JPH0471447B2 - - Google Patents
Info
- Publication number
- JPH0471447B2 JPH0471447B2 JP62082385A JP8238587A JPH0471447B2 JP H0471447 B2 JPH0471447 B2 JP H0471447B2 JP 62082385 A JP62082385 A JP 62082385A JP 8238587 A JP8238587 A JP 8238587A JP H0471447 B2 JPH0471447 B2 JP H0471447B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- wave detector
- mosfet
- substrate
- sound wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8238587A JPS63249025A (ja) | 1987-04-03 | 1987-04-03 | 音波検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8238587A JPS63249025A (ja) | 1987-04-03 | 1987-04-03 | 音波検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63249025A JPS63249025A (ja) | 1988-10-17 |
| JPH0471447B2 true JPH0471447B2 (fr) | 1992-11-13 |
Family
ID=13773115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8238587A Granted JPS63249025A (ja) | 1987-04-03 | 1987-04-03 | 音波検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63249025A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5254504A (en) * | 1989-04-13 | 1993-10-19 | Trustees Of The University Of Pennsylvania | Method of manufacturing ferroelectric MOSFET sensors |
| US20170027605A1 (en) * | 2014-04-11 | 2017-02-02 | Koninklijke Philips N.V. | Signal versus noise discrimination needle with piezoelectric polymer sensors |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5117971B2 (fr) * | 1971-09-01 | 1976-06-07 |
-
1987
- 1987-04-03 JP JP8238587A patent/JPS63249025A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63249025A (ja) | 1988-10-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |