場合、ろう付温度は、およそ、950に〜1200にで
あることから、酸素量による特性の変化が大きい。酸素
雰囲気中で加熱接合することにより、超電導体中に酸素
を十分吸収させることができ、超電導特性を消失させず
に接合が可能となる。また、酸素の吸収は冷却過程で支
配的であるため、冷却時のみ酸素雰囲気にすることでも
同様な効果が得られる。酸素濃度は、IIIb、または
、rVa族元素を含まないろう材を用いる場合は、0.
1%以上の広い酸素濃度範囲が適用できる。しかし、I
IIbまたはR/a族元素を含むろう材を用いる場合は
、0.5〜2%の酸素濃度が好ましい。
It is known that in most oxide-based superconductors, the amount of oxygen in the composition largely controls the superconducting properties. If we take Y-based superconductors, which have a particularly high degree of absorption and release of oxygen elements among several superconductors, 673~
At 873, oxygen absorption and release become most active. Therefore, when bonding is performed using an Ag-based or Ag-Cu alloy-based brazing material, the brazing temperature is approximately 950 to 1200° C., so the characteristics change greatly depending on the amount of oxygen. By heating and bonding in an oxygen atmosphere, oxygen can be sufficiently absorbed into the superconductor, and bonding can be performed without losing superconducting properties. Furthermore, since oxygen absorption is dominant during the cooling process, a similar effect can be obtained by creating an oxygen atmosphere only during cooling. The oxygen concentration is 0.0 when using a brazing filler metal that does not contain group IIIb or rVa elements.
A wide oxygen concentration range of 1% or more can be applied. However, I
When using a brazing filler metal containing Group IIb or R/a group elements, an oxygen concentration of 0.5 to 2% is preferred.

また、冷却過程のみを酸素雰囲気にする場合は。Also, if only the cooling process is in an oxygen atmosphere.

酸素濃度は10%以上のより高い値が好ましい。The oxygen concentration preferably has a higher value of 10% or more.

なお、酸素濃度が0.1%以下の場合は、接合時の加熱
・冷却の過程だけで超電導体中に酸素を十分にとり込む
ことができないため、接合後超電導体の特性は劣化して
しまう。
Note that when the oxygen concentration is 0.1% or less, oxygen cannot be sufficiently incorporated into the superconductor only during the heating and cooling process during bonding, and the characteristics of the superconductor after bonding deteriorate.

〔実施例〕〔Example〕

以下、本発明の実施例を記載する 〈実施例1〉 長さ12m9幅4 mm 、厚さ1.511I11の短
冊状のYBazCuaO7−δ超電導体上に、72wし
%A g −28w t%Cu含Cu末を有機バインダ
と混合したペースト状の金属ろうを印刷・塗布し。
Examples of the present invention will be described below (Example 1) A strip-shaped YBazCuaO7-δ superconductor with a length of 12 m, a width of 4 mm, and a thickness of 1.511 I1 was coated with 72w%A g -28wt%Cu. A paste-like metal solder made by mixing Cu powder with an organic binder is printed and applied.

これを算入気中で1123にで5分間加熱し、炉冷した
。これにより、酸化物系超電導体と金属の接合体を得た
。この接合部の接続抵抗を測定したところ、8.3 X
 10−7Ω・dであった。一方、同様にAg−Cu合
金ろう材を用いて、Ar雰囲気中で1123.5分間加
熱した場合には、接合後の試料の超電導特性は完全に消
失することがわかった。ただし、この接合体に、酸素雰
囲気中、773にで工時間加熱した後、炉冷する熱処理
を施した結果、超電導特性は回復したが、その接続抵抗
は、2X10−5Ω・dであり5大気中で加熱した場合
に比べて大きい接続抵抗が得られた。
This was heated at 1123° C. for 5 minutes in included air and cooled in the oven. As a result, a bonded body of the oxide-based superconductor and metal was obtained. When the connection resistance of this junction was measured, it was 8.3
It was 10-7Ω·d. On the other hand, when similarly using an Ag-Cu alloy brazing material and heating it for 1123.5 minutes in an Ar atmosphere, it was found that the superconducting properties of the sample after bonding completely disappeared. However, as a result of heat treatment of this bonded body in an oxygen atmosphere at 773°C for a working time and then furnace cooling, the superconducting properties were restored, but the connection resistance was 2X10-5Ω・d, which was 5 atmospheres. A higher connection resistance was obtained than when heating inside.

ここで示されるように、本実施例によれば、超電導体接
合部の接続抵抗が小さい接合体を、−回の加熱のみで得
ることができる。接続抵抗は、Ar雰囲気中加熱ろう付
後、酸素雰囲気中で熱処理する二段階の接合方法の場合
に比べ、10%以下の値が得られた。
As shown here, according to this example, a bonded body with low connection resistance at the superconductor bonded portion can be obtained by only - times of heating. The connection resistance was 10% or less compared to a two-step joining method in which heat brazing in an Ar atmosphere and then heat treatment in an oxygen atmosphere were performed.

〈実施例2〉 φ1.5m、長さ20mのYBazCuaO7−δ超電
導体に68wt%Ag−27wt%Cu−5wt%Ti
の組成をもつペースト状の金属ろうを塗布し、これを酸
素濃度2%の容気中で1083にで5分間加熱し、その
後、炉冷した。この接合体の接続抵抗を測定したところ
、10−6Ω・dオーダーの小さい値が得られた。
<Example 2> 68wt%Ag-27wt%Cu-5wt%Ti on a YBazCuaO7-δ superconductor with a diameter of 1.5m and a length of 20m.
A paste-like metal solder having the composition was applied and heated at 1083 for 5 minutes in an atmosphere with an oxygen concentration of 2%, and then cooled in a furnace. When the connection resistance of this bonded body was measured, a small value on the order of 10-6 Ω·d was obtained.

〈実施例3〉 長さ10閣9幅4■、厚さ1.5閣の短冊状のY B 
a 2Cu 307−δ超電導体上に、72wt%Ag
−28wt%Cu合金粉末を有機バインダと混合したペ
ースト状の金属ろうを印刷・塗布する。
<Example 3> A rectangular YB with a length of 10 cm, a width of 9 cm, and a thickness of 1.5 cm.
a 72wt%Ag on the 2Cu 307-δ superconductor
- Print and apply a paste-like metal solder made by mixing 28 wt% Cu alloy powder with an organic binder.

これをArガスを8Ω/minの流速で流した電気炉中
で1123に、5分間加熱し炉冷する。冷却過程で、炉
内温度が873Kに下がった時点で、流していたArガ
スを止め、代わりに200mQ/winの流量の02ガ
スを流し、o2雰囲気中で室温まで冷却した。これによ
り、酸化物系超電導体と金属の接合体を得た。この接合
部の抵抗を測定したところ、1×10″″6Ω・dであ
った。
This was heated to 1123° C. for 5 minutes in an electric furnace through which Ar gas was flowed at a flow rate of 8 Ω/min, and then cooled in the furnace. During the cooling process, when the temperature inside the furnace decreased to 873 K, the flowing Ar gas was stopped, and instead, 02 gas was flowed at a flow rate of 200 mQ/win, and the furnace was cooled to room temperature in an O2 atmosphere. As a result, a bonded body of the oxide-based superconductor and metal was obtained. When the resistance of this joint was measured, it was 1×10″6Ω·d.

〈実施例4〉 長さ10■9幅4m、厚さ1.5−の短冊状のYBaz
CuaO7−δ超電導体上に、72wt%A g −2
8w t%Cu含Cu末を有機バインダと混合したペー
スト状の金属ろうを印刷・塗布する。
<Example 4> YBaz in the form of a strip of length 10 x 9 width 4 m and thickness 1.5 -
72wt%A g -2 on CuaO7-δ superconductor
A paste-like metal solder made by mixing 8wt% Cu-containing Cu powder with an organic binder is printed and applied.

これを酸素濃度0.5%の雰囲気中で1123にで5分
間加熱し、その後炉冷した。この接合体の接続抵抗は1
0−7Ω・dオーダーであり非常に小さい値となった。
This was heated at 1123 °C for 5 minutes in an atmosphere with an oxygen concentration of 0.5%, and then cooled in a furnace. The connection resistance of this bonded body is 1
The value was on the order of 0-7Ω·d, which was a very small value.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、酸化物系超電導体の相互間または他の
部材との接合で、接続抵抗が数μΩ・d以下と極めて小
さい接続部をもち、しかも、−段階の加熱工程だけの簡
単な接合が可能となる。接合する試料の大きさ及び形状
等に制限がなく、その応用範囲は従来の低抵抗接続方法
に比べて広い。
According to the present invention, oxide-based superconductors can be bonded to each other or to other members with extremely small connection resistance of several μΩ・d or less, and in addition, can be easily bonded using only a -stage heating process. Bonding becomes possible. There are no restrictions on the size or shape of the samples to be joined, and the range of applications is wider than that of conventional low resistance connection methods.

Claims (1)

【特許請求の範囲】 1、酸化物系超電導体の接合方法において、Ag系また
はAg−Cu合金系ろう材を用いて、酸素濃度0.1%
以上の雰囲気中で加熱接合することを特徴とする酸化物
系超電導体の接合方法。 2、請求項1において、金属ろうが周期表のIIIb族ま
たはIVa族から選なれる少なくとも一種以上の元素を含
む酸化物系超電導体の接合方法。 3、請求項1において、前記超電導体は相互に、または
、金属、セラミックス等の部材と接合されている酸化物
系超電導接合体。 4、前記酸化物系超電導体の表面に、AgまたはAgと
Cuを主成分とする合金が接している酸化物系超電導体
。 5、請求項3において、前記酸化物系超電導体が超電導
線材であり、また、他の部材が金属線である酸化物系超
電導線材。 6、請求項1において、少なくとも冷却過程の673〜
873Kの温度範囲でのみ酸素濃度0.1%以上の雰囲
気にする酸化物系超電導体の接合方法。 7、請求項1において、温度が前記ろう材の融点に達す
るまでは非酸化性雰囲気中で加熱し、その後、酸素濃度
を0.1%以上の雰囲気にする酸化物系超電導体の接合
方法。
[Claims] 1. In a method for joining oxide-based superconductors, an Ag-based or Ag-Cu alloy-based brazing material is used, and the oxygen concentration is 0.1%.
A method for bonding oxide-based superconductors, characterized by carrying out thermal bonding in the above atmosphere. 2. The method of joining oxide-based superconductors according to claim 1, wherein the metal solder contains at least one element selected from Group IIIb or Group IVa of the periodic table. 3. The oxide-based superconducting assembly according to claim 1, wherein the superconductors are joined to each other or to members such as metals and ceramics. 4. An oxide superconductor in which Ag or an alloy containing Ag and Cu as main components is in contact with the surface of the oxide superconductor. 5. The oxide superconducting wire according to claim 3, wherein the oxide superconductor is a superconducting wire, and the other member is a metal wire. 6. In claim 1, at least the cooling step 673-
A method for joining oxide-based superconductors that creates an atmosphere with an oxygen concentration of 0.1% or more only in a temperature range of 873K. 7. The method of joining oxide superconductors according to claim 1, wherein the brazing material is heated in a non-oxidizing atmosphere until the temperature reaches the melting point of the brazing material, and then the atmosphere is made to have an oxygen concentration of 0.1% or more.
JP10762790A 1990-04-25 1990-04-25 Connecting method for oxide superconductor Pending JPH046764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10762790A JPH046764A (en) 1990-04-25 1990-04-25 Connecting method for oxide superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10762790A JPH046764A (en) 1990-04-25 1990-04-25 Connecting method for oxide superconductor

Publications (1)

Publication Number Publication Date
JPH046764A true JPH046764A (en) 1992-01-10

Family

ID=14463985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10762790A Pending JPH046764A (en) 1990-04-25 1990-04-25 Connecting method for oxide superconductor

Country Status (1)

Country Link
JP (1) JPH046764A (en)

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