JPH0478857B2 - - Google Patents

Info

Publication number
JPH0478857B2
JPH0478857B2 JP62270006A JP27000687A JPH0478857B2 JP H0478857 B2 JPH0478857 B2 JP H0478857B2 JP 62270006 A JP62270006 A JP 62270006A JP 27000687 A JP27000687 A JP 27000687A JP H0478857 B2 JPH0478857 B2 JP H0478857B2
Authority
JP
Japan
Prior art keywords
belt
pulley
mainspring spring
spring
winding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62270006A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01112069A (ja
Inventor
Tadashi Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP27000687A priority Critical patent/JPH01112069A/ja
Publication of JPH01112069A publication Critical patent/JPH01112069A/ja
Publication of JPH0478857B2 publication Critical patent/JPH0478857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
JP27000687A 1987-10-26 1987-10-26 検査装置の被検査物移動機構 Granted JPH01112069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27000687A JPH01112069A (ja) 1987-10-26 1987-10-26 検査装置の被検査物移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27000687A JPH01112069A (ja) 1987-10-26 1987-10-26 検査装置の被検査物移動機構

Publications (2)

Publication Number Publication Date
JPH01112069A JPH01112069A (ja) 1989-04-28
JPH0478857B2 true JPH0478857B2 (2) 1992-12-14

Family

ID=17480239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27000687A Granted JPH01112069A (ja) 1987-10-26 1987-10-26 検査装置の被検査物移動機構

Country Status (1)

Country Link
JP (1) JPH01112069A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009300072A (ja) * 2009-08-07 2009-12-24 Haimekku:Kk 冷蔵庫内の載置台

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229569A (en) * 1975-08-29 1977-03-05 Hitachi Ltd Revolving device

Also Published As

Publication number Publication date
JPH01112069A (ja) 1989-04-28

Similar Documents

Publication Publication Date Title
JP4341540B2 (ja) 三軸駆動装置
US3360799A (en) X-y recorder having intercoupled cordpulley means for independently x-y drives
US20060105555A1 (en) Display apparatus and control method thereof
JP3412436B2 (ja) 閉リンクロボット装置
JPH01112069A (ja) 検査装置の被検査物移動機構
KR100379772B1 (ko) 표면실장장치의 컨베이어
JPH11156770A (ja) 基板保持装置
JP2000266637A (ja) 基板検査用追従装置
JP2519749B2 (ja) ロボットの動力伝達装置
CN100570385C (zh) Tcp处理装置
JPH11165290A (ja) 水平多関節ロボットにおけるスチールベルトの取付構造
JP2595381B2 (ja) テ−ブルの位置決め装置
KR100456792B1 (ko) 백래쉬가 억제된 벨트 장치
JP2002098641A (ja) 大型基板検査装置
JP3022549B1 (ja) 微動位置決め機構,微動位置決めステージ装置及び作業用アーム装置
JP2000001218A (ja) 搬送装置
JPH09231694A (ja) ワイヤ駆動装置
JPH04322928A (ja) Xy駆動装置
JP3701084B2 (ja) 運動機構
JPH02199345A (ja) 直進移動装置
JPH10166285A (ja) 垂直多関節ロボット
KR100833248B1 (ko) Tcp 핸들링 장치
JP2005516876A (ja) スキャン分析装置のような光電子機器のフィルムガイド装置
JPS5936201B2 (ja) 二次元座標位置決め機構
JP4493650B2 (ja) Tcpハンドリング装置