JPH0481962U - - Google Patents

Info

Publication number
JPH0481962U
JPH0481962U JP1990125334U JP12533490U JPH0481962U JP H0481962 U JPH0481962 U JP H0481962U JP 1990125334 U JP1990125334 U JP 1990125334U JP 12533490 U JP12533490 U JP 12533490U JP H0481962 U JPH0481962 U JP H0481962U
Authority
JP
Japan
Prior art keywords
substrate
forming apparatus
film forming
vacuum film
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990125334U
Other languages
English (en)
Other versions
JPH0740521Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990125334U priority Critical patent/JPH0740521Y2/ja
Publication of JPH0481962U publication Critical patent/JPH0481962U/ja
Application granted granted Critical
Publication of JPH0740521Y2 publication Critical patent/JPH0740521Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の一実施例を示す真空成膜装
置の平面構成図、第２図は、その基板反転構造を
示す部分拡大平面図、第３図は、従来の真空成膜
装置の平面構成図、第４図は、その基板反転構造
を示す部分拡大平面図である。 尚、図中１は真空チヤンバー、２は治具台車、
３は基板ホルダー、４ａ，４ｂは基板、５は排気
ポンプ、６はモータ、７はターゲツト、８は回転
軸、９はストツパーである。

Claims (1)

  1. 【実用新案登録請求の範囲】 回転可能な円筒形治具台車の端面円周上に１８
    ０度反転可能な基板ホルダーを設け、同基板ホル
    ダーの表裏両面に基板を固定するようにした真空
    成膜装置において、 前記基板ホルダーの反転用回転軸をホルダーの
    一端部側に設け、同ホルダーを治具台車の内側か
    ら反転させるようにしたことを特徴とする真空成
    膜装置の基板反転構造。
JP1990125334U 1990-11-28 1990-11-28 真空成膜装置の基板反転構造 Expired - Lifetime JPH0740521Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990125334U JPH0740521Y2 (ja) 1990-11-28 1990-11-28 真空成膜装置の基板反転構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990125334U JPH0740521Y2 (ja) 1990-11-28 1990-11-28 真空成膜装置の基板反転構造

Publications (2)

Publication Number Publication Date
JPH0481962U true JPH0481962U (ja) 1992-07-16
JPH0740521Y2 JPH0740521Y2 (ja) 1995-09-20

Family

ID=31872935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990125334U Expired - Lifetime JPH0740521Y2 (ja) 1990-11-28 1990-11-28 真空成膜装置の基板反転構造

Country Status (1)

Country Link
JP (1) JPH0740521Y2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100653468B1 (ko) * 2000-05-31 2006-12-04 비오이 하이디스 테크놀로지 주식회사 액정 모듈의 반전 장치

Also Published As

Publication number Publication date
JPH0740521Y2 (ja) 1995-09-20

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