JPH0471865B2 - - Google Patents
Info
- Publication number
- JPH0471865B2 JPH0471865B2 JP313788A JP313788A JPH0471865B2 JP H0471865 B2 JPH0471865 B2 JP H0471865B2 JP 313788 A JP313788 A JP 313788A JP 313788 A JP313788 A JP 313788A JP H0471865 B2 JPH0471865 B2 JP H0471865B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramics
- temperature
- fluctuating pressure
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 41
- 229910052751 metal Inorganic materials 0.000 claims description 41
- 239000000919 ceramic Substances 0.000 claims description 31
- 238000010438 heat treatment Methods 0.000 claims description 23
- 230000000694 effects Effects 0.000 claims description 8
- 238000001953 recrystallisation Methods 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 239000011521 glass Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000005452 bending Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- 239000003570 air Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP313788A JPH01179770A (ja) | 1988-01-12 | 1988-01-12 | 金属とセラミックスとの接合方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP313788A JPH01179770A (ja) | 1988-01-12 | 1988-01-12 | 金属とセラミックスとの接合方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01179770A JPH01179770A (ja) | 1989-07-17 |
| JPH0471865B2 true JPH0471865B2 (da) | 1992-11-16 |
Family
ID=11548964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP313788A Granted JPH01179770A (ja) | 1988-01-12 | 1988-01-12 | 金属とセラミックスとの接合方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179770A (da) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4818120B2 (ja) * | 2004-10-13 | 2011-11-16 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のスクライブ方法ならびにスクライブ装置および脆性材料基板の分断システム。 |
| EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
| EP2781296B1 (de) | 2013-03-21 | 2020-10-21 | Corning Laser Technologies GmbH | Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser |
| JP5862630B2 (ja) * | 2013-09-20 | 2016-02-16 | 株式会社デンソー | 接合体の製造方法 |
| US9517963B2 (en) | 2013-12-17 | 2016-12-13 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US9676167B2 (en) | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
| US9701563B2 (en) | 2013-12-17 | 2017-07-11 | Corning Incorporated | Laser cut composite glass article and method of cutting |
| US20150165560A1 (en) | 2013-12-17 | 2015-06-18 | Corning Incorporated | Laser processing of slots and holes |
| US10442719B2 (en) | 2013-12-17 | 2019-10-15 | Corning Incorporated | Edge chamfering methods |
| TWI730945B (zh) | 2014-07-08 | 2021-06-21 | 美商康寧公司 | 用於雷射處理材料的方法與設備 |
| JP2017530867A (ja) | 2014-07-14 | 2017-10-19 | コーニング インコーポレイテッド | 長さおよび直径の調節可能なレーザビーム焦線を用いて透明材料を加工するためのシステムおよび方法 |
| WO2016010991A1 (en) | 2014-07-14 | 2016-01-21 | Corning Incorporated | Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block |
| US10611667B2 (en) | 2014-07-14 | 2020-04-07 | Corning Incorporated | Method and system for forming perforations |
| US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
| WO2016115017A1 (en) | 2015-01-12 | 2016-07-21 | Corning Incorporated | Laser cutting of thermally tempered substrates using the multi photon absorption method |
| WO2016154284A1 (en) | 2015-03-24 | 2016-09-29 | Corning Incorporated | Laser cutting and processing of display glass compositions |
| JP2018516215A (ja) | 2015-03-27 | 2018-06-21 | コーニング インコーポレイテッド | 気体透過性窓、および、その製造方法 |
| KR102499697B1 (ko) | 2015-07-10 | 2023-02-14 | 코닝 인코포레이티드 | 유연한 기판 시트에서의 홀의 연속 제조 방법 및 이에 관한 물품 |
| JP6938543B2 (ja) | 2016-05-06 | 2021-09-22 | コーニング インコーポレイテッド | 透明基板からの、輪郭設定された形状のレーザ切断及び取り外し |
| US10410883B2 (en) | 2016-06-01 | 2019-09-10 | Corning Incorporated | Articles and methods of forming vias in substrates |
| US10794679B2 (en) | 2016-06-29 | 2020-10-06 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
| US10730783B2 (en) | 2016-09-30 | 2020-08-04 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
| EP3848333B1 (en) | 2016-10-24 | 2025-12-03 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
| US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
| US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
| US10580725B2 (en) | 2017-05-25 | 2020-03-03 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
| US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
| US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
| US12180108B2 (en) | 2017-12-19 | 2024-12-31 | Corning Incorporated | Methods for etching vias in glass-based articles employing positive charge organic molecules |
| US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
-
1988
- 1988-01-12 JP JP313788A patent/JPH01179770A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01179770A (ja) | 1989-07-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01179770A (ja) | 金属とセラミックスとの接合方法 | |
| US7441688B2 (en) | Methods and device for controlling pressure in reactive multilayer joining and resulting product | |
| JP5390380B2 (ja) | 半導体接合のための装置及び方法 | |
| US4444352A (en) | Method of thermo-compression diffusion bonding together metal surfaces | |
| JP2017121648A (ja) | 組立品の製造方法、加圧接合容器及び加圧接合装置 | |
| CN100368135C (zh) | 真空扩散焊机加压方法 | |
| JPH0362670B2 (da) | ||
| US4197977A (en) | Method of making an actively-cooled titanium structure | |
| US4194673A (en) | Stress relieving of metal/ceramic abradable seals | |
| JP6300323B2 (ja) | 接合体、構造体、接合体の製造装置、及び接合体の製造方法 | |
| JPS5920721B2 (ja) | 多層金属・セラミツク複合体を金属基材に結合する方法 | |
| MX2007013181A (es) | Metodo para la formacion de una superficie de plata de ajuste apretado sobre una pieza de aluminio. | |
| JP7777035B2 (ja) | 鋼材接合体の製造方法 | |
| JP3904746B2 (ja) | 半導体製造装置用部材およびその製造方法 | |
| JPS61250167A (ja) | 冷却板付きタ−ゲツトの製造方法 | |
| JPH09314358A (ja) | チタン合金接合用介挿部材およびチタン合金の接合方法 | |
| JP3054171B2 (ja) | セラミックスの接合方法 | |
| JP3281645B2 (ja) | セラミックス製閉ループ構造体の製造方法 | |
| JP2023176794A (ja) | 鋼材接合体の製造方法 | |
| JPH032592B2 (da) | ||
| US5009360A (en) | Metal-to-metal bonding method and resulting structure | |
| JPS5519456A (en) | Production of hard-to-work metal pipe | |
| JPH07201690A (ja) | 基板の接合方法 | |
| JPH0251478A (ja) | 金属・セラミックス接合法 | |
| JPH09314357A (ja) | チタン合金接合用介挿部材およびチタン合金の接合方法 |