JPH0468519U - - Google Patents
Info
- Publication number
- JPH0468519U JPH0468519U JP11169990U JP11169990U JPH0468519U JP H0468519 U JPH0468519 U JP H0468519U JP 11169990 U JP11169990 U JP 11169990U JP 11169990 U JP11169990 U JP 11169990U JP H0468519 U JPH0468519 U JP H0468519U
- Authority
- JP
- Japan
- Prior art keywords
- kesepter
- gas inlet
- close
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図はこの考案の一実施例であるＭＯＣＶＤ
装置の反応系の構成を示す断面図、第２図は従来
のＭＯＣＶＤ装置の反応系の構成を示す断面図で
ある。
図において、１は石英反応管、２はウエハサセ
プタ、３はＧａＡｓ基板、４はＲＦコイル、５は
ガス導入口、６はウエハサセプタの回転軸、７は
分散器、８は分散器の回転軸を示す。なお、図中
、同一符号は同一、又は相当部分を示す。
Figure 1 shows an example of MOCVD of this invention.
FIG. 2 is a sectional view showing the configuration of a reaction system of a conventional MOCVD apparatus. In the figure, 1 is a quartz reaction tube, 2 is a wafer susceptor, 3 is a GaAs substrate, 4 is an RF coil, 5 is a gas inlet, 6 is a rotation axis of the wafer susceptor, 7 is a distributor, and 8 is a rotation axis of the distributor. shows. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ガスの分散器を設けたことを特徴とする半導体結
晶成長装置。 A semiconductor crystal growth apparatus characterized in that a gas distributor is provided coaxially with a kesepter and close to a gas inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11169990U JPH0468519U (en) | 1990-10-24 | 1990-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11169990U JPH0468519U (en) | 1990-10-24 | 1990-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468519U true JPH0468519U (en) | 1992-06-17 |
Family
ID=31859168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11169990U Pending JPH0468519U (en) | 1990-10-24 | 1990-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468519U (en) |
-
1990
- 1990-10-24 JP JP11169990U patent/JPH0468519U/ja active Pending
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