JPH0470268B2 - - Google Patents

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Publication number
JPH0470268B2
JPH0470268B2 JP59270291A JP27029184A JPH0470268B2 JP H0470268 B2 JPH0470268 B2 JP H0470268B2 JP 59270291 A JP59270291 A JP 59270291A JP 27029184 A JP27029184 A JP 27029184A JP H0470268 B2 JPH0470268 B2 JP H0470268B2
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Japan
Prior art keywords
mol
amount
piezoelectric
piezoelectric constant
added
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59270291A
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Japanese (ja)
Other versions
JPS61147589A (en
Inventor
Masahiro Tomita
Etsuro Yasuda
Hiroshige Matsuoka
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Soken Inc
Original Assignee
Nippon Soken Inc
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Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP59270291A priority Critical patent/JPS61147589A/en
Publication of JPS61147589A publication Critical patent/JPS61147589A/en
Publication of JPH0470268B2 publication Critical patent/JPH0470268B2/ja
Granted legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
    • C04B35/493Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野〕 本発明は、Pb(Tb1/2Nb1/2)O3−PbTiO3
PbZrO3を基本組成とする三成分固溶体よりなる、
各種アクチユエータに使用して好適なセラミツク
圧電材料に関するものである。 〔従来の技術〕 アクチユエータに用いるセラミツク圧電体に
は、圧度定数が大きいこと、キユリー温度が高い
こと、機械的強度に優れていること等の諸特性が
要求される。これらの特性を改善した圧電材料と
して、近年、Pb(Ni1/2Nb2/3)O3−PbTiO3
PbZrO3系やPb(Y1/2Nb1/2)O3−PbTiO3
PbZrO3系の三成分固溶体よりなる圧電材料が提
案されている(特公昭46−43062号、特開昭57−
208183号)。 〔発明が解決しようとする問題点〕 ところで、特に内燃機関の燃料噴射用インジエ
クタに使用する場合には、小型強力で、かつ高温
雰囲気中で安定に作動するセラミツク圧電体が望
まれており、圧電材料として、より圧電定数が大
きく、かつキユリー温度の高いものを必要として
いる。 上記要請に鑑みて、発明者らは種々実験を繰り
返し、これを満足する全く新規な三成分固溶体よ
りなる圧電材料を見い出した。 〔問題点を解決するための手段〕 本発明の圧電材料は、基本組成をPb(Tb1/2
Nb1/2)O3−PbTiO3−PbZrO3とする三成分固
溶体よりなる。しかして、上記固溶体の基本組成
は、Pb(Tb1/2Nb1/2)O3 0.5〜5.0モル%、
PbTiO3 40.0〜50.0モル%、PbZrO3 45〜59.5
モル%とし、基本組成中のPbの一部をSrで5.0モ
ル%〜15.0モル%置換する。 また、上記固溶体中にさらに、添加物として、
Nb2O5、Sb2O3、WO3、La2O3、TaO3、Bi2O3
NdO、Pr6O11から選ばれた少なくとも一種を、
基本組成に対して合計で2.0重量%以下含有せし
めてある。 〔効果〕 上記組成になるセラミツク圧電材料は、その圧
電定数が約400×10-12m/V以上と大きい値を示
し、かつキユリー温度も180℃以上と高い値を示
す。 そして、上記の如き添加物を添加すると、セラ
ミツク圧電材料はさらに大きな圧電定数値を示
す。 しかして、これら圧電材料を使用したセラミツ
ク圧電体は、電界印加時に大きな変位量を得るこ
とができ、かつ高温雰囲気中でも安定に作動する
から、内燃機関の燃料噴射用インジエクタ等に好
適に使用できる。 〔実施例〕 本発明のセラミツク圧電材料は例えば粉末冶金
法により製造する。すなわち、PbO、TiO2
ZrO2、Tb4O7、Nb2O5、Sb2O3、WO3、La2O3
TaO3、Bi2O3、NdCO3、Pr6O11、SrCO3等の原
料を所定の割合で秤量し、これを湿式ボールミル
等によつて混合する。この混合物を乾燥後、700
〜900℃で3〜10時間仮焼し、これを再びボール
ミルで混合した後乾燥して調整粉末を得る。調整
粉末に水あるいはポリビニルアルコール等の粘着
剤を添加して300〜1000Kg/cm2の圧力で加圧成形
後、1200〜1300℃で1〜3時間焼成を行ない、外
形を研磨して直径5mm、長さ8mmの円柱体とす
る。 しかる後、上記円柱体は、両端面に周知の方法
で電極を形成する。これを20〜100℃のシリコン
オイル等の絶縁オイル中に置いて、上記電極間に
直流電場20〜30KV/cmを6〜60分間印加するこ
とにより分極せしめる。その後120℃で1時間エ
イジングし、常温に戻して測定試料を得る。 上記試料の圧電定数d33は次式(1)より求められ、
かつ式(1)中のK33、ε33、S33は次式(2)、(3)、(4)よ
り求める。 d33=K333333 ……(1) 1/(K332=0.405fr/fa−fr+0.81……(2) ε33=C・l/S ……(3) 1/S33=4ρ・fa2・l2(1−K2 33) ……(4) ここで、lは試料の長さ(m)、Sは試料の端
面面積(m2)、CはLCRメータにより測定した1K
Hz時の静電容量(F)、ρは密度(Kg/m3)、fa、
frはそれぞれ反共振および共振周波数(Hz)であ
り、これらはいずれも周知の方法で測定される。
なお、K33は電気機械結合係数である。 原料の配合割合を種々に変え、上記方法により
得られた測定試料につき、上記要素を測定して算
出した圧電定数を別紙の表に示す。 表において、実験例1〜6は、Sr置換量を変
化させたものである。Sr置換量を増すにつれて、
圧電定数は上昇するが、キユリー温度が急激に低
下する。すなわち、実験例5は圧電定数が小さい
ことにより採用されず、実験例6はキユリー温度
が低いことにより採用されない。 実験例3、7〜10、38は、Pb(Tb1/2Nb1/2)
O3の添加量を主体的に変えたものである。これ
によれば、添加量が2モル%で圧電定数はピーク
値を示し(実験例3)、0.5モル%未満あるいは5
モル%より多い場合には所望の圧電定数が得られ
ない(実験例9、10)。 実験例3、11〜17は、Pb(Tb1/2Nb1/2)O3
添加量を一定にして、PbTiO3の添加量を変えた
場合である。これによれば、実験例3の組成で圧
電定数はピーク値を示し、上記添加量が40モル%
未満あるいは50モル%よりも多いと、所望の圧電
定数が得られない(実験例15〜17)。 実験例18〜25においては、実験例3の基本組成
に、添加物Sb2O3、Nb2O5、WO3、La2O3
TaO3、Bi2O3、NdO、Pr6O11をそれぞれ0.5重量
%加えてある。これら添加物を添加したことによ
り、圧電定数はより大きくできる。この場合、実
験例26〜29より知られる如く、添加量が1.0重量
%で圧電定数はピーク値を示し、2.0重量%を越
えるともはや所望の値は得られない(実験例30、
31)。これは、添加量が多いとその一部が固溶せ
ず、析出してしまうためと思われる。そして、こ
の場合には、焼結密度も低下し、機械的強度が低
下する。 実験例32〜37は、上記添加物を複数種混合して
加えたものであり、かかる組合せによつても所望
の圧電定数を得ることができる。 以上の実験結果を総合すると、Pb(Tb1/2Nb
1/2)O3−PbTiO3−PbZrO3の三成分固溶体の基
本組成を、Pb(Tb1/2Nb1/2)O3 0.5〜5モル
%、PbTiO3 40〜50モル%、PbZrO3 45〜59.5
モル%とし、かつ基本組成中のPbの一部をSrで
5〜15モル%置換せしめた圧電材料は、高いキユ
リー温度を維持するとともに、特に圧電定数は大
きな値を示す。 そして、上記圧電材料に、Sb2O3、Nb2O5
WO3、La2O3、TaO3、Bi2O3、NdO、Pr6O11
ら選ばれた少なくとも一種を、基本組成に対して
2.0重量%以下加えると、さらに大きな圧電定数
値を得ることができる。 Sr置換量は、上記範囲より少ないと充分な圧
電定数値が得られず(実験例5)、上記範囲より
多いとキユリー温度が低下する(実験例6)。 Pb(Tb1/2Nb1/2)O3の添加量が上記範囲外に
あると、所望の圧電定数が得られない(実験例
9、10)。 PbTiO3の添加量が上記範囲外にある場合に
は、電気機械結合係数および誘電率が低下して、
所望の圧電定数が得られない(実験例15〜17)。 したがつて、Pb(Tb1/2Nb1/2)O3とPbTiO3
の添加量を上記範囲に選び、残りをPbZrO3とす
る。 添加物は、2.0重量%を越えて添加すると、こ
れが一部析出して電気機械結合係数が小さくなる
ことにより、圧電定数が低下し、かつ機械的強度
も低下する(実験例30、31)。 本発明の圧電材料は、上記のすぐれた特性を有
することにより、アクチユエータに好適に使用で
きる。
[Industrial Application Field] The present invention provides Pb(Tb1/2Nb1/2)O 3 −PbTiO 3
Consisting of a ternary solid solution whose basic composition is PbZrO3 ,
The present invention relates to a ceramic piezoelectric material suitable for use in various actuators. [Prior Art] Ceramic piezoelectric bodies used in actuators are required to have various properties such as a large pressure constant, a high Curie temperature, and excellent mechanical strength. In recent years, Pb(Ni1/2Nb2/3)O 3 −PbTiO 3 − has been developed as a piezoelectric material with improved these properties.
PbZrO 3 series and Pb(Y1/2Nb1/2)O 3 −PbTiO 3
A piezoelectric material made of a PbZrO 3 -based ternary solid solution has been proposed (Japanese Patent Publication No. 43062/1983, Japanese Patent Application Laid-open No. 1983-1983).
No. 208183). [Problems to be Solved by the Invention] Particularly when used in fuel injection injectors for internal combustion engines, a ceramic piezoelectric body that is small, strong, and operates stably in a high-temperature atmosphere is desired. The material needs to have a larger piezoelectric constant and a higher Curie temperature. In view of the above requirements, the inventors repeated various experiments and discovered a piezoelectric material made of a completely new three-component solid solution that satisfies the requirements. [Means for solving the problem] The piezoelectric material of the present invention has a basic composition of Pb (Tb1/2
It consists of a ternary solid solution of Nb1/2)O 3 −PbTiO 3 −PbZrO 3 . Therefore, the basic composition of the above solid solution is Pb(Tb1/2Nb1/2)O 3 0.5 to 5.0 mol%,
PbTiO3 40.0~50.0 mol%, PbZrO3 45~59.5
A part of Pb in the basic composition is replaced with 5.0 mol% to 15.0 mol% of Sr. In addition, in the solid solution, as an additive,
Nb 2 O 5 , Sb 2 O 3 , WO 3 , La 2 O 3 , TaO 3 , Bi 2 O 3 ,
At least one selected from NdO, Pr 6 O 11 ,
The total content is 2.0% by weight or less based on the basic composition. [Effect] The ceramic piezoelectric material having the above composition exhibits a large piezoelectric constant of about 400×10 -12 m/V or more, and a high Curie temperature of 180° C. or more. When the above-mentioned additives are added, the ceramic piezoelectric material exhibits an even larger piezoelectric constant value. Ceramic piezoelectric bodies using these piezoelectric materials can obtain a large amount of displacement when an electric field is applied, and operate stably even in high-temperature atmospheres, so they can be suitably used for fuel injection injectors of internal combustion engines, etc. [Example] The ceramic piezoelectric material of the present invention is manufactured, for example, by a powder metallurgy method. That is, PbO, TiO2 ,
ZrO2 , Tb4O7 , Nb2O5 , Sb2O3 , WO3 , La2O3 ,
Raw materials such as TaO 3 , Bi 2 O 3 , NdCO 3 , Pr 6 O 11 , SrCO 3 and the like are weighed in predetermined proportions and mixed using a wet ball mill or the like. After drying this mixture, 700
Calcinate at ~900°C for 3 to 10 hours, mix again in a ball mill, and then dry to obtain a modified powder. After adding water or an adhesive such as polyvinyl alcohol to the prepared powder and press molding at a pressure of 300 to 1000 Kg/ cm2 , baking at 1200 to 1300°C for 1 to 3 hours, and polishing the outer shape to form a 5 mm diameter. A cylindrical body with a length of 8 mm. Thereafter, electrodes are formed on both end faces of the cylindrical body using a well-known method. This is placed in an insulating oil such as silicone oil at 20 to 100°C, and polarized by applying a DC electric field of 20 to 30 KV/cm between the electrodes for 6 to 60 minutes. Thereafter, the sample is aged at 120°C for 1 hour and then returned to room temperature to obtain a measurement sample. The piezoelectric constant d 33 of the above sample is obtained from the following formula (1),
And K 33 , ε 33 , and S 33 in equation (1) are obtained from the following equations (2), (3), and (4). d 33 = K 333333 ……(1) 1/(K 33 ) 2 = 0.405fr/fa−fr+0.81……(2) ε 33 = C・l/S ……(3) 1/ S 33 = 4ρ・fa 2・l 2 (1−K 2 33 ) ...(4) Here, l is the length of the sample (m), S is the end surface area of the sample (m 2 ), and C is the LCR meter. 1K measured by
Capacitance (F) at Hz, ρ is density (Kg/m 3 ), fa,
fr are anti-resonant and resonant frequencies (Hz), respectively, both of which are measured by well-known methods.
Note that K 33 is an electromechanical coupling coefficient. The piezoelectric constants calculated by measuring the above elements for measurement samples obtained by the above method with various mixing ratios of raw materials are shown in the attached table. In the table, in Experimental Examples 1 to 6, the amount of Sr substitution was changed. As the amount of Sr substitution increases,
Although the piezoelectric constant increases, the Curie temperature decreases rapidly. That is, Experimental Example 5 is not adopted because the piezoelectric constant is small, and Experimental Example 6 is not adopted because the Curie temperature is low. Experimental examples 3, 7 to 10, and 38 are Pb (Tb1/2Nb1/2)
The amount of O 3 added was mainly changed. According to this, the piezoelectric constant shows a peak value when the addition amount is 2 mol% (Experimental Example 3), and when the addition amount is less than 0.5 mol% or 5 mol%
If the amount exceeds mol%, the desired piezoelectric constant cannot be obtained (Experimental Examples 9 and 10). Experimental Examples 3 and 11 to 17 are cases in which the amount of Pb(Tb1/2Nb1/2)O 3 added is constant and the amount of PbTiO 3 added is changed. According to this, the piezoelectric constant shows a peak value with the composition of Experimental Example 3, and the above addition amount is 40 mol%.
If it is less than 50 mol% or more than 50 mol%, the desired piezoelectric constant cannot be obtained (Experimental Examples 15 to 17). In Experimental Examples 18 to 25, additives Sb 2 O 3 , Nb 2 O 5 , WO 3 , La 2 O 3 ,
TaO 3 , Bi 2 O 3 , NdO, and Pr 6 O 11 were each added in an amount of 0.5% by weight. By adding these additives, the piezoelectric constant can be made larger. In this case, as is known from Experimental Examples 26 to 29, the piezoelectric constant shows a peak value when the amount added is 1.0% by weight, and when it exceeds 2.0% by weight, the desired value can no longer be obtained (Experimental Example 30,
31). This is thought to be because if the amount added is large, a part of it will not form a solid solution and will precipitate. In this case, the sintered density also decreases, and the mechanical strength decreases. In Experimental Examples 32 to 37, a plurality of the above-mentioned additives were mixed and added, and the desired piezoelectric constant could be obtained even with such a combination. Combining the above experimental results, Pb(Tb1/2Nb
1/2) The basic composition of the ternary solid solution of O3 - PbTiO3 - PbZrO3 is Pb(Tb1/2Nb1/2) O3 0.5-5 mol%, PbTiO3 40-50 mol%, PbZrO3 45-59.5
A piezoelectric material in which 5 to 15 mol% of Pb in the basic composition is replaced with Sr maintains a high Curie temperature and exhibits a particularly large piezoelectric constant. Then, in the piezoelectric material, Sb 2 O 3 , Nb 2 O 5 ,
At least one selected from WO 3 , La 2 O 3 , TaO 3 , Bi 2 O 3 , NdO, Pr 6 O 11 is added to the basic composition.
If 2.0% by weight or less is added, an even larger piezoelectric constant value can be obtained. When the amount of Sr substitution is less than the above range, a sufficient piezoelectric constant value cannot be obtained (Experimental Example 5), and when it is more than the above range, the Curie temperature decreases (Experimental Example 6). If the amount of Pb(Tb1/2Nb1/2)O 3 added is outside the above range, the desired piezoelectric constant cannot be obtained (Experimental Examples 9 and 10). If the amount of PbTiO 3 added is outside the above range, the electromechanical coupling coefficient and dielectric constant will decrease,
The desired piezoelectric constant cannot be obtained (Experimental Examples 15 to 17). Therefore, Pb(Tb1/2Nb1/2) O3 and PbTiO3
The amount of addition is selected within the above range, and the remainder is PbZrO 3 . When additives are added in an amount exceeding 2.0% by weight, some of the additives precipitate and the electromechanical coupling coefficient decreases, resulting in a decrease in piezoelectric constant and mechanical strength (Experimental Examples 30 and 31). The piezoelectric material of the present invention has the above-mentioned excellent properties and can be suitably used for actuators.

【表】【table】

【表】【table】

【表】【table】

【表】【table】

Claims (1)

【特許請求の範囲】 1 基本組成がPb(Tb1/2Nb1/2)O3 0.5〜5.0
モル%、PbTiO3 40.0〜50.0モル%、PbZrO3
45〜59.5モル%からなる固溶体であつて、その組
成中のPbの一部をSrで5.0モル%〜15.0モル%置
換したことを特徴とするセラミツク圧電材料。 2 基本組成がPb(Tb1/2Nb1/2)O3 0.5〜5.0
モル%、PbTiO3 40.0〜50.0モル%、PbZrO3
45〜59.5モル%からなる固溶体であつて、その組
成中のPbの一部をSrで5.0モル%〜15.0モル%置
換するとともに、Nb2O5、Sb2O3、WO3、La2
O3、TaO3、Bi2O3、NdO、Pr6O11から選ばれた
少なくとも一種を、基本組成に対して合計で2.0
重量%以下含むことを特徴とするセラミツク圧電
材料。
[Claims] 1. Basic composition is Pb (Tb1/2Nb1/2)O 3 0.5 to 5.0
Mol%, PbTiO3 40.0-50.0 Mol%, PbZrO3
1. A ceramic piezoelectric material which is a solid solution consisting of 45 to 59.5 mol %, and is characterized in that a part of Pb in the composition is replaced with 5.0 mol % to 15.0 mol % of Sr. 2 Basic composition is Pb (Tb1/2Nb1/2)O 3 0.5 to 5.0
Mol%, PbTiO3 40.0-50.0 Mol%, PbZrO3
A solid solution consisting of 45 to 59.5 mol%, in which a part of Pb in the composition is replaced with 5.0 mol% to 15.0 mol% of Sr, and Nb 2 O 5 , Sb 2 O 3 , WO 3 , La 2
At least one selected from O 3 , TaO 3 , Bi 2 O 3 , NdO, Pr 6 O 11 , in total 2.0% of the basic composition
A ceramic piezoelectric material characterized in that it contains not more than % by weight.
JP59270291A 1984-12-20 1984-12-20 Ceramic piezoelectric material Granted JPS61147589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59270291A JPS61147589A (en) 1984-12-20 1984-12-20 Ceramic piezoelectric material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59270291A JPS61147589A (en) 1984-12-20 1984-12-20 Ceramic piezoelectric material

Publications (2)

Publication Number Publication Date
JPS61147589A JPS61147589A (en) 1986-07-05
JPH0470268B2 true JPH0470268B2 (en) 1992-11-10

Family

ID=17484214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59270291A Granted JPS61147589A (en) 1984-12-20 1984-12-20 Ceramic piezoelectric material

Country Status (1)

Country Link
JP (1) JPS61147589A (en)

Also Published As

Publication number Publication date
JPS61147589A (en) 1986-07-05

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