JPH0476043U - - Google Patents
Info
- Publication number
- JPH0476043U JPH0476043U JP11928190U JP11928190U JPH0476043U JP H0476043 U JPH0476043 U JP H0476043U JP 11928190 U JP11928190 U JP 11928190U JP 11928190 U JP11928190 U JP 11928190U JP H0476043 U JPH0476043 U JP H0476043U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive sheet
- convex portion
- pressure
- sensitive adhesive
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Dicing (AREA)
Description
第１図は本考案の一実施例を示す粘着シート引
延し装置の主要部の断面図、第２図は本考案の他
の実施例を示す粘着シート引延し装置の主要部の
断面図、第３図から第６図までは従来の粘着シー
ト引延し装置の一例を動作順に示した主要部の断
面図である。
１……チツプ、２……粘着シート、３……リン
グ、４……ステージ、５……リング押え、６，６
ａ，６ｂ……保持リング、７，７ａ，７ｂ……ク
ランパ、８……押えリング、１０，１０ａ……凸
部、１１，１１ａ……凹部。
FIG. 1 is a cross-sectional view of the main parts of an adhesive sheet stretching device showing one embodiment of the present invention, and FIG. 2 is a cross-sectional view of the main parts of a pressure-sensitive adhesive sheet drawing device showing another embodiment of the present invention. , FIG. 3 to FIG. 6 are cross-sectional views of main parts of an example of a conventional pressure-sensitive adhesive sheet stretching device showing the operating order. 1... Chip, 2... Adhesive sheet, 3... Ring, 4... Stage, 5... Ring presser, 6, 6
a, 6b...retaining ring, 7, 7a, 7b... clamper, 8... presser ring, 10, 10a... convex portion, 11, 11a... recessed portion.
Claims (1)
ける粘着シートを乗せる円形のステージと、この
ステージより食み出す前記粘着シートを前記ステ
ージと所定の間隔を置いて保持リングを介して挟
むリング押え及びクランパとを有する粘着シート
引延し装置において、前記保持リング及びクラン
パのいずれか側に所定の高さの凸部を設け、他側
にこの凸部の断面形状と相似形状の断面をもち、
かつその深さが前記凸部の高さより前記粘着シー
トの締代を加味した寸法だけ浅くして形成するこ
とを特徴とする粘着シート引延し装置。 A circular stage on which an adhesive sheet is placed on which the wafers cut and separated into a plurality of chips are pasted, and a ring presser and a clamper that sandwich the adhesive sheet protruding from the stage via a retaining ring at a predetermined distance from the stage. A pressure-sensitive adhesive sheet stretching device having a convex portion having a predetermined height on either side of the retaining ring and the clamper, and having a cross-sectional shape similar to the cross-sectional shape of the convex portion on the other side;
A pressure-sensitive adhesive sheet stretching device characterized in that the depth thereof is shallower than the height of the convex portion by a dimension that takes into account the tightening margin of the pressure-sensitive adhesive sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11928190U JPH0476043U (en) | 1990-11-14 | 1990-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11928190U JPH0476043U (en) | 1990-11-14 | 1990-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0476043U true JPH0476043U (en) | 1992-07-02 |
Family
ID=31867249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11928190U Pending JPH0476043U (en) | 1990-11-14 | 1990-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0476043U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521599A (en) * | 1991-07-10 | 1993-01-29 | Rohm Co Ltd | Tape stretching equipment |
| JP2021082705A (en) * | 2019-11-19 | 2021-05-27 | 株式会社ディスコ | Wafer processing method, and frame |
-
1990
- 1990-11-14 JP JP11928190U patent/JPH0476043U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521599A (en) * | 1991-07-10 | 1993-01-29 | Rohm Co Ltd | Tape stretching equipment |
| JP2021082705A (en) * | 2019-11-19 | 2021-05-27 | 株式会社ディスコ | Wafer processing method, and frame |
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