JPS6362343A - Probe card - Google Patents

Abstract

PURPOSE:To prevent displacement of a contact point, by providing a probing needle which comprises a fixed part mounted securely on a printed board, an L-shaped arm having one end connected securely to the fixing point, and a tip part connected securely to the other end of the arm and protruding downward. CONSTITUTION:A probing needle 10 is composed of the following parts: a fixed part 3, which is fixed to a printed board 1 and connected to a conductor wire by way of through hole and the like; an L-shaped arm, whose one end is fixed to the fixing part 3; and a tip part 5, which is fixed to the other end of the arm and protrudes downward. When the tip part 5 is brought into contact with the electrode of a semiconductor element at a specified needle pressure, the pressure applied on the tip part 5 is absorbed mainly by the elasticity of the L-shaped arm 4. Therefore, the tip part 5 may moved vertically, but will not deviate horizontally. This allows the electrodes on a semiconductor element to be made small.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a probe card, and more particularly to a probing needle of a probe card.

[Conventional technology]

Conventionally, in the manufacturing process of semiconductor devices in which multiple semiconductor elements are formed on a semiconductor wafer and then separated into individual semiconductor elements, it is common to measure the electrical characteristics of the semiconductor elements in the semiconductor wafer state. be. At this time, a tester to which a probe card is connected is used to measure the electrical characteristics of the semiconductor element.

As shown in FIG. 2, this probe card has an opening 2 formed almost in the center of a printed board 1, and a plurality of probes with one end fixed around the opening and the other end facing the center. The probing needle 10A is composed of a conductive wire (not shown) connected to the probing needle and formed on a printed board. Then, the probe card is brought close to the semiconductor wafer with one side corresponding to the surface of the semiconductor wafer, and a plurality of probing needles are applied to each electrode formed on one semiconductor element within the semiconductor wafer. The electrical characteristics of the semiconductor device are measured by making contact with appropriate pressure.

Probing needle 1 fixed on a conventional probe card
0A, as shown in FIG. 2, an arm 4A extends straight down the center from a fixed part 3A connected to the printed circuit board 1, and has a tip 5A at its tip that contacts the electrode of the semiconductor element. It had a fixed configuration.

[Problem that the invention seeks to solve]

In the conventional probe card described above, when the distance between the probe card and the semiconductor element is narrowed so that the probing needle 10A applies an appropriate pressure to the electrode of the semiconductor element 6, the probing needle 10A becomes as shown by the dotted line in FIG. As shown, the position is shifted by a distance W from the position before the pressure was applied.

For this reason, in semiconductor devices whose electrical characteristics are measured using conventional probe cards, the area of the electrodes must be increased to account for this positional shift, which poses the problem of increasing the area of the semiconductor device itself. There is.

An object of the present invention is to provide a probe card that does not cause displacement of the contact point of a probing needle when brought into contact with an electrode.

[Means for solving problems]

The probe card of the present invention has an opening provided in a printed circuit board, and a plurality of probing needles having one end fixed to the periphery of the opening and the other end extending downward from the center of the opening. - The probing needle is a card, and the probing needle includes a fixed part fixed to the printed circuit board, an L-shaped arm having one end fixed to the fixed part, and fixed to the other end of the arm and protruding downward. It consists of a tip.

〔Example〕

Next, embodiments of the present invention will be described using the drawings.

FIG. 1 is a sectional view of an embodiment of the present invention.

In FIG. 1, an opening 2 is provided in a printed circuit board 1 on which conductive wires (not shown) are formed.
A plurality of probing needles made of tungsten or the like are provided around the opening 2, with one end fixed by solder or the like around the opening and the other end extending below the center of the opening 2.

This probing needle 10 is fixed to the printed circuit board 1 and connected to a fixed part 3 by a conductor and a through hole.
and an L-shaped arm 4 whose one end is fixed to this fixed part 3.
and a tip portion 5 fixed to the other end of the arm 4 and protruding downward.

In this embodiment configured in this manner, when the tip 5 contacts the electrode of the semiconductor element with a predetermined stylus pressure, the pressure applied to the tip 5 is mainly absorbed by the elasticity of the L-shaped arm 4. Therefore, the tip 5 only moves in the vertical direction, and does not shift in the lateral direction as in the case of the conventional probing needle shown in FIG.

Therefore, the area of the electrode formed on the semiconductor element can be reduced.

〔Effect of the invention〕

As explained above, the present invention includes a probing needle that includes a fixed part fixed to a printed circuit board, an L-shaped arm fixed at one end to the fixed part, and a lower end fixed to the other end of the arm. By having a protruding tip, when the probing needle is brought into contact with an electrode of a semiconductor element, there is an effect that the position of the contact point does not shift.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of one embodiment of the present invention, and FIG. 2 is a sectional view of a conventional probe card.

Claims (1)

[Claims] In a probe card having an opening provided in a printed circuit board and a plurality of probing needles having one end fixed to the periphery of the opening and the other end extending downward from the center of the opening, the probing needles include: It is composed of a fixing part fixed to the printed circuit board, an L-shaped arm having one end fixed to the fixing part, and a tip part fixed to the other end of the arm and protruding downward. Features a probe card.