JPH0470746U - - Google Patents
Info
- Publication number
- JPH0470746U JPH0470746U JP11429090U JP11429090U JPH0470746U JP H0470746 U JPH0470746 U JP H0470746U JP 11429090 U JP11429090 U JP 11429090U JP 11429090 U JP11429090 U JP 11429090U JP H0470746 U JPH0470746 U JP H0470746U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- integrated circuit
- attached
- semiconductor integrated
- circuit device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例に係るプローブカー
ドの要部を示す概略的断面図、第２図はこのプロ
ーブカードの使用状態を示す概略的断面図、第３
図はこのプローブカードによるパツドの傷を示す
平面図、第４図は他の形状の探針を示す正面図、
第５図は従来のプローブカードの要部を示す概略
的断面図、第６図はこのプローブカードによるパ
ツドの傷を示す平面図である。
１０……基板、１１……開口、２０……リング
、３０，３５……探針、３１……接触部、５０…
…半導体集積回路装置、５１……パツド。
FIG. 1 is a schematic cross-sectional view showing the main parts of a probe card according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view showing the state of use of this probe card, and FIG.
The figure is a plan view showing scratches on the pad caused by this probe card, and Figure 4 is a front view showing probes of other shapes.
FIG. 5 is a schematic cross-sectional view showing the main parts of a conventional probe card, and FIG. 6 is a plan view showing scratches on the pad caused by this probe card. DESCRIPTION OF SYMBOLS 10... Substrate, 11... Opening, 20... Ring, 30, 35... Probe, 31... Contact part, 50...
...Semiconductor integrated circuit device, 51...pad.
Claims (1)
する際に用いられるプローブカードにおいて、基
板に開設された開口の周縁部に取り付けられるリ
ングと、このリングに取り付けられる探針とを具
備しており、前記探針は半導体集積回路装置に対
し平行に取り付けられるとともに、当該探針の先
端の接触部は、半導体集積回路装置のパツドに垂
直に接触すべく直角に折曲形成されていることを
特徴とするプローブカード。 (2) 前記探針は全体が略クランク形状に折曲形
成され、かつ接触部はパツドに対して垂直に接触
することを特徴とする請求項１記載のプローブカ
ード。[Claims for Utility Model Registration] (1) In a probe card used to measure various electrical characteristics of a semiconductor integrated circuit device, a ring attached to the periphery of an opening formed in a substrate, and a ring attached to this ring. The probe is attached parallel to the semiconductor integrated circuit device, and the contact portion at the tip of the probe is attached at a right angle to contact the pad of the semiconductor integrated circuit device perpendicularly. A probe card characterized by being bent. (2) The probe card according to claim 1, wherein the entire probe is bent into a substantially crank shape, and the contact portion contacts the pad perpendicularly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11429090U JPH0470746U (en) | 1990-10-30 | 1990-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11429090U JPH0470746U (en) | 1990-10-30 | 1990-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0470746U true JPH0470746U (en) | 1992-06-23 |
Family
ID=31861960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11429090U Pending JPH0470746U (en) | 1990-10-30 | 1990-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0470746U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5170456A (en) * | 1974-12-16 | 1976-06-18 | Seiko Instr & Electronics | PUROOBAA |
| JPS5717244A (en) * | 1980-07-04 | 1982-01-28 | Fujitsu Ltd | Radio communication system |
| JPS6362343A (en) * | 1986-09-03 | 1988-03-18 | Nec Corp | Probe card |
| JPH03105258A (en) * | 1989-09-19 | 1991-05-02 | Nec Kyushu Ltd | Probe card of inspecting apparatus of semiconductor |
-
1990
- 1990-10-30 JP JP11429090U patent/JPH0470746U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5170456A (en) * | 1974-12-16 | 1976-06-18 | Seiko Instr & Electronics | PUROOBAA |
| JPS5717244A (en) * | 1980-07-04 | 1982-01-28 | Fujitsu Ltd | Radio communication system |
| JPS6362343A (en) * | 1986-09-03 | 1988-03-18 | Nec Corp | Probe card |
| JPH03105258A (en) * | 1989-09-19 | 1991-05-02 | Nec Kyushu Ltd | Probe card of inspecting apparatus of semiconductor |
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