JPS63249025A - 音波検出器 - Google Patents

音波検出器

Info

Publication number: JPS63249025A
Authority: JP; Japan
Prior art keywords: piezoelectric element; mosfet; wave detector; signal; substrate
Prior art date: 1987-04-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP8238587A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0471447B2 (fr

Inventor

Akimasa Tanaka

章雅田中

Akinaga Yamamoto

晃永山本

Yasushi Hoshino

安司星野

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hamamatsu Photonics KK

Original Assignee

Hamamatsu Photonics KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-04-03

Filing date

1987-04-03

Publication date

1988-10-17

1987-04-03 Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK

1987-04-03 Priority to JP8238587A priority Critical patent/JPS63249025A/ja

1988-10-17 Publication of JPS63249025A publication Critical patent/JPS63249025A/ja

1992-11-13 Publication of JPH0471447B2 publication Critical patent/JPH0471447B2/ja

Status Granted legal-status Critical Current

Links

239000000758 substrate Substances 0.000 claims abstract description 14
XLOFNXVVMRAGLZ-UHFFFAOYSA-N 1,1-difluoroethene;1,1,2-trifluoroethene Chemical group FC(F)=C.FC=C(F)F XLOFNXVVMRAGLZ-UHFFFAOYSA-N 0.000 claims description 2
238000001514 detection method Methods 0.000 abstract description 8
238000010586 diagram Methods 0.000 description 4
239000000463 material Substances 0.000 description 3
230000005520 electrodynamics Effects 0.000 description 2
230000010287 polarization Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1

Landscapes

Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

JP8238587A 1987-04-03 1987-04-03 音波検出器 Granted JPS63249025A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP8238587A JPS63249025A (ja)	1987-04-03	1987-04-03	音波検出器

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP8238587A JPS63249025A (ja)	1987-04-03	1987-04-03	音波検出器

Publications (2)

Publication Number	Publication Date
JPS63249025A true JPS63249025A (ja)	1988-10-17
JPH0471447B2 JPH0471447B2 (fr)	1992-11-13

Family

ID=13773115

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP8238587A Granted JPS63249025A (ja)	1987-04-03	1987-04-03	音波検出器

Country Status (1)

Country	Link
JP (1)	JPS63249025A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5254504A (en) *	1989-04-13	1993-10-19	Trustees Of The University Of Pennsylvania	Method of manufacturing ferroelectric MOSFET sensors
JP2017512601A (ja) *	2014-04-11	2017-05-25	コーニンクレッカフィリップスエヌヴェＫｏｎｉｎｋｌｉｊｋｅＰｈｉｌｉｐｓＮ．Ｖ．	圧電性ポリマーセンサを備えた信号とノイズとを区別する針

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4832941A (fr) *	1971-09-01	1973-05-04

1987
- 1987-04-03 JP JP8238587A patent/JPS63249025A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4832941A (fr) *	1971-09-01	1973-05-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5254504A (en) *	1989-04-13	1993-10-19	Trustees Of The University Of Pennsylvania	Method of manufacturing ferroelectric MOSFET sensors
JP2017512601A (ja) *	2014-04-11	2017-05-25	コーニンクレッカフィリップスエヌヴェＫｏｎｉｎｋｌｉｊｋｅＰｈｉｌｉｐｓＮ．Ｖ．	圧電性ポリマーセンサを備えた信号とノイズとを区別する針

Also Published As

Publication number	Publication date
JPH0471447B2 (fr)	1992-11-13

Similar Documents

Publication	Publication Date	Title
JP3141645B2 (ja)	2001-03-05	圧力センサ
JP3694028B2 (ja)	2005-09-14	一体化共振マイクロビームセンサ及びトランジスタ発振器
US3585415A (en)	1971-06-15	Stress-strain transducer charge coupled to a piezoelectric material
Ko et al.	2003	Micromachined piezoelectric membrane acoustic device
CN108761134B (zh)	2020-02-14	一种弱耦合谐振式传感器的线性化输出检测方法
Chen et al.	1984	Integrated silicon PI-FET accelerometer with proof mass
Sung et al.	2015	A new transduction mechanism for hydrophones employing piezoelectricity and a field-effect transistor
US11506772B2 (en)	2022-11-22	Ultrasonic device and ultrasonic measuring apparatus
JPS5995420A (ja)	1984-06-01	Ｍｏｓ型センサ
Amiri et al.	2018	Sensitivity enhancement of MEMS diaphragm hydrophones using an integrated ring MOSFET transducer
Zhang et al.	2024	Micromachined piezoelectric sensor with radial polarization for enhancing underwater acoustic measurement
WO2004070408A1 (fr)	2004-08-19	Detecteur magnetique
JPS63249025A (ja)	1988-10-17	音波検出器
US11770658B2 (en)	2023-09-26	Sensor interface including resonator and differential amplifier
JPS61222178A (ja)	1986-10-02	電界効果型圧力センサ
Ramanathan et al.	2018	Near DC force measurement using PVDF sensors
Fiebiger et al.	1967	Electrical Performance of Metal‐Insulator‐Piezoelectric Semiconductor Transducers
JPH08162646A (ja)	1996-06-21	力学量センサ
JPH0516522B2 (fr)	1993-03-04
JP3261650B2 (ja)	2002-03-04	角速度センサ用検出回路
KR102723139B1 (ko)	2024-10-30	전계 효과 트랜지스터를 포함하는 마이크로폰
JPS60164367A (ja)	1985-08-27	触覚センサ
JP4672539B2 (ja)	2011-04-20	コンデンサマイクロホン装置
JPS6294988A (ja)	1987-05-01	電界効果型圧力センサ
JP2006038645A (ja)	2006-02-09	容量型ｍｅｍｓセンサ用の信号検出回路

Legal Events

Date	Code	Title	Description
2004-11-13	LAPS	Cancellation because of no payment of annual fees