JPH0479083U - - Google Patents

Info

Publication number
JPH0479083U
JPH0479083U JP12385190U JP12385190U JPH0479083U JP H0479083 U JPH0479083 U JP H0479083U JP 12385190 U JP12385190 U JP 12385190U JP 12385190 U JP12385190 U JP 12385190U JP H0479083 U JPH0479083 U JP H0479083U
Authority
JP
Japan
Prior art keywords
shaped
fan
center
rack
chuck body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12385190U
Other languages
English (en)
Other versions
JPH077102Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990123851U priority Critical patent/JPH077102Y2/ja
Publication of JPH0479083U publication Critical patent/JPH0479083U/ja
Application granted granted Critical
Publication of JPH077102Y2 publication Critical patent/JPH077102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
図面は本考案の実施例を示し、第１図は一部切
断の正面図、第２図は切断側面図、第３図は外観
側面図である。２……チヤツク胴、３……中心軸
、４，５……円盤、６，７……カム穴、８，９…
…扇形ピニオン、１０，１６……ラツク、１８…
…把持爪、１９……転子。

Claims (1)

    【実用新案登録請求の範囲】
  1. 流体圧により運動するラツクと、そのラツクと
    噛み合う扇形ピニオンと、その扇形ピニオンを内
    側面に設けた円盤とからなる円盤回動装置の２組
    が、チヤツク胴内で、両円盤は中心軸に回転自在
    に支持され、その中心軸に対し両扇形ピニオン同
    士及び両ラツク同士は対称に位置され、両円盤に
    中心から遠ざかる形状のカム穴が設けられ、チヤ
    ツク胴の両外側面に中心に向けて摺動自在に設け
    られた把持爪の転子が前記カム穴に嵌入されてい
    ることを特徴とするローダー装置のチヤツク装置
    。
JP1990123851U 1990-11-26 1990-11-26 ローダー装置のチヤツク装置 Expired - Lifetime JPH077102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990123851U JPH077102Y2 (ja) 1990-11-26 1990-11-26 ローダー装置のチヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990123851U JPH077102Y2 (ja) 1990-11-26 1990-11-26 ローダー装置のチヤツク装置

Publications (2)

Publication Number Publication Date
JPH0479083U true JPH0479083U (ja) 1992-07-09
JPH077102Y2 JPH077102Y2 (ja) 1995-02-22

Family

ID=31871537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990123851U Expired - Lifetime JPH077102Y2 (ja) 1990-11-26 1990-11-26 ローダー装置のチヤツク装置

Country Status (1)

Country Link
JP (1) JPH077102Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07132482A (ja) * 1993-11-02 1995-05-23 Ckd Corp ウェハ把持装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58160076A (ja) * 1982-03-19 1983-09-22 ヤマハ発動機株式会社 ロ−ダ用ロボツト
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド
JPS6052282A (ja) * 1983-08-30 1985-03-25 エスエムシ−株式会社 ロボット用ハンド
JPS62201689U (ja) * 1986-06-16 1987-12-22

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58160076A (ja) * 1982-03-19 1983-09-22 ヤマハ発動機株式会社 ロ−ダ用ロボツト
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド
JPS6052282A (ja) * 1983-08-30 1985-03-25 エスエムシ−株式会社 ロボット用ハンド
JPS62201689U (ja) * 1986-06-16 1987-12-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07132482A (ja) * 1993-11-02 1995-05-23 Ckd Corp ウェハ把持装置

Also Published As

Publication number Publication date
JPH077102Y2 (ja) 1995-02-22

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