JPH0479435U - - Google Patents

Info

Publication number
JPH0479435U
JPH0479435U JP12411890U JP12411890U JPH0479435U JP H0479435 U JPH0479435 U JP H0479435U JP 12411890 U JP12411890 U JP 12411890U JP 12411890 U JP12411890 U JP 12411890U JP H0479435 U JPH0479435 U JP H0479435U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
transporting
hole
adsorbing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12411890U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12411890U priority Critical patent/JPH0479435U/ja
Publication of JPH0479435U publication Critical patent/JPH0479435U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す側面図、第２
図は本考案のコロの断面図、第３図、第４図はそ
れぞれ従来の半導体基板搬送装置の一例を示す側
面図である。 １……半導体基板、２……コロ、３……穴、４
……コロ、５……シヤフト、６……搬送ベルト、
７……ベルトプーリー。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体基板を搬送するための半導体基板搬送装
    置において、半導体基板を吸着するための穴を有
    した前記半導体基板を搬送する回転コロを含むこ
    とを特徴とする半導体基板搬送装置。
JP12411890U 1990-11-26 1990-11-26 Pending JPH0479435U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12411890U JPH0479435U (ja) 1990-11-26 1990-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12411890U JPH0479435U (ja) 1990-11-26 1990-11-26

Publications (1)

Publication Number Publication Date
JPH0479435U true JPH0479435U (ja) 1992-07-10

Family

ID=31871786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12411890U Pending JPH0479435U (ja) 1990-11-26 1990-11-26

Country Status (1)

Country Link
JP (1) JPH0479435U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010116248A (ja) * 2008-11-13 2010-05-27 Ihi Corp 浮上搬送装置及び搬送ローラ
KR101365851B1 (ko) * 2006-12-22 2014-02-21 엘지디스플레이 주식회사 글래스 반송 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101365851B1 (ko) * 2006-12-22 2014-02-21 엘지디스플레이 주식회사 글래스 반송 장치
JP2010116248A (ja) * 2008-11-13 2010-05-27 Ihi Corp 浮上搬送装置及び搬送ローラ

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